TW201224382A - Rack for firing - Google Patents

Abstract

Provided is a rack for firing which holds a plurality of flat board-like setters at multiple levels in the perpendicular direction by means of a setter holding means, and fires electronic ceramic elements at multiple levels. The setter holding means is composed of a material composed of Si-SiC containing 0.01-30 % of Si or recrystallized SiC or Si3N4-SiC, and the setter holding means holds each of the flat board-like setters with 70-100 % of the outer circumferential side surface thereof exposed. Consequently, the rack has excellent energy efficiency, mass-production efficiency, and uniform heating characteristics at each of the multiple levels in the multiple-level firing.

Description

201224382 IV. Designated representative map: (1) The representative representative of the case is: (2). (2) The symbol of the symbol of this representative figure is briefly described: LI, L2~ the length of the outer peripheral side; s~ the width of the vertical pillar of the corner; the width of the vertical pillar in the middle. The chemical formula: 5. If there is a chemical formula in this case, please reveal the characteristics that can best show the invention. VI. Description of the Invention: [Technical Field to Which the Invention Is Alonged] The present invention relates to a frame suitable for the firing of an electronic ceramic component. [Previous technique] Adding a sintering aid or a forming aid: a micro-powder element of a ceramic, the un-melted element is formed into an unfired plate and placed in a baking furnace, In-furnace = (-ceramic gas condition - surface-melting machine. : U set temperature and ring, as the space is formed, for example, as shown in Fig. 9, the tray mounter formed on the upper periphery is generally stacked in multiple sections The configuration between the overlapping plurality of mounting brackets will be such that the flat mounter and the fitting portion 201224382 are gradually stacked (Patent Document). Further, it is also known to ensure the endurance of the stack. The peripheral wall portion formed in the manner of the strength is formed on the upper surface of the mount itself: a structure in which the disc-shaped mount is laminated in a disk shape (Patent Document 2). However, as shown in Fig. 9, The installation device is completely embedded in the structure of the tray: the outer peripheral side of the installer is covered by the tray. Moreover, in the case where the ampoule is gradually stacked, not only the flow of the gas in the furnace is hindered by the protrusion 8, but also Lower section The entire lower surface of the installer is in contact with the furnace body directly or via a tray. Since the influence of heat conduction from the furnace body is large, the heat treatment is performed in each section, and the heat treatment is performed; the installer of the pottery section is < The electronic pottery is a problem that has a poor yield of the product compared with the actual ceramic component in the upper section. The surrounding of the electronic is two: special: as shown in the literature 2, the disc-shaped mounter is gradually stacked, And the second is that the flow of gas in the furnace is not formed by the resistance of the peripheral wall relative to the ==::=:: degree _ efficiency is high efficiency two or "volume hinders energy efficiency or mass production [Patent Literature [Patent Document 1] 曰 特 [ [Patent Document 2] 曰 特 2000 2000 ~ ~ ~ ~ ~ 2000 2000 2000 2000 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 — — Burning is to provide a frame for burning 201224382. The frame for metallurgy solves the above-mentioned problems. It is excellent in energy efficiency or mass production efficiency when it comes to multi-stage cooking of electronic ceramic components, and it is used in various stages of sintering. Excellent heat soluness of the segment [Means for Solving the Problem] In order to solve the above-described problem, the frame for firing according to the present invention is a plurality of flat plate-shaped mounters that are held in a plurality of stages in the vertical direction by the mounter holding means. The means is composed of any material of Si-Sic containing 0.048% Si, and recrystallized Sic & Si3N4-Sic, and the mounter retaining means is such that each flat-shaped mounter exposes 70~100 of its outer peripheral side. The invention of claim 2 is characterized in that: in the frame for the burning of the first application of the patent scope, the installer retaining means has: a plurality of vertical pillars, and an installer holding mechanism; a lower end support frame supporting a lower end portion of the vertical support; and an upper end support frame, which is an upper end portion of the vertical support; the mount retaining mechanism is formed by a plurality of concave portions or convex portions formed on an inner side surface of the vertical support Or the frame is formed by at least one of the beams between the vertical pillars facing each other across the flat-shaped mounter, as shown in the third item of the patent application. Also creating vertical post constituted by four vertical corners of the corner portions of the vertical side to know, ^ perpendicularly disposed in the corner portion between the intermediate vertical post constituted vertical support. The invention of claim 4 of claim 4 is characterized in that, in the frame for melting of the first application of the patent application, the holder holding means is constituted by a flat member having a frame shape in the peripheral portion and having a large frame. It is laminated in a plurality of stages in a state in which 1 is held by a flat mounter. ^

