JP5581398B2 - リークディテクタ - Google Patents
リークディテクタ Download PDFInfo
- Publication number
- JP5581398B2 JP5581398B2 JP2012544083A JP2012544083A JP5581398B2 JP 5581398 B2 JP5581398 B2 JP 5581398B2 JP 2012544083 A JP2012544083 A JP 2012544083A JP 2012544083 A JP2012544083 A JP 2012544083A JP 5581398 B2 JP5581398 B2 JP 5581398B2
- Authority
- JP
- Japan
- Prior art keywords
- intake port
- mass spectrometer
- turbo molecular
- molecular pump
- leak
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Examining Or Testing Airtightness (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
Claims (2)
- サーチガスを検知する質量分析管と、ハウジング内に回転軸に装着された回転翼と固定翼とを交互に複数段有し、回転軸を回転駆動する駆動源を設けたターボ分子ポンプとを備え、当該ターボ分子ポンプの吸気ポートと試験体とを接続管を介して接続し、当該試験体内からサーチガスを質量分析管に導入して漏洩検知を行うリークディテクタにおいて、
前記ハウジングのうち、最も高真空側に位置する回転翼に対向する壁面に、試験体に連通する吸気ポートと質量分析管が接続される接続ポートとを相互に離隔させて開設したことを特徴とするリークディテクタ。 - 吸気ポートと接続ポートとの間のコンダクタンスが吸気ポートの実効排気速度の1/10以下となるように構成したことを特徴とする請求項1記載のリークディテクタ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012544083A JP5581398B2 (ja) | 2010-11-16 | 2011-09-29 | リークディテクタ |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010256030 | 2010-11-16 | ||
JP2010256030 | 2010-11-16 | ||
JP2012544083A JP5581398B2 (ja) | 2010-11-16 | 2011-09-29 | リークディテクタ |
PCT/JP2011/005491 WO2012066715A1 (ja) | 2010-11-16 | 2011-09-29 | リークディテクタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2012066715A1 JPWO2012066715A1 (ja) | 2014-05-12 |
JP5581398B2 true JP5581398B2 (ja) | 2014-08-27 |
Family
ID=46083669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012544083A Active JP5581398B2 (ja) | 2010-11-16 | 2011-09-29 | リークディテクタ |
Country Status (8)
Country | Link |
---|---|
US (1) | US20130199275A1 (ja) |
EP (1) | EP2642266A4 (ja) |
JP (1) | JP5581398B2 (ja) |
KR (1) | KR101456843B1 (ja) |
CN (1) | CN103189724B (ja) |
RU (1) | RU2545468C2 (ja) |
TW (1) | TWI519772B (ja) |
WO (1) | WO2012066715A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2770315B1 (fr) * | 2013-02-21 | 2021-03-31 | The Swatch Group Research and Development Ltd. | Dispositif électronique muni de moyens de détection automatique de fuite |
JP6255196B2 (ja) * | 2013-09-17 | 2017-12-27 | Dowaサーモテック株式会社 | 真空排気方法及び真空排気設備 |
CN103925385B (zh) * | 2014-04-11 | 2016-03-30 | 北京中科科仪股份有限公司 | 一种真空阀门和可切换流导真空阀门 |
US20160260594A1 (en) * | 2015-03-02 | 2016-09-08 | Bayspec, Inc. | Sample Inlet and Vacuum System for Portable Mass Spectrometer |
WO2017037842A1 (ja) * | 2015-08-31 | 2017-03-09 | 島津エミット株式会社 | ヘリウムリークディテクタ |
CN107091716A (zh) * | 2017-04-13 | 2017-08-25 | 深圳市卓誉自动化科技有限公司 | 一种用于检测电池密封性的真空氦检装置和方法 |
KR101950798B1 (ko) | 2018-03-22 | 2019-02-21 | 이승우 | 가스 탐지를 이용한 배관의 용접 부위 검사 장치 |
JP7192660B2 (ja) * | 2019-05-30 | 2022-12-20 | 株式会社島津製作所 | 真空ポンプおよびリークディテクタ |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07286928A (ja) * | 1994-04-15 | 1995-10-31 | Anelva Corp | ヘリウムリークディテクタ |
JP2655315B2 (ja) * | 1994-06-29 | 1997-09-17 | 日本真空技術株式会社 | 複合分子ポンプを使用した漏洩探知装置 |
