JP5669443B2 - 振動体とその製造方法及び振動波アクチュエータ - Google Patents

振動体とその製造方法及び振動波アクチュエータ Download PDF

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Publication number
JP5669443B2
JP5669443B2 JP2010124711A JP2010124711A JP5669443B2 JP 5669443 B2 JP5669443 B2 JP 5669443B2 JP 2010124711 A JP2010124711 A JP 2010124711A JP 2010124711 A JP2010124711 A JP 2010124711A JP 5669443 B2 JP5669443 B2 JP 5669443B2
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JP
Japan
Prior art keywords
piezoelectric
substrate
layer
vibrating body
electrode layer
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Expired - Fee Related
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JP2010124711A
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English (en)
Japanese (ja)
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JP2011254569A (ja
JP2011254569A5 (enExample
Inventor
丸山　裕
裕 丸山
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Canon Inc
Original Assignee
Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010124711A priority Critical patent/JP5669443B2/ja
Priority to US13/118,320 priority patent/US9083264B2/en
Publication of JP2011254569A publication Critical patent/JP2011254569A/ja
Publication of JP2011254569A5 publication Critical patent/JP2011254569A5/ja
Application granted granted Critical
Publication of JP5669443B2 publication Critical patent/JP5669443B2/ja
Priority to US14/790,383 priority patent/US20150303832A1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2440/00—Bending wave transducers covered by H04R, not provided for in its groups
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP2010124711A 2010-05-31 2010-05-31 振動体とその製造方法及び振動波アクチュエータ Expired - Fee Related JP5669443B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010124711A JP5669443B2 (ja) 2010-05-31 2010-05-31 振動体とその製造方法及び振動波アクチュエータ
US13/118,320 US9083264B2 (en) 2010-05-31 2011-05-27 Vibration element, manufacturing method thereof, and vibration wave actuator
US14/790,383 US20150303832A1 (en) 2010-05-31 2015-07-02 Vibration element, manufacturing method thereof, and vibration wave actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010124711A JP5669443B2 (ja) 2010-05-31 2010-05-31 振動体とその製造方法及び振動波アクチュエータ

Publications (3)

Publication Number Publication Date
JP2011254569A JP2011254569A (ja) 2011-12-15
JP2011254569A5 JP2011254569A5 (enExample) 2013-07-11
JP5669443B2 true JP5669443B2 (ja) 2015-02-12

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JP2010124711A Expired - Fee Related JP5669443B2 (ja) 2010-05-31 2010-05-31 振動体とその製造方法及び振動波アクチュエータ

Country Status (2)

Country Link
US (2) US9083264B2 (enExample)
JP (1) JP5669443B2 (enExample)

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US9509235B2 (en) * 2011-06-27 2016-11-29 Canon Kabushiki Kaisha Piezoelectric element, oscillatory wave motor, and optical apparatus
JP6106840B2 (ja) * 2012-03-23 2017-04-05 ヤマハ株式会社 Ｐｚｔデバイス
US9818925B2 (en) * 2012-06-14 2017-11-14 Canon Kabushiki Kaisha Vibrating body, method of manufacturing the same and vibration type drive device
JP2014117014A (ja) * 2012-12-06 2014-06-26 Canon Inc 振動体とその製造方法及び振動波駆動装置
JP2014155350A (ja) 2013-02-08 2014-08-25 Canon Inc 振動体とその製造方法及び振動型駆動装置
JP2014170926A (ja) 2013-02-08 2014-09-18 Canon Inc 振動体、その製造方法、及び振動型駆動装置
US9494453B2 (en) * 2013-03-25 2016-11-15 Woojin Inc. Ultrasonic sensor for high temperature and manufacturing method thereof
CN103686564A (zh) * 2013-12-16 2014-03-26 西安康弘新材料科技有限公司 多层独石双晶式压电骨传导振子
CN105375812A (zh) 2014-08-13 2016-03-02 精工爱普生株式会社 压电驱动装置及其驱动方法、机器人及其驱动方法
JP6467809B2 (ja) * 2014-08-13 2019-02-13 セイコーエプソン株式会社 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法
JP6601190B2 (ja) * 2015-11-30 2019-11-06 セイコーエプソン株式会社 圧電モジュール、超音波モジュール及び電子機器
JP6617536B2 (ja) * 2015-11-30 2019-12-11 セイコーエプソン株式会社 圧電デバイス、圧電モジュール及び電子機器
CN108886347B (zh) * 2016-03-25 2019-10-11 日本碍子株式会社 接合方法
JP2018107437A (ja) * 2016-12-27 2018-07-05 キヤノン株式会社 振動子、振動波駆動装置、振動波モータおよび電子機器
US20180190896A1 (en) * 2017-01-04 2018-07-05 Te Connectivity Corporation Ultrasonic Transmitter and Receiver
US10680161B1 (en) * 2017-03-29 2020-06-09 Apple Inc. Electronic Devices with Piezoelectric Ink
CN107196554A (zh) * 2017-07-03 2017-09-22 南京邮电大学 一种基于压电陶瓷的分形结构振动换能器及其制造方法
JP7039994B2 (ja) * 2017-12-25 2022-03-23 セイコーエプソン株式会社 圧電素子及びその製造方法並びに液体吐出ヘッド
WO2021126056A1 (en) * 2019-12-16 2021-06-24 Piezomotor Uppsala Ab Electromechanical actuators with composite drive pads

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Publication number Publication date
US20110291525A1 (en) 2011-12-01
JP2011254569A (ja) 2011-12-15
US20150303832A1 (en) 2015-10-22
US9083264B2 (en) 2015-07-14

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