S 4 201224382 Invention of claim 5

The characteristics of the goods 3 are: in the frame of the burning of the first scope of the patent application, the monthly search J ^ ^ ^ maintenance means is provided by a plurality of k-rich piles and relatively arranged - the twisted line members, and The beam is placed between the concave portions of the upper portions of the stacking projections, and is stacked in a plurality of stages in a state in which the flat-plate mounter is held on the beams. Further, in the case where the member constituting the mounter is made of Si-SiC containing 1 to 30% of Si, ^ nnn · and has a chemical composition of SiC: 70 to 99 /, Si : 1 to 30 %, SiC+ Si is set to ]nn〇/ von 100%, and further contains A1 : 0. 01-0. 2% ' Fe : 0. Ol^o. 2% . ca : Π m π r ^ η _ . 1~0. 2%. If the application for patents is shown in the 11th item of Capricorn, it should be flat U1....SlC. The material is also included in the case where the member constituting the holder holding means is formed by recrystallization S1, and the chemical composition thereof is SiC. qq 1ηΛη 99 to 100%, and Sic is set.

100% ' and then A1 : 〇.〇卜〇.2%, F re* 〇.〇1~〇 2% 'fa- 0.0 Bu 0.2%. ·. U. In the case of the structure η 旰 旰 SuN4 — Sic constituting the holder holding means, the chemical composition is Sic: 7 Ου / 〇, Si3N4 : 20 to 30%, and SiC + Si3N4 is set to 1 〇 〇%, and then right A1 : 〇. 1 ~ 0.5%, Fe· 〇. 1~0. 5%, Ca: 0. 0 〇. 2%. [Effect of the Invention] The frame for the smelting of the present invention is used for the surface of the slabs of the slabs of the slabs of the slabs of the slabs. _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ 7 (M〇(10) is exposed, ===: The electronic chemistry component on the mounter quickly conveys the m-degree of the furnace. Therefore, 'the heat uniformity of each section of the multi-stage firing is excellent. The mounter holding means has a higher strength under high temperature conditions than aluminum oxide or the like which is generally used, and can be reduced in size and weight due to the large amount of strength. Therefore, the electronic ceramic component is multi-staged. When burning or simmering, it is excellent in energy efficiency or mass production efficiency. In addition, the space is formed in each of the protrusions in the past.

The '-face is the case where the plurality of stages of the installer are gradually stacked, and the weight or volume occupied by the protrusion formed by the J to ensure the strength of the stage stack hinders the efficiency of energy efficiency or mass production efficiency. The problem is that the frame for the burning of the second application of the patent scope has the structure of the holder holding mechanism, and the holder holding mechanism has a plurality of vertical pillars and a lower end support frame supporting the lower end of the vertical pillar. And the upper end support frame that supports the upper end portion of the vertical strut, and is held in a plurality of stages in the vertical direction in a plurality of flat plate-shaped mounters, 'there is no need to ensure the strength of the stacking of the stacks = the formed protrusions' In comparison, energy efficiency or mass production efficiency can be made more efficient. . . In addition, in the case where the space is formed by the protrusions on one side, and the plurality of women's devices are gradually stacked, the bottom: the entire lower surface of the mounter is in contact with the furnace body directly or via the tray. Because of the large influence of heat conduction from the furnace body, for example, in the lowermost stage, the shock absorber is subjected to heat treatment, and the heat treatment is performed on the ceramic part and the heat treatment in the upper stage.

