JP5404628B2 - 多重量子井戸構造を有するオプトエレクトロニクス半導体チップ - Google Patents
多重量子井戸構造を有するオプトエレクトロニクス半導体チップ Download PDFInfo
- Publication number
- JP5404628B2 JP5404628B2 JP2010526158A JP2010526158A JP5404628B2 JP 5404628 B2 JP5404628 B2 JP 5404628B2 JP 2010526158 A JP2010526158 A JP 2010526158A JP 2010526158 A JP2010526158 A JP 2010526158A JP 5404628 B2 JP5404628 B2 JP 5404628B2
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- JP
- Japan
- Prior art keywords
- quantum well
- layer
- semiconductor chip
- layers
- well layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
- H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
- H01S5/3086—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure doping of the active layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Led Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007046027A DE102007046027A1 (de) | 2007-09-26 | 2007-09-26 | Optoelektronischer Halbleiterchip mit einer Mehrfachquantentopfstruktur |
| DE102007046027.0 | 2007-09-26 | ||
| PCT/DE2008/001534 WO2009039830A1 (de) | 2007-09-26 | 2008-09-12 | Optoelektronischer halbleiterchip mit einer mehrfachquantentopfstruktur |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010541223A JP2010541223A (ja) | 2010-12-24 |
| JP2010541223A5 JP2010541223A5 (enExample) | 2011-06-16 |
| JP5404628B2 true JP5404628B2 (ja) | 2014-02-05 |
Family
ID=40194467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010526158A Active JP5404628B2 (ja) | 2007-09-26 | 2008-09-12 | 多重量子井戸構造を有するオプトエレクトロニクス半導体チップ |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8173991B2 (enExample) |
| EP (1) | EP2208240B1 (enExample) |
| JP (1) | JP5404628B2 (enExample) |
| KR (1) | KR101488846B1 (enExample) |
| CN (1) | CN101809767B (enExample) |
| DE (1) | DE102007046027A1 (enExample) |
| TW (1) | TWI443859B (enExample) |
| WO (1) | WO2009039830A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI496318B (zh) * | 2009-06-08 | 2015-08-11 | Epistar Corp | 發光元件及其製造方法 |
| KR100993085B1 (ko) | 2009-12-07 | 2010-11-08 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 패키지 및 라이트 유닛 |
| DE102009060749B4 (de) | 2009-12-30 | 2021-12-30 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronischer Halbleiterchip |
| DE102009060747B4 (de) | 2009-12-30 | 2025-01-09 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiterchip |
| TWI557936B (zh) | 2010-04-30 | 2016-11-11 | 美國波士頓大學信託會 | 具能帶結構位變動之高效率紫外光發光二極體 |
| KR101637596B1 (ko) * | 2010-07-09 | 2016-07-07 | 엘지이노텍 주식회사 | 발광소자 |
| JP6005346B2 (ja) * | 2011-08-12 | 2016-10-12 | シャープ株式会社 | 窒化物半導体発光素子およびその製造方法 |
| DE102013104351B4 (de) | 2013-04-29 | 2022-01-20 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiterschichtenfolge und Verfahren zum Betreiben eines optoelektronischen Halbleiterchips |
| JP6426359B2 (ja) * | 2014-03-24 | 2018-11-21 | 株式会社東芝 | 半導体発光素子及びその製造方法 |
| DE102014111058A1 (de) | 2014-08-04 | 2016-02-04 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement und Verfahren zur Herstellung |
| FR3028671B1 (fr) * | 2014-11-19 | 2018-03-09 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Diode electroluminescente a puits quantiques dopes et procede de fabrication associe |
| JP6188866B2 (ja) * | 2016-05-19 | 2017-08-30 | シャープ株式会社 | 窒化物半導体発光素子の製造方法 |
| DE102016120419A1 (de) | 2016-10-26 | 2018-04-26 | Osram Opto Semiconductors Gmbh | Halbleiterkörper |
| KR20200009843A (ko) | 2018-07-20 | 2020-01-30 | 홍익대학교 산학협력단 | 광전 소자 및 그 제조 방법 |
| JP2020167321A (ja) * | 2019-03-29 | 2020-10-08 | 旭化成株式会社 | 窒化物半導体発光素子 |
| JP7469677B2 (ja) * | 2019-11-26 | 2024-04-17 | 日亜化学工業株式会社 | 窒化物半導体素子 |
| CN118782700B (zh) * | 2024-09-11 | 2024-11-22 | 江西兆驰半导体有限公司 | 用于Micro-LED的外延片及其制备方法、Micro-LED |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5475701A (en) * | 1993-12-29 | 1995-12-12 | Honeywell Inc. | Integrated laser power monitor |
| US5606572A (en) * | 1994-03-24 | 1997-02-25 | Vixel Corporation | Integration of laser with photodiode for feedback control |
| US5757837A (en) * | 1996-10-16 | 1998-05-26 | The Regents Of The University Of California | Intracavity quantum well photodetector integrated within a vertical-cavity surface-emitting laser and method of operating same |
| US6849866B2 (en) * | 1996-10-16 | 2005-02-01 | The University Of Connecticut | High performance optoelectronic and electronic inversion channel quantum well devices suitable for monolithic integration |
