JP5396695B2 - 浮上ユニット及び浮上搬送装置 - Google Patents

浮上ユニット及び浮上搬送装置 Download PDF

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Publication number
JP5396695B2
JP5396695B2 JP2007173433A JP2007173433A JP5396695B2 JP 5396695 B2 JP5396695 B2 JP 5396695B2 JP 2007173433 A JP2007173433 A JP 2007173433A JP 2007173433 A JP2007173433 A JP 2007173433A JP 5396695 B2 JP5396695 B2 JP 5396695B2
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JP
Japan
Prior art keywords
nozzle
unit
thin plate
levitation
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007173433A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009012875A (ja
Inventor
賢輔 平田
刈入 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP2007173433A priority Critical patent/JP5396695B2/ja
Priority to KR1020107000547A priority patent/KR20100018613A/ko
Priority to PCT/JP2008/058625 priority patent/WO2009004859A1/ja
Priority to CN200880021740.6A priority patent/CN101715422B/zh
Priority to TW097121180A priority patent/TW200918427A/zh
Publication of JP2009012875A publication Critical patent/JP2009012875A/ja
Application granted granted Critical
Publication of JP5396695B2 publication Critical patent/JP5396695B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
JP2007173433A 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置 Active JP5396695B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007173433A JP5396695B2 (ja) 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置
KR1020107000547A KR20100018613A (ko) 2007-06-29 2008-05-09 부상 장치 및 부상 반송 장치
PCT/JP2008/058625 WO2009004859A1 (ja) 2007-06-29 2008-05-09 浮上装置及び浮上搬送装置
CN200880021740.6A CN101715422B (zh) 2007-06-29 2008-05-09 悬浮装置及悬浮输送装置
TW097121180A TW200918427A (en) 2007-06-29 2008-06-06 Levitation device and levitation transportation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007173433A JP5396695B2 (ja) 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置

Publications (2)

Publication Number Publication Date
JP2009012875A JP2009012875A (ja) 2009-01-22
JP5396695B2 true JP5396695B2 (ja) 2014-01-22

Family

ID=40225916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007173433A Active JP5396695B2 (ja) 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置

Country Status (5)

Country Link
JP (1) JP5396695B2 (https=)
KR (1) KR20100018613A (https=)
CN (1) CN101715422B (https=)
TW (1) TW200918427A (https=)
WO (1) WO2009004859A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101142959B1 (ko) * 2009-06-29 2012-05-08 김영태 평판 정밀 플로팅 시스템
JP5879680B2 (ja) * 2010-11-05 2016-03-08 株式会社Ihi 非接触式静電チャック
JP5790121B2 (ja) * 2011-04-26 2015-10-07 株式会社Ihi 浮上搬送装置
CN102785940A (zh) * 2012-08-15 2012-11-21 吉林大学 超声波/气浮混合式非接触自动运输装置
CN106829482A (zh) * 2016-11-01 2017-06-13 昆山高艺泽机械设备有限公司 一种气浮式输送系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
JP4501713B2 (ja) * 2005-02-09 2010-07-14 シンフォニアテクノロジー株式会社 エア浮上搬送装置
TW200800773A (en) * 2005-11-14 2008-01-01 Ishikawajima Harima Heavy Ind Floating device and carrying device
KR101213991B1 (ko) * 2005-12-16 2012-12-20 엘아이지에이디피 주식회사 기판 이송 장치 및 방법

Also Published As

Publication number Publication date
CN101715422B (zh) 2013-03-27
KR20100018613A (ko) 2010-02-17
CN101715422A (zh) 2010-05-26
TWI359778B (https=) 2012-03-11
WO2009004859A1 (ja) 2009-01-08
JP2009012875A (ja) 2009-01-22
TW200918427A (en) 2009-05-01

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