S 201224382 Compared with electronic ceramic components, it is difficult to heat the homogenization in each segment, such as the difference in yield of products. However, in the case of the lowermost segment, according to the invention of the second paragraph of the patent application scope A space is also formed between the lower surface of the device and the furnace body to reduce the heat transfer from the furnace body, and the mounting mechanism maintains 70 to 100% of the outer circumferential side of each flat connector from between the vertical pillars. Exposed. It is difficult to prevent the flow of the gas in the furnace due to the discharge of the binder decomposition gas which is harmful to sintering, and the heat conduction in each stage can be achieved because the heat conduction of the mounts constituting each stage becomes more uniform. - according to the invention of claim 3 of the patent application, the installer can be held more stably, in particular, according to the configuration of the beam between the intermediate vertical pillars, because the central portion of the mounter through the beam section conducts heat, Therefore, it is possible to achieve homogenization with the edge portion of the mount which is affected by the heat conduction from the vertical pillars of the corners. * 1 ^ The frame-like flat state has a small amount of multi-section, and the efficiency or mass production section is constructed by a pair of beams arranged by the installer: the state is multi-segmented according to the patent application scope 帛 4 items of invention Because 'the temple hand & has a configuration in which a plurality of segment stacking projection members are provided in the peripheral portion, and the laminate is held in a flat shape, the heat of the mount holding means can be made When the electronic ceramic component is subjected to multi-stage sintering, the energy efficiency is improved, the contact with the gas in the furnace is excellent, and the soaking property in a plurality of stages is excellent. According to the invention of claim 5, since the = holding means consists of a plurality of piles (four) protruding and opposed to: the wire member, and the upper surface of the stacking projections are concave and held in the flat mounter The effect of the composition of the 201224382 laminate on these beams. Therefore, the invention of the fourth aspect of the patent application can be obtained. [Embodiment] (First embodiment) Figs. 1 and 2 show that the first embodiment of the invention is not the first embodiment of the present invention. The frame for smelting has an approximate cubic shape, and the holder retaining means is constructed by the following members: 〇 Ting is called 4 corner vertical struts 2, which form the vertical side of the four corners; approximately the lower end of the suffix t The support frame 4 supports the lower end portions of the four corner vertical pillars 2 (2 2c, 2d); and the upper-end support frame of the approximately square shape supports the upper end portions of the four corner vertical pillars 2. As shown in Fig. 1, the frame 1 is inserted into the flat mounter 7 and used. The horizontal groove portion 2i is formed in parallel with the insertion direction of the flat mounter 7 at the inner side surface of each of the corner vertical stays 2 to constitute a mounting poem mechanism. The flat mounter 7 is inserted into the horizontal groove portion 21 and held. The horizontal groove portion 2i is formed in a plurality of pieces. By holding each of the horizontal groove portions 21 in a plurality of flat plate mountings #7, it is possible to constitute a plurality of stages of firing jigs as shown in Fig. 2. In this way, the flat-shaped mounter is inserted into the frame to form a multi-stage firing jig, whereby the conventional one surface is formed by stacking a space between the mounters and gradually stacking the multi-stage mounts. 