KR101317696B1 - Bellows protect structure for gate valve - Google Patents

Abstract

The present invention detects even if a predetermined air pressure is applied to the bellows surrounding the rod part retracting in the opening / closing cylinder in the seal unit of the gate valve, thereby relieving the corresponding air pressure, thereby preventing damage to the bellows or shortening of the life due to pressure. The bellows protection structure of the gate valve which can be used, and in the gate valve for opening and closing the opening of the valve casing by operating the seal unit part in accordance with the inflow of air pressure of the bellows surrounding the rod part retreating according to the free driving pressure and the lock driving pressure As a protection structure, the seal unit is received by the opening and closing cylinder with the rod, the opening and closing cylinder is fixed and receives the free drive pressure and the lock drive pressure for opening and closing through the free drive pressure outlet and the lock drive pressure outlet, respectively Delivered to the opening and closing cylinder It consists of a plate and a seal plate attached to the rod portion of the opening and closing cylinder, the opening and closing cylinder is provided with a safety valve for detecting the bet of the bellows, if the bet applied to the bellows exceeds the reference pressure corresponds to the bet of the bellows It is characterized in that the exhaust through the safety valve to the outside.

Description

BELLOWS PROTECT STRUCTURE FOR GATE VALVE}

The present invention relates to a bellows protection structure of a gate valve, and more particularly, to detect a bellows surrounding a rod part advancing in an opening / closing cylinder in a seal unit of the gate valve even if a predetermined air pressure is applied therein, thereby relieving the corresponding air pressure. The present invention relates to a bellows protection structure of a gate valve that can prevent the bellows damage or shorten the life due to pressurization.

In general, most of the processes for manufacturing LCD substrates, semiconductor devices, and solar cells are performed in a vacuum state. Therefore, most of the equipment that performs the process for manufacturing the LCD substrate or semiconductor device is a vacuum equipment, a vacuum pump is used to maintain a high vacuum inside the vacuum equipment, the chamber between the chamber and the chamber of the vacuum equipment Gate valve is provided to maintain the degree of vacuum or to open and close the object of the vacuum chamber to pass through.

In order to improve the technology and improve the productivity of the gate valve, the gate valve is also enlarged due to the enlargement of the wafer or the glass substrate, but the conventional cam structure or the slit valve is required to increase the weight and the number of driving parts. There is a problem that is difficult to realize due to the increase in maintenance points, delay in operating speed, and the like.

In general, the configuration of the gate valve is composed of a valve casing provided between the vacuum chamber, a seal unit for opening and closing the opening of the vacuum chamber, a lift drive unit for lifting and lowering the seal unit, and a control panel for controlling pneumatic supply and operation.

Here, the seal unit part is provided between the back plate and the seal plate interposed between the back plate and the seal plate is provided with an opening and closing cylinder for performing the opening and closing operation by moving the back plate and the seal plate, the sealing portion (Seal) An elastic body such as a bellows is inserted to protect the rod from pressure in operation.

However, when the bet between the bellows and the rod portion rises above atmospheric pressure, a significant drop in the life of the bellows occurs, making it difficult to predict the service life, and due to the characteristics of the material, serious deformation or damage may occur. Therefore, in the field, there is a big loss due to work delay and failure due to unexpected malfunction and there is a difficulty in dismantling the entire gate valve in case of maintenance.

The present invention has been made to solve the above problems, the object of the present invention is to detect the bellows surrounding the rod portion retracted in the opening and closing cylinder in the seal unit of the gate valve even if a predetermined air pressure is applied to the inside to detect the corresponding air pressure By eliminating the damage, the bellows protection structure of the gate valve can be prevented in advance to prevent the bellows damage or shorten the life due to the pressurization.

In addition, it provides a bellows protection structure of the gate valve that can simplify the configuration and increase the applicability to the existing product by using the existing pneumatic flow path for opening and closing the cylinder when the air pressure for the bellows protection is released.

