JP5565472B2 - サセプタ及びエピタキシャルウェーハの製造方法 - Google Patents
サセプタ及びエピタキシャルウェーハの製造方法 Download PDFInfo
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- JP5565472B2 JP5565472B2 JP2012544100A JP2012544100A JP5565472B2 JP 5565472 B2 JP5565472 B2 JP 5565472B2 JP 2012544100 A JP2012544100 A JP 2012544100A JP 2012544100 A JP2012544100 A JP 2012544100A JP 5565472 B2 JP5565472 B2 JP 5565472B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 25
- 238000001947 vapour-phase growth Methods 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 80
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- 239000007789 gas Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 10
- 230000008021 deposition Effects 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000012808 vapor phase Substances 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/12—Substrate holders or susceptors
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
Description
すなわち、本発明は、上記問題を解消するために、サセプタの厚さを増大させることによって、サセプタ外周部の熱容量を増大させ、ウェーハの外周部と内周部とにおける熱的条件を等しくすることができるサセプタを提供し、さらにそのサセプタを用いてエピタキシャル層の気相成長を行うエピタキシャルウェーハの製造方法を提供することを目的とする。
本発明が適用されるエピタキシャルウェーハの製造方法の手順のフロー図を図5に示す。
まず、工程(a)では、エピタキシャル層を成長させるウェーハ(シリコンウェーハ)を準備する。ここで、本発明はシリコンウェーハに限らず、シリコンカーバイドウェーハや、GaPウェーハ、GaAsウェーハなどの化合物半導体ウェーハ等にも用いることができる。
この洗浄工程における洗浄法は、典型的なRCA洗浄の他、薬液の濃度や種類を通常行われる範囲で変更したものを用いることもできる。
エピタキシャル成長装置51は、チャンバー52と、チャンバー内部に配置されたサセプタ71、サセプタを下方から支持し、回転上下動自在なサセプタ支持手段53、チャンバー52内にウェーハを搬入したり、逆に外へと搬出したりするためのウェーハ搬送口54、チャンバー内に各種ガスを供給するガス導入管55、ガス導入管55に接続され、チャンバー内に水素ガスを供給する図示しない水素ガス供給手段及びシラン等の原料ガスを供給する図示しない原料ガス供給手段、チャンバー内から各種ガスを排出するガス排出管57、チャンバー52の外部に備えられた加熱手段58、チャンバー内にシリコンウェーハを移送し、また、チャンバー52内からシリコンウェーハを移送する図示しないウェーハ移送手段等から構成される。
尚、サセプタ71には、リフトピン用貫通孔73が形成されているものであってもよい。リフトピン用貫通孔73には、リフトピン75が挿通される。
また、チャンバー52の内部にはリフトピン75をサセプタに対して相対的に上下させることができるリフトピン昇降手段を設けてもよい。
尚、突出部76は、サセプタ裏面にブロック状の突起物を密着させることによって形成することもできるし、サセプタ自体の形成時に裏面加工して、予めサセプタ裏面に突起物を形成してもよい。
上記突出部76を設けたことにより、サセプタの前記上段座ぐり部に対応する位置の厚みが増大されるとともに熱容量も増大されるので、この部分の温度を上がりにくくし、ウェーハ外周部と内周部との熱的条件を一定にすることができ、ウェーハ主表面のナノトポロジー品質や外周抵抗率分布品質を損ねることなく裏面デポの発生を抑制することができる。
また、突出部76の厚みが、前記上段座ぐり部に対応する位置における、前記突出部以外のサセプタの厚みの3倍以下とすることにより、熱容量差が大きくなりすぎることによる加熱時のサセプタの破損を防止できる。
前記突出部76に前記溝77が施されていることにより、ランプ加熱に対して影となるような部分を前記突出部上に必然的に作ることができ、また、前記溝77により表面積が大きくなって放熱し易くなり、それによって前記突出部の温度を下げることができるため、本発明の効果である裏面デポの抑制をより効果的に行うことができる。さらに前記溝77が格子状であるものを用いることや、前記溝77の深さが、前記上段座ぐり部72aに対応する位置のサセプタの厚みの1/10以上であるものを用いることにより、さらに効果的に裏面デポを抑制することができる。
サセプタの座ぐりにシリコンウェーハを載置し、原料ガスを流しながら前記シリコンウェーハ表面上にエピタキシャル層の気相成長を行うエピタキシャル成長装置において、図4に示すように、ひとつのサセプタ裏面の、厚みが4mmである上段座ぐり部に対応する部分の円周方向上に、厚さ3.8mmのブロック、厚さ7.6mmのブロック、3.8mmの深さの溝が施された厚さ7.6mmのブロック及びブロックを設けない部分を均等に設け、反応圧力を常圧、反応温度を1100℃、成長速度を2.7μm/minとして、直径300mmのシリコンウェーハ表面上に厚さ5μmのエピタキシャル層の気相成長を行った。このようにすることで、サセプタ裏面の突出部の有無等以外の条件を完全に一致させて、本発明の効果を検証することができる。