'Energy efficiency or mass production efficiency can be made more efficient. The shape of the ampoule holding mechanism is not limited to the horizontal groove portion 2, and a plurality of concave portions or convex portions formed on the inner side surface of the vertical portion 2 of the corner portion may be used or the frame may be opposed to each other at 201224382. The shape of the beam or the like between the vertical pillars of the corners. The frame 1 for firing according to the present embodiment is disposed vertically between the adjacent vertical corner pillars (between 2a and 2b and between 2c and 2d) in a pair of opposing positions of the flat connector 7. The middle vertical pillars 5 (53 and 5b). The pair of intermediate vertical stays 5 (5a and 5b) are provided with a plurality of horizontal hole portions 51 in the respective inner side faces, and the frame beams 6 are formed between the pair of horizontal hole portions 51 at positions facing each other across the flat-plate mount 7. The height of the beam 6 is arranged to support the central portion of the flat-plate mounter 7 held by each horizontal groove portion 21 from below. Therefore, since the mounter can be held more stably, the mounter can be made thin. Further, since the center of the mount of each stage is thermally conducted through the beam, it can be heated to the edge portion of the mounter which influences the heat conduction from the corner vertical stay 2 . Here, for example, as shown in Fig. 3, a frame i for firing which does not have the intermediate vertical pillar 5 can be formed. / For example, as shown in Fig. 2, when the length of the outer peripheral side surface of the flat-plate mounter 4 held by the horizontal groove portion 21 formed on the inner side surface of each of the corner vertical stays 2 is set to (U + L2) X2, In the present embodiment, the width s of the corner vertical pillar 2 is covered by the width VII of the vertical pillar 5 between the applications, and the circumferential side is ^^bb^^{(s+t)x4}/{(Ll + L2)x2 }χ1 〇〇 = 5-30% ^ 7〇 to 95% of the outer peripheral side of the mounter 4 has a structure exposed in the firing furnace. Therefore, in the various sections of the dream, the entire surface of the device can ensure a good gas flow in the furnace. * '' #—田Μ天趣邵β will be formed between the installers, gradually stacking multiple installers In this case, since the entire lower surface of the β of the lowermost installation 3| is directly or via the furnace body of the 201224382 baking furnace, it is greatly affected by the heat conduction from the furnace body to have the mounter implemented, for example, in the lowermost stage. The heat-treated electronic ceramics has a problem that the yield of the article is higher than that of the electronic ceramic component which is subjected to the heat treatment in the upper stage, and the homogenization system in each segment is difficult. In the present invention, the plurality of vertical pillars 2 and the intermediate portion are provided. a vertical pillar 5 (hereinafter referred to as a vertical pillar), a lower end support frame 4 supporting an lower end portion of the vertical pillar, and an upper end frame frame 3 supporting an upper end portion of the vertical pillar, the mounter is held by the vertical The configuration of the plurality of fiscal flat grooves U formed by the inner (four) faces of the pillars, thereby forming a space between the lower surface of the lowermost installer and the furnace body, thereby reducing the heat conduction from the furnace body. . . . In addition, the lower end portion and the upper end portion of the vertical stays 2, 5 are fitted to the fitting portions formed on the lower end support frame 4 and the upper end support frame 3 from the viewpoint of stably holding the mounter in the case where the frame for firing is tilted (4). It is fixed, and the inclination angle of the vertical pillar to the lower end frame frame is 2 when the whole frame of the firing frame is inclined by 3 () degrees. the following. In the case where the inclination angle is the above, the case where the vibration at the time of use becomes large has a risk of causing damage to the dense solidified material due to the vibration accompanying the internal combustion during the firing, and the composition according to the present invention Can effectively avoid this problem. As described above, according to the constitution of the present invention, since the influence of the heat conduction from the furnace body of the baking furnace is lowered 'and the good air flow is ensured, the heat conduction of the mounts constituting each stage becomes more uniform, but Homogenization. & [Material of the material for holding the device] The frame for the burning of the present invention is generally under an inert gas atmosphere,