According to one aspect of the present invention, in the gate valve for opening and closing the opening of the valve casing by operating the seal unit part in response to the inflow of air pressure as a protective structure of the bellows surrounding the rod part retreating according to the free driving pressure and the lock driving pressure, The seal unit has an opening / closing cylinder provided with the rod, and the opening / closing cylinder is fixed, and receives a free driving pressure and a lock driving pressure for opening and closing, respectively, and discharges them through the free driving pressure discharge port and the lock driving pressure discharge port to be delivered to the opening and closing cylinder. It consists of a back plate and a seal plate attached to the rod portion of the opening and closing cylinder, the opening and closing cylinder is provided with a safety valve for detecting the bet of the bellows, bet of the bellows if the bet applied to the bellows exceeds the reference pressure Gay to the outside through the safety valve Provides a bellows protection structure for the valve.

Preferably, the safety valve, measuring opening for receiving the bet applied to the bellows through the opening on one side; A body part connected to the measuring tool and opened / closed according to the air pressure introduced through the measuring tool; And an exhaust port connected to the body part to exhaust the air pressure when the body part is opened. And a control unit.

Preferably, the body portion, one side of the elastic member is fixed as a fixed end; And a gate having one side coupled to the free end of the elastic member and the other side blocking the measurement sphere. It is configured to include, characterized in that the gate is retracted when the bet of the bellows drawn along the measuring port exceeds the reference pressure to communicate the measuring port and the exhaust port.

Preferably, the exhaust port exhausts the bet of the bellows through the lock driving pressure outlet port.

Preferably, the exhaust port is characterized in that for venting the bet of the bellows through the free drive pressure outlet.

According to the present invention, even if a certain air pressure is applied to the bellows surrounding the rod part advancing in the opening / closing cylinder in the seal unit of the gate valve, the air pressure is sensed to relieve the corresponding air pressure, thereby preventing damage to the bellows due to pressurization or shortening of life. There is an effect that can be prevented.

In addition, by using the existing pneumatic flow path for opening and closing the cylinder as it is when the air pressure for the protection of the bellows as it is effective to simplify the configuration and increase the applicability to the existing product.

1 is a view showing a lifting state of the seal unit of the gate valve to which the present invention is applied.
Figure 2 is a view showing a seal unit lowering state of the gate valve to which the present invention is applied.
Figure 3 is a perspective view showing a seal unit of the gate valve to which the present invention is applied.
4 is a cross-sectional view showing an open state of a seal unit to which a bellows protection structure according to the present invention is applied.
5 is a cross-sectional view showing a closed state of a seal unit to which a bellows protection structure according to the present invention is applied.
6 is a view for explaining the structure of a safety valve according to an embodiment of the present invention.

Hereinafter, an embodiment of a bellows protection structure of a gate valve according to the present invention will be described in more detail with reference to the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a state in which the seal unit portion of a gate valve is lifted, to which the present invention is applied.

The gate valve to which the present invention is applied is provided between the vacuum chamber and has a valve casing 100 having a predetermined opening, a seal unit 300 embedded in the valve casing 100 to open and close the opening, and the seal. Lifting drive unit 200 for raising or lowering the unit unit 300, and the control panel 400 for supplying supply and operation control is configured.

The lifting driving unit 200 is composed of a lifting cylinder and a guide block to raise and lower the seal unit 300 by pneumatic pressure. Here, the lifting cylinder may be a pneumatic cylinder. The air lift is maintained between the lift drive unit 200 and the valve casing 100 by an airtight holding means such as an O-ring.

In addition, a separate valve rod (not shown) is processed in the axial direction as an air pressure supply path to the elevating drive unit 200, and the seal unit 300 is tightly locked and dismantled by the air pressure supplied therethrough. (Free) The valve rod is coupled to the back plate 310 of the seal unit 300 and connected to the pneumatic flow path of the back plate 310.

