JP7245724B2 - Valve body and vacuum gate valve - Google Patents

Description

The present invention relates to a valve body used for a vacuum gate valve and a vacuum gate valve provided with the valve body.

A vacuum gate valve isolates a vacuum from a vacuum or a vacuum from the atmosphere by releasably closing a gate opening provided in a valve box with a valve body. The valve body is composed of a valve plate arranged to face the gate opening, and a seal driving portion having a cylinder that drives the valve plate in a direction of contacting and separating from the partition wall of the valve box. The valve plate is provided with an O-ring that ensures a tight seal with the gate opening.

Such a vacuum gate valve is called, for example, a rectangular gate valve having a gate opening having an elongated hole shape. By operating a plurality of cylinders arranged along each of the valve plates, the valve plate is brought into contact with the partition wall of the valve body to releasably close the gate opening.

In such a square gate valve, when the gate opening is opened, the O-ring, which has been pressed against the partition wall of the valve body, is pulled away from the partition wall of the valve body, causing a large impact noise. do. This impact sound increases as the length of the gate opening increases and the size of the gate opening increases. In addition, the vacuum gate valve vibrates greatly due to the fact that the O-ring that has been pressed against and in close contact with the valve body is pulled away from the valve body.

Specifically, as a technique for reducing these impact noises and vibrations, conventionally, for example, a plurality of valve opening/closing means are installed along the length direction of the valve plate. There is a technique for creating a time lag between the end of the valve plate and the rest of the valve plate in the time it takes for the valve plate to separate from the opening (see, for example, Patent Document 1 below. ).

Japanese Patent No. 6063594

However, the conventional technique described in the above-mentioned Patent Document 1 has a troublesome problem that it is necessary to adjust the restoring forces of the springs in the valve opening/closing means installed in plural in order to generate the time lag. rice field. Specifically, the springs provided at the center of the valve plate and the springs provided at the ends of the valve plate must incorporate springs with different restoring forces, which increases the number of parts and complicates the manufacturing process. was there.

In addition, in the conventional technique described in the above-mentioned Patent Document 1, the valve plate is separated from the partition wall depending on the restoring force of the spring. There is a problem that it is difficult to maintain the balance of the spring return force between the center portion and the valve plate end portion.

SUMMARY OF THE INVENTION An object of the present invention is to provide a valve body and a vacuum gate valve that can reduce the impact noise and vibration that occur when the gate opening is opened, in order to solve the above-described problems of the prior art.

Another object of the present invention is to provide a valve body and a vacuum gate valve that can suppress the generation of foreign matter due to deterioration of the O-ring, in order to solve the above-described problems of the prior art.

In order to solve the above-described problems and achieve the object, a valve body according to the present invention is a valve body for opening and closing a gate opening provided in a valve body of a vacuum gate valve, the valve body being arranged along one direction. a pressure plate supporting a cylinder group consisting of a first cylinder and a second cylinder; a valve plate that reciprocates to and from the pressure plate, a first application port that is provided in the pressure plate and communicates with a space on the side of the pressure plate from the piston in the first cylinder and the second cylinder ; 1 cylinder and a second application port communicating with the space on the valve plate side from the piston in the second cylinder, and the valve plate is pushed by the air applied from the first application port. an air circuit for moving the piston in a direction away from the pressure plate and for moving the piston in a direction in which the valve plate approaches the pressure plate by air applied from the second application port; to regulate the application of the air applied from the second air supply port to the first cylinder among the cylinder group , and to restrict the application of the air applied from the second air supply port to the second cylinder. and an air regulation mechanism that does not regulate the air.

Moreover, the valve body according to this invention is characterized in that, in the above invention, the second cylinder is arranged closer to the end than the first cylinder in the arrangement direction of the cylinder group.

Further, a vacuum gate valve according to the present invention includes a valve body provided with a gate opening, and a valve body provided in the valve body for opening and closing the gate opening, wherein the valve body A pressure plate supporting a cylinder group consisting of a first cylinder and a second cylinder arranged along a direction; a valve plate that reciprocates in a direction toward and away from a plate; and a first valve plate that is provided on the pressure plate and communicates with a space on the side of the pressure plate from the piston in the first cylinder and the second cylinder. and a second air application port communicating with a space on the valve plate side of the piston in the first cylinder and the second cylinder , wherein the air is applied from the first air application port. an air circuit for moving the piston in a direction in which the valve plate moves away from the pressure plate by moving the piston in a direction in which the valve plate approaches the pressure plate by air applied from the second application port; , provided in the air circuit for regulating the application of air applied from the second air application port to the first cylinder among the cylinder group , and an air regulation mechanism that does not regulate application of applied air .