10 201224382 In the present invention, SiC, 纴曰* j , , , 曰 曰 are used under high temperature conditions of about 130 (^ 4501. Therefore, the mounting means is maintained by a Si containing 〇.〇1~3〇% Si SiC and Si^-SiC are made of any material. ι-SiC is a material called Si immersion w that immerses Si between particles of Sic. As a chemical component, it should contain S " The Si of '3 (10) is further prepared as a trace component, and is prepared (1% by weight, and 2%) of A1, 〇·〇卜〇.

〇.〇1~〇.2% Ca. If the content of Si exceeds 3 %, it is not preferable because it causes a decrease in strength or a decrease in heat radiation rate. X, according to the arithmetic mean surface roughness Ra = 〇. Bu 3〇 #m, ^ coefficient is 200 ~ miscellaneous Pa, intensity is (10) ~ 4_pa, thermal conductivity at room temperature is 150~240W / m. k The porosity is preferably 1% or less. By using the material f having such a chemical composition and physical properties, the firing post i can be made lighter, higher in strength, and longer in life. The heat emissivity of the mount holding means composed of Si-Sic is as shown by the solid line in the graph of Fig. 4, and is 8 〇 1 〇 (10) at a wavelength of 8 #111, and a wavelength of 12 quot „ 20 to 40%, preferably at a wavelength of 19/^ of 6 〇 to 8 〇%. The heat radiance can be specified according to chemical composition and surface roughness, and in the present invention, as described above, as a chemical component, the content is 7 〇~99% of δί(>ι~3〇% of Si, and further as a trace component, and further prepared with a 〇. 〇 〇 _ _ a, 〇. 2 / ° Fe, ^. 01~0. The composition of 2% Ca is preferably a composition having a surface roughness of Ra = (M~3()/zm' Ra = 1Q to 3Q//m, whereby the heat emissivity is achieved. The dotted line in Fig. 4 is a chemical composition, and the thermal emissivity of the alumina used as the main component of the conventional mounter is as shown in Fig. 4, as shown in Fig. 4, by replacing it as a conventional installation. The alumina used in the main component of the device is Si-Sic, and the heat emissivity of each component (2, 5, 3, 4) is mentioned, so that it can be efficiently utilized from the furnace. The radiant heat of the constituent members (2, 3, 4) and the high-efficiency smelting. & The surface layer of each of the constituent members (2, 5, 3, 4) constituting the mounter holding means is provided as a chemical component. It is preferable that the film of the thickness of M1 is more than 〇%, and the film of the film is used to suppress deterioration of the reaction of each constituent member (2, 5, 3, 4) caused by the environmental gas, and the sintering can be performed. In addition to the Si-Sicization mentioned above, it is also possible to use recrystallized Sic or Sii-Si〇 recrystallized Sic system to refine the Sic particles by recrystallization, and the chemical composition is 99~100. % SiC. However, the sic is set to 100% 'in addition to the trace component' contains 2% of the = 〇 〇 〜 . 2 2 2 2 2 2 2 2 2 2 'It is suitable for 70~80% of the other. In addition, ShN4-SiC is used in the region where Sic which uses Si3N4 as a binder is higher than Si-SiC. Its chemical composition is SiC, 20^30%. Si3N4 'Set SiC+Si3N4 to 1〇〇%, 〇.1 0.5/0 A1, 0.1~〇·5% pe, 〇.〇布 0.2% ca extension 3 kinds The texture system is used in the second and third embodiments described below. β is not particularly limited as long as the material of the flat-plate mounter 7 is used, but the material is the same as the holder holding means. 'In particular, Si-SiC containing U 32% Si is preferred. This is due to

