KR101317696B1 - 게이트 밸브의 벨로우즈 보호 구조 - Google Patents
게이트 밸브의 벨로우즈 보호 구조 Download PDFInfo
- Publication number
- KR101317696B1 KR101317696B1 KR1020110133702A KR20110133702A KR101317696B1 KR 101317696 B1 KR101317696 B1 KR 101317696B1 KR 1020110133702 A KR1020110133702 A KR 1020110133702A KR 20110133702 A KR20110133702 A KR 20110133702A KR 101317696 B1 KR101317696 B1 KR 101317696B1
- Authority
- KR
- South Korea
- Prior art keywords
- bellows
- opening
- pressure
- bet
- closing cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
- F16K17/04—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded
- F16K17/06—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded with special arrangements for adjusting the opening pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
- Fluid-Driven Valves (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110133702A KR101317696B1 (ko) | 2011-12-13 | 2011-12-13 | 게이트 밸브의 벨로우즈 보호 구조 |
| JP2012265744A JP5665200B2 (ja) | 2011-12-13 | 2012-11-16 | ゲートバルブのベローズ保護構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110133702A KR101317696B1 (ko) | 2011-12-13 | 2011-12-13 | 게이트 밸브의 벨로우즈 보호 구조 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20130066928A KR20130066928A (ko) | 2013-06-21 |
| KR101317696B1 true KR101317696B1 (ko) | 2013-10-15 |
Family
ID=48776142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020110133702A Active KR101317696B1 (ko) | 2011-12-13 | 2011-12-13 | 게이트 밸브의 벨로우즈 보호 구조 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5665200B2 (enExample) |
| KR (1) | KR101317696B1 (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190060512A (ko) | 2017-11-24 | 2019-06-03 | 주식회사 비지에스 | 게이트 밸브 |
| KR20190060515A (ko) | 2017-11-24 | 2019-06-03 | 주식회사 비지에스 | 게이트 밸브 하우징 및 이의 제조방법 |
| KR20190060513A (ko) | 2017-11-24 | 2019-06-03 | 주식회사 비지에스 | 게이트 밸브 |
| KR20190060514A (ko) | 2017-11-24 | 2019-06-03 | 주식회사 비지에스 | 내부 유로를 포함하는 실린더 및 이를 이용한 게이트 밸브 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102146911B1 (ko) * | 2018-01-23 | 2020-08-25 | 조설호 | 대면적 게이트 밸브 |
| JP7245724B2 (ja) * | 2019-06-06 | 2023-03-24 | 入江工研株式会社 | 弁体および真空ゲートバルブ |
| JP7296083B1 (ja) | 2023-01-30 | 2023-06-22 | 入江工研株式会社 | 回転駆動式ゲートバルブ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5419329U (enExample) * | 1977-07-12 | 1979-02-07 | ||
| JP2002181205A (ja) * | 2000-12-14 | 2002-06-26 | Irie Koken Kk | ゲート弁 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54105353U (enExample) * | 1978-01-09 | 1979-07-25 | ||
| JPS57208361A (en) * | 1981-06-15 | 1982-12-21 | Ntn Toyo Bearing Co Ltd | Boots |
| JPH0542282Y2 (enExample) * | 1986-04-23 | 1993-10-25 | ||
| JPH0314978A (ja) * | 1989-06-12 | 1991-01-23 | Nippondenso Co Ltd | 燃料ポンプの流量調整装置 |
| JPH086843B2 (ja) * | 1991-10-15 | 1996-01-29 | エスエムシー株式会社 | 無発塵ゲートバルブ |
| JP2000028013A (ja) * | 1998-07-13 | 2000-01-25 | Ckd Corp | ゲート式真空遮断弁 |
| JP4614155B2 (ja) * | 2001-08-28 | 2011-01-19 | Smc株式会社 | ゲートバルブ |
| JP2003148635A (ja) * | 2001-11-15 | 2003-05-21 | Smc Corp | ゲートバルブ |
-
2011
- 2011-12-13 KR KR1020110133702A patent/KR101317696B1/ko active Active
-
2012
- 2012-11-16 JP JP2012265744A patent/JP5665200B2/ja active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5419329U (enExample) * | 1977-07-12 | 1979-02-07 | ||
| JP2002181205A (ja) * | 2000-12-14 | 2002-06-26 | Irie Koken Kk | ゲート弁 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190060512A (ko) | 2017-11-24 | 2019-06-03 | 주식회사 비지에스 | 게이트 밸브 |
| KR20190060515A (ko) | 2017-11-24 | 2019-06-03 | 주식회사 비지에스 | 게이트 밸브 하우징 및 이의 제조방법 |