According to the valve body and the vacuum gate valve of the present invention, it is possible to reduce impact noise and vibration that occur when the gate opening is opened.

Further, according to the valve body and the vacuum gate valve according to the present invention, it is possible to suppress the generation of foreign matter due to deterioration of the O-ring.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory diagram (Part 1) showing the configuration of a vacuum gate valve according to an embodiment of the present invention; It is explanatory drawing (2) which shows the structure of the vacuum gate valve of embodiment concerning this invention. FIG. 4 is an explanatory diagram showing the configuration of an elevation drive mechanism; FIG. 2 is an explanatory diagram (part 1) showing the configuration of the valve body; FIG. 2 is an explanatory diagram (part 2) showing the configuration of the valve body; FIG. 4 is an explanatory diagram (Part 1) showing the basic operation of the valve body; FIG. 11 is an explanatory diagram (Part 2) showing the basic operation of the valve body; 1 is an explanatory diagram (part 1) showing the configuration of an air regulating mechanism of an embodiment according to the present invention; FIG. FIG. 2 is an explanatory diagram (part 2) showing the configuration of the air regulating mechanism of the embodiment according to the present invention; FIG. 4 is an explanatory diagram (Part 1) showing the operation of the valve body of the embodiment according to the present invention; It is explanatory drawing (2) which shows operation|movement of the valve body of embodiment concerning this invention.

Preferred embodiments of the vacuum gate valve according to the present invention will be described in detail below with reference to the accompanying drawings.

(Configuration of vacuum gate valve)
First, the configuration of the vacuum gate valve of the embodiment according to the present invention will be described. 1 and 2 are explanatory diagrams showing the configuration of a vacuum gate valve according to an embodiment of the invention. FIG. 1 shows the appearance of a vacuum gate valve according to an embodiment of the invention. In FIG. 2, the vacuum gate valve of the embodiment according to the present invention is partially exploded to show main components.

As shown in FIGS. 1 and 2, the vacuum gate valve 100 according to the embodiment of the invention includes a seal portion 110 and an elevating portion 120. As shown in FIG. The seal portion 110 includes a valve case 111 and a valve body 211 . The valve box 111 is a flat, hollow box having a rectangular parallelepiped outer shape, and is provided with an opening that opens one of six sides forming the rectangular parallelepiped shape.

The opening is closed by a bonnet flange 212 . An O-ring 213 is provided between the opening and the bonnet flange 212 . Thereby, the opening and the bonnet flange 212 are sealed. The valve body 211 is housed within the space formed by the valve body 111 and the bonnet flange 212 .

A top plate 112 is provided in the valve box 111 at a position facing the bonnet flange 212 that closes the opening. The top plate 112 has a rectangular plate shape surrounded by a pair of long sides and a pair of short sides. Plate-shaped partition walls 113 are connected to a pair of long sides of the top plate 112 . Side walls 114 each having a plate shape are connected to a pair of short sides of the top plate 112 .

The plate surface of the top plate 112 and the plate surface of each partition wall 113 , and the plate surface of the top plate 112 and the plate surface of each side wall 114 form right angles. Further, the plate surface of each partition 113 and the plate surface of each side wall 114 form a right angle. Hereinafter, the direction in which the bonnet flange 212 and the top plate 112 face each other is defined as the height direction, the direction in which the pair of side walls 114 face each other is defined as the width direction, and the direction in which the pair of partition walls 113 face each other is defined as the depth direction.

Each partition wall 113 in the valve body 111 is provided with a gate opening 115 extending through each partition wall 113 in the plate thickness direction with the width direction as the longitudinal direction. The gate opening 115 provided in the partition wall 113 on the front side and the gate opening portion 115 provided in the partition wall 113 on the back side face each other along the depth direction.

