JP2012255590A5 - - Google Patents

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Publication number
JP2012255590A5
JP2012255590A5 JP2011128662A JP2011128662A JP2012255590A5 JP 2012255590 A5 JP2012255590 A5 JP 2012255590A5 JP 2011128662 A JP2011128662 A JP 2011128662A JP 2011128662 A JP2011128662 A JP 2011128662A JP 2012255590 A5 JP2012255590 A5 JP 2012255590A5
Authority
JP
Japan
Prior art keywords
displacer
refrigerator
gap
cylinder
gas flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011128662A
Other languages
English (en)
Japanese (ja)
Other versions
JP5660979B2 (ja
JP2012255590A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2011128662A external-priority patent/JP5660979B2/ja
Priority to JP2011128662A priority Critical patent/JP5660979B2/ja
Priority to TW101120129A priority patent/TWI490410B/zh
Priority to KR1020120060755A priority patent/KR101339978B1/ko
Priority to CN201210186688.8A priority patent/CN102817809B/zh
Priority to US13/490,889 priority patent/US20120312032A1/en
Publication of JP2012255590A publication Critical patent/JP2012255590A/ja
Publication of JP2012255590A5 publication Critical patent/JP2012255590A5/ja
Publication of JP5660979B2 publication Critical patent/JP5660979B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011128662A 2011-06-08 2011-06-08 クライオポンプ及び極低温冷凍機 Active JP5660979B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011128662A JP5660979B2 (ja) 2011-06-08 2011-06-08 クライオポンプ及び極低温冷凍機
TW101120129A TWI490410B (zh) 2011-06-08 2012-06-05 Low temperature pump and very low temperature freezer
US13/490,889 US20120312032A1 (en) 2011-06-08 2012-06-07 Cryopump and cryogenic refrigerator
CN201210186688.8A CN102817809B (zh) 2011-06-08 2012-06-07 低温泵及超低温制冷机
KR1020120060755A KR101339978B1 (ko) 2011-06-08 2012-06-07 크라이오펌프 및 극저온 냉동기

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011128662A JP5660979B2 (ja) 2011-06-08 2011-06-08 クライオポンプ及び極低温冷凍機

Publications (3)

Publication Number Publication Date
JP2012255590A JP2012255590A (ja) 2012-12-27
JP2012255590A5 true JP2012255590A5 (cg-RX-API-DMAC10.html) 2013-11-28
JP5660979B2 JP5660979B2 (ja) 2015-01-28

Family

ID=47291977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011128662A Active JP5660979B2 (ja) 2011-06-08 2011-06-08 クライオポンプ及び極低温冷凍機

Country Status (5)

Country Link
US (1) US20120312032A1 (cg-RX-API-DMAC10.html)
JP (1) JP5660979B2 (cg-RX-API-DMAC10.html)
KR (1) KR101339978B1 (cg-RX-API-DMAC10.html)
CN (1) CN102817809B (cg-RX-API-DMAC10.html)
TW (1) TWI490410B (cg-RX-API-DMAC10.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6057782B2 (ja) * 2013-03-05 2017-01-11 住友重機械工業株式会社 クライオポンプ
JP6305193B2 (ja) 2013-09-17 2018-04-04 住友重機械工業株式会社 蓄冷式冷凍機、一段蓄冷器、及び二段蓄冷器
JP6440361B2 (ja) * 2014-01-29 2018-12-19 住友重機械工業株式会社 極低温冷凍機
CN106679217B (zh) * 2016-12-16 2020-08-28 复旦大学 一种机械振动隔离的液氦再凝聚低温制冷系统
JP2018127943A (ja) * 2017-02-08 2018-08-16 住友重機械工業株式会社 クライオポンプ
CN116086052A (zh) * 2022-12-06 2023-05-09 安徽万瑞冷电科技有限公司 蓄冷装置、制冷机及低温泵
GB2636985B (en) * 2023-12-19 2026-07-22 Edwards Vacuum Llc Detecting displacer position in a cryopump
GB2637351B (en) * 2024-01-22 2026-03-18 Leybold Dresden Gmbh Attachment mechanism for two-stage cold head
US20260028975A1 (en) * 2024-07-29 2026-01-29 Applied Materials, Inc. Protective coatings for cryogenic pump components in process chambers

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2966034A (en) * 1959-06-16 1960-12-27 Little Inc A Reciprocating flow gas expansion refrigeration apparatus and device embodying same
US3218815A (en) * 1964-06-17 1965-11-23 Little Inc A Cryogenic refrigeration apparatus operating on an expansible fluid and embodying a regenerator
JP3271346B2 (ja) * 1993-01-11 2002-04-02 ダイキン工業株式会社 冷凍機の再生器及びその製造方法
JPH09178278A (ja) * 1995-12-25 1997-07-11 Ebara Corp 蓄冷器
JP2000161214A (ja) 1998-11-24 2000-06-13 Applied Materials Inc クライオポンプ
DE10114207B4 (de) * 2000-03-24 2007-10-04 Kabushiki Kaisha Toshiba, Kawasaki Regenerator und Kältespeicherkühlanlage, die denselben verwendet
JP2002243294A (ja) * 2001-02-22 2002-08-28 Sumitomo Heavy Ind Ltd クライオポンプ
JP4323400B2 (ja) * 2004-09-24 2009-09-02 アイシン精機株式会社 蓄冷器及び蓄冷型冷凍機
JP2006242484A (ja) * 2005-03-03 2006-09-14 Sumitomo Heavy Ind Ltd 蓄冷材、蓄冷器及び極低温蓄冷式冷凍機
KR100706818B1 (ko) 2005-11-07 2007-04-12 박병직 크라이오 펌프
CN102099640B (zh) * 2008-05-21 2013-03-27 布鲁克机械公司 线性驱动低温冷冻机

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