JP5403702B2 - 銅ボンディングワイヤ - Google Patents
銅ボンディングワイヤ Download PDFInfo
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- JP5403702B2 JP5403702B2 JP2011087299A JP2011087299A JP5403702B2 JP 5403702 B2 JP5403702 B2 JP 5403702B2 JP 2011087299 A JP2011087299 A JP 2011087299A JP 2011087299 A JP2011087299 A JP 2011087299A JP 5403702 B2 JP5403702 B2 JP 5403702B2
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- H01L24/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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Description
チップクラック評価には、デイジ社のボンドテスター5000を用いて、ワイヤ中央にフックを掛けて引っ張って200本のワイヤのスティッチプル破壊試験を行い、破壊モードのうち、チップが損傷してチップの欠けが発生した場合をNGとした。(表2では、「チップ損傷」と表示している。)
アルミニウムパッド下損傷については、各ワイヤ試料を用いて超音波熱圧着ボールボンディングを行った後に、水酸化カリウム水溶液で銅ボールごとアルミニウムを洗い流し、アルミニウム電極下のTi膜やSi層の損傷具合を観察し、いずれか一方にひび割れ・欠け等の損傷が200個中1個でも発生した場合をNGと判定した。(表2では、「パッド下損傷」と表示している。)
図1は、本実施例に係る銅ボンディングワイヤの評価を行うHAST装置の一例の概略構成を示した図である。信頼性に関しては、図1に示されるHAST装置で評価した。図1において、HAST装置は、試料となる銅ボンディングワイヤ10と、ボール20と、半導体素子30と、アルミニウム電極40と、アルミニウム配線41と、銀めっき付きリード50と、封止エポキシ樹脂60と、抵抗測定器70とを備える。
表2に示す本評価で重要な項目は、小さな開口部内でボール接合するためのボールつぶし形状、Low−k膜などの低誘電体材料を損傷しないためのプル試験損傷とパッド下損傷、従来の4N純度のベア銅線よりも高い信頼性を得るための450時間のHASTである。なお、表2において、OKの場合は「○」、NGの場合は「×」で評価結果を示している。
20 ボール
30 半導体素子
40 アルミニウム電極
41 アルミニウム配線
50 銀めっき付きリード
60 封止エポキシ樹脂
70 抵抗測定器
80 凸状押し込み
Claims (4)
- 主成分が銅であって、硫黄が0.1質量ppm以上3質量ppm以下、パラジウムが400質量ppm以上5000質量ppm以下添加されたことを特徴とする銅ボンディングワイヤ。
- 前記硫黄の添加量が0.1質量ppm以上1質量ppm以下、前記パラジウムの添加量が400質量ppm以上2000質量ppm以下であることを特徴とする請求項1に記載の銅ボンディングワイヤ。
- 更に銀が5質量ppm以上50質量ppm以下添加されたことを特徴とする請求項1又は2に記載の銅ボンディングワイヤ。
- 線径が18.0μm以下であることを特徴とする請求項1乃至3のいずれか一項に記載の銅ボンディングワイヤ。
Priority Applications (1)
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JP2011087299A JP5403702B2 (ja) | 2011-04-11 | 2011-04-11 | 銅ボンディングワイヤ |
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JP2011087299A JP5403702B2 (ja) | 2011-04-11 | 2011-04-11 | 銅ボンディングワイヤ |
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JP2012222194A JP2012222194A (ja) | 2012-11-12 |
JP5403702B2 true JP5403702B2 (ja) | 2014-01-29 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2016028417A (ja) * | 2014-07-11 | 2016-02-25 | ローム株式会社 | 電子装置 |
JP6422768B2 (ja) * | 2014-12-24 | 2018-11-14 | タツタ電線株式会社 | 銅ボンディングワイヤの製造方法 |
WO2016189752A1 (ja) * | 2015-05-26 | 2016-12-01 | 日鉄住金マイクロメタル株式会社 | 半導体装置用ボンディングワイヤ |
JP6801641B2 (ja) * | 2017-12-21 | 2020-12-16 | 株式会社村田製作所 | インダクタ部品 |
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JP4204359B2 (ja) * | 2002-03-26 | 2009-01-07 | 株式会社野毛電気工業 | ボンディングワイヤーおよびそれを使用した集積回路デバイス |
JP4158928B2 (ja) * | 2004-09-02 | 2008-10-01 | 古河電気工業株式会社 | ボンディングワイヤー及びその製造方法 |
JP5152897B2 (ja) * | 2006-11-21 | 2013-02-27 | タツタ電線株式会社 | 銅ボンディングワイヤ |
JP2009059962A (ja) * | 2007-08-31 | 2009-03-19 | Sumitomo Metal Mining Co Ltd | 半導体パッケージ |
JP5109881B2 (ja) * | 2008-09-04 | 2012-12-26 | 住友金属鉱山株式会社 | 銅ボンディングワイヤ |
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