The valve body 211 includes a valve plate 214 and a seal driving portion 215 , and has a first position positioned between the pair of gate openings 115 and a second position retracted from between the pair of gate openings 115 . is reciprocally movable between the position of When the valve body 211 is positioned at the first position, the valve plate 214 faces the gate opening 115 provided in the partition wall 113 on the front side. When the valve body 211 is positioned at the first position, the valve plate 214 is brought into contact with the partition wall 113 on the front side so that the gate opening 115 provided in the partition wall 113 on the front side is opened to the valve plate 214 . releasably closed by

The valve plate 214 is realized by an elongated plate-like member whose longitudinal direction is the width direction. A dust cover 216 is provided on the upper edge of the valve plate 214 . The dust cover 216 prevents foreign matter such as dust that falls due to gravity from adhering to the cylinder (see FIG. 4) arranged below the dust cover 216 .

An O-ring 217 is provided on the peripheral edge of the valve plate 214 at a position facing the partition wall 113 on the front side. Since the O-ring 217 is provided on the valve plate 214 , the valve plate 214 and the front partition wall 113 can be sealed when the valve plate 214 is in contact with the front partition wall 113 . Hereinafter, the position of the valve plate 214 that closes the gate opening 115 will be described as the closed position, and the position of the valve plate 214 that opens the gate opening 115 will be described as the open position.

The valve body 211 is connected to the lifting section 120 . The lifting section 120 includes a casing 121 that houses a lifting drive mechanism (see FIG. 3) that reciprocates the valve body 211 . The lift drive mechanism has a lift rod 222 , and the valve body 211 is connected to the lift rod 222 . The elevation unit 120 reciprocates the valve body 211 between the first position and the second position by an elevation drive mechanism.

(Structure of lifting drive mechanism)
Next, the configuration of the lifting drive mechanism will be described. FIG. 3 is an explanatory diagram showing the configuration of the lifting drive mechanism. As shown in FIG. 3, the lift drive mechanism 300 includes an air cylinder 301, a shaft 302, a bellows unit 303, and the like. The lift drive mechanism 300 also includes an air compressor (not shown).

The air cylinder 301 includes a cylindrical cylinder tube 304 and a rod-shaped piston rod 305 whose longitudinal direction is the axial direction of the cylinder tube 304 . Cylinder tube 304 and piston rod 305 are provided so as to be able to relatively reciprocate along the axial direction. The air cylinder 301 expands and contracts by reciprocating the piston rod 305 along the axial direction with air (compressed air) supplied to the cylinder tube 304 . Shaft 302 supports seal portion 110 .

The bellows unit 303 has an extendable metal tube 306 and accommodates the lifting rod 222 inside. The elevating rod 222 is flexible and expands and contracts in conjunction with the expansion and contraction of the air cylinder 301 . Inside the lifting rod 222, a through hole (not shown) is formed along the axis.

The lifting rod 222 passes through the bonnet flange 212 , and the through hole of the lifting rod 222 is connected to the seal driving portion 215 . Air (compressed air) is applied to the through-hole of the lifting rod 222 when the valve body 211 opens and closes the gate opening 115 in the fully raised state of the air cylinder 301 .

The bellows unit 303 expands and contracts the tube 306 following the expansion and contraction of the elevating rod 222 interlocking with the expansion and contraction of the air cylinder 301 while keeping the inside of the tube 306 vacuum. The valve body 211 reciprocates between the first position and the second position in accordance with the extension and contraction of the elevating rod 222, and is driven by the seal driving section 215 while positioned at the first position. to close or open the gate opening 115 .

(Configuration of valve body 211)
Next, the configuration of the valve body 211 will be described in detail. 4A and 4B are explanatory diagrams showing the configuration of the valve body 211. FIG. As shown in FIG. 4A, the valve plate 214 in the valve body 211 has a plurality of blank flanges 401 arranged along the longitudinal direction. The blank flange 401 seals, via O-rings, a plurality of through-holes passing through the valve plate 214 in the plate thickness direction.

The seal driving portion 215 in the valve body 211 has a pressure plate 402 realized by an elongated plate-like member one size larger than the valve plate 214 . Pressure plate 402 supports a plurality of cylinders 403 . Each of the plurality of cylinders 403 has a cylinder body 404 and a piston 405 . A plurality of cylinders 403 are arranged along the length of the pressure plate 402 .

