JP5653782B2 - 有機発光ディスプレイ装置及びその製造方法 - Google Patents
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 29
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 18
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 8
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- 239000011733 molybdenum Substances 0.000 claims description 8
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- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 6
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 6
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- 229910052779 Neodymium Inorganic materials 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 6
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
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- 229910052741 iridium Inorganic materials 0.000 claims description 6
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 6
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims description 6
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 239000010937 tungsten Substances 0.000 claims description 6
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- 230000003287 optical effect Effects 0.000 description 8
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- JYMITAMFTJDTAE-UHFFFAOYSA-N aluminum zinc oxygen(2-) Chemical compound [O-2].[Al+3].[Zn+2] JYMITAMFTJDTAE-UHFFFAOYSA-N 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 3
- 229910001195 gallium oxide Inorganic materials 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
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- 229910004205 SiNX Inorganic materials 0.000 description 2
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- 230000002745 absorbent Effects 0.000 description 1
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Inorganic materials [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 1
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4908—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT
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Description
11 バッファ層
12 半導体層
13 第1絶縁層
14 第1金属層
15 第1透明導電層
16 第2金属層
17 第2絶縁層
18 第3金属層
19 第3絶縁層
21 有機層
21a 有機発光層
22 対向電極
114 第1画素電極
115 第2画素電極
116 第3画素電極
117a 第1開口
117b 第2開口
119 第4開口
212 活性層
212a,212b,218a,218b ソース及びドレイン領域
212c チャネル領域
214 第1ゲート電極
215 第2ゲート電極
216 第3ゲート電極
217a,217b コンタクトホール
312 下部電極
314 第1上部電極
315 第2上部電極
316 第3上部電極
317 第3開口
Claims (21)
- 基板上に形成され、半導体物質で備えられた薄膜トランジスタの活性層と、
前記基板上に形成され、不純物イオンがドーピングされた半導体物質で備えられたキャパシタの下部電極と、
前記活性層及び前記下部電極を覆うように、前記基板上に形成された第1絶縁層と、
前記第1絶縁層上に形成され、金属で備えられた第1ゲート電極、透明導電物で備えられた第2ゲート電極、及び金属で備えられた第3ゲート電極が順次に積層された薄膜トランジスタのゲート電極と、
前記第1絶縁層上に形成され、金属で備えられた第1画素電極、及び透明導電物で備えられた第2画素電極が順次に積層された画素電極と、
前記第1絶縁層上に形成され、金属で備えられた第1上部電極、及び透明導電物で備えられた第2上部電極が順次に積層されたキャパシタの上部電極と、
前記活性層と電気的に連結された薄膜トランジスタのソース及びドレイン電極と、
前記画素電極上に配され、有機発光層を備える有機層と、
前記有機層を介して前記画素電極に対向して配される対向電極と、を備える有機発光ディスプレイ装置。 - 前記第1ゲート電極、第1画素電極及び第1上部電極は、同じ金属で形成され、前記金属は、アルミニウム合金であることを特徴とする請求項1に記載の有機発光ディスプレイ装置。
