JP5559329B2 - 構造体および構造体を形成する方法 - Google Patents
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Description
Claims (14)
- 第1のピッチを有し、少なくとも1つの誘電体層に埋め込まれた第1の複数の導電線であって、前記第1の複数の導電線のそれぞれが、第1の垂直面に平行な1対の側壁と、前記1対の側壁の端部に直接隣接する第2の垂直面内及び基板の上面に接触する底面内に位置する端壁とを有し、前記第1の垂直面と前記第2の垂直面との角度が45度より小さい第1の複数の導電線と、
複数の導電ビアであって、前記複数の導電ビアのそれぞれが前記複数の導電線の1つの端部の上面および端壁に接触し、前記少なくとも1つの誘電体層に埋め込まれ、前記第2の垂直面が前記複数の導電ビアのそれぞれと交差する、複数の導電ビアと、
前記第1のピッチと垂直な接触面を有する複数の誘電材料部分であって、前記基板から前記第1の複数の導電線によって分離され、前記複数の誘電材料部分の各側壁が前記第1の複数の導電線の側壁の平面と一致し、前記複数の誘電材料部分の各端壁が一定の距離だけ前記第2の垂直面から陥凹されている、複数の誘電材料部分と、
を含む、構造体。 - 第2のピッチを有し、前記少なくとも1つの誘電体層に埋め込まれた第2の複数の導電線であって、前記第2の複数の導電線のそれぞれが、前記第1の垂直面に垂直な第3の垂直面に平行な1対の側壁を有し、前記第2の複数の導電線のそれぞれの底面が、前記複数の導電ビアの1つに接触する第2の複数の導電線をさらに含む、請求項1に記載の構造体。
- 前記第1のピッチがリソグラフィ・ツールを使用してプリントできる最小ピッチより小さいピッチであるサブリソグラフィ・ピッチであり、前記第2のピッチが前記最小ピッチ以上のピッチであるリソグラフィ・ピッチである、請求項2に記載の構造体。
- 少なくとも1つの半導体デバイスを含み、前記少なくとも1つの誘電体層の下に位置する半導体基板をさらに含む、請求項1に記載の構造体。
- 前記複数の誘電材料部分の各々の底面は、前記第1の複数の導電線の上面に接触する、請求項1に記載の構造体。
- 少なくとも1つの誘電体層に埋め込まれ、一定幅領域と前記一定幅領域に隣接する少なくとも1つの拡張幅領域とを有する第1の複数の導電線であって、前記一定幅領域内の一定の第1のピッチと、前記少なくとも1つの拡張幅領域内の前記第1の複数の導電線の隣接対間の幅が前記一定幅領域の端部部分からの横方向距離につれて増加する、第1の複数の導電線と、
第2のピッチを有する複数の導電ビアであって、前記複数の導電ビアのそれぞれが前記第1の複数の導電線の1つの端部部分に接触し、前記少なくとも1つの誘電体層に埋め込まれ、前記第2のピッチが前記第1のピッチより大きい、複数の導電ビアと、
第2のピッチを有し、前記少なくとも1つの誘電体層に埋め込まれた第2の複数の導電線であって、前記第2の複数の導電線のそれぞれの底面が、前記複数の導電ビアの1つに隣接し、前記第2の複数の導電線が前記第2のピッチと同じであるピッチを有する第2の複数の導電線と、
を含む、構造体。 - 前記第1のピッチがリソグラフィ・ツールを使用してプリントできる最小ピッチより小さいピッチであるサブリソグラフィ・ピッチであり、前記第2のピッチが前記最小ピッチ以上のピッチであるリソグラフィ・ピッチである、請求項6に記載の構造体。
- 基板上に第1の複数の導電線と複数の誘電材料部分とを含む複数のスタックを形成するステップであって、前記複数のスタックは第1のピッチを有し、前記複数のスタックの各々は、スタックの底面から上面に延びる第1の垂直面に平行な1対の側壁を有するステップと、
前記第1の垂直面と交差する第2の垂直面に沿って側壁を有するフォトレジストを使用して前記第1の複数の導電線をパターン形成するステップであって、前記1対の側壁に直接隣接する前記パターン形成された第1の複数の導電線のそれぞれの端壁が前記第2の垂直面内に形成され、前記第1の垂直面と前記第2の垂直面との角度が45度より小さいステップと、
前記パターン形成された第1の複数の導電線の上に誘電体層を形成するステップと、
前記誘電体層に複数の導電ビアを形成するステップであって、前記複数の導電ビアのそれぞれが前記複数の導電線の1つの端部の上面および端壁に接触し、前記第2の垂直面が前記複数の導電ビアのそれぞれと交差するステップと、
前記誘電体層に第2のピッチを有する第2の複数の導電線を形成するステップであって、前記第2の複数の導電線のそれぞれが、前記第1の垂直面に垂直な第3の垂直面に平行な1対の側壁を有し、前記第2の複数の導電線のそれぞれの底面が、前記複数の導電ビアの1つに接触するステップと
を含む、構造体を形成する方法。 - 自己集合共重合体層を使用して前記第1のピッチを有する複数のポリマー・ブロック線を形成するステップと、
前記複数のポリマー・ブロック線のパターンを前記基板上の導電材料層に転写するステップであって、前記転写後の前記導電材料層の残りの部分が前記第1の複数の導電線を構成するステップと、をさらに含む、請求項8に記載の方法。 - 前記複数のポリマー・ブロック線の前記形成前に前記導電材料層上に誘電材料層を形成するステップであって、誘電材料部分を形成するために前記パターンの前記転写中に前記誘電材料層がパターン形成されるステップと、
