JP5444968B2 - アクチュエータ及びこれを用いた光走査装置 - Google Patents

アクチュエータ及びこれを用いた光走査装置 Download PDF

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Publication number
JP5444968B2
JP5444968B2 JP2009205316A JP2009205316A JP5444968B2 JP 5444968 B2 JP5444968 B2 JP 5444968B2 JP 2009205316 A JP2009205316 A JP 2009205316A JP 2009205316 A JP2009205316 A JP 2009205316A JP 5444968 B2 JP5444968 B2 JP 5444968B2
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JP
Japan
Prior art keywords
drive
mirror
actuator according
connecting portion
support beam
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Application number
JP2009205316A
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English (en)
Japanese (ja)
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JP2010288435A (ja
JP2010288435A5 (cg-RX-API-DMAC7.html
Inventor
司 山田
正人 江原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsumi Electric Co Ltd
Original Assignee
Mitsumi Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2009205316A priority Critical patent/JP5444968B2/ja
Application filed by Mitsumi Electric Co Ltd filed Critical Mitsumi Electric Co Ltd
Priority to CN201080020675.2A priority patent/CN102422521B/zh
Priority to US13/319,380 priority patent/US8610983B2/en
Priority to CN201410083527.5A priority patent/CN103840704B/zh
Priority to PCT/JP2010/057096 priority patent/WO2010131557A1/ja
Publication of JP2010288435A publication Critical patent/JP2010288435A/ja
Publication of JP2010288435A5 publication Critical patent/JP2010288435A5/ja
Priority to US14/031,162 priority patent/US8681404B2/en
Application granted granted Critical
Publication of JP5444968B2 publication Critical patent/JP5444968B2/ja
Active legal-status Critical Current
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details
    • H02N2/123—Mechanical transmission means, e.g. for gearing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2009205316A 2009-05-11 2009-09-04 アクチュエータ及びこれを用いた光走査装置 Active JP5444968B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2009205316A JP5444968B2 (ja) 2009-05-11 2009-09-04 アクチュエータ及びこれを用いた光走査装置
US13/319,380 US8610983B2 (en) 2009-05-11 2010-04-21 Actuator and optical scanning device using actuator
CN201410083527.5A CN103840704B (zh) 2009-05-11 2010-04-21 致动器及使用致动器的光扫描装置
PCT/JP2010/057096 WO2010131557A1 (ja) 2009-05-11 2010-04-21 アクチュエータ及びアクチュエータを用いた光走査装置
CN201080020675.2A CN102422521B (zh) 2009-05-11 2010-04-21 致动器及使用致动器的光扫描装置
US14/031,162 US8681404B2 (en) 2009-05-11 2013-09-19 Actuator and optical scanning device using actuator

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009114317 2009-05-11
JP2009114317 2009-05-11
JP2009205316A JP5444968B2 (ja) 2009-05-11 2009-09-04 アクチュエータ及びこれを用いた光走査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013190157A Division JP5720747B2 (ja) 2009-05-11 2013-09-13 アクチュエータ及びこれを用いた光走査装置

Publications (3)

Publication Number Publication Date
JP2010288435A JP2010288435A (ja) 2010-12-24
JP2010288435A5 JP2010288435A5 (cg-RX-API-DMAC7.html) 2012-09-27
JP5444968B2 true JP5444968B2 (ja) 2014-03-19

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Family Applications (1)

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JP2009205316A Active JP5444968B2 (ja) 2009-05-11 2009-09-04 アクチュエータ及びこれを用いた光走査装置

Country Status (4)

Country Link
US (2) US8610983B2 (cg-RX-API-DMAC7.html)
JP (1) JP5444968B2 (cg-RX-API-DMAC7.html)
CN (2) CN102422521B (cg-RX-API-DMAC7.html)
WO (1) WO2010131557A1 (cg-RX-API-DMAC7.html)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5736766B2 (ja) 2010-12-22 2015-06-17 ミツミ電機株式会社 光走査装置
JP5666955B2 (ja) * 2011-03-24 2015-02-12 スタンレー電気株式会社 光偏向器
WO2013111265A1 (ja) * 2012-01-24 2013-08-01 パイオニア株式会社 アクチュエータ
CN104272166A (zh) * 2012-05-07 2015-01-07 松下知识产权经营株式会社 光学反射元件
JP6180155B2 (ja) * 2013-04-01 2017-08-16 富士電機株式会社 アクチュエータ
JP6349851B2 (ja) * 2014-03-27 2018-07-04 セイコーエプソン株式会社 光学デバイスおよび画像表示装置
WO2015146144A1 (ja) * 2014-03-28 2015-10-01 住友精密工業株式会社 駆動装置
JP5967145B2 (ja) * 2014-06-24 2016-08-10 ミツミ電機株式会社 光走査装置
EP3197052B1 (en) * 2014-09-18 2020-07-01 Mitsumi Electric Co., Ltd. Capacitive load drive circuit and optical scanning device
JP6492914B2 (ja) * 2015-04-15 2019-04-03 株式会社デンソー 光走査装置
US9841163B1 (en) * 2015-04-29 2017-12-12 Cooper Technologies Company Light redirecting flange in luminaires
CN105305877B (zh) * 2015-10-30 2017-08-25 西安交通大学 采用轴向限位—径向箝位机构的尺蠖式压电作动器及方法
IT201600079604A1 (it) * 2016-07-28 2018-01-28 St Microelectronics Srl Struttura oscillante con attuazione piezoelettrica, sistema e metodo di fabbricazione
JP6814076B2 (ja) * 2017-03-14 2021-01-13 浜松ホトニクス株式会社 光モジュール
JP6455547B2 (ja) * 2017-05-24 2019-01-23 ミツミ電機株式会社 光走査装置
JP7066982B2 (ja) * 2017-05-30 2022-05-16 船井電機株式会社 光走査装置
JP6924090B2 (ja) 2017-07-21 2021-08-25 浜松ホトニクス株式会社 アクチュエータ装置
WO2019031420A1 (ja) * 2017-08-10 2019-02-14 浜松ホトニクス株式会社 ミラー装置
KR20200095458A (ko) * 2017-12-01 2020-08-10 하마마츠 포토닉스 가부시키가이샤 액추에이터 장치
JP6585147B2 (ja) 2017-12-01 2019-10-02 浜松ホトニクス株式会社 アクチュエータ装置
JP7132481B2 (ja) * 2018-02-23 2022-09-07 ミツミ電機株式会社 アクチュエータ及び光走査装置
CN108494284B (zh) * 2018-03-26 2020-09-18 徐明秀 一种微角度驱动装置的制备方法
CN108428786B (zh) * 2018-03-26 2020-10-02 浙江宝纺印染有限公司 一种微角度驱动装置的制备方法
CN108614353B (zh) * 2018-05-10 2020-08-04 西安交通大学 基于离子交换聚合金属材料的二维偏转解耦机构及其偏转方法
KR102845738B1 (ko) * 2018-08-10 2025-08-13 하마마츠 포토닉스 가부시키가이샤 액추에이터 장치, 및 액추에이터 장치의 제조 방법
WO2020049028A1 (de) * 2018-09-05 2020-03-12 Behr-Hella Thermocontrol Gmbh Fahrzeug-bedieneinheit mit taktiler rückmeldung
US11221478B2 (en) 2019-04-15 2022-01-11 Microsoft Technology Licensing, Llc MEMS scanner
EP3998505B1 (en) * 2019-04-26 2023-07-19 FUJIFILM Corporation Micromirror device
JP6962348B2 (ja) * 2019-05-13 2021-11-05 株式会社村田製作所 振動装置
JP7297538B2 (ja) * 2019-06-06 2023-06-26 スタンレー電気株式会社 光偏向器及び製造方法
CN112165273B (zh) * 2020-09-24 2021-11-30 南京工程学院 基于同向偏心约束和斜压电陶瓷的耦合模态型超声波电机
JP7600030B2 (ja) * 2021-05-14 2024-12-16 スタンレー電気株式会社 光偏向器
JP2023138058A (ja) * 2022-03-18 2023-09-29 日東電工株式会社 配線回路基板

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3956933B2 (ja) 2002-11-26 2007-08-08 ブラザー工業株式会社 光走査装置および画像形成装置
US7446911B2 (en) 2002-11-26 2008-11-04 Brother Kogyo Kabushiki Kaisha Optical scanning apparatus and image forming apparatus
JP4092283B2 (ja) * 2003-11-17 2008-05-28 スタンレー電気株式会社 ２次元光スキャナ及び光学装置
US7442918B2 (en) * 2004-05-14 2008-10-28 Microvision, Inc. MEMS device having simplified drive
US7535619B2 (en) * 2005-04-27 2009-05-19 Hewlett-Packard Development Company, L.P. Discharge of MEM devices having charge induced via focused beam to enter different states
JP5151065B2 (ja) * 2006-05-19 2013-02-27 コニカミノルタホールディングス株式会社 光スキャナ及び走査型プロジェクタ
WO2009028152A1 (ja) * 2007-08-27 2009-03-05 Panasonic Corporation 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置

Also Published As

Publication number Publication date
US8610983B2 (en) 2013-12-17
US8681404B2 (en) 2014-03-25
JP2010288435A (ja) 2010-12-24
CN103840704A (zh) 2014-06-04
CN102422521A (zh) 2012-04-18
CN102422521B (zh) 2014-09-03
WO2010131557A1 (ja) 2010-11-18
CN103840704B (zh) 2016-09-14
US20140016170A1 (en) 2014-01-16
US20120062970A1 (en) 2012-03-15

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