- 前記アルミニウム合金は、ニッケルを含むことを特徴とする請求項2に記載の有機発光ディスプレイ装置。
- 前記金属は、80乃至200Åの厚さであることを特徴とする請求項1乃至3のいずれか一項に記載の有機発光ディスプレイ装置。
- 前記第2ゲート電極、第2画素電極及び第2上部電極は、同じ透明導電物で形成され、前記透明導電物は、ITO、IZO、ZnO、In2O3、IGO、及びAZOを含むグループから選択された少なくとも一つ以上を含むことを特徴とする請求項1乃至4のいずれか一項に記載の有機発光ディスプレイ装置。
- 前記第2画素電極上に積層され、金属で備えられた第3画素電極と、
前記第3画素電極及びゲート電極を覆うように、前記第1絶縁層上に形成され、前記第2画素電極の一部を露出させる第1開口と、前記第3画素電極の一部を露出させる第2開口と、前記第2上部電極を露出させる第3開口と、を含む第2絶縁層と、を備え、
前記ソース及びドレイン電極は、前記第2絶縁層上に形成され、前記ソース及びドレイン電極のうちいずれか一つは、前記第2開口を通じて前記第3画素電極とコンタクトされたことを特徴とする請求項1乃至5のいずれか一項に記載の有機発光ディスプレイ装置。 - 前記第3画素電極及び第3ゲート電極は、同じ金属で形成され、前記金属は、アルミニウム(Al)、白金(Pt)、パラジウム(Pd)、銀(Ag)、マグネシウム(Mg)、金(Au)、ニッケル(Ni)、ネオジム(Nd)、イリジウム(Ir)、クロム(Cr)、リチウム(Li)、カルシウム(Ca)、モリブデン(Mo)、チタン(Ti)、タングステン(W)、銅(Cu)のうち選択された一つ以上の金属を含むことを特徴とする請求項6に記載の有機発光ディスプレイ装置。
- 前記第3画素電極及び第3ゲート電極は、多層の金属層を備えることを特徴とする請求項6または7に記載の有機発光ディスプレイ装置。
- 前記第1画素電極は、前記有機発光層から放出された光を一部透過及び一部反射する半透過ミラーであることを特徴とする請求項1乃至8のいずれか一項に記載の有機発光ディスプレイ装置。
- 前記対向電極は、前記有機発光層から放出された光を反射するように備えられたことを特徴とする請求項1乃至9のいずれか一項に記載の有機発光ディスプレイ装置。
- 前記第1画素電極の端部と、前記第2画素電極の端部とは、エッチング面が同じであることを特徴とする請求項1乃至10のいずれか一項に記載の有機発光ディスプレイ装置。
- 前記第2絶縁層上に形成された第3絶縁層をさらに備え、前記第3絶縁層は、前記第1開口を通じて露出された前記前記第2画素電極の一部を露出させる第4開口を備え、前記ソース及びドレイン電極と前記第3開口を通じて露出された前記第2上部電極とを覆うことを特徴とする請求項6乃至11のいずれか一項に記載の有機発光ディスプレイ装置。
- 基板上に半導体層を形成し、前記半導体層をパターニングして薄膜トランジスタの活性層及びキャパシタの下部電極を形成する第1マスク工程と、
前記活性層及び下部電極を覆うように、基板上に第1絶縁層を形成し、前記第1絶縁層上に、第1金属層、第1透明導電層及び第2金属層を順次に積層した後にパターニングし、第1画素電極、第2画素電極及び第3画素電極が順次に積層された画素電極と、第1ゲート電極、第2ゲート電極及び第3ゲート電極が順次に積層された薄膜トランジスタのゲート電極と、第1上部電極、第2上部電極及び第3上部電極が順次に積層されたキャパシタの上部電極と、を形成する第2マスク工程と、
前記画素電極、ゲート電極及び上部電極を覆うように、前記第1絶縁層上に第2絶縁層を形成し、前記第2絶縁層をパターニングして前記第3画素電極を露出させる第1開口及び第2開口、前記活性層のソース及びドレイン領域を露出させるコンタクトホール、及び前記第3上部電極を露出させる第3開口を形成する第3マスク工程と、
前記第2絶縁層上に、前記第1開口乃至第3開口及びコンタクトホールを通じて露出された部分を覆うように、第3金属層を形成し、前記第3金属層をパターニングしてソース及びドレイン電極を形成する第4マスク工程と、
前記ソース及びドレイン電極を覆うように、前記第2絶縁層上に第3絶縁層を形成し、前記第3絶縁層をパターニングして前記第1画素電極及び前記第2画素電極が順次積層された画素電極を露出させる第4開口を形成する第5マスク工程と、を含む有機発光ディスプレイ装置の製造方法。 - 前記第2マスク工程後、前記第1ゲート電極乃至第3ゲート電極をマスクとして、前記ソース及びドレイン領域にイオン不純物をドーピングする工程がさらに含まれたことを特徴とする請求項13に記載の有機発光ディスプレイ装置の製造方法。
- 前記第4マスク工程は、前記第1開口を通じて露出された第3画素電極の部分及び前記第3開口を通じて露出された第3上部電極を除去する工程を含むことを特徴とする請求項13または14に記載の有機発光ディスプレイ装置の製造方法。
- 前記第4マスク工程後、前記第3開口を通じて露出された第2上部電極上から不純物イオンを前記下部電極にドーピングする工程がさらに含まれたことを特徴とする請求項14または15に記載の有機発光ディスプレイ装置の製造方法。
- 前記第1金属層は、アルミニウム合金で備えられたことを特徴とする請求項13乃至16のいずれか一項に記載の有機発光ディスプレイ装置の製造方法。
- 前記アルミニウム合金は、ニッケルを含むことを特徴とする請求項17に記載の有機発光ディスプレイ装置の製造方法。
- 前記第1金属層は、80乃至200Åの厚さであることを特徴とする請求項13乃至18のいずれか一項に記載の有機発光ディスプレイ装置の製造方法。
- 前記第1透明導電層は、ITO、IZO、ZnO、In2O3、IGO、及びAZOを含むグループから選択された少なくとも一つ以上を含むことを特徴とする請求項13乃至19のいずれか一項に記載の有機発光ディスプレイ装置の製造方法。
- 前記第2金属層は、アルミニウム(Al)、白金(Pt)、パラジウム(Pd)、銀(Ag)、マグネシウム(Mg)、金(Au)、ニッケル(Ni)、ネオジム(Nd)、イリジウム(Ir)、クロム(Cr)、リチウム(Li)、カルシウム(Ca)、モリブデン(Mo)、チタン(Ti)、タングステン(W)、銅(Cu)のうち選択された一つ以上の金属を含むことを特徴とする請求項13乃至20のいずれか一項に記載の有機発光ディスプレイ装置の製造方法。
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