JP5421709B2 - リニアモータの駆動システム及び制御方法 - Google Patents

リニアモータの駆動システム及び制御方法 Download PDF

Info

Publication number
JP5421709B2
JP5421709B2 JP2009226478A JP2009226478A JP5421709B2 JP 5421709 B2 JP5421709 B2 JP 5421709B2 JP 2009226478 A JP2009226478 A JP 2009226478A JP 2009226478 A JP2009226478 A JP 2009226478A JP 5421709 B2 JP5421709 B2 JP 5421709B2
Authority
JP
Japan
Prior art keywords
mover
stator
control
linear motor
deviation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009226478A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011078196A5 (enExample
JP2011078196A (ja
Inventor
祐樹 野村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
THK Co Ltd
Original Assignee
THK Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by THK Co Ltd filed Critical THK Co Ltd
Priority to JP2009226478A priority Critical patent/JP5421709B2/ja
Priority to US13/499,166 priority patent/US8653766B2/en
Priority to DE112010003861.9T priority patent/DE112010003861B4/de
Priority to CN201080042900.2A priority patent/CN102549912B/zh
Priority to PCT/JP2010/065717 priority patent/WO2011040216A1/ja
Publication of JP2011078196A publication Critical patent/JP2011078196A/ja
Publication of JP2011078196A5 publication Critical patent/JP2011078196A5/ja
Application granted granted Critical
Publication of JP5421709B2 publication Critical patent/JP5421709B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Control Of Linear Motors (AREA)
  • Linear Motors (AREA)
JP2009226478A 2009-09-30 2009-09-30 リニアモータの駆動システム及び制御方法 Active JP5421709B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2009226478A JP5421709B2 (ja) 2009-09-30 2009-09-30 リニアモータの駆動システム及び制御方法
US13/499,166 US8653766B2 (en) 2009-09-30 2010-09-13 Linear motor driving system and linear motor control method
DE112010003861.9T DE112010003861B4 (de) 2009-09-30 2010-09-13 Linearmotor-Antriebssystem und Linearmotor-Steuerverfahren
CN201080042900.2A CN102549912B (zh) 2009-09-30 2010-09-13 线性电动机的驱动系统及控制方法
PCT/JP2010/065717 WO2011040216A1 (ja) 2009-09-30 2010-09-13 リニアモータの駆動システム及び制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009226478A JP5421709B2 (ja) 2009-09-30 2009-09-30 リニアモータの駆動システム及び制御方法

Publications (3)

Publication Number Publication Date
JP2011078196A JP2011078196A (ja) 2011-04-14
JP2011078196A5 JP2011078196A5 (enExample) 2012-03-22
JP5421709B2 true JP5421709B2 (ja) 2014-02-19

Family

ID=43826042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009226478A Active JP5421709B2 (ja) 2009-09-30 2009-09-30 リニアモータの駆動システム及び制御方法

Country Status (5)

Country Link
US (1) US8653766B2 (enExample)
JP (1) JP5421709B2 (enExample)
CN (1) CN102549912B (enExample)
DE (1) DE112010003861B4 (enExample)
WO (1) WO2011040216A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160068662A (ko) * 2014-12-05 2016-06-15 로베르트 보쉬 게엠베하 부서지기 쉬운 물체를 운송하기 위한 운송 장치 및 운송 방법
KR20220101929A (ko) * 2021-01-12 2022-07-19 주식회사 프레스토솔루션 홀센서를 이용한 선형이송장치의 캐리어 위치 제어 방법
US11658598B2 (en) 2019-12-27 2023-05-23 Panasonic Intellectual Property Management Co., Ltd. Linear motor system
US11764717B2 (en) 2020-02-04 2023-09-19 Panasonic Intellectual Property Management Co., Ltd. Linear motor system

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103066894B (zh) * 2012-12-12 2015-05-20 清华大学 一种六自由度磁悬浮工件台
DE102012025323B4 (de) * 2012-12-22 2025-07-31 Festo Se & Co. Kg Verfahren zum Betreiben einer Linearmotoranordnung und Linearmotoranordnung
JP6314372B2 (ja) * 2013-04-22 2018-04-25 村田機械株式会社 位置検出装置、位置検出方法、及び移動体システム
JP6314371B2 (ja) * 2013-04-22 2018-04-25 村田機械株式会社 移動体システム及び移動体の駆動方法
JP5648722B1 (ja) * 2013-08-02 2015-01-07 株式会社安川電機 リニアモータシステム
CN103647496A (zh) * 2013-12-04 2014-03-19 华中科技大学 交通驱动用单边直线感应电机稳动态特性等效电路
JP6733170B2 (ja) * 2015-08-21 2020-07-29 村田機械株式会社 リニアモータシステム
CA3013079C (en) * 2016-02-01 2023-10-31 Technologies Lanka Inc. Door actuators, integrated door actuator and method of operating a door actuator of a transit vehicle
KR20170137253A (ko) * 2016-06-02 2017-12-13 주식회사 탑 엔지니어링 위치 조절 장치 및 이를 구비한 페이스트 디스펜서
CN109314456A (zh) * 2016-06-30 2019-02-05 雅马哈发动机株式会社 线性马达、头单元、表面安装机及单轴机器人
DE112016007262T8 (de) * 2016-09-26 2019-07-04 Yamaha Hatsudoki Kabushiki Kaisha Positionsdetektiervorrichtung und Linearfördervorrichtung, die mit derselben versehen ist
WO2018055772A1 (ja) 2016-09-26 2018-03-29 ヤマハ発動機株式会社 リニアコンベア装置及びその駆動制御方法
EP3447904B1 (de) * 2017-08-21 2024-03-20 B&R Industrial Automation GmbH Steuerung von langstatorlinearmotor-spulen eines langstatorlinearmotor-stators
US10243502B1 (en) * 2018-02-22 2019-03-26 Hamilton Sundstrand Corporation System and method for detecting latent faults in a redundant motor application
JP7179488B2 (ja) * 2018-05-11 2022-11-29 キヤノン株式会社 搬送システムおよびその制御方法
US10432117B1 (en) * 2018-06-22 2019-10-01 Rockwell Automation Technologies, Inc. System and method for monitoring mover status in an independent cart system
EP3653428A1 (de) * 2018-11-19 2020-05-20 B&R Industrial Automation GmbH Verfahren zum sicheren überwachen der funktion eines langstatorlinearmotors
JP2021090343A (ja) * 2019-12-03 2021-06-10 ベーウントエル・インダストリアル・オートメイション・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 安全機能
CN113739840B (zh) * 2020-05-29 2022-10-04 上海微电子装备（集团）股份有限公司 运动机构的检测装置及检测方法、光刻设备
JP2022019448A (ja) * 2020-07-17 2022-01-27 キヤノン株式会社 搬送システム、制御システム及び制御方法
CN113029211B (zh) * 2021-03-25 2021-11-19 浙江锐鹰传感技术有限公司 动子无线缆的高精度编码器实现方法
WO2023095578A1 (ja) * 2021-11-24 2023-06-01 住友重機械工業株式会社 駆動装置、可動子、制御方法、制御プログラム
CN115085628B (zh) * 2022-06-30 2025-08-19 瑞声光电科技(常州)有限公司 直驱系统的控制方法及相关设备
CN119182338B (zh) * 2024-09-06 2025-07-18 果栗智造(上海)技术股份有限公司 与线性电机设备相关的方法、装置、存储介质及电子设备