前記第2の垂直面に対して前記誘電材料層を横方向に陥凹させるステップと、をさらに含む、請求項9に記載の方法。 - 前記誘電体層をリソグラフィでパターン形成することにより前記第2の垂直面に沿って前記誘電体層に複数のビアホールを形成するステップであって、前記誘電材料部分の側壁および前記第1の複数の導電線の上面が前記複数のビアホール内で露出されるステップをさらに含む、請求項10に記載の方法。
- 基板上で一定幅領域と前記一定幅領域に隣接する少なくとも1つの拡張幅領域とを有する第1の複数の導電線を形成するステップであって、前記第1の複数の導電線が、前記一定幅領域内の一定の第1のピッチと、前記少なくとも1つの拡張幅領域内の拡張ピッチとを有し、前記拡張ピッチが前記一定幅領域の端部部分からの横方向距離につれて増加するステップと、
前記複数の導電線上に誘電体層を形成するステップと、
前記誘電体層内に第2のピッチを有する複数の導電ビアを形成するステップであって、前記複数の導電ビアのそれぞれが前記複数の導電線の1つの端部の上面および端壁に接触し、前記第2のピッチが前記第1のピッチより大きく、前記第1の複数の導電線が、前記基板、前記誘電体層、および前記複数の導電ビアによって閉じ込められるステップと、
前記誘電体層に前記第2のピッチを有する第2の複数の導電線を形成するステップであって、前記第2の複数の導電線のそれぞれの底面が、前記複数の導電ビアの1つに接触するステップと
を含む、構造体を形成する方法。 - ホモポリマーを含む自己集合共重合体層を使用して前記第1のピッチを有する複数のポリマー・ブロック線を形成するステップと、
前記複数のポリマー・ブロック線のパターンを前記基板上の導電材料層に転写するステップであって、前記転写後の前記導電材料層の残りの部分が前記第1の複数の導電線を構成するステップと、をさらに含む、請求項12に記載の方法。 - 前記導電材料層上にテンプレート層を形成するステップと、
前記テンプレート層に陥凹エリアを形成するステップであって、前記陥凹エリアが、一定幅を有する領域と、前記一定幅領域に隣接し、可変幅を有する台形領域とを含み、前記一定幅領域が前記一定幅を有する前記領域内に形成され、前記少なくとも1つの拡張幅領域が前記台形領域内に形成されるステップと、をさらに含む、請求項13に記載の方法。
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US12/540,759 US8247904B2 (en) | 2009-08-13 | 2009-08-13 | Interconnection between sublithographic-pitched structures and lithographic-pitched structures |
US12/540,759 | 2009-08-13 | ||
PCT/US2010/044326 WO2011019552A1 (en) | 2009-08-13 | 2010-08-04 | Interconnection between sublithographic-pitched structures and lithographic-pitched structures |
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US7405147B2 (en) * | 2004-01-30 | 2008-07-29 | International Business Machines Corporation | Device and methodology for reducing effective dielectric constant in semiconductor devices |
US9105590B2 (en) * | 2011-08-10 | 2015-08-11 | United Microelectronics Corp. | Semiconductor structure having material layers which are level with each other and manufacturing method thereof |
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JP2013502072A (ja) | 2013-01-17 |
US8247904B2 (en) | 2012-08-21 |
DE112010003269B4 (de) | 2014-05-15 |
CN102473649B (zh) | 2015-03-18 |
TWI527154B (zh) | 2016-03-21 |
GB201200163D0 (en) | 2012-02-15 |
CN102473649A (zh) | 2012-05-23 |
GB2485493A (en) | 2012-05-16 |
DE112010003269T5 (de) | 2013-04-25 |
GB2485493B (en) | 2014-01-15 |
WO2011019552A1 (en) | 2011-02-17 |
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