ここで、WaferSightとは、ウェーハに光を入射し、ウェーハからの反射光と基準面からの反射光との光学干渉によって生じる干渉縞の数と幅から、ウェーハ表面の変位量を計測することを原理とする測定器である。実際の測定においては、ウェーハ両面に前述の計測を行い、予め測定しておいた、ある特定の1点の厚みから全体の厚み変化を算出する。
また、UA3Pは触針式表面変位量によって測定を行う測定機である。探針を微弱な一定荷重で対象に押し当て、対象の凹凸に応じて動く針の変位量をレーザーで計測することを原理とする。
Claims (5)
- エピタキシャル層の気相成長を行う際に半導体基板を支持するサセプタであって、該サセプタの上面には、内部に前記半導体基板が配置される座ぐりが形成され、該座ぐりは、前記半導体基板の外周縁部を支持する上段座ぐり部と、該上段座ぐり部よりも下段でかつ中心側に形成された下段座ぐり部とを有する二段構造を成し、前記下段座ぐり部には、前記サセプタの裏面まで貫通し、前記気相成長を行う際にも開放状態となる孔部が形成されており、前記サセプタの裏面側には、少なくとも前記上段座ぐり部に対応する位置に突出部が設けられ、前記突出部の厚みが、前記上段座ぐり部に対応する位置における、前記突出部以外のサセプタの厚みの3倍以下であり、かつ前記上段座ぐり部に対応する位置における、前記突出部以外のサセプタの厚みの95%以上であることを特徴とするサセプタ。
- 前記突出部に溝が施されているものであることを特徴とする請求項1に記載のサセプタ。
- 前記溝が、格子状であることを特徴とする請求項2に記載のサセプタ。
- 前記溝の深さが、前記上段座ぐり部に対応する位置のサセプタの厚みの1/10以上であることを特徴とする請求項2または3に記載のサセプタ。
- エピタキシャルウェーハの製造方法であって、前記請求項1乃至請求項4のいずれか1項に記載のサセプタを用いて、該サセプタの座ぐりにウェーハを載置し、原料ガスを流しながら前記ウェーハ上にエピタキシャル層の気相成長を行うことを特徴とするエピタキシャルウェーハの製造方法。
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PCT/JP2011/006284 WO2012066752A1 (ja) | 2010-11-15 | 2011-11-10 | サセプタ及びエピタキシャルウェーハの製造方法 |
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JP5477314B2 (ja) * | 2011-03-04 | 2014-04-23 | 信越半導体株式会社 | サセプタ及びこれを用いたエピタキシャルウェーハの製造方法 |
JP6539929B2 (ja) * | 2015-12-21 | 2019-07-10 | 昭和電工株式会社 | ウェハ支持機構、化学気相成長装置およびエピタキシャルウェハの製造方法 |
JP6847199B2 (ja) * | 2016-07-22 | 2021-03-24 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | エピの均一性調整を改善するための加熱変調器 |
CN106252209B (zh) * | 2016-08-30 | 2017-05-24 | 四川广瑞半导体有限公司 | 一种功率芯片用外延片生产工艺 |
WO2019043865A1 (ja) * | 2017-08-31 | 2019-03-07 | 株式会社Sumco | サセプタ、エピタキシャル成長装置、エピタキシャルシリコンウェーハの製造方法、ならびにエピタキシャルシリコンウェーハ |
DE102019132933A1 (de) * | 2018-12-10 | 2020-06-10 | Showa Denko K.K. | Suszeptor und vorrichtung zur chemischen gasphasenabscheidung |
KR102460313B1 (ko) * | 2018-12-13 | 2022-10-28 | 주식회사 원익아이피에스 | 기판 처리 장치의 서셉터 및 기판 처리 장치 |
CN110429050B (zh) * | 2019-08-05 | 2022-02-08 | 西安奕斯伟材料科技有限公司 | 一种外延生长基座 |
JP2022055209A (ja) * | 2020-09-28 | 2022-04-07 | エピクルー株式会社 | 気相成長装置及びエピタキシャルウェーハの製造方法 |
CN113699586B (zh) * | 2021-08-27 | 2022-07-26 | 江苏第三代半导体研究院有限公司 | 一种带空气桥结构的托盘及外延生长方法 |
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JPWO2012066752A1 (ja) | 2014-05-12 |
WO2012066752A1 (ja) | 2012-05-24 |
KR101808054B1 (ko) | 2017-12-12 |
KR20140018189A (ko) | 2014-02-12 |
CN103210475A (zh) | 2013-07-17 |
US20130180447A1 (en) | 2013-07-18 |
US9797066B2 (en) | 2017-10-24 |
CN103210475B (zh) | 2016-04-27 |
DE112011103491B4 (de) | 2020-09-24 |
DE112011103491T5 (de) | 2013-09-26 |
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