Cylinder body 404 is fixed to pressure plate 402 and forms a space (see FIGS. 5 and 6) for housing piston 405 between pressure plate 402 and pressure plate 402 . The piston 405 is provided to reciprocate along the plate thickness direction of the pressure plate 402 in the space formed between the cylinder body 404 and the pressure plate 402 . In this embodiment, cylinder 403 is formed by a portion of pressure plate 402 , cylinder body 404 and piston 405 .

One end in the axial direction of each piston 405 is connected to the side of the valve plate 214 opposite to the blank flange 401 . Therefore, when the piston 405 reciprocates along the plate thickness direction of the pressure plate 402 , the valve plate 214 reciprocates along the direction of contacting and separating from the pressure plate 402 in conjunction with the reciprocating motion of the piston 405 . . Valve plate 214 is positioned in a closed position when it is furthest away from pressure plate 402 and is positioned in an open position when it is closest to pressure plate 402 .

The pressure plate 402 is provided with a first application port 406 and a second application port 407, as shown in FIG. 4B. The first application port 406 and the second application port 407 each extend in the lateral direction of the pressure plate 402 (the direction parallel to the arrangement direction of the plurality of cylinders 403 ) inside the pressure plate 402 , and the cylinder main body 404 and pressure plate 402 .

Also, the first application port 406 and the second application port 407 communicate with the through holes of the lifting rod 222 respectively. Specifically, the first application port 406 communicates with the through-hole of the lifting rod 222 via an opening 406 a that opens toward the outside of the pressure plate 402 . The second application port 407 communicates with the through-hole of the lifting rod 222 via an opening 407a that opens toward the outside of the pressure plate 402 .

An air compressor (not shown) is connected to the first application port 406 via the through hole of the lifting rod 222 and the opening 406a. An air compressor (not shown) is connected to the second application port 407 via the through hole of the lifting rod 222 and the opening 407a. The same air compressor can be used as the air compressor connected to the first application port 406 and the air compressor connected to the second application port 407 .

In the valve element 214 of this embodiment, the first application port 406, the space on the pressure plate 402 side of the piston 405, the space on the cylinder body 404 side of the piston 405, and the second application port 407 provide the can be realized.

The air circuit guides the air applied from the first air application port 406 to the space on the pressure plate 402 side of the piston 405 and pushes it out through the cylinder 403 to the second air application port 407 . Also, the air circuit guides the air applied from the second air application port 407 to the space on the side of the cylinder body 404 from the piston 405 and pushes it out through the cylinder 403 to the first air application port 406 .

Between the first air supply port 406 and the plurality of cylinders 403, the air circuit has a manifold shape with a plurality of branches so as to distribute the air applied from the first air application port 406 to the plurality of cylinders 403. . Further, the air circuit has a manifold shape branched into a plurality of parts between the second air supply port 407 and the plurality of cylinders 403 so as to distribute the air applied from the second air supply port 407 to the plurality of cylinders 403 respectively. form.

As a result, the air applied from the first air supply port 406 is distributed to the plurality of cylinders 403, then collected again and discharged from the second air supply port 407 to the outside of the air circuit. Similarly, the air applied from the second air supply port 407 is distributed to the plurality of cylinders 403, gathered again, and discharged from the first air application port 406 to the outside of the air circuit.

(Basic operation of the valve body 211)
Next, the basic operation of the valve body 211 will be explained. 5 and 6 are explanatory diagrams showing the basic operation of the valve body 211. FIG. 5 and 6, reference numeral 501 denotes an O-ring that seals between the inner peripheral surface of the cylinder body 404 and the outer peripheral surface of the piston 405. As shown in FIG. 5 and 6, reference numeral 502 indicates part of the air circuit.

When air is applied from the first application port 406 in the air circuit, the piston 405 in the cylinder 403 is urged by the air introduced between the piston 405 and the pressure plate 402 from the first application port 406, As shown in FIG. 5, valve plate 214 moves away from pressure plate 402 . In this way, the air that is applied from the first application port 406 and guided to each space formed between the piston 405 and the pressure plate 402 is directed to move the valve plate 214 away from the pressure plate 402 . is pushed out to the second application port 407 while moving the .