S 12 201224382 The material has a high temperature strength and can make the women's wearer thin. The shape of the flat and strong 7 is not necessary to be made into a woman's benefit. If these shapes are used, it is a honeycomb or a net. Because the oxygen in the furnace is moved through the flat-plate mounter, it can be heated more uniformly, and in the case of lower temperature and temperature. It is also possible to use a heat-resistant metal made of titanium or the like. (Second Embodiment) Fig. 5 and Fig. 6 are transmitted; . The second embodiment of the present invention is not shown. The frame 1 for the smelting of the present embodiment, the ''women's sling retention means' is constituted by a frame member 10 having a frame-shaped projection u in a peripheral portion and a plurality of stages. In the embodiment of Fig. 5, the rectangular rectangular plate member 10 has a quadrangular hole 12 on the left and right sides, and the flat-plate mounter 7 is placed in this portion. The segment stacking protrusions n are protruded from the center portion of the side opposite to the left and right ends of the flat plate member 1G, and the lower position projections 13 are protruded from the wrapping hole 12 at a lower position than the segment stack (four) projections 11. . Fig. 6 is a side view showing the state in which the holder holding means holds the flat-plate mounter and is laminated in a plurality of stages, and the flat-plate mounter 7 is indicated by dotted lines. In this manner, in the present embodiment, 70% or more of the outer peripheral side of the flat-plate mounter 7 is exposed in the baking furnace. In addition, since the material is any one of si-sic, recrystallized Sic, and Si3N4_SiC having a high heat emissivity, it is possible to ensure excellent soaking property as in the first embodiment. Further, since the multi-stage stacking can be performed after the holder holding means is held by the flat-plate mounter 7, the same is true! The embodiment has an advantage of being excellent in handleability. (Third embodiment) Fig. 7 and Fig. 8 show a third embodiment of the present invention. In the present invention, the "1 series mounter holding means" is provided by a pair of straight members 16 having a plurality of segment stacking members 15 and a concave surface 17 which is placed on the upper portion of each stack stacking projection 15 The composition of #18. The stack stacking projection 15 is a mountain-shaped projection, and the recess 19 is formed on the lower side thereof. Reference numeral 18 is a rod-shaped body having a cross-sectional angle, and both ends thereof are fitted into the upper concave surface 17 of the segment stacking projection 15, and the flat mounter 7 is placed thereon. Fig. 8 is a side view showing a state in which the flat mounter 7 is held on the beams 18 and laminated in a plurality of stages, and the flat mounter 7 is indicated by dotted lines. As shown in Fig. 8, the lower concave portion 19 is fitted into the upper side of the beam 18 to stabilize the laminated state. As shown in Fig. 8, in the present embodiment, about 10% of the outer peripheral side surface of the flat-plate mounter 7 can be exposed in the baking furnace. In addition, since the material is any one of Si—SiC, recrystallized siC, and Si 3 N 4 —SiC having a high heat emissivity, excellent soaking property can be secured as in the first embodiment. In the third embodiment, the holder holding means can be stacked in a plurality of stages after the flat holder 7 is held. Therefore, the third embodiment has an advantage of being excellent in handleability as compared with the first embodiment. [Examples]

