JP5428023B2 - 化合物半導体基板、化合物半導体基板の製造方法及び半導体デバイス - Google Patents
化合物半導体基板、化合物半導体基板の製造方法及び半導体デバイス Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 180
- 239000004065 semiconductor Substances 0.000 title claims description 178
- 150000001875 compounds Chemical class 0.000 title claims description 165
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 230000007547 defect Effects 0.000 claims description 32
- 239000013078 crystal Substances 0.000 claims description 26
- 239000000126 substance Substances 0.000 claims description 26
- 239000010408 film Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 21
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 19
- 239000001257 hydrogen Substances 0.000 claims description 19
- 229910052739 hydrogen Inorganic materials 0.000 claims description 19
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 230000005533 two-dimensional electron gas Effects 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 19
- 230000000052 comparative effect Effects 0.000 description 7
- 238000000619 electron energy-loss spectrum Methods 0.000 description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 5
- 230000001133 acceleration Effects 0.000 description 5
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
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- 238000002474 experimental method Methods 0.000 description 3
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- 238000005259 measurement Methods 0.000 description 3
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- 229910052733 gallium Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- -1 optical devices Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 238000010249 in-situ analysis Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/26—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys
- H01L29/267—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys in different semiconductor regions, e.g. heterojunctions
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/02546—Arsenides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02658—Pretreatments
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N52/00—Hall-effect devices
- H10N52/101—Semiconductor Hall-effect devices
Description
図1は、本発明の実施例1に係るSi基板上の化合物半導体層を含む化合物半導体基板の断面模式図で、図中符号101は4インチのSi単結晶からなるSi基板、102はAsを含む化合物半導体層を示している。
水素終端処理を行った直後のSi基板を、真空度が10−6Torr(1.333×10−4Pa[パスカル])以下の真空装置内に納めた後に、Si基板の基板温度を昇温する。このまま基板温度を上昇させていくと、終端処理された水素が離脱するが、水素が離脱する前に、AsとGaを同時に照射することで、Si基板と化合物半導体層との界面を準備し、化合物半導体層を形成した。この化合物半導体層は0.5μmである。ここで、X線回折実験でドメイン構造を判別したところ、シングルドメインであることが確認された。本試料を約10nmの薄さに薄片化し、これを1250keVの加速エネルギーを有する超高圧電子顕微鏡により、その電子エネルギー損失スペクトル(EELS:ELECTRON ENERGY LOSS SPECTRUM)を2次元観測した結果、GaAsとSi基板の界面にAs濃度が大きい物質が無いことが確認された。
図2は、実施例1の化合物半導体基板を用いて作成されたホール素子の断面模式図で、図中符号201は化合物半導体基板、202はホール素子の受感部、203は窒化Siで形成された保護膜、204はAu/Tiの積層電極部を示している。
Claims (17)
- Si基板上にAsを含む化合物半導体層を設けた化合物半導体基板において、前記Si基板と前記化合物半導体層の界面に、前記化合物半導体層よりもAsの濃度が高い物質が、島状に存在することを特徴とする化合物半導体基板。
- 前記島状物質は、前記Si基板、または、前記化合物半導体層の構成元素の一部から成ることを特徴とする請求項1に記載の化合物半導体基板。
- 前記島状物質が、前記Si基板に対して、エピタキシャル成長していないことを特徴とする請求項1又は2に記載の化合物半導体基板。
- 前記島状物質が、前記Si基板及び前記化合物半導体層と結晶配列が異なることを特徴とする請求項1,2又は3に記載の化合物半導体基板。
- 前記Si基板と前記化合物半導体層との界面から、10nmの位置での前記化合物半導体層の結晶転位(欠陥)が、5.0×108/cm2以上、2.5×1010/cm2以下であることを特徴とする請求項1乃至4のいずれかに記載の化合物半導体基板。
- 前記化合物半導体層の膜厚が、0.1μm以上、2.0μm以下であることを特徴とする請求項1乃至5のいずれかに記載の化合物半導体基板。
- 前記Si基板の成膜面の表面積が10cm2以上であることを特徴とする請求項1乃至6のいずれかに記載の化合物半導体基板。
- 前記化合物半導体層が、シングルドメイン構造であることを特徴とする請求項1乃至7のいずれかに記載の化合物半導体基板。
- 前記化合物半導体層が、InxAlyGaZAs(x+y+z=1)であることを特徴とする請求項1乃至8のいずれかに記載の化合物半導体基板。
- 前記Si基板が、Si薄膜基板であることを特徴とする請求項1乃至9のいずれかに記載の化合物半導体基板。
- Si基板上に、Asを含む化合物半導体層を形成する化合物半導体基板の製造方法において、
水素終端処理したSi基板上に、化合物半導体をエピタキシャル成長させる前に、水素が離脱する基板温度より低い温度で、Asを先行照射して前記Si基板と化合物半導体層の界面となる表面を形成し、Asの先行照射を止めてから数秒後に、前記化合物半導体層を構成する各々の原子を照射して前記化合物半導体層を積層することによって、前記Si基板上に前記化合物半導体層を形成することを特徴とする化合物半導体基板の製造方法。 - 前記Si基板の成膜面の表面積が、10cm2以上であることを特徴とする請求項11に記載の化合物半導体基板の製造方法。