Further, when air is applied from the second application port 407, the piston 405 in the cylinder 403 is urged by the air introduced from the second application port 407 between the piston 405 and the cylinder body 404. 6, valve plate 214 moves toward pressure plate 402 . In this way, the air that is applied from the second application port 407 and guided to each space formed between the cylinder body 404 and the pressure plate 402 moves the valve plate 214 closer to the pressure plate 402 . is pushed out to the first application port 406 while moving .

In this embodiment, some of the plurality of cylinders 403 in the valve body 211 that performs the basic operation described above are provided with the air regulating mechanism of the embodiment according to the present invention (see FIG. 7). and FIG. 8). The air regulation mechanism regulates the application of air to some cylinders 403 of the plurality of cylinders 403 so that the air applied from the second application port 407 is not applied to the cylinders 403 . .

(Configuration of air regulation mechanism)
Next, the configuration of the air regulating mechanism of the embodiment according to the invention will be explained. 7 and 8 are explanatory diagrams showing the configuration of the air regulating mechanism of the embodiment according to the invention. As shown in FIGS. 7 and 8, the air regulating mechanism 700 has a closing plug 702 housed in a movement space 701. As shown in FIGS.

The movement space 701 includes a cylinder-side opening 703 communicating with some of the cylinders 403 and an application port-side opening 704 communicating with the second application port 407 . The stop plug 702 is positioned within the movement space 701 between a regulated position at which air is restricted from flowing out from the movement space 701 to the cylinder 403 by closing the cylinder-side opening 703, and a release position other than the regulated position. is movably provided in the

The air regulating mechanism 700 includes a regulating member 705 that separates the closing plug 702 from the application port side opening 704 . The restricting member 705 can be implemented by, for example, a tension spring. By providing the regulating member 705, the closure plug 702 is prevented from closing the application port side opening 704, and when air is applied from the first application port 406, the flow of the air is blocked by the closure plug 702. This prevents the valve plate 214 from moving away from the pressure plate 402, thereby reliably moving the piston 405.

The air regulation mechanism 700 is provided in each of the cylinders 403 provided along the length direction of the pressure plate 402, except for the cylinders 403 at both ends in the length direction. Specifically, for example, when the seal drive unit 215 has seven cylinders 403 , the air regulation mechanism 700 is preferably provided in an air circuit that communicates with the central three cylinders 403 .

(Operation of valve body 211)
Next, the operation of the valve body 211 of the embodiment according to this invention will be explained. 9 and 10 are explanatory diagrams showing the operation of the valve body 211 of the embodiment according to this invention. When the valve body 211 is driven by the elevation drive mechanism 300 and positioned at the first position, it is possible to apply air from the first application port 406 to the air circuit.

Air applied to the air circuit from the first application port 406 is guided between the piston 405 and the pressure plate 402 in each cylinder 403 . The piston 405 in each cylinder 403 is biased by air guided between the piston 405 and the pressure plate 402 to move the valve plate 214 away from the pressure plate 402 .

In the air regulating mechanism 700 provided between the cylinder 403 and the second application port 407, the closing plug 702 is biased by the air applied from the first application port 406 and passed through the cylinder 403, Positioned in the open position. Since the closing plug 702 is separated from the application port side opening 704 by the regulating member 705, the cylinder side opening 703 is always open.

Therefore, even in the cylinder 403 in which the air regulation mechanism 700 is provided between the second application port 407 and the air introduced between the piston 405 and the pressure plate 402, the piston 405 is urged and the valve is closed. Piston 405 can be moved in a direction in which plate 214 moves away from pressure plate 402 .

Thus, when air is applied to the air circuit from the first application port 406 , the pistons 405 in all the cylinders 403 move in the direction in which the valve plate 214 separates from the pressure plate 402 . As a result, as shown in FIG. 9, the valve plate 214 is evenly urged over its length by the plurality of cylinders 403 and comes into contact with the partition wall 113 on the front side to be positioned at the closed position. As a result, the gate opening 115 provided in the partition wall 113 on the front side can be closed.