S 14 201224382 [Table 1] Mounter shape First embodiment 150xl50x2t

-" L---^---_____7 1st comparative example T50xl50x5t7i5h~ In the frame for melting of the present invention, a flat-shaped mounting cymbal inserted with (10)-dragon is used, and a pile of 15 segments is constructed. The structure of the burning jig (the first embodiment), and the 150-mounter stacking 15 segments, the upper periphery has 15 protrusions and the like (the "匕" example), the burning in H & Under the conditions, 'the burning of the ceramic capacitors (Cong.c, Μ,,. In the first table, respectively, the 杳 杳 杳 . ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ))), the result of measuring the temperature of each segment ("the end of the temperature difference of the installer (4) center t Λβ ΛΑ)"), the center of the uppermost installer. The temperature of P and the central temperature difference rc)"). The temperature difference between the center of the thief ("the installer is as shown in the first table, and the product yield is improved by heating in each stage. W" frame can be made 15 201224382 [Table 2] The second embodiment Third Embodiment Fourth Embodiment Fifth Embodiment Sixth Embodiment Second Addition Third Comparative Example Fourth Comparative Example Substrate Principal Component Ratio (wt%) SiC 70 80 θθ 100 75 65 Si 30 20 1 - 35 - AI2O3 — - - - — 100 85 Si〇2 — - - - 1 15 S13N4 — - - - 24 _ _ Micro-component (wt%) A1 0.01 0.1 0.2 0.1 0.2 0.01 0.5 0.1 Fe 0.01 0.01 0.2 0.1 0.2 0.01 0.3 0.1 卜 Ca 0.01 Γ~D. 1 0.2 0.1 0.1 〇01 0.3 0.1 Elastic system J fe(GPa) 210 350 400 200 250 190 300 100 涟 涟 MPa MPa MPa rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio rio (W/m · 1〇150 190 240 60 - 40 140 30 5 Rolling 2 0.7 0.5 0.1 20 10 2 1 20 Emissivity (%) 6^m 81 90 99 96 89 70 50 30 12/zm 16 Ren m 22 60 30 70 39 δ〇35 70 28 10 5 5 Product yield in the middle section Multi-segment scaffolding rush (3⁄4 L life (2 J) υ 100 400 100 500 100 450 /〇100 300 68 100 350 50 97 60 40 96 30 40 96 35 In order to investigate the influence of the material, the frame for the smelting of the scope of the patent application of the present invention (the second to sixth embodiments, the second to fourth comparative examples) according to the respective component ratios shown in the second table ), and insert a 15〇mmxl5〇mmx2mm flat-plate mounter' to form a 15th-stage stacking structure of the burning fixture. Using the firing frame, the ceramic capacitor is fired under the same sintering conditions. (1300 ° C, 10 hours). The physical properties (elastic coefficient, four-curvature strength, thermal conductivity, and pore diameter) of the frame for the second to sixth embodiments and the second to fourth comparative examples were measured in the second table. The result of the rate, the radiance rate, the result of the investigation of the product yield of the interruption, and the life of the frame for the smelting ("life of the multi-stage scaffolding group" (times)). The second, third, and fourth embodiments shown in Table 2 contain 〇〇13%. Si—SiC, the fifth embodiment is recrystallized SiC, the sixth embodiment is 冰 ~ ~~ SxC, and the second comparative example is Si sis with excess Si content (:, the third ruthenium is oxidized, The fourth comparative example is Shixi Oxidation. As shown in Table 2,

S 16 201224382 By, 3 has 〇. 01~30% of Si of Si-Sic' recrystallized siC and -SlC of any material f constitutes the slab of the smelting of the first part of the patent scope The product yield is improved and the frame for firing is extended. In addition, the material of the chemical composition of the second to fourth comparative examples constitutes the case of the frame for the burning of the first patent of the Chinese patent, and the deterioration of the product yield is observed, and in particular, the scaffolding group is combined. Significantly lower. [Brief Description of the Drawings] Fig. 1 is a perspective view showing the state of the entire body of the frame for melting of the i-th embodiment. Fig. 2 is a perspective view showing the insertion of the flat plate insert into the frame for melting. Fig. 3 is an overall perspective view showing a modification of the first embodiment. Fig. 4 is a graph showing the heat emissivity of the holder holding means of the present invention. Fig. 5 is a side view of the frame for firing in the second embodiment. Fig. 6 is a side view showing the insertion of the flat plate insert into the baking. Fig. 7 is a view showing the state of the overall three-dimensional pivot frame of the state of the frame for the smelting of the third embodiment. Fig. 8 is a side view showing the state in which the flat-plate mounter is inserted into the slab. Ming 9' is the state of the previous installer of the stacked multiple segments 201224382. [Description of main component symbols] 1 ~ frame for burning; 2 (2a, 2b, 2c, 2d) ~ vertical pillar of corner; 21~ horizontal groove; 3~ upper support frame; 4 ~ lower support frame; 5 (5a , 5b) ~ intermediate vertical pillar; 5 horizontal hole; 6 ~ beam; 7 ~ flat mount; 8 ~ protrusion; 10 ~ flat member; 11 ~ segment stacking protrusion; 1 2 ~ square hole; ~ positioning protrusion; 15 ~ segment stacking protrusion; 1 6 ~ linear member, 1 7 ~ upper concave surface; 1 9 ~ concave. 18~梁; 18 s