| US6121634A (en) * | 1997-02-21 | 2000-09-19 | Kabushiki Kaisha Toshiba | Nitride semiconductor light emitting device and its manufacturing method |
| JP3904709B2 (ja) * | 1997-02-21 | 2007-04-11 | 株式会社東芝 | 窒化物系半導体発光素子およびその製造方法 |
| US5831277A (en) | 1997-03-19 | 1998-11-03 | Northwestern University | III-nitride superlattice structures |
| EP2169733B1 (de) | 1997-09-29 | 2017-07-19 | OSRAM Opto Semiconductors GmbH | Halbleiterlichtquelle |
| US6064683A (en) * | 1997-12-12 | 2000-05-16 | Honeywell Inc. | Bandgap isolated light emitter |
| US6608330B1 (en) * | 1998-09-21 | 2003-08-19 | Nichia Corporation | Light emitting device |
| US6153894A (en) * | 1998-11-12 | 2000-11-28 | Showa Denko Kabushiki Kaisha | Group-III nitride semiconductor light-emitting device |
| JP3719047B2 (ja) * | 1999-06-07 | 2005-11-24 | 日亜化学工業株式会社 | 窒化物半導体素子 |
| JP2001053339A (ja) * | 1999-08-11 | 2001-02-23 | Toshiba Corp | 半導体発光素子およびその製造方法 |
| DE19955747A1 (de) * | 1999-11-19 | 2001-05-23 | Osram Opto Semiconductors Gmbh | Optische Halbleitervorrichtung mit Mehrfach-Quantentopf-Struktur |
| JP3778765B2 (ja) * | 2000-03-24 | 2006-05-24 | 三洋電機株式会社 | 窒化物系半導体素子およびその製造方法 |
| US6586762B2 (en) | 2000-07-07 | 2003-07-01 | Nichia Corporation | Nitride semiconductor device with improved lifetime and high output power |
| US20020017652A1 (en) * | 2000-08-08 | 2002-02-14 | Stefan Illek | Semiconductor chip for optoelectronics |
| US6936488B2 (en) | 2000-10-23 | 2005-08-30 | General Electric Company | Homoepitaxial gallium-nitride-based light emitting device and method for producing |
| JP4161603B2 (ja) | 2001-03-28 | 2008-10-08 | 日亜化学工業株式会社 | 窒化物半導体素子 |
| WO2002080320A1 (fr) * | 2001-03-28 | 2002-10-10 | Nichia Corporation | Element semi-conducteur a base de nitrure |
| EP1401027B1 (en) * | 2001-05-30 | 2009-04-08 | Cree, Inc. | Group III nitride based light emitting diode with a superlattice structure |
| US6958497B2 (en) * | 2001-05-30 | 2005-10-25 | Cree, Inc. | Group III nitride based light emitting diode structures with a quantum well and superlattice, group III nitride based quantum well structures and group III nitride based superlattice structures |
| JP2003229645A (ja) * | 2002-01-31 | 2003-08-15 | Nec Corp | 量子井戸構造およびそれを用いた半導体素子ならびに半導体素子の製造方法 |
| TWI271877B (en) * | 2002-06-04 | 2007-01-21 | Nitride Semiconductors Co Ltd | Gallium nitride compound semiconductor device and manufacturing method |
| TWI234915B (en) | 2002-11-18 | 2005-06-21 | Pioneer Corp | Semiconductor light-emitting element and method of manufacturing the same |
| WO2004051759A1 (ja) * | 2002-12-03 | 2004-06-17 | Nec Corporation | 量子井戸構造を有する半導体光素子およびその製造方法 |
| US7277461B2 (en) * | 2003-06-27 | 2007-10-02 | Finisar Corporation | Dielectric VCSEL gain guide |
| US7054345B2 (en) * | 2003-06-27 | 2006-05-30 | Finisar Corporation | Enhanced lateral oxidation |
| KR100476567B1 (ko) * | 2003-09-26 | 2005-03-17 | 삼성전기주식회사 | 질화물 반도체 소자 |
| DE102005016592A1 (de) * | 2004-04-14 | 2005-11-24 | Osram Opto Semiconductors Gmbh | Leuchtdiodenchip |
| US7366217B2 (en) * | 2004-06-25 | 2008-04-29 | Finisar Corporation | Optimizing mirror reflectivity for reducing spontaneous emissions in photodiodes |
| US7184455B2 (en) * | 2004-06-25 | 2007-02-27 | Finisar Corporation | Mirrors for reducing the effects of spontaneous emissions in photodiodes |
-
2007
- 2007-09-26 DE DE102007046027A patent/DE102007046027A1/de not_active Withdrawn
-
2008
- 2008-09-12 WO PCT/DE2008/001534 patent/WO2009039830A1/de not_active Ceased
- 2008-09-12 KR KR1020107008962A patent/KR101488846B1/ko active Active
- 2008-09-12 US US12/680,463 patent/US8173991B2/en active Active
- 2008-09-12 JP JP2010526158A patent/JP5404628B2/ja active Active
- 2008-09-12 EP EP08801326.3A patent/EP2208240B1/de active Active
- 2008-09-12 CN CN2008801089782A patent/CN101809767B/zh active Active
- 2008-09-22 TW TW097136253A patent/TWI443859B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| KR101488846B1 (ko) | 2015-02-03 |
| TW200924245A (en) | 2009-06-01 |
| EP2208240A1 (de) | 2010-07-21 |
| TWI443859B (zh) | 2014-07-01 |
| CN101809767A (zh) | 2010-08-18 |
| US8173991B2 (en) | 2012-05-08 |
| KR20100056572A (ko) | 2010-05-27 |
| CN101809767B (zh) | 2012-06-13 |
| US20110042643A1 (en) | 2011-02-24 |
| JP2010541223A (ja) | 2010-12-24 |
| EP2208240B1 (de) | 2018-08-29 |
| WO2009039830A1 (de) | 2009-04-02 |
| DE102007046027A1 (de) | 2009-04-02 |
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