JP2005294874A - ワイヤをウェッジ接合した半導体装置及び金合金ボンディングワイヤ - Google Patents
ワイヤをウェッジ接合した半導体装置及び金合金ボンディングワイヤ Download PDFInfo
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- JP2005294874A JP2005294874A JP2005197314A JP2005197314A JP2005294874A JP 2005294874 A JP2005294874 A JP 2005294874A JP 2005197314 A JP2005197314 A JP 2005197314A JP 2005197314 A JP2005197314 A JP 2005197314A JP 2005294874 A JP2005294874 A JP 2005294874A
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Abstract
【解決手段】 電極膜3上に金属バンプ2を形成し、そのバンプ2上に金合金ボンディングワイヤ1をウェッジ接合する場合はそのバンプ2の高さHを2t+2≦H≦6t+50(μm)とする。さらにバンプのワイヤ結線方向に対して垂直方向の長さS、平行方向の長さL、ワイヤ径Wの関係が1.3W≦S≦4W、1.5W≦L≦5Wである。適切な高さ、形状を有する金属バンプを介して接合することにより、従来のボール接合よりも狭ピッチ接合に優れ、しかも高い長期信頼性を有する、半導体装置を提供するものである。
【選択図】 図1
Description
(1) 半導体素子上のアルミ及びアルミ合金、Cu及びCu合金、Al層又はAu層を上層とするCu又はCu合金の膜厚tの電極膜上に、金属バンプあるいは、Au層またはAu合金層を表面に形成された金属バンプが形成され、該バンプが高純度Au、Au合金、Pt、Pd、Cu、これらの合金であり、そのバンプ上に金合金ボンディングワイヤがウェッジ接合されており、そのバンプ高さHが2t+2≦H≦6t+50(μm)であることを特徴とする半導体装置。
(2) さらにバンプのワイヤ結線方向に対して垂直方向の長さS、平行方向の長さL、ワイヤ径Wの関係が1.3W≦S≦4W、1.5W≦L≦5Wであることを特徴とする上記(1)に記載の半導体装置。
(3) バンプのビッカース硬度Hbとワイヤのビッカース硬度Hwの関係がHw−10≦Hb≦2Hwであることを特徴とする上記(1)に記載の半導体装置。
(4) さらにチップ面と平行な断面でみたバンプ内の結晶粒の平均径Gとワイヤ径Wの関係が、0.05W≦G≦0.7Wの範囲であることを特徴とする上記(1)に記載の半導体装置。
(5) 半導体素子上のアルミ及びアルミ合金、Cu及びCu合金、Al層又はAu層を上層とするCu又はCu合金の膜厚tの電極膜上に、高純度Au、Au合金、Pt、Pd、Cu、これらの合金の金属バンプが形成され、そのバンプ上に金合金ボンディングワイヤがウェッジ接合されており、且つそのバンプ高さHが2t+2≦H≦6t+50(μm)であり、さらにバンプのワイヤ結線方向に対して垂直方向の長さS、平行方向の長さL、ワイヤ径Wの関係が1.3W≦S≦4W、1.5W≦L≦5Wであり、さらにバンプのビッカース硬度Hbとワイヤのビッカース硬度Hwの関係がHw−10≦Hb≦2Hwの範囲であることを特徴とする半導体装置。
(6) 上記(1)〜(5)のいずれかに記載の半導体装置に用いる金合金ボンディングワイヤであって、引張破断強度F(MPa)が80〜400MPaで、破断伸びC(%)が1〜9%であり、さらに強度Fと伸びCの関係が150≦F・C≦2500の範囲であり、純度が99質量%以上の金であることを特徴とする半導体用の金合金ボンディングワイヤ。
2:金属バンプ
3:電極膜
4:シリコン基板
W:ワイヤ径
D:ワイヤ圧着厚さの最小値
t:電極の膜厚
H:バンプ高さ
S:バンプの横長さ
L:バンプの縦長さ
WD:ウェッジ接合されたワイヤの圧着幅
Claims (6)
- 半導体素子上のアルミ及びアルミ合金、Cu及びCu合金、Al層又はAu層を上層とするCu又はCu合金の膜厚tの電極膜上に、金属バンプあるいは、Au層またはAu合金層を表面に形成された金属バンプが形成され、該バンプが高純度Au、Au合金、Pt、Pd、Cu、これらの合金であり、そのバンプ上に金合金ボンディングワイヤがウェッジ接合されており、そのバンプ高さHが2t+2≦H≦6t+50(μm)であることを特徴とする半導体装置。
- さらにバンプのワイヤ結線方向に対して垂直方向の長さS、平行方向の長さL、ワイヤ径Wの関係が1.3W≦S≦4W、1.5W≦L≦5Wであることを特徴とする請求項1に記載の半導体装置。
- バンプのビッカース硬度Hbとワイヤのビッカース硬度Hwの関係がHw−10≦Hb≦2Hwであることを特徴とする請求項1に記載の半導体装置。
