JP4976368B2 - 熱電子放出素子 - Google Patents
熱電子放出素子 Download PDFInfo
- Publication number
- JP4976368B2 JP4976368B2 JP2008328568A JP2008328568A JP4976368B2 JP 4976368 B2 JP4976368 B2 JP 4976368B2 JP 2008328568 A JP2008328568 A JP 2008328568A JP 2008328568 A JP2008328568 A JP 2008328568A JP 4976368 B2 JP4976368 B2 JP 4976368B2
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- carbon nanotube
- electrode
- thermionic emission
- emission device
- insulating substrate
- Prior art date
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 113
- 239000002041 carbon nanotube Substances 0.000 claims description 77
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 77
- 239000002238 carbon nanotube film Substances 0.000 claims description 52
- 239000000758 substrate Substances 0.000 claims description 50
- 238000000034 method Methods 0.000 description 13
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000002079 double walled nanotube Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000002109 single walled nanotube Substances 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- -1 alkaline earth metal carbonate Chemical class 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000002048 multi walled nanotube Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000001241 arc-discharge method Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/15—Cathodes heated directly by an electric current
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/04—Cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/02—Electrodes other than control electrodes
- H01J2329/04—Cathode electrodes
- H01J2329/0402—Thermionic cathodes
Landscapes
- Solid Thermionic Cathode (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Cold Cathode And The Manufacture (AREA)
Description
Kaili Jiang、Qunqing Li、Shoushan Fan、"Spinning continuous carbon nanotube yarns"、Nature、2002年、第419巻、p.801
145 カーボンナノチューブ
200 熱電子放出装置
202 絶縁性基板
204a 第一電極引き出し線
204b 第二電極引き出し線
206a 第三電極引き出し線
206b 第四電極引き出し線
208 熱電子放出素子
210 第一電極
212 第二電極
214 格子
216 絶縁部
218 溝
220 熱電子放出ユニット
Claims (9)
- 絶縁性基板と、前記絶縁性基板に形成された少なくとも一つの格子と、を含み、
各々の前記格子が、該格子の周辺に設置された四つの電極引き出し線によって囲まれ、
各々の前記格子が、熱電子放出ユニットを含み、
前記熱電子放出ユニットが、二つの電極及び熱電子放出素子を含み、
前記二つの電極が前記熱電子放出素子と電気的に接続されていて、
前記格子に対応して、前記絶縁性基板に複数の溝を形成することを特徴とする熱電子放出装置。 - 前記複数の溝の寸法が同じであり、
前記複数の溝が均一な間隔で前記絶縁性基板に設置されていることを特徴とする、請求項1に記載の熱電子放出装置。 - 一つの前記熱電子放出素子が、一つの前記溝の一部に対向して、前記絶縁性基板に対して懸架されて設置されていることを特徴とする、請求項1に記載の熱電子放出装置。
- 一つの前記熱電子放出素子の一部が一つの前記溝に対向するように、前記熱電子放出素子が前記絶縁性基板に対して懸架されて設置されていることを特徴とする、請求項1に記載の熱電子放出装置。
- 前記熱電子放出素子が、カーボンナノチューブ構造体を含むことを特徴とする、請求項1〜4のいずれか一項に記載の熱電子放出装置。
- 前記カーボンナノチューブ構造体が、カーボンナノチューブフィルム又はカーボンナノチューブワイヤを含むことを特徴とする、請求項5に記載の熱電子放出装置。
- 前記カーボンナノチューブ構造体が一枚のカーボンナノチューブフィルムを含み、
該カーボンナノチューブフィルムにおける複数のカーボンナノチューブが、一つの電極からもう一つの電極まで進む方向に対して、平行に配列されていることを特徴とする、請求項5に記載の熱電子放出装置。 - 前記カーボンナノチューブ構造体が少なくとも二枚のカーボンナノチューブフィルムを含み、
前記少なくとも二枚のカーボンナノチューブフィルムが積み重ねられていて、
隣接するカーボンナノチューブフィルムにおけるカーボンナノチューブが、0°〜90°の角度を成すことを特徴とする、請求項6に記載の熱電子放出装置。 - 前記カーボンナノチューブ構造体がカーボンナノチューブワイヤを含み、
該カーボンナノチューブワイヤにおいて、一つの端部が一つの前記電極に電気的に接続され、もう一つの端部がもう一つの前記電極に電気的に接続されていることを特徴とする、請求項5に記載の熱電子放出装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200710125660.2 | 2007-12-29 | ||
CN2007101256602A CN101471211B (zh) | 2007-12-29 | 2007-12-29 | 热发射电子器件 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009164125A JP2009164125A (ja) | 2009-07-23 |
JP4976368B2 true JP4976368B2 (ja) | 2012-07-18 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008328568A Active JP4976368B2 (ja) | 2007-12-29 | 2008-12-24 | 熱電子放出素子 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7772755B2 (ja) |
JP (1) | JP4976368B2 (ja) |
CN (1) | CN101471211B (ja) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101459019B (zh) | 2007-12-14 | 2012-01-25 | 清华大学 | 热电子源 |
CN101471210B (zh) | 2007-12-29 | 2010-11-10 | 清华大学 | 热电子源 |