Adjustment of the pneumatic pressure of the lift drive unit 200 and the seal unit 300 may be made by the pneumatic unit and the solenoid valve in the control panel 400.

3 shows a seal unit of a gate valve to which the present invention is applied.

The seal unit 300 has a structure in which the back plate 310 and the seal plate 330 are installed before and after the center of the opening and closing cylinder 320, respectively, the cylinder body 321 portion of the opening and closing cylinder 320. Is fixed to the back plate 310 and has a structure in which the seal plate 330 is attached to the end of the rod portion 323. The seal unit 300 presses the back plate 310 and the seal plate 330 in the front-rear direction according to the transmission of air pressure, so that the back plate 310 and the seal plate 330 of the valve casing 100 It is configured to open and close the opening.

The back plate 310 is used as a supply and exhaust passage of pneumatic pressure required for the operation of the opening and closing cylinder 320 by processing a passage hole that becomes a pneumatic flow path, the position of the hole according to the position of the supply and exhaust holes It can be changed and the number can be increased or decreased as needed. In the following description and drawings, only one flow path for supplying and exhausting air will be installed for convenience of description.

As shown in FIG. 3, as many opening and closing cylinders 320 as necessary may be attached to the back plate 310 according to the size of the opening of the valve casing 100, and the number thereof is not limited. In addition, according to the change in the weight of the seal unit 300, the capacity or number of the opening and closing cylinder 320 can be changed.

The detailed configuration of the opening and closing cylinder 320 will be described with reference to FIGS. 4 and 5 as follows.

The opening and closing cylinder 320 is coupled to the inner surface of the back plate 310 and the cylinder body 321 and the cylinder cover 322 configured to have a predetermined internal space that can be supplied with air pressure, and the cylinder body ( The piston pad 324 is advanced and retracted in the cylinder body 321 according to the pneumatic pressure provided in the 321, and provided through the cylinder cover 322, one side is coupled to the piston pad 324 and the other side is Coupled to the seal plate 330 is configured to include a rod portion 323 to move forward and backward in accordance with the movement of the piston pad (324).

Looking at the free state of opening the opening of the valve casing 100 by the opening / closing cylinder 320 with reference to FIG. 4, the pre-drive pressure supplied to the back plate 310 is a pre-drive pressure outlet 311. When the free drive pressure is transmitted, the free discharge pressure is discharged into the cylinder body 321 of the opening / closing cylinder 320 along the free driving pressure discharge passage 312 to return the piston pad 324 to the back plate 310. In this direction, the rod 323 moves forward to the back plate 310 and the back plate 310 and the seal plate 330 are separated from the opening of the corresponding valve casing 100 according to the pressure. 100) is made open.

Looking at the lock state of closing the opening of the valve casing 100 by the opening and closing cylinder 320 with reference to Figure 5, the lock driving pressure supplied to the back plate 310 is the lock driving pressure outlet 313 Is discharged through the lock drive pressure, and is discharged into the cylinder body 321 of the opening / closing cylinder 320 along the lock drive pressure discharge passage 314 to seal the piston pad 324 with the seal plate 330. Direction, and the rod part 323 is spaced apart from the back plate 310 and the back plate 310 and the seal plate 330 are pushed to the opening of the corresponding valve casing 100 according to the pressure. 100 is closed.

Here, a bellows 326 is inserted into the rod part 323 which is moved back and forth according to the free driving pressure and the lock driving pressure. The bellows 326 may be made of an elastic body, and made of an elastic body for wrapping a welding bellows, a molding bellows, or a rod part.

Since the inside of the valve casing 100 is generally in a vacuum state, the rod part 323 is wrapped in an elastic body such as a bellows 326 so as to separate and maintain the space inside the opening / closing cylinder 320 and the inside of the valve casing 100, respectively. Will be This airtightness blocks the entry of the atmosphere into the vacuum space.