Claims (1)

201224382 VII. Patent application scope: 1. A frame for burning, which uses a holder holding means to hold a plurality of flat plate-shaped mounters in a plurality of stages in a vertical direction, wherein: the installer retaining means is composed of 〇〇1~3 〇% is composed of any one of ―1C, Ό日曰 SiC and Si3N4—Sic, and the mounter retaining means is such that each flat mounter exposes 70 to 100% of its outer peripheral side. Keep it under. 2. The frame for the melting of the first application of the patent scope, wherein the installer retaining means has: a plurality of vertical pillars, a lower end portion of the vertical support strut of the lower end support frame of the installer holding mechanism; and an upper end support a frame supporting the upper end of the vertical struts; the mount retaining mechanism being formed by a plurality of recesses 4 or protrusions formed on the inner side of the vertical struts. p, or at least one of the beams placed between the vertical struts facing each other across the flat-shaped mount. 3. The frame for burning according to item 2 of the patent application, wherein the vertical support is composed of a vertical vertical pillar constituting a vertical side of the four corners thereof and an intermediate vertical pillar vertically disposed between the vertical pillars of the corner. 4. The frame for the smelting of the first aspect of the patent application, wherein the mounter retaining means is constituted by a frame member having a frame-like projection having a plurality of segments for stacking at the peripheral portion, in a state in which the flat mounter is held Stacked in multiple stages. 5. The frame for the smelting of the first application of the patent scope, wherein the installer retaining means is provided by a pair of 19 201224382 linear members having a plurality of stacking projections and arranged opposite each other, and the racks are stacked in each section. The beam between the upper concave surfaces is formed as a 'layer of the flat mounter'. The protection is to be stacked on a plurality of sections. 6. For example, in the scope of the patent application, the main frame of the first four items, the components of the assembly that hold the handcuffs are made of Si. — SiC consists of SiC: 70~99%, ς·., (10) heart Sl. 3〇%, SiC + si 100%, and further contains A1 : 0 01 ”·' u. 2/0 , Fe : ο. 〇 〇, 2%, Ca. 〇. 0.2 0.2 0.2%. La · 7. The frame of the smelting of the sixth paragraph of the patent application, in which the components of the holder retaining means are thermally light The rate is in the wave 8. As stated in the scope of the patent scope 6 or 1, the '''''''''''''''''''''''' The surface roughness is Ka-ul~30 " m, the elastic Sun Jinjinda evaluation coefficient is 2〇〇M〇〇GPa, 1〇〇~40〇MPa, and the thermal conductivity at room temperature is 1% or less. The number is 150~... 'Pneumatic hole 9_ as in the patent application range 丨 to plus from any of the four items of the burning frame, which constitutes the mounting device ^ ^ blade member Recrystallized SiC, the chemical composition of which is SiC: 99 to 100%, # ς People set S!C to 1%, and further contain A1: 0_0, 0.2%, Fe: 〇〇琨 and u. 2/ 〇, Ca: 0. 〇卜〇. 2%. 10. For the frame of the smelting of any of the patent scopes 1 to ^ ^ ^ 4, which constitutes the t-device retention means @士.姐姐The components are made of Si3N4-SiC, and the chemical components are SiC: 7〇~8〇%, ς.λτ, η. S13N4: 20~30%, and Sir + Si3N〇 is set to 100%' Ai.n • υ· 1 〇. 5%, Fe: 〇· 1 〇. 5%, S 20 201224382 Ca : 0. 01~0. 2%. 11 _If the patent application range is 1 to 4 Any of the materials for the smelting, wherein the material of the flat-plate mount is Si-SiC containing 0.1 to 30% of Si.