JP5665200B2 - ゲートバルブのベローズ保護構造 - Google Patents

ゲートバルブのベローズ保護構造 Download PDF

Info

Publication number
JP5665200B2
JP5665200B2 JP2012265744A JP2012265744A JP5665200B2 JP 5665200 B2 JP5665200 B2 JP 5665200B2 JP 2012265744 A JP2012265744 A JP 2012265744A JP 2012265744 A JP2012265744 A JP 2012265744A JP 5665200 B2 JP5665200 B2 JP 5665200B2
Authority
JP
Japan
Prior art keywords
bellows
pressure
open
opening
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012265744A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013124773A5 (enExample
JP2013124773A (ja
Inventor
オセチャン
雅晴 中川
雅晴 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Irie Koken Co Ltd
Original Assignee
Irie Koken Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Irie Koken Co Ltd filed Critical Irie Koken Co Ltd
Publication of JP2013124773A publication Critical patent/JP2013124773A/ja
Publication of JP2013124773A5 publication Critical patent/JP2013124773A5/ja
Application granted granted Critical
Publication of JP5665200B2 publication Critical patent/JP5665200B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F16K17/04—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded
    • F16K17/06—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded with special arrangements for adjusting the opening pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Fluid-Driven Valves (AREA)
JP2012265744A 2011-12-13 2012-11-16 ゲートバルブのベローズ保護構造 Active JP5665200B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110133702A KR101317696B1 (ko) 2011-12-13 2011-12-13 게이트 밸브의 벨로우즈 보호 구조
KR10-2011-0133702 2011-12-13

Publications (3)

Publication Number Publication Date
JP2013124773A JP2013124773A (ja) 2013-06-24
JP2013124773A5 JP2013124773A5 (enExample) 2014-01-23
JP5665200B2 true JP5665200B2 (ja) 2015-02-04

Family

ID=48776142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012265744A Active JP5665200B2 (ja) 2011-12-13 2012-11-16 ゲートバルブのベローズ保護構造

Country Status (2)

Country Link
JP (1) JP5665200B2 (enExample)
KR (1) KR101317696B1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190060513A (ko) 2017-11-24 2019-06-03 주식회사 비지에스 게이트 밸브
KR102077271B1 (ko) 2017-11-24 2020-04-07 코스텍시스템(주) 게이트 밸브 하우징 및 이의 제조방법
KR20190060512A (ko) 2017-11-24 2019-06-03 주식회사 비지에스 게이트 밸브
KR102077270B1 (ko) 2017-11-24 2020-04-07 코스텍시스템(주) 내부 유로를 포함하는 실린더 및 이를 이용한 게이트 밸브
KR102146911B1 (ko) * 2018-01-23 2020-08-25 조설호 대면적 게이트 밸브
JP7245724B2 (ja) * 2019-06-06 2023-03-24 入江工研株式会社 弁体および真空ゲートバルブ
JP7296083B1 (ja) 2023-01-30 2023-06-22 入江工研株式会社 回転駆動式ゲートバルブ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5419329U (enExample) * 1977-07-12 1979-02-07
JPS54105353U (enExample) * 1978-01-09 1979-07-25
JPS57208361A (en) * 1981-06-15 1982-12-21 Ntn Toyo Bearing Co Ltd Boots
JPH0542282Y2 (enExample) * 1986-04-23 1993-10-25
JPH0314978A (ja) * 1989-06-12 1991-01-23 Nippondenso Co Ltd 燃料ポンプの流量調整装置
JPH086843B2 (ja) * 1991-10-15 1996-01-29 エスエムシー株式会社 無発塵ゲートバルブ
JP2000028013A (ja) * 1998-07-13 2000-01-25 Ckd Corp ゲート式真空遮断弁
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
JP4614155B2 (ja) * 2001-08-28 2011-01-19 Ｓｍｃ株式会社 ゲートバルブ
JP2003148635A (ja) * 2001-11-15 2003-05-21 Smc Corp ゲートバルブ

Also Published As

Publication number Publication date
KR20130066928A (ko) 2013-06-21
KR101317696B1 (ko) 2013-10-15
JP2013124773A (ja) 2013-06-24

Similar Documents

Publication Publication Date Title
JP5665200B2 (ja) ゲートバルブのベローズ保護構造
KR101037846B1 (ko) 게이트 밸브 장치, 진공 처리 장치 및 게이트 밸브 장치에 있어서의 밸브체의 개방 방법
CN105020423B (zh) 闸阀
JP2010520621A (ja) スリットバルブドアの密閉圧力の制御
JP2013124773A5 (enExample)
CN104088793A (zh) 一种空压机进气控制阀总成
CN102754017B (zh) 气密密封装置及具有该密封装置的显示装置制造系统
JP6150388B2 (ja) ゲートバルブ及びチャンバ
US9273800B2 (en) Valve
CN101532582B (zh) 真空处理设备、控制真空处理设备的方法及器件制造方法
JP2016011719A (ja) ゲートバルブ
CN114729713A (zh) 真空工艺室的进气阀
CN104493361B (zh) 用于激光焊接的密封装置
KR100808101B1 (ko) 진공 게이트 밸브
KR200413024Y1 (ko) 진공 게이트 밸브
JP2012015272A (ja) 処理装置及び搬送装置
JP2005240883A (ja) 真空用ゲート弁
KR20160038948A (ko) 기판 처리 장치용 게이트 밸브 조립체
KR102207154B1 (ko) 게이트 밸브
KR20190060512A (ko) 게이트 밸브
KR20120134537A (ko) 챔버와 진공차단장치의 진공 밸런싱 장치
CN112649156A (zh) 集成控制阀气密检测装置和检测方法
CN200952588Y (zh) 一种用于二次真空系统的机械安全阀
KR20040008878A (ko) 진공 게이트밸브
CN223712714U (zh) 气缸下压装置及晶圆键合卡盘组件

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131101

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20131101

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20131105

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131106

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140911

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140924

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141114

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20141205

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20141205

R150 Certificate of patent or registration of utility model

Ref document number: 5665200

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250