| KR20190060513A (ko) | 2017-11-24 | 2019-06-03 | 주식회사 비지에스 | 게이트 밸브 |
| KR20190060514A (ko) | 2017-11-24 | 2019-06-03 | 주식회사 비지에스 | 내부 유로를 포함하는 실린더 및 이를 이용한 게이트 밸브 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130066928A (ko) | 2013-06-21 |
| JP5665200B2 (ja) | 2015-02-04 |
| JP2013124773A (ja) | 2013-06-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101317696B1 (ko) | 게이트 밸브의 벨로우즈 보호 구조 | |
| WO2008109311A2 (en) | Control of slit valve door seal pressure | |
| CN112119247A (zh) | 闸阀 | |
| KR101088898B1 (ko) | 진공차단 슬롯밸브 및 이를 구비한 진공차단 도어 | |
| WO2000017555A1 (en) | Two speed air cylinder for slit valve motion control | |
| KR101069544B1 (ko) | 역압 대응 게이트 밸브 | |
| KR101626035B1 (ko) | 게이트밸브어셈블리와 이를 포함하는 기판처리시스템 | |
| US9180445B2 (en) | Vacuum processing apparatus having a means for preventing counter-pressure between chambers | |
| KR20150130316A (ko) | 공압 유체 재순환 지연 기능을 가진 공압식 방향 제어 밸브를 위한 안전 기구 | |
| KR100808101B1 (ko) | 진공 게이트 밸브 | |
| JP2016011719A (ja) | ゲートバルブ | |
| KR200413024Y1 (ko) | 진공 게이트 밸브 | |
| KR20190060512A (ko) | 게이트 밸브 | |
| KR20160038948A (ko) | 기판 처리 장치용 게이트 밸브 조립체 | |
| KR100489553B1 (ko) | 진공 게이트밸브 | |
| KR101727275B1 (ko) | 고압 관로 밸브 급속 개폐를 위한 콘트롤러 | |
| KR20120134537A (ko) | 챔버와 진공차단장치의 진공 밸런싱 장치 | |
| KR20180110380A (ko) | 반도체 제조 설비용 슬릿 밸브 | |
| KR20190060513A (ko) | 게이트 밸브 | |
| KR100932119B1 (ko) | 반도체 제조설비의 슬릿 도어 밸브 | |
| KR102012720B1 (ko) | 진공밸브 엑츄에이터 | |
| KR200460437Y1 (ko) | 반도체 제조장비의 슬릿 밸브 | |
| KR20200132273A (ko) | 게이트 밸브 | |
| CN103858207B (zh) | 腔室之间具备反压防止机构的真空处理装置 | |
| KR200292552Y1 (ko) | 진공 게이트밸브 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| PA0109 | Patent application |
St.27 status event code: A-0-1-A10-A12-nap-PA0109 |
|
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
|
| D13-X000 | Search requested |
St.27 status event code: A-1-2-D10-D13-srh-X000 |
|
| D14-X000 | Search report completed |
St.27 status event code: A-1-2-D10-D14-srh-X000 |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
|
| E13-X000 | Pre-grant limitation requested |
St.27 status event code: A-2-3-E10-E13-lim-X000 |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
St.27 status event code: A-1-2-D10-D22-exm-PE0701 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
St.27 status event code: A-2-4-F10-F11-exm-PR0701 |
|
| PR1002 | Payment of registration fee |
St.27 status event code: A-2-2-U10-U11-oth-PR1002 Fee payment year number: 1 |
|
| PG1601 | Publication of registration |
St.27 status event code: A-4-4-Q10-Q13-nap-PG1601 |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-5-5-R10-R18-oth-X000 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-4-4-P10-P22-nap-X000 |
|
| FPAY | Annual fee payment |
Payment date: 20161004 Year of fee payment: 4 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 4 |
|
| FPAY | Annual fee payment |
Payment date: 20170927 Year of fee payment: 5 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 5 |
|
| FPAY | Annual fee payment |
Payment date: 20181025 Year of fee payment: 6 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 6 |
|
| FPAY | Annual fee payment |
Payment date: 20191002 Year of fee payment: 7 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 7 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 8 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 9 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 10 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 11 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 12 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 13 |