JPH1090105A (ja) * | 1996-09-12 | 1998-04-10 | Ulvac Japan Ltd | 漏洩探知方法と装置 |
JP2000171327A (ja) * | 1998-12-10 | 2000-06-23 | Alcatel | トレ―サガスの検出による漏れ検出方法及び該方法を実施するための漏れ検出装置 |
JP2004340726A (ja) * | 2003-05-15 | 2004-12-02 | Ulvac Japan Ltd | 漏洩検知装置 |
JP2006517291A (ja) * | 2003-01-25 | 2006-07-20 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | 流入部を備えたリーク検出器 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3616680A (en) * | 1969-10-27 | 1971-11-02 | Sargent Welch Scientific Co | Leak detector |
DE3133781A1 (de) * | 1981-08-26 | 1983-03-10 | Leybold-Heraeus GmbH, 5000 Köln | Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe |
JPH1089260A (ja) * | 1996-09-10 | 1998-04-07 | Toshiba Corp | 回転機械のクラック検出方法及びクラック検出装置 |
FR2761776B1 (fr) * | 1997-04-03 | 1999-07-23 | Alsthom Cge Alcatel | Detecteur de fuite a gaz traceur |
DE10055057A1 (de) * | 2000-11-07 | 2002-05-08 | Pfeiffer Vacuum Gmbh | Leckdetektorpumpe |
DE10334455B4 (de) * | 2003-07-29 | 2013-01-31 | Pfeiffer Vacuum Gmbh | Lecksuchverfahren und Lecksuchanordnung zur Durchführung des Verfahrens |
US7036359B2 (en) * | 2003-07-31 | 2006-05-02 | Aisan Kogyo Kabushiki Kaisha | Failure diagnostic system for fuel vapor processing apparatus |
-
2011
- 2011-09-29 KR KR1020137015207A patent/KR101456843B1/ko active IP Right Grant
- 2011-09-29 JP JP2012544083A patent/JP5581398B2/ja active Active
- 2011-09-29 US US13/879,484 patent/US20130199275A1/en not_active Abandoned
- 2011-09-29 RU RU2013127277/28A patent/RU2545468C2/ru active
- 2011-09-29 WO PCT/JP2011/005491 patent/WO2012066715A1/ja active Application Filing
- 2011-09-29 EP EP11841122.2A patent/EP2642266A4/en not_active Withdrawn
- 2011-09-29 CN CN201180052834.1A patent/CN103189724B/zh active Active
- 2011-10-13 TW TW100137125A patent/TWI519772B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07286928A (ja) * | 1994-04-15 | 1995-10-31 | Anelva Corp | ヘリウムリークディテクタ |
JP2655315B2 (ja) * | 1994-06-29 | 1997-09-17 | 日本真空技術株式会社 | 複合分子ポンプを使用した漏洩探知装置 |
JPH1090105A (ja) * | 1996-09-12 | 1998-04-10 | Ulvac Japan Ltd | 漏洩探知方法と装置 |
JP2000171327A (ja) * | 1998-12-10 | 2000-06-23 | Alcatel | トレ―サガスの検出による漏れ検出方法及び該方法を実施するための漏れ検出装置 |
JP2006517291A (ja) * | 2003-01-25 | 2006-07-20 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | 流入部を備えたリーク検出器 |
JP2004340726A (ja) * | 2003-05-15 | 2004-12-02 | Ulvac Japan Ltd | 漏洩検知装置 |
Also Published As
Publication number | Publication date |
---|---|
CN103189724A (zh) | 2013-07-03 |
KR101456843B1 (ko) | 2014-11-04 |
TW201237384A (en) | 2012-09-16 |
KR20130090419A (ko) | 2013-08-13 |
US20130199275A1 (en) | 2013-08-08 |
JPWO2012066715A1 (ja) | 2014-05-12 |
EP2642266A4 (en) | 2017-08-09 |
RU2013127277A (ru) | 2014-12-27 |
TWI519772B (zh) | 2016-02-01 |
RU2545468C2 (ru) | 2015-03-27 |
CN103189724B (zh) | 2015-03-04 |
WO2012066715A1 (ja) | 2012-05-24 |
EP2642266A1 (en) | 2013-09-25 |
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