JP2009164119A - 熱電子放出素子及びその製造方法 - Google Patents
熱電子放出素子及びその製造方法 Download PDFInfo
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- JP2009164119A JP2009164119A JP2008320197A JP2008320197A JP2009164119A JP 2009164119 A JP2009164119 A JP 2009164119A JP 2008320197 A JP2008320197 A JP 2008320197A JP 2008320197 A JP2008320197 A JP 2008320197A JP 2009164119 A JP2009164119 A JP 2009164119A
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- 238000004519 manufacturing process Methods 0.000 title abstract description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 86
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 54
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 54
- 239000002238 carbon nanotube film Substances 0.000 claims description 49
- 239000000758 substrate Substances 0.000 claims description 47
- 238000000034 method Methods 0.000 description 14
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 239000002079 double walled nanotube Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 239000002109 single walled nanotube Substances 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- -1 alkaline earth metal carbonate Chemical class 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000002048 multi walled nanotube Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000001241 arc-discharge method Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/14—Solid thermionic cathodes characterised by the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/19—Thermionic cathodes
- H01J2201/196—Emission assisted by other physical processes, e.g. field- or photo emission
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Cold Cathode And The Manufacture (AREA)
- Solid Thermionic Cathode (AREA)
Abstract
【解決手段】本発明の熱電子放出装置は、基板と、絶縁性基板と、前記絶縁性基板に形成された複数の格子と、を含む。各々の前記格子は、該格子の周辺に設置された四つの電極引き出し線と、熱電子放出ユニットと、を含む。前記熱電子放出ユニットが、二つの電極及び熱電子放出素子を含む。前記二つの電極は前記熱電子放出素子と電気的に接続されている。前記熱電子放出素子がカーボンナノチューブ構造体を含む。本発明は熱電子放出装置の製造方法も提供する。
【選択図】図1
Description
Kaili Jiang、Qunqing Li、Shoushan Fan、"Spinning continuous carbon nanotube yarns"、Nature、2002年、第419巻、p.801
145 カーボンナノチューブ
200 熱電子放出装置
202 絶縁性基板
204a 第一電極引き出し線
204b 第二電極引き出し線
206a 第三電極引き出し線
206b 第四電極引き出し線
208 熱電子放出素子
210 第一電極
212 第二電極
214 格子
216 絶縁部
218 溝
220 熱電子放出ユニット
Claims (8)
- 基板と、絶縁性基板と、前記絶縁性基板に形成された複数の格子と、を含み、
各々の前記格子が、該格子の周辺に設置された四つの電極引き出し線と、熱電子放出ユニットと、を含み
前記熱電子放出ユニットが、二つの電極及び熱電子放出素子を含み、
前記二つの電極が前記熱電子放出素子と電気的に接続されていて、
前記熱電子放出素子がカーボンナノチューブ構造体を含むことを特徴とする熱電子放出装置。 - 前記熱電子放出素子が、前記二つの電極に設置されていて、
前記熱電子放出素子が、前記絶縁性基板に対して懸架されて設置されていることを特徴とする、請求項1に記載の熱電子放出装置。 - 前記四つの電極引き出し線において、
二つの前記電極引き出し線が第一方向に対して、平行に配列されていて、
もう二つの前記電極引き出し線が第二方向に対して、平行に配列されていることを特徴とする、請求項1に記載の熱電子放出装置。 - 前記二つの電極において、
一つの前記電極が、第一方向に対して配列された一つの前記電極引き出し線に電気的に接続されていて、
もう一つの前記電極が、第二方向に対して配列された一つの前記電極引き出し線に電気的に接続されていることを特徴とする、請求項1〜3のいずれか一項に記載の熱電子放出装置。 - 単一の前記格子に対応して、前記絶縁性基板に一つの溝が設置されていることを特徴とする、請求項1に記載の熱電子放出装置。
- 前記カーボンナノチューブ構造体が一枚のカーボンナノチューブフィルムを含み、
該カーボンナノチューブフィルムにおける複数のカーボンナノチューブが、一つの電極からもう一つの電極まで進む方向に対して、平行に配列されていることを特徴とする、請求項1に記載の熱電子放出装置。 - 前記カーボンナノチューブ構造体が少なくとも二枚のカーボンナノチューブフィルムを含み、
前記少なくとも二枚のカーボンナノチューブフィルムが積み重ねられていて、
隣接するカーボンナノチューブフィルムにおけるカーボンナノチューブが、0°〜90°の角度を成すことを特徴とする、請求項1に記載の熱電子放出装置。 - 絶縁性基板を提供する第一ステップと、
該絶縁性基板に複数の格子を形成する第二ステップと、
各々の格子に二つの電極を設置する第三ステップと、
前記二つの電極にカーボンナノチューブ構造体を設置する第四ステップと、
前記カーボンナノチューブ構造体の余分な部分を除去して、前記二つの電極の間に前記カーボンナノチューブ構造体を保持する第五ステップと、を含むことを特徴とする熱電子放出装置の製造方法。
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Application Number | Priority Date | Filing Date | Title |
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CN200710125672.5 | 2007-12-29 | ||
CN2007101256725A CN101471213B (zh) | 2007-12-29 | 2007-12-29 | 热发射电子器件及其制备方法 |
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JP2009164119A true JP2009164119A (ja) | 2009-07-23 |
JP5015906B2 JP5015906B2 (ja) | 2012-09-05 |
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US (3) | US8072127B2 (ja) |
JP (1) | JP5015906B2 (ja) |
CN (1) | CN101471213B (ja) |
Cited By (3)
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JP2009164118A (ja) * | 2007-12-29 | 2009-07-23 | Qinghua Univ | 熱電子放出素子の製造方法 |
JP2009170420A (ja) * | 2008-01-11 | 2009-07-30 | Qinghua Univ | 熱電子放出素子の製造方法 |
US8072127B2 (en) | 2007-12-29 | 2011-12-06 | Tsinghua University | Thermionic electron emission device |
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JP2009164118A (ja) * | 2007-12-29 | 2009-07-23 | Qinghua Univ | 熱電子放出素子の製造方法 |
US8072127B2 (en) | 2007-12-29 | 2011-12-06 | Tsinghua University | Thermionic electron emission device |
US8247023B2 (en) | 2007-12-29 | 2012-08-21 | Tsinghua University | Method for making thermionic electron source |
JP2009170420A (ja) * | 2008-01-11 | 2009-07-30 | Qinghua Univ | 熱電子放出素子の製造方法 |
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CN101471213A (zh) | 2009-07-01 |
US8072127B2 (en) | 2011-12-06 |
US20120064794A1 (en) | 2012-03-15 |
US8410675B2 (en) | 2013-04-02 |
US20090167137A1 (en) | 2009-07-02 |
JP5015906B2 (ja) | 2012-09-05 |
US20120062100A1 (en) | 2012-03-15 |
CN101471213B (zh) | 2011-11-09 |
US8808554B2 (en) | 2014-08-19 |
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