JP5639169B2 - 暗視野検査システムおよび暗視野検査システムを構成する方法 - Google Patents

暗視野検査システムおよび暗視野検査システムを構成する方法 Download PDF

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Publication number
JP5639169B2
JP5639169B2 JP2012521696A JP2012521696A JP5639169B2 JP 5639169 B2 JP5639169 B2 JP 5639169B2 JP 2012521696 A JP2012521696 A JP 2012521696A JP 2012521696 A JP2012521696 A JP 2012521696A JP 5639169 B2 JP5639169 B2 JP 5639169B2
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cylindrical lens
inspection system
dark field
wafer
beam shaping
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JP2012533756A (ja
JP2012533756A5 (enExample
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チャオ・グオヘン
バエズ−イラバニ・メヘディ
ヤング・スコット
バスカー・クリス
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KLA Corp
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KLA Tencor Corp
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    • H10P74/203—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection

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  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2012521696A 2009-07-22 2010-07-16 暗視野検査システムおよび暗視野検査システムを構成する方法 Active JP5639169B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22771309P 2009-07-22 2009-07-22
US61/227,713 2009-07-22
PCT/US2010/042354 WO2011011291A1 (en) 2009-07-22 2010-07-16 Dark field inspection system with ring illumination

Related Child Applications (1)

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JP2014140065A Division JP6072733B2 (ja) 2009-07-22 2014-07-07 暗視野検査システムおよび方法

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JP2012533756A JP2012533756A (ja) 2012-12-27
JP2012533756A5 JP2012533756A5 (enExample) 2013-08-22
JP5639169B2 true JP5639169B2 (ja) 2014-12-10

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JP2012521696A Active JP5639169B2 (ja) 2009-07-22 2010-07-16 暗視野検査システムおよび暗視野検査システムを構成する方法
JP2014140065A Active JP6072733B2 (ja) 2009-07-22 2014-07-07 暗視野検査システムおよび方法

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US (1) US9176072B2 (enExample)
EP (1) EP2457251A4 (enExample)
JP (2) JP5639169B2 (enExample)
KR (1) KR101803109B1 (enExample)
CN (1) CN102473663B (enExample)
IL (1) IL217178A (enExample)
TW (1) TWI536012B (enExample)
WO (1) WO2011011291A1 (enExample)

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Publication number Publication date
JP6072733B2 (ja) 2017-02-01
JP2014222239A (ja) 2014-11-27
JP2012533756A (ja) 2012-12-27
KR20120052994A (ko) 2012-05-24
EP2457251A1 (en) 2012-05-30
IL217178A0 (en) 2012-02-29
CN102473663B (zh) 2016-11-09
US20110169944A1 (en) 2011-07-14
WO2011011291A1 (en) 2011-01-27
US9176072B2 (en) 2015-11-03
CN102473663A (zh) 2012-05-23
IL217178A (en) 2017-04-30
KR101803109B1 (ko) 2017-11-29
EP2457251A4 (en) 2017-11-08
TWI536012B (zh) 2016-06-01
TW201132960A (en) 2011-10-01

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