With the valve plate 214 in contact with the partition wall 113 on the front side, when air is applied to the air circuit from the second air application port 407 , the pressure between the cylinders 403 and the second air application port 407 is increased. In the cylinders 403 not provided with the air regulation mechanism 700 , the air applied to the air circuit from the second air supply port 407 is guided between the piston 405 and the cylinder body 404 in each cylinder 403 .

As a result, the pistons 405 in the cylinders 403 that are not provided with the air regulation mechanism 700 between them and the second application port 407 are urged by the air guided between the pistons 405 and the cylinder bodies 404, Valve plate 214 moves toward pressure plate 402, as indicated by the arrow in FIG. When the piston 405 moves in the direction in which the valve plate 214 approaches the pressure plate 402, the pressing force pressing the valve plate 214 against the front partition wall 113 is released.

Here, in the air regulation mechanism 700 provided between the cylinder 403 and the second application port 407, the closing plug 702 is positioned at the regulation position by the air applied from the second application port 407 to the air circuit. , the cylinder-side opening 703 is closed. Therefore, among the plurality of cylinders 403, some of the cylinders 403 provided with the air regulating mechanism 700 between them and the second air application port 407 have air applied to the air circuit from the second air application port 407. is not applied. As a result, the pistons 405 of some of the plurality of cylinders 403 having the air regulating mechanism 700 between them and the second application port 407 have their valve plates 214 on the partition wall 113 on the front side. Keep pressing.

In this way, the pistons 405 in some cylinders 403 maintain the state of pressing the valve plate 214 against the front side partition wall 113, and the piston 405 in the remaining cylinders 403 presses the valve plate 214 against the front side partition wall 113. is released, a difference can be generated in the force for pressing the valve plate 214 against the partition wall 113 on the front side in the longitudinal direction of the valve plate 214 .

In this state, when an external force is applied to the valve plate 214 to separate the valve plate 214 from the partition wall 113, the valve plate 214 and the partition wall 113 are moved to a position where the force pressing the valve plate 214 against the partition wall 113 is small. pulled away from As a result, the force applied to the O-ring can be reduced compared to the case where the valve plate 214 and the partition wall 113 are evenly separated over the entire length of the valve plate 214 . As a result, it is possible to reduce impact noise and vibration that occur when the gate opening 115 is opened.

In the valve body 211, the air is applied from the second application port 407 to some of the cylinders 403 arranged along one direction, other than the cylinder 403 arranged at the end. By restricting, the valve plate 214 and the partition wall 113 on the front side are separated from both end sides in the arrangement direction of the cylinder 403 . This makes it easier to separate the valve plate 214 from the partition wall 113 on the front side than in the case of restricting the application of air from the second air supply port 407 to the cylinders 403 at both ends in the arrangement direction of the cylinders 403 .

As a result, impact noise and vibration generated when the gate opening 115 is opened can be reliably reduced. In addition, deterioration of the O-ring can be suppressed, and foreign matter generated due to chipping of the deteriorated O-ring can be suppressed from scattering.

In the valve body 211, the air circuit is divided into a plurality of parts for each cylinder 403 between the first application port 406 and the second application port 407, and is assembled again. The cylinder 403 provided with the air regulating mechanism 700 between the cylinder 403 and the port 407 communicates with the other cylinder 403 via an air circuit on the first application port 406 side of the cylinder 403 . Therefore, even when the cylinder-side opening 703 is closed by the air regulation mechanism 700, the cylinder 403 provided with the air regulation mechanism 700 between it and the second application port 407 does not maintain a perfect vacuum.

As a result, even when the pistons 405 of some of the cylinders 403 are kept in a state of pressing the valve plate 214 against the partition wall 113 by the air regulating mechanism 700, the valve plate 214 is gradually compressed from both ends in the length direction. is separated from the partition wall 113 on the front side, the force with which the piston 405 of the cylinder 403 presses the valve plate 214 against the partition wall 113 on the front side weakens. As a result, the valve plate 214 can be smoothly peeled off from the partition wall 113 on the front side without applying a large force to the O-ring. As a result, it is possible to reduce impact noise and vibration that occur when the gate opening 115 is opened.

