JP5397171B2 - 振動型角速度センサ - Google Patents

振動型角速度センサ Download PDF

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Publication number
JP5397171B2
JP5397171B2 JP2009256089A JP2009256089A JP5397171B2 JP 5397171 B2 JP5397171 B2 JP 5397171B2 JP 2009256089 A JP2009256089 A JP 2009256089A JP 2009256089 A JP2009256089 A JP 2009256089A JP 5397171 B2 JP5397171 B2 JP 5397171B2
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JP
Japan
Prior art keywords
signal
excitation
vibration
angular velocity
velocity sensor
Prior art date
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Expired - Fee Related
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JP2009256089A
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English (en)
Japanese (ja)
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JP2011099818A (ja
JP2011099818A5 (zh
Inventor
潤弥 松岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Corp
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Yamaha Corp
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Priority to JP2009256089A priority Critical patent/JP5397171B2/ja
Publication of JP2011099818A publication Critical patent/JP2011099818A/ja
Publication of JP2011099818A5 publication Critical patent/JP2011099818A5/ja
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JP2009256089A 2009-11-09 2009-11-09 振動型角速度センサ Expired - Fee Related JP5397171B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009256089A JP5397171B2 (ja) 2009-11-09 2009-11-09 振動型角速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009256089A JP5397171B2 (ja) 2009-11-09 2009-11-09 振動型角速度センサ

Publications (3)

Publication Number Publication Date
JP2011099818A JP2011099818A (ja) 2011-05-19
JP2011099818A5 JP2011099818A5 (zh) 2012-12-13
JP5397171B2 true JP5397171B2 (ja) 2014-01-22

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ID=44191099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009256089A Expired - Fee Related JP5397171B2 (ja) 2009-11-09 2009-11-09 振動型角速度センサ

Country Status (1)

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JP (1) JP5397171B2 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101218991B1 (ko) 2010-08-06 2013-01-07 삼성전기주식회사 자이로 센서 구동 장치
KR101237604B1 (ko) * 2011-09-02 2013-02-26 한국기술교육대학교 산학협력단 자이로 센서 구동 장치 및 그 방법
WO2014155997A1 (ja) * 2013-03-29 2014-10-02 旭化成株式会社 角速度センサ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005308530A (ja) * 2004-04-21 2005-11-04 Denso Corp 角速度・加速度複合センサ
JP2006226770A (ja) * 2005-02-16 2006-08-31 Seiko Instruments Inc 力学量センサ
JP2007271320A (ja) * 2006-03-30 2007-10-18 Kyocera Corp 加速度・角速度検出素子およびその製造方法、ならびに加速度・角速度測定装置
JP4234734B2 (ja) * 2006-07-05 2009-03-04 和廣 岡田 角速度センサ
JP5177740B2 (ja) * 2007-10-11 2013-04-10 日本信号株式会社 ジャイロセンサのドリフト抑制方法
JP2009128164A (ja) * 2007-11-22 2009-06-11 Alps Electric Co Ltd 加速度・角速度・磁気方位検出用複合センサ及びこれを用いた装置

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Publication number Publication date
JP2011099818A (ja) 2011-05-19

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