CN102817809B - 低温泵及超低温制冷机 - Google Patents

低温泵及超低温制冷机 Download PDF

Info

Publication number
CN102817809B
CN102817809B CN201210186688.8A CN201210186688A CN102817809B CN 102817809 B CN102817809 B CN 102817809B CN 201210186688 A CN201210186688 A CN 201210186688A CN 102817809 B CN102817809 B CN 102817809B
Authority
CN
China
Prior art keywords
displacer
temperature
low
storage apparatus
cold storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201210186688.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN102817809A (zh
Inventor
田中秀和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Publication of CN102817809A publication Critical patent/CN102817809A/zh
Application granted granted Critical
Publication of CN102817809B publication Critical patent/CN102817809B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CN201210186688.8A 2011-06-08 2012-06-07 低温泵及超低温制冷机 Active CN102817809B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP128662/2011 2011-06-08
JP2011128662A JP5660979B2 (ja) 2011-06-08 2011-06-08 クライオポンプ及び極低温冷凍機

Publications (2)

Publication Number Publication Date
CN102817809A CN102817809A (zh) 2012-12-12
CN102817809B true CN102817809B (zh) 2016-02-03

Family

ID=47291977

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210186688.8A Active CN102817809B (zh) 2011-06-08 2012-06-07 低温泵及超低温制冷机

Country Status (5)

Country Link
US (1) US20120312032A1 (cg-RX-API-DMAC10.html)
JP (1) JP5660979B2 (cg-RX-API-DMAC10.html)
KR (1) KR101339978B1 (cg-RX-API-DMAC10.html)
CN (1) CN102817809B (cg-RX-API-DMAC10.html)
TW (1) TWI490410B (cg-RX-API-DMAC10.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6057782B2 (ja) * 2013-03-05 2017-01-11 住友重機械工業株式会社 クライオポンプ
JP6305193B2 (ja) 2013-09-17 2018-04-04 住友重機械工業株式会社 蓄冷式冷凍機、一段蓄冷器、及び二段蓄冷器
JP6440361B2 (ja) * 2014-01-29 2018-12-19 住友重機械工業株式会社 極低温冷凍機
CN106679217B (zh) * 2016-12-16 2020-08-28 复旦大学 一种机械振动隔离的液氦再凝聚低温制冷系统
JP2018127943A (ja) * 2017-02-08 2018-08-16 住友重機械工業株式会社 クライオポンプ
CN116086052A (zh) * 2022-12-06 2023-05-09 安徽万瑞冷电科技有限公司 蓄冷装置、制冷机及低温泵
GB2636985B (en) * 2023-12-19 2026-07-22 Edwards Vacuum Llc Detecting displacer position in a cryopump
GB2637351B (en) * 2024-01-22 2026-03-18 Leybold Dresden Gmbh Attachment mechanism for two-stage cold head
US20260028975A1 (en) * 2024-07-29 2026-01-29 Applied Materials, Inc. Protective coatings for cryogenic pump components in process chambers

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1319753A (zh) * 2000-03-24 2001-10-31 东芝株式会社 蓄冷器及使用该蓄冷器的蓄冷式冷冻机

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2966034A (en) * 1959-06-16 1960-12-27 Little Inc A Reciprocating flow gas expansion refrigeration apparatus and device embodying same
US3218815A (en) * 1964-06-17 1965-11-23 Little Inc A Cryogenic refrigeration apparatus operating on an expansible fluid and embodying a regenerator
JP3271346B2 (ja) * 1993-01-11 2002-04-02 ダイキン工業株式会社 冷凍機の再生器及びその製造方法
JPH09178278A (ja) * 1995-12-25 1997-07-11 Ebara Corp 蓄冷器
JP2000161214A (ja) 1998-11-24 2000-06-13 Applied Materials Inc クライオポンプ
JP2002243294A (ja) * 2001-02-22 2002-08-28 Sumitomo Heavy Ind Ltd クライオポンプ
JP4323400B2 (ja) * 2004-09-24 2009-09-02 アイシン精機株式会社 蓄冷器及び蓄冷型冷凍機
JP2006242484A (ja) * 2005-03-03 2006-09-14 Sumitomo Heavy Ind Ltd 蓄冷材、蓄冷器及び極低温蓄冷式冷凍機
KR100706818B1 (ko) 2005-11-07 2007-04-12 박병직 크라이오 펌프
CN102099640B (zh) * 2008-05-21 2013-03-27 布鲁克机械公司 线性驱动低温冷冻机

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1319753A (zh) * 2000-03-24 2001-10-31 东芝株式会社 蓄冷器及使用该蓄冷器的蓄冷式冷冻机

Also Published As

Publication number Publication date
JP5660979B2 (ja) 2015-01-28
KR101339978B1 (ko) 2013-12-10
JP2012255590A (ja) 2012-12-27
CN102817809A (zh) 2012-12-12
US20120312032A1 (en) 2012-12-13
KR20120136298A (ko) 2012-12-18
TW201319395A (zh) 2013-05-16
TWI490410B (zh) 2015-07-01

Similar Documents

Publication Publication Date Title
CN102400888B (zh) 低温泵及超低温制冷机
CN102817809A (zh) 低温泵及超低温制冷机
US8157183B2 (en) Expansion valve, heat pump type refrigeration cycle apparatus, and air handling unit
JP5589193B2 (ja) 位相調節機構を有するｇ−ｍ冷凍機
KR101861832B1 (ko) 진공 공간부를 구비하는 냉장고
JP5870760B2 (ja) 四方弁とそれを備えたヒートポンプ装置
US9423160B2 (en) Regenerative refrigerator
JP2659684B2 (ja) 蓄冷器式冷凍機
US9784479B2 (en) Cryogenic refrigerator and displacer
CN102980321B (zh) 采用中继线性压缩机的多级脉管制冷机
JP5982871B2 (ja) 四方弁とそれを備えたヒートポンプ装置
JP5882110B2 (ja) 蓄冷器式冷凍機、蓄冷器
CN108253669A (zh) 多通换向装置及空调系统
JP5908324B2 (ja) 蓄冷式冷凍機
CN207454270U (zh) 压缩机组件和具有其的制冷装置
JP5754197B2 (ja) 四方弁とそれを備えたヒートポンプ装置
JPH0452468A (ja) 極低温冷凍装置
JP2001248929A (ja) 蓄冷器式冷凍機
WO2011105682A2 (ko) 극저온 냉동기
JP2010156499A (ja) 冷凍装置
CN219572351U (zh) 回热器组件、制冷系统及冰箱
JP2013147973A (ja) 圧縮機及び冷凍サイクル装置
CN216279535U (zh) 一种压差驱动式四通阀和制冷系统
CN107806415A (zh) 压缩机组件和具有其的制冷装置
CN113550886A (zh) 压缩机以及压缩循环系统

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant