CN101809767B - 带有多量子阱结构的光电子半导体芯片 - Google Patents
带有多量子阱结构的光电子半导体芯片 Download PDFInfo
- Publication number
- CN101809767B CN101809767B CN2008801089782A CN200880108978A CN101809767B CN 101809767 B CN101809767 B CN 101809767B CN 2008801089782 A CN2008801089782 A CN 2008801089782A CN 200880108978 A CN200880108978 A CN 200880108978A CN 101809767 B CN101809767 B CN 101809767B
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- Prior art keywords
- quantum well
- semiconductor chip
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- well layer
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
- H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
- H01S5/3086—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure doping of the active layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Led Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007046027A DE102007046027A1 (de) | 2007-09-26 | 2007-09-26 | Optoelektronischer Halbleiterchip mit einer Mehrfachquantentopfstruktur |
| DE102007046027.0 | 2007-09-26 | ||
| PCT/DE2008/001534 WO2009039830A1 (de) | 2007-09-26 | 2008-09-12 | Optoelektronischer halbleiterchip mit einer mehrfachquantentopfstruktur |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101809767A CN101809767A (zh) | 2010-08-18 |
| CN101809767B true CN101809767B (zh) | 2012-06-13 |
Family
ID=40194467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008801089782A Active CN101809767B (zh) | 2007-09-26 | 2008-09-12 | 带有多量子阱结构的光电子半导体芯片 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8173991B2 (enExample) |
| EP (1) | EP2208240B1 (enExample) |
| JP (1) | JP5404628B2 (enExample) |
| KR (1) | KR101488846B1 (enExample) |
| CN (1) | CN101809767B (enExample) |
| DE (1) | DE102007046027A1 (enExample) |
| TW (1) | TWI443859B (enExample) |
| WO (1) | WO2009039830A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI496318B (zh) * | 2009-06-08 | 2015-08-11 | Epistar Corp | 發光元件及其製造方法 |
| KR100993085B1 (ko) | 2009-12-07 | 2010-11-08 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 패키지 및 라이트 유닛 |
| DE102009060749B4 (de) | 2009-12-30 | 2021-12-30 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronischer Halbleiterchip |
| DE102009060747B4 (de) | 2009-12-30 | 2025-01-09 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiterchip |
| TWI557936B (zh) | 2010-04-30 | 2016-11-11 | 美國波士頓大學信託會 | 具能帶結構位變動之高效率紫外光發光二極體 |
| KR101637596B1 (ko) * | 2010-07-09 | 2016-07-07 | 엘지이노텍 주식회사 | 발광소자 |
| JP6005346B2 (ja) * | 2011-08-12 | 2016-10-12 | シャープ株式会社 | 窒化物半導体発光素子およびその製造方法 |
| DE102013104351B4 (de) | 2013-04-29 | 2022-01-20 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiterschichtenfolge und Verfahren zum Betreiben eines optoelektronischen Halbleiterchips |
| JP6426359B2 (ja) * | 2014-03-24 | 2018-11-21 | 株式会社東芝 | 半導体発光素子及びその製造方法 |
| DE102014111058A1 (de) | 2014-08-04 | 2016-02-04 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement und Verfahren zur Herstellung |
| FR3028671B1 (fr) * | 2014-11-19 | 2018-03-09 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Diode electroluminescente a puits quantiques dopes et procede de fabrication associe |
| JP6188866B2 (ja) * | 2016-05-19 | 2017-08-30 | シャープ株式会社 | 窒化物半導体発光素子の製造方法 |