- 前記化合物半導体層が、シングルドメイン構造であることを特徴とする請求項11又は12に記載の化合物半導体基板の製造方法。
- 前記化合物半導体層が、InxAlyGaZAs(x+y+z=1)であることを特徴とする請求項11乃至13のいずれかに記載の化合物半導体基板の製造方法。
- 前記Si基板が、Si薄膜基板であることを特徴とする請求項11乃至14のいずれかに記載の化合物半導体基板の製造方法。
- 請求項1乃至10のいずれかに記載の化合物半導体基板を用いたことを特徴とする半導体デバイス。
- 前記半導体デバイスが、電子デバイス,光デバイス,磁気センサ,太陽電池,2次元電子ガスを利用した超高速デバイスのいずれかであることを特徴とする請求項16に記載の半導体デバイス。
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JP2009532239A JP5428023B2 (ja) | 2007-09-12 | 2008-09-12 | 化合物半導体基板、化合物半導体基板の製造方法及び半導体デバイス |
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JP2007237030 | 2007-09-12 | ||
JP2007237030 | 2007-09-12 | ||
PCT/JP2008/066537 WO2009035079A1 (ja) | 2007-09-12 | 2008-09-12 | 化合物半導体基板、化合物半導体基板の製造方法及び半導体デバイス |
JP2009532239A JP5428023B2 (ja) | 2007-09-12 | 2008-09-12 | 化合物半導体基板、化合物半導体基板の製造方法及び半導体デバイス |
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JPWO2009035079A1 JPWO2009035079A1 (ja) | 2010-12-24 |
JP5428023B2 true JP5428023B2 (ja) | 2014-02-26 |
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Country Status (6)
Country | Link |
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US (1) | US8552533B2 (ja) |
EP (2) | EP3029716A1 (ja) |
JP (1) | JP5428023B2 (ja) |
KR (1) | KR101088985B1 (ja) |
CN (1) | CN101802979B (ja) |
WO (1) | WO2009035079A1 (ja) |
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JP5243606B2 (ja) * | 2009-06-30 | 2013-07-24 | 旭化成エレクトロニクス株式会社 | 磁気センサ |
US10096473B2 (en) * | 2016-04-07 | 2018-10-09 | Aixtron Se | Formation of a layer on a semiconductor substrate |
CN114599965A (zh) * | 2019-11-01 | 2022-06-07 | 三菱电机株式会社 | 化合物半导体的晶体缺陷观察方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07240378A (ja) * | 1994-02-28 | 1995-09-12 | Toshiba Corp | 半導体薄膜製造装置 |
JPH07263357A (ja) * | 1994-03-25 | 1995-10-13 | Hikari Gijutsu Kenkyu Kaihatsu Kk | Iii−v族化合物薄膜の製造方法 |
JPH08306622A (ja) * | 1995-05-01 | 1996-11-22 | Nippon Telegr & Teleph Corp <Ntt> | 化合物半導体の微結晶成長方法 |
JPH0927451A (ja) * | 1995-07-12 | 1997-01-28 | Sumitomo Metal Ind Ltd | 化合物半導体基板の製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2512018B2 (ja) | 1987-10-07 | 1996-07-03 | 松下電子工業株式会社 | ホ―ル効果装置 |
JP3286921B2 (ja) * | 1992-10-09 | 2002-05-27 | 富士通株式会社 | シリコン基板化合物半導体装置 |
JP3414833B2 (ja) | 1993-05-28 | 2003-06-09 | 松下電器産業株式会社 | 半導体薄膜の製造方法および磁電変換素子の製造方法 |
JPH07193331A (ja) | 1993-12-27 | 1995-07-28 | Toshiba Corp | 発光素子用GaAs基板 |
-
2008
- 2008-09-12 US US12/677,627 patent/US8552533B2/en active Active
- 2008-09-12 EP EP15196973.0A patent/EP3029716A1/en not_active Withdrawn
- 2008-09-12 KR KR1020107004906A patent/KR101088985B1/ko not_active IP Right Cessation
- 2008-09-12 WO PCT/JP2008/066537 patent/WO2009035079A1/ja active Application Filing
- 2008-09-12 EP EP08830273A patent/EP2190006A4/en not_active Ceased
- 2008-09-12 JP JP2009532239A patent/JP5428023B2/ja active Active
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07240378A (ja) * | 1994-02-28 | 1995-09-12 | Toshiba Corp | 半導体薄膜製造装置 |
JPH07263357A (ja) * | 1994-03-25 | 1995-10-13 | Hikari Gijutsu Kenkyu Kaihatsu Kk | Iii−v族化合物薄膜の製造方法 |
JPH08306622A (ja) * | 1995-05-01 | 1996-11-22 | Nippon Telegr & Teleph Corp <Ntt> | 化合物半導体の微結晶成長方法 |
JPH0927451A (ja) * | 1995-07-12 | 1997-01-28 | Sumitomo Metal Ind Ltd | 化合物半導体基板の製造方法 |
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US20100200956A1 (en) | 2010-08-12 |
CN101802979A (zh) | 2010-08-11 |
US8552533B2 (en) | 2013-10-08 |
EP2190006A4 (en) | 2011-09-28 |
JPWO2009035079A1 (ja) | 2010-12-24 |
KR20100034058A (ko) | 2010-03-31 |
EP3029716A1 (en) | 2016-06-08 |
KR101088985B1 (ko) | 2011-12-01 |
EP2190006A1 (en) | 2010-05-26 |
CN101802979B (zh) | 2012-02-22 |
WO2009035079A1 (ja) | 2009-03-19 |
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