In the present invention, in order to protect the bellows 326, safety valves 327 and 328 are provided in the opening and closing cylinder 320, and through the safety valves 327 and 328, the air pressure in the opening and closing cylinder 320, more precisely, By detecting the bet between the rod part 323 and the bellows 326, when a pressure exceeding a predetermined pressure is applied to the bellows 326, the bellows 326 is automatically opened to exhaust the air pressure to prevent deformation and damage of the bellows 326. It becomes possible.

When the actual bellows 326 has an abnormal air pressure (about 0.101 Mpa or more) to the inside, a significant drop in the life of the bellows 326 occurs, and the actual air pressure is 3 to 5 Kg / ㎠ compared to atmospheric pressure When three to five times the pressure is applied, the bellows will be severely deformed or damaged.

In order to prevent this, the inside of the opening / closing cylinder 320 detects the bet of the bellows 326 at the time of free driving pressure and releases the bet applied to the bellows 326 when the bet exceeds the reference pressure, thereby eliminating the first safety. Valve 327 is provided.

Similarly, a second safety valve inside the opening / closing cylinder 320 detects the bet of the bellows 326 when the lock driving pressure is applied, and exhausts the bet applied to the bellows 326 when the bet exceeds the reference pressure. 328 is provided.

First, referring to FIGS. 4 and 6, the first safety valve 327 is installed in the piston pad 324 and the measuring port 327a that accepts the bet of the bellows 326 through an opening on one side thereof. The body portion 327b connected to the measuring sphere 327a and opened and closed according to the air pressure drawn through the measuring sphere 327a, and the corresponding air pressure when the body portion 327b is opened by being connected to the body portion 327b. And an exhaust port 327c for exhausting the gas. Here, the measuring sphere 327a, the body portion 327b, and the exhaust port 327c constituting the first safety valve 327 are preferably arranged in a line.

Here, the measuring sphere 327a is extended to a position where the end can accept the bet of the bellows 326. Such an extension may be built in the rod part 323. In addition, the body portion 327b has an elastic member 327d such as a spring fixedly installed at one side as a fixed end therein, and a gate for opening and closing the measuring tool 327a at the free end of the elastic member 327d. 327e) are combined. Therefore, the gate 327e normally blocks the measuring sphere 327a by the elastic force of the elastic member 327d (see FIG. 6A), and the reference pressure RP is applied to the measuring sphere 327a. When the bet of the excess bellows 326 is drawn in, the measurement port 327a is opened by being pushed by the corresponding air pressure to communicate the measurement port 327a and the exhaust port 327c so that the abnormal air pressure is exhausted through the exhaust port 327c (Fig. 6). (b)).

At this time, the reference pressure RP may be 1.3 atm, and the reference pressure RP may be adjusted by the elastic modulus of the elastic member 327d.

In addition, the exhaust port 327c of the first safety valve 327 may communicate with the lock driving pressure outlet 313 which is not used when the pre-driving pressure is generated. More specifically, the exhaust port 327c of the first safety valve 327 is exhausted along the space between the back plate 310 and the piston pad 324 to pass through the lock drive pressure discharge flow path 314 and to the lock drive pressure discharge port. It is exhausted to the outside along 313.

Next, referring to FIGS. 5 and 6, the second safety valve 328 is installed in the cylinder cover 322, and measures the measuring hole 328a to receive the bet of the bellows 326 through an opening on one side. And a body portion 328b connected to the measuring sphere 328a and opened / closed according to the air pressure drawn through the measuring sphere 328a, and connected to the body portion 328b to open the body portion 328b. It consists of an exhaust port 328c which exhausts air pressure. Here, the measuring sphere 328a, the body portion 328b, and the exhaust port 328c constituting the second safety valve 328 are preferably arranged in a line.