| DE102016120419A1 (de) | 2016-10-26 | 2018-04-26 | Osram Opto Semiconductors Gmbh | Halbleiterkörper |
| KR20200009843A (ko) | 2018-07-20 | 2020-01-30 | 홍익대학교 산학협력단 | 광전 소자 및 그 제조 방법 |
| JP2020167321A (ja) * | 2019-03-29 | 2020-10-08 | 旭化成株式会社 | 窒化物半導体発光素子 |
| JP7469677B2 (ja) * | 2019-11-26 | 2024-04-17 | 日亜化学工業株式会社 | 窒化物半導体素子 |
| CN118782700B (zh) * | 2024-09-11 | 2024-11-22 | 江西兆驰半导体有限公司 | 用于Micro-LED的外延片及其制备方法、Micro-LED |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1076390A2 (en) * | 1999-08-11 | 2001-02-14 | Kabushiki Kaisha Toshiba | Semiconductor light-emitting element and method of fabrication thereof |
| WO2002080320A1 (fr) * | 2001-03-28 | 2002-10-10 | Nichia Corporation | Element semi-conducteur a base de nitrure |
| WO2003065526A1 (en) * | 2002-01-31 | 2003-08-07 | Nec Corporation | Quantum well structure and semiconductor element using it and production method of semiconductor element |
| WO2004051759A1 (ja) * | 2002-12-03 | 2004-06-17 | Nec Corporation | 量子井戸構造を有する半導体光素子およびその製造方法 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5475701A (en) * | 1993-12-29 | 1995-12-12 | Honeywell Inc. | Integrated laser power monitor |
| US5606572A (en) * | 1994-03-24 | 1997-02-25 | Vixel Corporation | Integration of laser with photodiode for feedback control |
| US5757837A (en) * | 1996-10-16 | 1998-05-26 | The Regents Of The University Of California | Intracavity quantum well photodetector integrated within a vertical-cavity surface-emitting laser and method of operating same |
| US6849866B2 (en) * | 1996-10-16 | 2005-02-01 | The University Of Connecticut | High performance optoelectronic and electronic inversion channel quantum well devices suitable for monolithic integration |
| US6121634A (en) * | 1997-02-21 | 2000-09-19 | Kabushiki Kaisha Toshiba | Nitride semiconductor light emitting device and its manufacturing method |
| JP3904709B2 (ja) * | 1997-02-21 | 2007-04-11 | 株式会社東芝 | 窒化物系半導体発光素子およびその製造方法 |
| US5831277A (en) | 1997-03-19 | 1998-11-03 | Northwestern University | III-nitride superlattice structures |
| EP2169733B1 (de) | 1997-09-29 | 2017-07-19 | OSRAM Opto Semiconductors GmbH | Halbleiterlichtquelle |
| US6064683A (en) * | 1997-12-12 | 2000-05-16 | Honeywell Inc. | Bandgap isolated light emitter |
| US6608330B1 (en) * | 1998-09-21 | 2003-08-19 | Nichia Corporation | Light emitting device |
| US6153894A (en) * | 1998-11-12 | 2000-11-28 | Showa Denko Kabushiki Kaisha | Group-III nitride semiconductor light-emitting device |
| JP3719047B2 (ja) * | 1999-06-07 | 2005-11-24 | 日亜化学工業株式会社 | 窒化物半導体素子 |
| DE19955747A1 (de) * | 1999-11-19 | 2001-05-23 | Osram Opto Semiconductors Gmbh | Optische Halbleitervorrichtung mit Mehrfach-Quantentopf-Struktur |
| JP3778765B2 (ja) * | 2000-03-24 | 2006-05-24 | 三洋電機株式会社 | 窒化物系半導体素子およびその製造方法 |
| US6586762B2 (en) | 2000-07-07 | 2003-07-01 | Nichia Corporation | Nitride semiconductor device with improved lifetime and high output power |
| US20020017652A1 (en) * | 2000-08-08 | 2002-02-14 | Stefan Illek | Semiconductor chip for optoelectronics |
| US6936488B2 (en) | 2000-10-23 | 2005-08-30 | General Electric Company | Homoepitaxial gallium-nitride-based light emitting device and method for producing |
| JP4161603B2 (ja) | 2001-03-28 | 2008-10-08 | 日亜化学工業株式会社 | 窒化物半導体素子 |
| EP1401027B1 (en) * | 2001-05-30 | 2009-04-08 | Cree, Inc. | Group III nitride based light emitting diode with a superlattice structure |
| US6958497B2 (en) * | 2001-05-30 | 2005-10-25 | Cree, Inc. | Group III nitride based light emitting diode structures with a quantum well and superlattice, group III nitride based quantum well structures and group III nitride based superlattice structures |
| TWI271877B (en) * | 2002-06-04 | 2007-01-21 | Nitride Semiconductors Co Ltd | Gallium nitride compound semiconductor device and manufacturing method |
| TWI234915B (en) | 2002-11-18 | 2005-06-21 | Pioneer Corp | Semiconductor light-emitting element and method of manufacturing the same |
| US7277461B2 (en) * | 2003-06-27 | 2007-10-02 | Finisar Corporation | Dielectric VCSEL gain guide |
| US7054345B2 (en) * | 2003-06-27 | 2006-05-30 | Finisar Corporation | Enhanced lateral oxidation |
| KR100476567B1 (ko) * | 2003-09-26 | 2005-03-17 | 삼성전기주식회사 | 질화물 반도체 소자 |
| DE102005016592A1 (de) * | 2004-04-14 | 2005-11-24 | Osram Opto Semiconductors Gmbh | Leuchtdiodenchip |
| US7366217B2 (en) * | 2004-06-25 | 2008-04-29 | Finisar Corporation | Optimizing mirror reflectivity for reducing spontaneous emissions in photodiodes |
| US7184455B2 (en) * | 2004-06-25 | 2007-02-27 | Finisar Corporation | Mirrors for reducing the effects of spontaneous emissions in photodiodes |
-
2007
- 2007-09-26 DE DE102007046027A patent/DE102007046027A1/de not_active Withdrawn
-
2008
- 2008-09-12 WO PCT/DE2008/001534 patent/WO2009039830A1/de not_active Ceased
- 2008-09-12 KR KR1020107008962A patent/KR101488846B1/ko active Active
- 2008-09-12 US US12/680,463 patent/US8173991B2/en active Active
- 2008-09-12 JP JP2010526158A patent/JP5404628B2/ja active Active
- 2008-09-12 EP EP08801326.3A patent/EP2208240B1/de active Active
- 2008-09-12 CN CN2008801089782A patent/CN101809767B/zh active Active
- 2008-09-22 TW TW097136253A patent/TWI443859B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1076390A2 (en) * | 1999-08-11 | 2001-02-14 | Kabushiki Kaisha Toshiba | Semiconductor light-emitting element and method of fabrication thereof |
| WO2002080320A1 (fr) * | 2001-03-28 | 2002-10-10 | Nichia Corporation | Element semi-conducteur a base de nitrure |
| WO2003065526A1 (en) * | 2002-01-31 | 2003-08-07 | Nec Corporation | Quantum well structure and semiconductor element using it and production method of semiconductor element |
| WO2004051759A1 (ja) * | 2002-12-03 | 2004-06-17 | Nec Corporation | 量子井戸構造を有する半導体光素子およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101488846B1 (ko) | 2015-02-03 |
| TW200924245A (en) | 2009-06-01 |
| EP2208240A1 (de) | 2010-07-21 |
| TWI443859B (zh) | 2014-07-01 |
| CN101809767A (zh) | 2010-08-18 |
| US8173991B2 (en) | 2012-05-08 |
| KR20100056572A (ko) | 2010-05-27 |
| JP5404628B2 (ja) | 2014-02-05 |
| US20110042643A1 (en) | 2011-02-24 |
| JP2010541223A (ja) | 2010-12-24 |
| EP2208240B1 (de) | 2018-08-29 |
| WO2009039830A1 (de) | 2009-04-02 |
| DE102007046027A1 (de) | 2009-04-02 |
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| C06 | Publication | ||
| PB01 | Publication | ||
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |