JP5438908B2 - 電気的試験用接触子、これを用いた電気的接続装置及び接触子の製造方法 - Google Patents

電気的試験用接触子、これを用いた電気的接続装置及び接触子の製造方法 Download PDF

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Publication number
JP5438908B2
JP5438908B2 JP2008060927A JP2008060927A JP5438908B2 JP 5438908 B2 JP5438908 B2 JP 5438908B2 JP 2008060927 A JP2008060927 A JP 2008060927A JP 2008060927 A JP2008060927 A JP 2008060927A JP 5438908 B2 JP5438908 B2 JP 5438908B2
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Japan
Prior art keywords
contact
contact portion
region
pedestal
inclined surfaces
Prior art date
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Active
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JP2008060927A
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English (en)
Japanese (ja)
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JP2009216562A5 (enExample
JP2009216562A (ja
Inventor
秀樹 平川
孝幸 林崎
亮 相馬
優子 山田
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Micronics Japan Co Ltd
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Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP2008060927A priority Critical patent/JP5438908B2/ja
Priority to US12/388,394 priority patent/US7816931B2/en
Publication of JP2009216562A publication Critical patent/JP2009216562A/ja
Publication of JP2009216562A5 publication Critical patent/JP2009216562A5/ja
Application granted granted Critical
Publication of JP5438908B2 publication Critical patent/JP5438908B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49204—Contact or terminal manufacturing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2008060927A 2008-03-11 2008-03-11 電気的試験用接触子、これを用いた電気的接続装置及び接触子の製造方法 Active JP5438908B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008060927A JP5438908B2 (ja) 2008-03-11 2008-03-11 電気的試験用接触子、これを用いた電気的接続装置及び接触子の製造方法
US12/388,394 US7816931B2 (en) 2008-03-11 2009-02-18 Contact for electrical test, electrical connecting apparatus using it, and method of producing the contact

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008060927A JP5438908B2 (ja) 2008-03-11 2008-03-11 電気的試験用接触子、これを用いた電気的接続装置及び接触子の製造方法

Publications (3)

Publication Number Publication Date
JP2009216562A JP2009216562A (ja) 2009-09-24
JP2009216562A5 JP2009216562A5 (enExample) 2011-03-24
JP5438908B2 true JP5438908B2 (ja) 2014-03-12

Family

ID=41062335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008060927A Active JP5438908B2 (ja) 2008-03-11 2008-03-11 電気的試験用接触子、これを用いた電気的接続装置及び接触子の製造方法

Country Status (2)

Country Link
US (1) US7816931B2 (enExample)
JP (1) JP5438908B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009270880A (ja) * 2008-05-02 2009-11-19 Micronics Japan Co Ltd 電子デバイスの電気的試験用接触子、その製造方法及びプローブ組立体
JP5530124B2 (ja) * 2009-07-03 2014-06-25 株式会社日本マイクロニクス 集積回路の試験装置
DE102012224424A1 (de) 2012-12-27 2014-07-17 Robert Bosch Gmbh Sensorsystem und Abdeckvorrichtung für ein Sensorsystem
JP7353859B2 (ja) 2019-08-09 2023-10-02 株式会社日本マイクロニクス 電気的接触子及び電気的接続装置
CN111585145B (zh) * 2020-06-01 2021-02-12 渭南高新区木王科技有限公司 一种高精密探针压接机

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3650311B2 (ja) 2000-06-15 2005-05-18 東京エレクトロン株式会社 コンタクトピン及びプローブカード
JP2006119024A (ja) * 2004-10-22 2006-05-11 Tokyo Electron Ltd プローブおよびその製造方法
WO2006075408A1 (ja) * 2005-01-14 2006-07-20 Kabushiki Kaisha Nihon Micronics 通電試験用プローブ
WO2006095441A1 (ja) * 2005-03-07 2006-09-14 Kabushiki Kaisha Nihon Micronics 通電試験用プローブ及びこれを用いた電気的接続装置
KR100664443B1 (ko) * 2005-08-10 2007-01-03 주식회사 파이컴 캔틸레버형 프로브 및 그 제조 방법
TW200815763A (en) * 2006-09-26 2008-04-01 Nihon Micronics Kabushiki Kaisha Electrical test probe and electrical test probe assembly

Also Published As

Publication number Publication date
US7816931B2 (en) 2010-10-19
US20090230982A1 (en) 2009-09-17
JP2009216562A (ja) 2009-09-24

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