JP5563378B2 - 弾性波素子 - Google Patents

弾性波素子 Download PDF

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Publication number
JP5563378B2
JP5563378B2 JP2010133838A JP2010133838A JP5563378B2 JP 5563378 B2 JP5563378 B2 JP 5563378B2 JP 2010133838 A JP2010133838 A JP 2010133838A JP 2010133838 A JP2010133838 A JP 2010133838A JP 5563378 B2 JP5563378 B2 JP 5563378B2
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Prior art keywords
excitation electrode
thickness
film
frequency
quartz substrate
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JP2010133838A
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Japanese (ja)
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JP2011259348A (ja
JP2011259348A5 (enExample
Inventor
大健 今
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River Eletec Corp
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River Eletec Corp
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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2010133838A 2010-06-11 2010-06-11 弾性波素子 Active JP5563378B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010133838A JP5563378B2 (ja) 2010-06-11 2010-06-11 弾性波素子

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JP2010133838A JP5563378B2 (ja) 2010-06-11 2010-06-11 弾性波素子

Publications (3)

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JP2011259348A JP2011259348A (ja) 2011-12-22
JP2011259348A5 JP2011259348A5 (enExample) 2013-07-25
JP5563378B2 true JP5563378B2 (ja) 2014-07-30

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108028639A (zh) * 2015-09-28 2018-05-11 株式会社村田制作所 晶体片以及晶体振子
US11258424B1 (en) 2020-08-18 2022-02-22 River Eletec Corporation Acoustic wave device
US12274173B2 (en) 2020-08-18 2025-04-08 River Eletec Corporation Acoustic wave device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014208664A1 (ja) * 2013-06-28 2014-12-31 リバーエレテック株式会社 弾性波素子
JP7080671B2 (ja) * 2018-02-27 2022-06-06 ＮＤＫ ＳＡＷ ｄｅｖｉｃｅｓ株式会社 弾性表面波デバイス

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5768925A (en) * 1980-10-17 1982-04-27 Fujitsu Ltd Piezoelectric device
JPH08340230A (ja) * 1995-06-13 1996-12-24 Meidensha Corp 水晶振動子
JP2003258596A (ja) * 2002-03-01 2003-09-12 Yasuhiko Nakagawa ラム波型高周波共振器、これを用いた発振装置、及びラム波を用いた高周波信号生成方法
JP4306668B2 (ja) * 2005-01-07 2009-08-05 セイコーエプソン株式会社 ラム波型高周波共振子
JP2008054163A (ja) * 2006-08-28 2008-03-06 Seiko Epson Corp ラム波型高周波共振子
JP2008098974A (ja) * 2006-10-12 2008-04-24 Seiko Epson Corp ラム波型高周波デバイス
JP4553047B2 (ja) * 2008-03-12 2010-09-29 セイコーエプソン株式会社 ラム波型共振子及び発振器

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108028639A (zh) * 2015-09-28 2018-05-11 株式会社村田制作所 晶体片以及晶体振子
CN108028639B (zh) * 2015-09-28 2021-01-08 株式会社村田制作所 晶体片以及晶体振子
US11258424B1 (en) 2020-08-18 2022-02-22 River Eletec Corporation Acoustic wave device
US12274173B2 (en) 2020-08-18 2025-04-08 River Eletec Corporation Acoustic wave device

Also Published As

Publication number Publication date
JP2011259348A (ja) 2011-12-22

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