Here, the measuring sphere 328a is formed at a position where the end thereof can accept the bet of the bellows 326. In addition, the body portion 328b has an elastic member 328d such as a spring fixedly installed at one side as a fixed end therein, and a gate for opening and closing the measuring tool 328a at the free end of the elastic member 328d. 328e) is combined. Therefore, the gate 328e normally blocks the measuring sphere 328a by the elastic force of the elastic member 328d (see (a) of FIG. 6), and the reference pressure RP is applied to the measuring sphere 328a. When the bet of the excess bellows 326 is drawn in, it is pushed into the bet to open the measuring port 328a so that the measuring port 328a and the exhaust port 328c communicate with each other, so that the abnormal bet is exhausted through the exhaust port 328c (Fig. 6). (b)).

In this case, the reference pressure RP may be 1.3 atm, and the reference pressure RP may be adjusted by the elastic modulus of the elastic member 328d.

In addition, the exhaust port 328c of the second safety valve 328 may communicate with the free driving pressure outlet 311 which is not used when generating the lock driving pressure. More specifically, the exhaust port 328c of the second safety valve 328 is exhausted along the pre-drive pressure discharge passage 312 to be exhausted to the outside along the pre-drive pressure discharge port 311.

Since the inside of the bellows 326 blocked by the actual bellows 326 changes in volume when the rod part 323 is moved back and forth, a serious malfunction may occur if the air pressure generated accordingly is not properly exhausted. Through the first safety valve 327 and the second safety valve 328 in accordance with the occurrence of the excess bet to exhaust the air pressure to the outside it is possible to prevent damage to the bellows or shortened life.

In the above description and drawings, the first safety valve 327 and the second safety valve 328 are respectively described and illustrated in the opening / closing cylinder 320, but the present invention is not limited thereto. Of course, the first safety valve 327 and the second safety valve 328 may be provided in the opening / closing cylinder 320, respectively.

As described above, an optimal embodiment has been disclosed in the drawings and specification. Although specific terms have been employed herein, they are used for purposes of illustration only and are not intended to limit the scope of the invention as defined in the claims or the claims. Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

100 valve casing 200 lifting drive
300: seal unit 400: control panel
310: back plate 320: opening and closing cylinder
330: seal plate 323: rod
326: bellows 327: the first safety valve
328: second safety valve

Claims (5)

In the gate valve for opening and closing the opening of the valve casing by operating the seal unit part in response to the inflow of air pressure, a bellows protection structure surrounding the rod part retreating according to the free driving pressure and the lock driving pressure,
The seal unit has an opening / closing cylinder provided with the rod portion, and the opening / closing cylinder is fixed, and receives a free driving pressure and a lock driving pressure for opening and closing, respectively, and discharges them through the free driving pressure outlet and the lock driving pressure outlet to the opening and closing cylinder. Consists of a back plate for transmitting and a seal plate attached to the rod portion of the opening and closing cylinder,
The opening and closing cylinder is provided with a safety valve for detecting the bet of the bellows, and if the bet applied to the bellows exceeds the reference pressure to exhaust the bet of the bellows to the outside through the corresponding safety valve,
The safety valve,
A measuring tool receiving a bet applied to the bellows through an opening on one side;
A body part connected to the measuring tool and opened / closed according to the air pressure introduced through the measuring tool; And
An exhaust port connected to the body to exhaust the air pressure when the body is opened; Bellows protection structure of the gate valve comprising a.
delete The method of claim 1,
The body portion
An elastic member having one side fixed as a fixed end; And
A gate having one side coupled to a free end of the elastic member and the other side blocking the measurement sphere; And,
The bellows protection structure of the gate valve characterized in that the gate is retracted to communicate the measuring port and the exhaust port when the bet of the bellows drawn along the measuring port exceeds the reference pressure.
The method of claim 3, wherein
And said exhaust port exhausts the bet of the bellows through the lock drive pressure outlet port.
The method of claim 3, wherein
And said exhaust port exhausts the bet of the bellows through the free drive pressure outlet.

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