JP5660979B2 - クライオポンプ及び極低温冷凍機 - Google Patents

クライオポンプ及び極低温冷凍機 Download PDF

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Publication number
JP5660979B2
JP5660979B2 JP2011128662A JP2011128662A JP5660979B2 JP 5660979 B2 JP5660979 B2 JP 5660979B2 JP 2011128662 A JP2011128662 A JP 2011128662A JP 2011128662 A JP2011128662 A JP 2011128662A JP 5660979 B2 JP5660979 B2 JP 5660979B2
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Japan
Prior art keywords
displacer
regenerator
low temperature
cylinder
longitudinal direction
Prior art date
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Active
Application number
JP2011128662A
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English (en)
Japanese (ja)
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JP2012255590A (ja
JP2012255590A5 (cg-RX-API-DMAC10.html
Inventor
田中　秀和
秀和 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2011128662A priority Critical patent/JP5660979B2/ja
Priority to TW101120129A priority patent/TWI490410B/zh
Priority to US13/490,889 priority patent/US20120312032A1/en
Priority to CN201210186688.8A priority patent/CN102817809B/zh
Priority to KR1020120060755A priority patent/KR101339978B1/ko
Publication of JP2012255590A publication Critical patent/JP2012255590A/ja
Publication of JP2012255590A5 publication Critical patent/JP2012255590A5/ja
Application granted granted Critical
Publication of JP5660979B2 publication Critical patent/JP5660979B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2011128662A 2011-06-08 2011-06-08 クライオポンプ及び極低温冷凍機 Active JP5660979B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011128662A JP5660979B2 (ja) 2011-06-08 2011-06-08 クライオポンプ及び極低温冷凍機
TW101120129A TWI490410B (zh) 2011-06-08 2012-06-05 Low temperature pump and very low temperature freezer
US13/490,889 US20120312032A1 (en) 2011-06-08 2012-06-07 Cryopump and cryogenic refrigerator
CN201210186688.8A CN102817809B (zh) 2011-06-08 2012-06-07 低温泵及超低温制冷机
KR1020120060755A KR101339978B1 (ko) 2011-06-08 2012-06-07 크라이오펌프 및 극저온 냉동기

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011128662A JP5660979B2 (ja) 2011-06-08 2011-06-08 クライオポンプ及び極低温冷凍機

Publications (3)

Publication Number Publication Date
JP2012255590A JP2012255590A (ja) 2012-12-27
JP2012255590A5 JP2012255590A5 (cg-RX-API-DMAC10.html) 2013-11-28
JP5660979B2 true JP5660979B2 (ja) 2015-01-28

Family

ID=47291977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011128662A Active JP5660979B2 (ja) 2011-06-08 2011-06-08 クライオポンプ及び極低温冷凍機

Country Status (5)

Country Link
US (1) US20120312032A1 (cg-RX-API-DMAC10.html)
JP (1) JP5660979B2 (cg-RX-API-DMAC10.html)
KR (1) KR101339978B1 (cg-RX-API-DMAC10.html)
CN (1) CN102817809B (cg-RX-API-DMAC10.html)
TW (1) TWI490410B (cg-RX-API-DMAC10.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6057782B2 (ja) * 2013-03-05 2017-01-11 住友重機械工業株式会社 クライオポンプ
JP6305193B2 (ja) 2013-09-17 2018-04-04 住友重機械工業株式会社 蓄冷式冷凍機、一段蓄冷器、及び二段蓄冷器
JP6440361B2 (ja) * 2014-01-29 2018-12-19 住友重機械工業株式会社 極低温冷凍機
CN106679217B (zh) * 2016-12-16 2020-08-28 复旦大学 一种机械振动隔离的液氦再凝聚低温制冷系统
JP2018127943A (ja) * 2017-02-08 2018-08-16 住友重機械工業株式会社 クライオポンプ
CN116086052A (zh) * 2022-12-06 2023-05-09 安徽万瑞冷电科技有限公司 蓄冷装置、制冷机及低温泵
GB2636985B (en) * 2023-12-19 2026-07-22 Edwards Vacuum Llc Detecting displacer position in a cryopump
GB2637351B (en) * 2024-01-22 2026-03-18 Leybold Dresden Gmbh Attachment mechanism for two-stage cold head
US20260028975A1 (en) * 2024-07-29 2026-01-29 Applied Materials, Inc. Protective coatings for cryogenic pump components in process chambers

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2966034A (en) * 1959-06-16 1960-12-27 Little Inc A Reciprocating flow gas expansion refrigeration apparatus and device embodying same
US3218815A (en) * 1964-06-17 1965-11-23 Little Inc A Cryogenic refrigeration apparatus operating on an expansible fluid and embodying a regenerator
JP3271346B2 (ja) * 1993-01-11 2002-04-02 ダイキン工業株式会社 冷凍機の再生器及びその製造方法
JPH09178278A (ja) * 1995-12-25 1997-07-11 Ebara Corp 蓄冷器
JP2000161214A (ja) 1998-11-24 2000-06-13 Applied Materials Inc クライオポンプ
DE10114207B4 (de) * 2000-03-24 2007-10-04 Kabushiki Kaisha Toshiba, Kawasaki Regenerator und Kältespeicherkühlanlage, die denselben verwendet
JP2002243294A (ja) * 2001-02-22 2002-08-28 Sumitomo Heavy Ind Ltd クライオポンプ
JP4323400B2 (ja) * 2004-09-24 2009-09-02 アイシン精機株式会社 蓄冷器及び蓄冷型冷凍機
JP2006242484A (ja) * 2005-03-03 2006-09-14 Sumitomo Heavy Ind Ltd 蓄冷材、蓄冷器及び極低温蓄冷式冷凍機
KR100706818B1 (ko) 2005-11-07 2007-04-12 박병직 크라이오 펌프
CN102099640B (zh) * 2008-05-21 2013-03-27 布鲁克机械公司 线性驱动低温冷冻机

Also Published As

Publication number Publication date
KR101339978B1 (ko) 2013-12-10
JP2012255590A (ja) 2012-12-27
CN102817809A (zh) 2012-12-12
US20120312032A1 (en) 2012-12-13
CN102817809B (zh) 2016-02-03
KR20120136298A (ko) 2012-12-18
TW201319395A (zh) 2013-05-16
TWI490410B (zh) 2015-07-01

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