JP5491036B2 - 電界放出型電子源及びその製造方法 - Google Patents
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- 229910017052 cobalt Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/04—Cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
- H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
- H01J1/3044—Point emitters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/316—Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/027—Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30469—Carbon nanotubes (CNTs)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/316—Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
- H01J2201/3165—Surface conduction emission type cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/02—Electrodes other than control electrodes
- H01J2329/04—Cathode electrodes
- H01J2329/0407—Field emission cathodes
- H01J2329/0439—Field emission cathodes characterised by the emitter material
- H01J2329/0444—Carbon types
- H01J2329/0455—Carbon nanotubes (CNTs)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/02—Electrodes other than control electrodes
- H01J2329/04—Cathode electrodes
- H01J2329/0486—Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
- H01J2329/0489—Surface conduction emission type cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
Description
16 格子
18 電子放出体
20、33、43 絶縁層
22、36、46 電子放出ユニット
14、34、44 陰極電極
12、32、42 グリッド電極
38、48 陰極放出体
121、421 延長部
181 電子放出体の両端
182 隙間
183 先端
100、300 電界放出型電子源
400 表面伝導型電子源
Claims (8)
- 絶縁基板と、前記絶縁基板に設置された複数のグリッド電極及び陰極電極と、複数の電子放出ユニットと、を含む電界放出型電子源において、
前記複数のグリッド電極及び前記複数陰極電極が交叉して、複数の格子が形成され、各々の前記格子に一つの前記電子放出ユニットが設置され、
各々の前記電子放出ユニットは、一端が前記グリッド電極に電気的に接続された少なくとも一つのグリッド電極側電子放出体及び一端が前記陰極電極に電気的に接続された少なくとも一つの陰極電極側電子放出体を含み、
前記グリッド電極側電子放出体と陰極電極側電子放出体との間に隙間があり、前記グリッド電極側電子放出体及び陰極電極側電子放出体はそれぞれ前記隙間に対向した一つの先端を有し、各々の前記先端が複数の電子放出先端を有し、
前記電子放出体は、カーボンナノチューブワイヤよりなり、
前記カーボンナノチューブワイヤが平行して配列された複数のカーボンナノチューブを含み、
一部の前記カーボンナノチューブは、端と端が分子間力で接続されることを特徴とする電界放出型電子源。 - 各々の前記電子放出先端が少なくとも一本のカーボンナノチューブからなることを特徴とする、請求項1に記載の電界放出型電子源。
- 前記隙間の幅が1マイクロメートル〜20マイクロメートルであることを特徴とする、請求項1または2に記載の電界放出型電子源。
- 前記グリッド電極が複数の延長部を含み、各々の延長部がそれぞれ、各々の前記陰極電極に対向して設置されることを特徴とする、請求項1から3のいずれか一項に記載の電界放出型電子源。
- 前記グリッド電極側電子放出体の前記一端が、前記グリッド電極の延長部に電気的に接続されることを特徴とする、請求項4に記載の電界放出型電子源。
- 絶縁基板を提供する第一ステップと、
前記絶縁基板に設置された複数のグリッド電極及び陰極電極を形成し、前記複数のグリッド電極及び前記複数陰極電極が交叉して、複数の格子を形成する第二ステップと、
複数の電子放出体を提供する第三ステップと、
前記複数の電子放出体をそれぞれ、各々の前記格子の中に設置し、前記複数のグリッド電極及び複数の陰極電極に電気的に接続する第四ステップと、
前記電子放出体を加工して、グリッド電極側電子放出体及び陰極電極側電子放出体に分離させ、該グリッド電極側電子放出体と陰極電極側電子放出体との間に隙間を形成し、前記グリッド電極側電子放出体及び陰極電極側電子放出体のそれぞれに前記隙間に対向した一つの先端と、各々の前記先端に複数の電子放出先端を形成する第五ステップと、
を含み、
前記電子放出体は、カーボンナノチューブワイヤよりなり、
前記カーボンナノチューブワイヤが平行して配列された複数のカーボンナノチューブを含み、
一部の前記カーボンナノチューブは、端と端が分子間力で接続されることを特徴とする電界放出型電子源の製造方法。 - 前記第二ステップにおいて、前記複数のグリッド電極及び陰極電極が交叉する場所に、絶縁部を形成することを特徴とする、請求項6に記載の電界放出型電子源の製造方法。
- 前記第五ステップにおいて、レーザーで焼き切る方法、電子の衝撃で切る方法又は真空の雰囲気で焼き切る方法を利用して、前記電子放出体を加工することを特徴とする、請求項6又は7に記載の電界放出型電子源の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CN200810066050.4 | 2008-02-01 | ||
CN200810066050.4A CN101499390B (zh) | 2008-02-01 | 2008-02-01 | 电子发射器件及其制备方法 |
Publications (2)
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JP2009187946A JP2009187946A (ja) | 2009-08-20 |
JP5491036B2 true JP5491036B2 (ja) | 2014-05-14 |
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Country Status (3)
Country | Link |
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US (2) | US7967655B2 (ja) |
JP (1) | JP5491036B2 (ja) |
CN (1) | CN101499390B (ja) |
Families Citing this family (11)
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CN101239712B (zh) * | 2007-02-09 | 2010-05-26 | 清华大学 | 碳纳米管薄膜结构及其制备方法 |
CN101465259B (zh) * | 2007-12-19 | 2011-12-21 | 清华大学 | 场发射电子器件 |
CN101499389B (zh) * | 2008-02-01 | 2011-03-23 | 鸿富锦精密工业(深圳)有限公司 | 电子发射器件 |
CN101964229B (zh) * | 2009-07-21 | 2012-05-30 | 清华大学 | 碳纳米管绞线及其制备方法 |
JP5564853B2 (ja) | 2009-08-14 | 2014-08-06 | ソニー株式会社 | 受信装置および方法、プログラム、並びに受信システム |
CN101880035A (zh) | 2010-06-29 | 2010-11-10 | 清华大学 | 碳纳米管结构 |
CN102024635B (zh) * | 2010-11-29 | 2012-07-18 | 清华大学 | 电子发射体及电子发射元件 |
CN102082061B (zh) * | 2010-12-29 | 2013-06-05 | 清华大学 | 场发射显示装置 |
CN102082051B (zh) | 2010-12-30 | 2013-04-24 | 清华大学 | 碳纳米管线尖端的制备方法及场发射结构的制备方法 |
CN103295853B (zh) * | 2012-02-23 | 2015-12-09 | 清华大学 | 场发射电子源及应用该场发射电子源的场发射装置 |
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