As described above, the valve body 211 of the embodiment according to the present invention is the valve body 211 that opens and closes the gate opening 115 provided in the valve body 111 of the vacuum gate valve 100. A pressure plate 402 that supports a plurality of arranged cylinders 403 , a valve plate 214 that reciprocates in a direction toward and away from the pressure plate 402 in conjunction with the operation of a piston 405 provided in each of the plurality of cylinders 403 , and the pressure plate 402 . A first application port 406 communicated with a space on the pressure plate 402 side of the plurality of cylinders 403 from the piston 405 , and a first application port 406 communicated with a space on the valve plate 211 side of the piston 405 in the plurality of cylinders 403 . The air applied from the first application port 406 moves the piston 405 in the direction in which the valve plate 211 separates from the pressure plate 402, and the air is applied from the second application port 407. an air circuit for moving the piston 405 in the direction in which the valve plate 211 approaches the pressure plate 402 by the applied air; and an air regulating mechanism 700 for regulating the application of air applied from.

According to the valve body 211 of the embodiment according to this invention, the air applied from the second air application port 407 is applied only to the remaining cylinders 403 other than some of the cylinders 403 . Therefore, the pistons 405 in some of the cylinders 403 maintain the state in which the valve plate 214 is in contact with the partition wall 113, and the pistons 405 in the remaining cylinders 403 are caused to Valve plate 214 moves toward pressure plate 402 . This makes it possible to create a difference in the force that presses the valve plate 214 against the partition wall 113 on the front side in the longitudinal direction of the valve plate 214 .

In this state, when a force is applied to the valve plate 214 to urge the valve plate 214 toward the pressure plate 402 , the valve plate 214 and the front partition wall 113 move the valve plate 214 toward the front partition wall 113 . is pulled away from the position where the pressing force is small, that is, the position corresponding to the remaining cylinder 403 to which the air from the second application port 407 is applied. As a result, the force applied to the O-ring can be reduced compared to the case where the force for separating the valve plate 214 from the partition wall 113 on the front side is evenly applied to the entire valve plate 214, and the force generated when the gate opening 115 is opened can be reduced. impact noise and vibration can be reduced.

In addition, according to the valve body 211 of the embodiment according to the present invention, the force applied to the O-ring is reduced compared to the case where the force that separates the valve plate 214 from the partition wall 113 on the front side is evenly applied to the entire valve plate 214. By reducing the size, deterioration of the O-ring provided between the valve plate 214 and the partition wall 113 on the front side can be suppressed. As a result, it is possible to suppress the occurrence of foreign matter such as chipping of the deteriorated O-ring due to the deterioration of the O-ring. Furthermore, it is possible to suppress scattering of foreign matter generated due to deterioration of the O-ring.

The air regulating mechanism 700 itself does not apply a force to separate the valve plate 214 from the front partition wall 113, but a force (restoring force) to move the piston 405 in the cylinder 403 so that the valve plate 214 is positioned at the open position. does not cause it. That is, the air regulating mechanism 700 operates using the air applied from the second application port 407 without supplying electric power or electric control signals.

As described above, according to the valve body 211 of the embodiment according to the present invention, the air regulating mechanism 700 is operated by using the air applied from the second application port 407, and air is supplied to some of the cylinders 403. By restricting the application, it is possible to create a difference in the force that presses the valve plate 214 against the partition wall 113 on the front side in the longitudinal direction of the valve plate 214 . As a result, the gate opening 115 can be opened without requiring a complicated configuration or control for adjusting the force that separates the valve plate 214 from the front side partition wall 113 so that it differs for each position in the length direction of the valve plate 214 . It is possible to reduce the impact noise and vibration that occur when

Further, in the valve body 211 of the embodiment according to the present invention, the air regulation mechanism 700 is arranged at the end of the plurality of cylinders 403 in the arrangement direction. It is characterized by regulating the application of air applied from the second application port 407 to the .

According to the valve body 211 of the embodiment according to the present invention, of the plurality of cylinders 403 arranged along one direction, the second application port 407 is provided for the cylinders 403 other than the cylinder 403 arranged at the end. By regulating the application of air from the valve plate 214, the valve plate 214 is moved more than when the application of air from the second air supply port 407 to the cylinder 403 arranged at the end in the length direction of the valve plate 214 is regulated. It can be made easy to separate from the partition wall 113 on the front side. As a result, the gate opening 115 can be opened smoothly, and impact noise and vibration generated when the gate opening 115 is opened can be reliably reduced.