- さらにチップ面と平行な断面でみたバンプ内の結晶粒の平均径Gとワイヤ径Wの関係が、0.05W≦G≦0.7Wの範囲であることを特徴とする請求項1に記載の半導体装置。
- 半導体素子上のアルミ及びアルミ合金、Cu及びCu合金、Al層又はAu層を上層とするCu又はCu合金の膜厚tの電極膜上に、高純度Au、Au合金、Pt、Pd、Cu、これらの合金の金属バンプが形成され、そのバンプ上に金合金ボンディングワイヤがウェッジ接合されており、且つそのバンプ高さHが2t+2≦H≦6t+50(μm)であり、さらにバンプのワイヤ結線方向に対して垂直方向の長さS、平行方向の長さL、ワイヤ径Wの関係が1.3W≦S≦4W、1.5W≦L≦5Wであり、さらにバンプのビッカース硬度Hbとワイヤのビッカース硬度Hwの関係がHw−10≦Hb≦2Hwの範囲であることを特徴とする半導体装置。
- 請求項1〜5のいずれかに記載の半導体装置に用いる金合金ボンディングワイヤであって、引張破断強度F(MPa)が80〜400MPaで、破断伸びC(%)が1〜9%であり、さらに強度Fと伸びCの関係が150≦F・C≦2500の範囲であり、純度が99質量%以上の金であることを特徴とする半導体用の金合金ボンディングワイヤ。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009302261A (ja) * | 2008-06-12 | 2009-12-24 | Toyota Central R&D Labs Inc | 半導体装置 |
JP2010123817A (ja) * | 2008-11-21 | 2010-06-03 | Fujitsu Ltd | ワイヤボンディング方法および電子装置とその製造方法 |
JP2010157683A (ja) * | 2008-12-03 | 2010-07-15 | Renesas Technology Corp | 半導体集積回路装置 |
US8174104B2 (en) * | 2008-06-09 | 2012-05-08 | Micronas Gmbh | Semiconductor arrangement having specially fashioned bond wires |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02114545A (ja) * | 1988-10-24 | 1990-04-26 | Toshiba Corp | ワイヤボンディング接続方法 |
JPH09275119A (ja) * | 1996-04-04 | 1997-10-21 | Nippon Steel Corp | 半導体装置 |
JPH10512399A (ja) * | 1995-09-26 | 1998-11-24 | シーメンス アクチエンゲゼルシヤフト | 半導体チップを少なくとも1つの接触面と電気的に接続する方法 |
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2005
- 2005-07-06 JP JP2005197314A patent/JP2005294874A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH02114545A (ja) * | 1988-10-24 | 1990-04-26 | Toshiba Corp | ワイヤボンディング接続方法 |
JPH10512399A (ja) * | 1995-09-26 | 1998-11-24 | シーメンス アクチエンゲゼルシヤフト | 半導体チップを少なくとも1つの接触面と電気的に接続する方法 |
JPH09275119A (ja) * | 1996-04-04 | 1997-10-21 | Nippon Steel Corp | 半導体装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8174104B2 (en) * | 2008-06-09 | 2012-05-08 | Micronas Gmbh | Semiconductor arrangement having specially fashioned bond wires |
JP2009302261A (ja) * | 2008-06-12 | 2009-12-24 | Toyota Central R&D Labs Inc | 半導体装置 |
JP2010123817A (ja) * | 2008-11-21 | 2010-06-03 | Fujitsu Ltd | ワイヤボンディング方法および電子装置とその製造方法 |
JP2010157683A (ja) * | 2008-12-03 | 2010-07-15 | Renesas Technology Corp | 半導体集積回路装置 |
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