JP2012533756A5 - - Google Patents

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JP2012533756A5
JP2012533756A5 JP2012521696A JP2012521696A JP2012533756A5 JP 2012533756 A5 JP2012533756 A5 JP 2012533756A5 JP 2012521696 A JP2012521696 A JP 2012521696A JP 2012521696 A JP2012521696 A JP 2012521696A JP 2012533756 A5 JP2012533756 A5 JP 2012533756A5
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Japan
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inspection system
dark field
field inspection
beam shaping
output
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JP2012521696A
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JP5639169B2 (ja
JP2012533756A (ja
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Priority claimed from PCT/US2010/042354 external-priority patent/WO2011011291A1/en
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JP2012521696A 2009-07-22 2010-07-16 暗視野検査システムおよび暗視野検査システムを構成する方法 Active JP5639169B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22771309P 2009-07-22 2009-07-22
US61/227,713 2009-07-22
PCT/US2010/042354 WO2011011291A1 (en) 2009-07-22 2010-07-16 Dark field inspection system with ring illumination

Related Child Applications (1)

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JP2014140065A Division JP6072733B2 (ja) 2009-07-22 2014-07-07 暗視野検査システムおよび方法

Publications (3)

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JP2012533756A JP2012533756A (ja) 2012-12-27
JP2012533756A5 true JP2012533756A5 (enExample) 2013-08-22
JP5639169B2 JP5639169B2 (ja) 2014-12-10

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JP2012521696A Active JP5639169B2 (ja) 2009-07-22 2010-07-16 暗視野検査システムおよび暗視野検査システムを構成する方法
JP2014140065A Active JP6072733B2 (ja) 2009-07-22 2014-07-07 暗視野検査システムおよび方法

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JP2014140065A Active JP6072733B2 (ja) 2009-07-22 2014-07-07 暗視野検査システムおよび方法

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US (1) US9176072B2 (enExample)
EP (1) EP2457251A4 (enExample)
JP (2) JP5639169B2 (enExample)
KR (1) KR101803109B1 (enExample)
CN (1) CN102473663B (enExample)
IL (1) IL217178A (enExample)
TW (1) TWI536012B (enExample)
WO (1) WO2011011291A1 (enExample)

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