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4658214A (en) * 1982-12-28 1987-04-14 Polaroid Corporation Magnetic position indicator using multiple probes
US5252902A (en) * 1990-03-02 1993-10-12 Kabushiki Kaisha Sg Servo control system
JPH0583807A (ja) 1991-09-19 1993-04-02 Hitachi Ltd リニアシンクロナスモータ制御装置
JP3230831B2 (ja) * 1992-01-28 2001-11-19 オークマ株式会社 モータ駆動制御装置
ATE228644T1 (de) * 1997-05-02 2002-12-15 Automation Tooling Syst Modulares fördersystem mit mehreren beweglichen elementen mit unabhängiger steuerung
JP3351990B2 (ja) * 1997-05-27 2002-12-03 オークマ株式会社 ボールネジ駆動系の位置制御装置
JPH11353028A (ja) * 1998-06-09 1999-12-24 Yaskawa Electric Corp モーションコントローラにおける指令制御方法
WO2000046911A1 (en) * 1999-02-04 2000-08-10 Nikon Corporation Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method
JP2000245128A (ja) * 1999-02-22 2000-09-08 Nkk Corp リニア同期モータ
US6876896B1 (en) * 1999-04-26 2005-04-05 Ab Tetrapak Variable motion system and method
JP3447639B2 (ja) * 1999-12-28 2003-09-16 川崎重工業株式会社 ホームドアシステムの制御方法及び装置
JP2004056892A (ja) * 2002-07-18 2004-02-19 Yaskawa Electric Corp リニアモータ装置
JP2004080881A (ja) 2002-08-13 2004-03-11 Shinko Electric Co Ltd リニアモータの速度変動低減方法
KR100984604B1 (ko) * 2004-10-01 2010-09-30 가부시키가이샤 야스카와덴키 리니어 모터 시스템
CN2847692Y (zh) * 2005-12-05 2006-12-13 北京中科信电子装备有限公司 离子注入机直线电机控制系统
JP4747184B2 (ja) * 2008-04-14 2011-08-17 本田技研工業株式会社 電動機
JP2010035287A (ja) * 2008-07-25 2010-02-12 Hitachi Ltd 円筒型リニアモータ及びそれを用いた電磁サスペンション及び電動パワーステアリング装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160068662A (ko) * 2014-12-05 2016-06-15 로베르트 보쉬 게엠베하 부서지기 쉬운 물체를 운송하기 위한 운송 장치 및 운송 방법
KR102447060B1 (ko) * 2014-12-05 2022-09-26 로베르트 보쉬 게엠베하 부서지기 쉬운 물체를 운송하기 위한 운송 장치 및 운송 방법
US11658598B2 (en) 2019-12-27 2023-05-23 Panasonic Intellectual Property Management Co., Ltd. Linear motor system
US11764717B2 (en) 2020-02-04 2023-09-19 Panasonic Intellectual Property Management Co., Ltd. Linear motor system
KR20220101929A (ko) * 2021-01-12 2022-07-19 주식회사 프레스토솔루션 홀센서를 이용한 선형이송장치의 캐리어 위치 제어 방법

Also Published As

Publication number Publication date
CN102549912A (zh) 2012-07-04
US8653766B2 (en) 2014-02-18
DE112010003861T5 (de) 2013-01-31
WO2011040216A1 (ja) 2011-04-07
CN102549912B (zh) 2014-12-10
DE112010003861B4 (de) 2025-04-03
US20120187873A1 (en) 2012-07-26
JP2011078196A (ja) 2011-04-14

Similar Documents

Publication Publication Date Title
JP5421709B2 (ja) リニアモータの駆動システム及び制御方法
JP5486874B2 (ja) 分散配置リニアモータおよび分散配置リニアモータの制御方法
TWI458251B (zh) 線性同步電動機控制方法及控制裝置
WO2009119810A1 (ja) サーボモータの位置制御装置
JP2015033240A (ja) リニアモータシステム
JP5508181B2 (ja) リニアモータ及びリニアモータ装置
JPWO2010024234A1 (ja) 分散配置リニアモータおよび分散配置リニアモータの駆動システム
JP5224372B2 (ja) 永久磁石同期モータの磁極位置検出方法
JP5529637B2 (ja) リニアモータの位置検出システム
US7425783B2 (en) Linear motor
JP5427037B2 (ja) リニアモータシステム
JP2011050225A (ja) リニアモータおよびリニアモータ駆動システム
JPWO2008117345A1 (ja) リニアモータ及びその制御方法
JP2002223587A (ja) リニアモータの制御装置
JP2005124359A (ja) 同期電動機の電流制御方法および制御装置
JPH06225568A (ja) リニア駆動システム
JP2004309356A (ja) 位置検出方法、位置検出装置及び位置制御装置
JP2011050224A (ja) リニアモータおよびリニアモータ駆動システム
CN120601807A (zh) 用于运行线性马达的方法
JPH08275491A (ja) リニアモータ
JP2010252532A (ja) リニアモータおよびリニアモータ装置
WO2012053405A1 (ja) 制御装置及び制御方法
WO2011158732A1 (ja) リニアモータの制御装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120206

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120810

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20131029

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20131122

R150 Certificate of patent or registration of utility model

Ref document number: 5421709

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250