JP2014222239A5 - - Google Patents

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JP2014222239A5
JP2014222239A5 JP2014140065A JP2014140065A JP2014222239A5 JP 2014222239 A5 JP2014222239 A5 JP 2014222239A5 JP 2014140065 A JP2014140065 A JP 2014140065A JP 2014140065 A JP2014140065 A JP 2014140065A JP 2014222239 A5 JP2014222239 A5 JP 2014222239A5
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inspection system
dark field
beam shaping
field inspection
output
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JP2014140065A
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Japanese (ja)
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JP6072733B2 (ja
JP2014222239A (ja
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JP2014140065A 2009-07-22 2014-07-07 暗視野検査システムおよび方法 Active JP6072733B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US22771309P 2009-07-22 2009-07-22
US61/227,713 2009-07-22

Related Parent Applications (1)

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JP2012521696A Division JP5639169B2 (ja) 2009-07-22 2010-07-16 暗視野検査システムおよび暗視野検査システムを構成する方法

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JP2014222239A JP2014222239A (ja) 2014-11-27
JP2014222239A5 true JP2014222239A5 (enExample) 2016-12-08
JP6072733B2 JP6072733B2 (ja) 2017-02-01

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JP2012521696A Active JP5639169B2 (ja) 2009-07-22 2010-07-16 暗視野検査システムおよび暗視野検査システムを構成する方法
JP2014140065A Active JP6072733B2 (ja) 2009-07-22 2014-07-07 暗視野検査システムおよび方法

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JP2012521696A Active JP5639169B2 (ja) 2009-07-22 2010-07-16 暗視野検査システムおよび暗視野検査システムを構成する方法

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US (1) US9176072B2 (enExample)
EP (1) EP2457251A4 (enExample)
JP (2) JP5639169B2 (enExample)
KR (1) KR101803109B1 (enExample)
CN (1) CN102473663B (enExample)
IL (1) IL217178A (enExample)
TW (1) TWI536012B (enExample)
WO (1) WO2011011291A1 (enExample)

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