Further, the vacuum gate valve 100 of the embodiment according to the present invention includes a valve box 111 provided with a gate opening 115 and a valve body 211 provided in the valve box 111 for opening and closing the gate opening 115. A pressure plate 402 that supports a plurality of cylinders 403 arranged along one direction, and a direction in which the valve body 211 contacts and separates from the pressure plate 402 in conjunction with the operation of a piston 405 provided in each of the plurality of cylinders 403. a valve plate 214 that reciprocates in a plurality of cylinders 403; and a second application port 407 communicating with the space closer to the valve plate 211 , and the air applied from the first application port 406 pushes the piston 405 in the direction in which the valve plate 211 separates from the pressure plate 402 . an air circuit for moving the piston 405 in a direction in which the valve plate 211 approaches the pressure plate 402 by air applied from the second application port 407; and an air regulation mechanism 700 that regulates the application of air applied from the second application port 407 to some of the cylinders 403 .

According to the vacuum gate valve 100 of the embodiment of the present invention, by opening and closing the gate opening 115 with the valve body 211, impact noise and vibration generated when opening the gate opening 115 can be reduced.

INDUSTRIAL APPLICABILITY As described above, the valve body and the vacuum gate valve according to the present invention are useful as a vacuum gate valve that isolates a vacuum or the atmosphere from the vacuum and a valve body used in the vacuum gate valve, and are particularly useful for semiconductor devices and the like. It is suitable for vacuum gate valves used in processing equipment related to the manufacture of precision equipment and valve bodies used in the vacuum gate valves.

REFERENCE SIGNS LIST 100 vacuum gate valve 110 seal portion 111 valve box 113 partition wall 115 gate opening portion 120 elevation portion 211 valve body 214 valve plate 217 O-ring 402 pressure plate 403 cylinder 404 cylinder main body 405 piston 406 first application port 407 second application port 502 Air circuit 700 Air regulation mechanism 701 Space for movement 702 Stop plug 703 Cylinder side opening 704 Application port side opening

Claims (3)

A valve body for opening and closing a gate opening provided in a valve body of a vacuum gate valve,
a pressure plate supporting a cylinder group consisting of a first cylinder and a second cylinder arranged along one direction;
a valve plate that reciprocates in a direction toward and away from the pressure plate in conjunction with the operation of the pistons provided in the first cylinder and the second cylinder ;
a first applying port provided in the pressure plate and communicating with a space on the side of the pressure plate from the piston in the first cylinder and the second cylinder; a second air application port communicating with a space on the valve plate side of the piston in the cylinder , wherein air applied from the first air application port causes the valve plate to move in a direction away from the pressure plate. an air circuit that moves a piston and moves the piston in a direction in which the valve plate approaches the pressure plate by air applied from the second application port;
provided in the air circuit for regulating the application of air applied from the second air application port to the first cylinder among the cylinder group , and applying air from the second air application port to the second cylinder; an air regulating mechanism that does not regulate application of applied air ;
A valve body characterized by comprising: 2. The valve body according to claim 1, wherein the second cylinder is arranged closer to the end than the first cylinder in the arrangement direction of the cylinder group . a valve box provided with a gate opening;
a valve body provided in the valve body for opening and closing the gate opening;
with
The valve body
a pressure plate supporting a cylinder group consisting of a first cylinder and a second cylinder arranged along one direction;
a valve plate that reciprocates in a direction toward and away from the pressure plate in conjunction with the operation of the pistons provided in the first cylinder and the second cylinder ;
a first applying port provided in the pressure plate and communicating with a space on the side of the pressure plate from the piston in the first cylinder and the second cylinder; a second air application port communicating with a space on the valve plate side of the piston in the cylinder , wherein air applied from the first air application port causes the valve plate to move in a direction away from the pressure plate. an air circuit that moves a piston and moves the piston in a direction in which the valve plate approaches the pressure plate by air applied from the second application port;
provided in the air circuit for regulating the application of air applied from the second air application port to the first cylinder among the cylinder group , and applying air from the second air application port to the second cylinder; an air regulating mechanism that does not regulate application of applied air ;
A vacuum gate valve, comprising:

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