TWI490410B - Low temperature pump and very low temperature freezer - Google Patents
Low temperature pump and very low temperature freezer Download PDFInfo
- Publication number
- TWI490410B TWI490410B TW101120129A TW101120129A TWI490410B TW I490410 B TWI490410 B TW I490410B TW 101120129 A TW101120129 A TW 101120129A TW 101120129 A TW101120129 A TW 101120129A TW I490410 B TWI490410 B TW I490410B
- Authority
- TW
- Taiwan
- Prior art keywords
- displacer
- regenerator
- low temperature
- cylinder
- working gas
- Prior art date
Links
- 238000001816 cooling Methods 0.000 claims description 129
- 239000000463 material Substances 0.000 claims description 25
- 239000011232 storage material Substances 0.000 claims description 22
- 230000001172 regenerating effect Effects 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- 239000003990 capacitor Substances 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 104
- 230000005855 radiation Effects 0.000 description 43
- 230000002093 peripheral effect Effects 0.000 description 15
- 239000001307 helium Substances 0.000 description 14
- 229910052734 helium Inorganic materials 0.000 description 14
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 14
- 238000007789 sealing Methods 0.000 description 9
- 230000004308 accommodation Effects 0.000 description 7
- 239000003507 refrigerant Substances 0.000 description 7
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 4
- 238000005057 refrigeration Methods 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 210000003423 ankle Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
- F04B37/085—Regeneration of cryo-pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011128662A JP5660979B2 (ja) | 2011-06-08 | 2011-06-08 | クライオポンプ及び極低温冷凍機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201319395A TW201319395A (zh) | 2013-05-16 |
| TWI490410B true TWI490410B (zh) | 2015-07-01 |
Family
ID=47291977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101120129A TWI490410B (zh) | 2011-06-08 | 2012-06-05 | Low temperature pump and very low temperature freezer |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20120312032A1 (cg-RX-API-DMAC10.html) |
| JP (1) | JP5660979B2 (cg-RX-API-DMAC10.html) |
| KR (1) | KR101339978B1 (cg-RX-API-DMAC10.html) |
| CN (1) | CN102817809B (cg-RX-API-DMAC10.html) |
| TW (1) | TWI490410B (cg-RX-API-DMAC10.html) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6057782B2 (ja) * | 2013-03-05 | 2017-01-11 | 住友重機械工業株式会社 | クライオポンプ |
| JP6305193B2 (ja) | 2013-09-17 | 2018-04-04 | 住友重機械工業株式会社 | 蓄冷式冷凍機、一段蓄冷器、及び二段蓄冷器 |
| JP6440361B2 (ja) * | 2014-01-29 | 2018-12-19 | 住友重機械工業株式会社 | 極低温冷凍機 |
| CN106679217B (zh) * | 2016-12-16 | 2020-08-28 | 复旦大学 | 一种机械振动隔离的液氦再凝聚低温制冷系统 |
| JP2018127943A (ja) * | 2017-02-08 | 2018-08-16 | 住友重機械工業株式会社 | クライオポンプ |
| CN116086052A (zh) * | 2022-12-06 | 2023-05-09 | 安徽万瑞冷电科技有限公司 | 蓄冷装置、制冷机及低温泵 |
| GB2636985B (en) * | 2023-12-19 | 2026-07-22 | Edwards Vacuum Llc | Detecting displacer position in a cryopump |
| GB2637351B (en) * | 2024-01-22 | 2026-03-18 | Leybold Dresden Gmbh | Attachment mechanism for two-stage cold head |
| US20260028975A1 (en) * | 2024-07-29 | 2026-01-29 | Applied Materials, Inc. | Protective coatings for cryogenic pump components in process chambers |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW472113B (en) * | 1998-11-24 | 2002-01-11 | Applied Materials Inc | Cryopump |
| JP2002243294A (ja) * | 2001-02-22 | 2002-08-28 | Sumitomo Heavy Ind Ltd | クライオポンプ |
| JP2006090648A (ja) * | 2004-09-24 | 2006-04-06 | Aisin Seiki Co Ltd | 蓄冷器及び蓄冷型冷凍機 |
| US20110126554A1 (en) * | 2008-05-21 | 2011-06-02 | Brooks Automation Inc. | Linear Drive Cryogenic Refrigerator |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2966034A (en) * | 1959-06-16 | 1960-12-27 | Little Inc A | Reciprocating flow gas expansion refrigeration apparatus and device embodying same |
| US3218815A (en) * | 1964-06-17 | 1965-11-23 | Little Inc A | Cryogenic refrigeration apparatus operating on an expansible fluid and embodying a regenerator |
| JP3271346B2 (ja) * | 1993-01-11 | 2002-04-02 | ダイキン工業株式会社 | 冷凍機の再生器及びその製造方法 |
| JPH09178278A (ja) * | 1995-12-25 | 1997-07-11 | Ebara Corp | 蓄冷器 |
| DE10114207B4 (de) * | 2000-03-24 | 2007-10-04 | Kabushiki Kaisha Toshiba, Kawasaki | Regenerator und Kältespeicherkühlanlage, die denselben verwendet |
| JP2006242484A (ja) * | 2005-03-03 | 2006-09-14 | Sumitomo Heavy Ind Ltd | 蓄冷材、蓄冷器及び極低温蓄冷式冷凍機 |
| KR100706818B1 (ko) | 2005-11-07 | 2007-04-12 | 박병직 | 크라이오 펌프 |
-
2011
- 2011-06-08 JP JP2011128662A patent/JP5660979B2/ja active Active
-
2012
- 2012-06-05 TW TW101120129A patent/TWI490410B/zh active
- 2012-06-07 US US13/490,889 patent/US20120312032A1/en not_active Abandoned
- 2012-06-07 CN CN201210186688.8A patent/CN102817809B/zh active Active
- 2012-06-07 KR KR1020120060755A patent/KR101339978B1/ko active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW472113B (en) * | 1998-11-24 | 2002-01-11 | Applied Materials Inc | Cryopump |
| JP2002243294A (ja) * | 2001-02-22 | 2002-08-28 | Sumitomo Heavy Ind Ltd | クライオポンプ |
| JP2006090648A (ja) * | 2004-09-24 | 2006-04-06 | Aisin Seiki Co Ltd | 蓄冷器及び蓄冷型冷凍機 |
| US20110126554A1 (en) * | 2008-05-21 | 2011-06-02 | Brooks Automation Inc. | Linear Drive Cryogenic Refrigerator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5660979B2 (ja) | 2015-01-28 |
| KR101339978B1 (ko) | 2013-12-10 |
| JP2012255590A (ja) | 2012-12-27 |
| CN102817809A (zh) | 2012-12-12 |
| US20120312032A1 (en) | 2012-12-13 |
| CN102817809B (zh) | 2016-02-03 |
| KR20120136298A (ko) | 2012-12-18 |
| TW201319395A (zh) | 2013-05-16 |
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