JP5486735B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP5486735B2 JP5486735B2 JP2013518033A JP2013518033A JP5486735B2 JP 5486735 B2 JP5486735 B2 JP 5486735B2 JP 2013518033 A JP2013518033 A JP 2013518033A JP 2013518033 A JP2013518033 A JP 2013518033A JP 5486735 B2 JP5486735 B2 JP 5486735B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- island
- conductivity type
- type high
- concentration semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 144
- 239000002184 metal Substances 0.000 claims description 25
- 230000002093 peripheral effect Effects 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 119
- 229910052710 silicon Inorganic materials 0.000 description 119
- 239000010703 silicon Substances 0.000 description 119
- 230000003068 static effect Effects 0.000 description 40
- 230000000694 effects Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 235000004522 Pentaglottis sempervirens Nutrition 0.000 description 4
- 230000010354 integration Effects 0.000 description 4
- 240000004050 Pentaglottis sempervirens Species 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 150000002736 metal compounds Chemical class 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/41—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger
- G11C11/412—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger using field-effect transistors only
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/41—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger
- G11C11/413—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
- H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
- H10B10/125—Static random access memory [SRAM] devices comprising a MOSFET load element the MOSFET being a thin film transistor [TFT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Memories (AREA)
- Thin Film Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Static Random-Access Memory (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2011/073885 WO2013057785A1 (ja) | 2011-10-18 | 2011-10-18 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5486735B2 true JP5486735B2 (ja) | 2014-05-07 |
JPWO2013057785A1 JPWO2013057785A1 (ja) | 2015-04-02 |
Family
ID=48140463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013518033A Active JP5486735B2 (ja) | 2011-10-18 | 2011-10-18 | 半導体装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5486735B2 (ko) |
KR (1) | KR20130099108A (ko) |
CN (1) | CN103250239A (ko) |
TW (1) | TW201318110A (ko) |
WO (1) | WO2013057785A1 (ko) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0289293A (ja) * | 1987-09-07 | 1990-03-29 | Mitsubishi Electric Corp | 半導体記憶装置 |
JPH0951042A (ja) * | 1995-06-02 | 1997-02-18 | Hitachi Ltd | 半導体装置 |
JP2005038557A (ja) * | 2003-07-18 | 2005-02-10 | Semiconductor Energy Lab Co Ltd | メモリ回路およびメモリ回路を有する表示装置 |
JP2007066493A (ja) * | 2005-08-02 | 2007-03-15 | Renesas Technology Corp | 半導体記憶装置 |
JP2008065968A (ja) * | 2006-08-10 | 2008-03-21 | Renesas Technology Corp | 半導体記憶装置 |
JP2008205168A (ja) * | 2007-02-20 | 2008-09-04 | Fujitsu Ltd | 半導体装置及びその製造方法 |
WO2009060934A1 (ja) * | 2007-11-07 | 2009-05-14 | Nec Corporation | 半導体装置及びその製造方法 |
WO2009096465A1 (ja) * | 2008-01-29 | 2009-08-06 | Unisantis Electronics (Japan) Ltd. | 半導体記憶装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8692317B2 (en) * | 2008-04-16 | 2014-04-08 | Nec Corporation | Semiconductor storage device |
-
2011
- 2011-10-18 JP JP2013518033A patent/JP5486735B2/ja active Active
- 2011-10-18 WO PCT/JP2011/073885 patent/WO2013057785A1/ja active Application Filing
- 2011-10-18 KR KR1020137009906A patent/KR20130099108A/ko not_active Application Discontinuation
- 2011-10-18 CN CN2011800502708A patent/CN103250239A/zh active Pending
-
2012
- 2012-10-12 TW TW101137659A patent/TW201318110A/zh unknown
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0289293A (ja) * | 1987-09-07 | 1990-03-29 | Mitsubishi Electric Corp | 半導体記憶装置 |
JPH0951042A (ja) * | 1995-06-02 | 1997-02-18 | Hitachi Ltd | 半導体装置 |
JP2005038557A (ja) * | 2003-07-18 | 2005-02-10 | Semiconductor Energy Lab Co Ltd | メモリ回路およびメモリ回路を有する表示装置 |
JP2007066493A (ja) * | 2005-08-02 | 2007-03-15 | Renesas Technology Corp | 半導体記憶装置 |
JP2008065968A (ja) * | 2006-08-10 | 2008-03-21 | Renesas Technology Corp | 半導体記憶装置 |
JP2008205168A (ja) * | 2007-02-20 | 2008-09-04 | Fujitsu Ltd | 半導体装置及びその製造方法 |
WO2009060934A1 (ja) * | 2007-11-07 | 2009-05-14 | Nec Corporation | 半導体装置及びその製造方法 |
WO2009096465A1 (ja) * | 2008-01-29 | 2009-08-06 | Unisantis Electronics (Japan) Ltd. | 半導体記憶装置 |
Also Published As
Publication number | Publication date |
---|---|
TW201318110A (zh) | 2013-05-01 |
CN103250239A (zh) | 2013-08-14 |
KR20130099108A (ko) | 2013-09-05 |
JPWO2013057785A1 (ja) | 2015-04-02 |
WO2013057785A1 (ja) | 2013-04-25 |
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