CN101471212B (zh) | 2007-12-29 | 2010-12-08 | 清华大学 | 热发射电子器件 |
CN101471213B (zh) | 2007-12-29 | 2011-11-09 | 清华大学 | 热发射电子器件及其制备方法 |
CN101471215B (zh) | 2007-12-29 | 2011-11-09 | 清华大学 | 热电子源的制备方法 |
CN101471211B (zh) | 2007-12-29 | 2010-06-02 | 清华大学 | 热发射电子器件 |
CN101483123B (zh) * | 2008-01-11 | 2010-06-02 | 清华大学 | 场发射电子器件的制备方法 |
US8452031B2 (en) * | 2008-04-28 | 2013-05-28 | Tsinghua University | Ultrasonic thermoacoustic device |
US8259967B2 (en) * | 2008-04-28 | 2012-09-04 | Tsinghua University | Thermoacoustic device |
US8259968B2 (en) * | 2008-04-28 | 2012-09-04 | Tsinghua University | Thermoacoustic device |
US8270639B2 (en) * | 2008-04-28 | 2012-09-18 | Tsinghua University | Thermoacoustic device |
US8249279B2 (en) * | 2008-04-28 | 2012-08-21 | Beijing Funate Innovation Technology Co., Ltd. | Thermoacoustic device |
CN101715160B (zh) * | 2008-10-08 | 2013-02-13 | 清华大学 | 柔性发声装置及发声旗帜 |
US8325947B2 (en) * | 2008-12-30 | 2012-12-04 | Bejing FUNATE Innovation Technology Co., Ltd. | Thermoacoustic device |
CN101771922B (zh) * | 2008-12-30 | 2013-04-24 | 清华大学 | 发声装置 |
US8300855B2 (en) * | 2008-12-30 | 2012-10-30 | Beijing Funate Innovation Technology Co., Ltd. | Thermoacoustic module, thermoacoustic device, and method for making the same |
CN101905878A (zh) * | 2009-06-04 | 2010-12-08 | 清华大学 | 碳纳米管线状结构及其制备方法 |
CN101922755A (zh) * | 2009-06-09 | 2010-12-22 | 清华大学 | 取暖墙 |
CN101943850B (zh) * | 2009-07-03 | 2013-04-24 | 清华大学 | 发声银幕及使用该发声银幕的放映系统 |
CN101990152B (zh) * | 2009-08-07 | 2013-08-28 | 清华大学 | 热致发声装置及其制备方法 |
CN102006542B (zh) | 2009-08-28 | 2014-03-26 | 清华大学 | 发声装置 |
CN102001641B (zh) * | 2009-08-28 | 2013-06-05 | 清华大学 | 碳纳米管线状结构的制备方法 |
CN102023297B (zh) * | 2009-09-11 | 2015-01-21 | 清华大学 | 声纳系统 |
CN102034467B (zh) * | 2009-09-25 | 2013-01-30 | 北京富纳特创新科技有限公司 | 发声装置 |
CN102056064B (zh) * | 2009-11-06 | 2013-11-06 | 清华大学 | 扬声器 |
CN102056065B (zh) * | 2009-11-10 | 2014-11-12 | 北京富纳特创新科技有限公司 | 发声装置 |
CN102065363B (zh) * | 2009-11-16 | 2013-11-13 | 北京富纳特创新科技有限公司 | 发声装置 |
CN101880035A (zh) | 2010-06-29 | 2010-11-10 | 清华大学 | 碳纳米管结构 |
CN102064071B (zh) * | 2010-12-16 | 2012-07-18 | 清华大学 | 场发射显示装置 |
US9053890B2 (en) | 2013-08-02 | 2015-06-09 | University Health Network | Nanostructure field emission cathode structure and method for making |
Family Cites Families (8)
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US5905335A (en) * | 1995-02-03 | 1999-05-18 | Canon Kabushiki Kaisha | Electron generation using a fluorescent element and image forming using such electron generation |
US6774532B1 (en) * | 1999-02-25 | 2004-08-10 | Sandia Corporation | Self-powered microthermionic converter |
JP3857156B2 (ja) | 2002-02-22 | 2006-12-13 | 株式会社日立製作所 | 電子源用ペースト、電子源およびこの電子源を用いた自発光パネル型表示装置 |
JP4393257B2 (ja) * | 2004-04-15 | 2010-01-06 | キヤノン株式会社 | 外囲器の製造方法および画像形成装置 |
US7704115B2 (en) * | 2004-08-04 | 2010-04-27 | Canon Kabushiki Kaisha | Supporting structure, method of manufacturing supporting structure, and display apparatus using the same |
CN100372047C (zh) | 2005-09-09 | 2008-02-27 | 清华大学 | 一种薄膜场发射显示器件及其场发射阴极的制备方法 |
JP4613327B2 (ja) * | 2006-11-06 | 2011-01-19 | 学校法人 名城大学 | カーボンナノチューブ製フィラメントおよびその利用 |
CN101471211B (zh) | 2007-12-29 | 2010-06-02 | 清华大学 | 热发射电子器件 |
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2007
- 2007-12-29 CN CN2007101256602A patent/CN101471211B/zh active Active
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2008
- 2008-10-23 US US12/288,863 patent/US7772755B2/en active Active
- 2008-12-24 JP JP2008328568A patent/JP4976368B2/ja active Active
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JP2009164125A (ja) | 2009-07-23 |
CN101471211A (zh) | 2009-07-01 |
US20090167136A1 (en) | 2009-07-02 |
US7772755B2 (en) | 2010-08-10 |
CN101471211B (zh) | 2010-06-02 |
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