KR20100018613A - 부상 장치 및 부상 반송 장치 - Google Patents

부상 장치 및 부상 반송 장치 Download PDF

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Publication number
KR20100018613A
KR20100018613A KR1020107000547A KR20107000547A KR20100018613A KR 20100018613 A KR20100018613 A KR 20100018613A KR 1020107000547 A KR1020107000547 A KR 1020107000547A KR 20107000547 A KR20107000547 A KR 20107000547A KR 20100018613 A KR20100018613 A KR 20100018613A
Authority
KR
South Korea
Prior art keywords
fluid
floating
inner circumference
conveying
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020107000547A
Other languages
English (en)
Korean (ko)
Inventor
겐스케 히라타
가이 다나카
Original Assignee
가부시키가이샤 아이에이치아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 아이에이치아이 filed Critical 가부시키가이샤 아이에이치아이
Publication of KR20100018613A publication Critical patent/KR20100018613A/ko
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
KR1020107000547A 2007-06-29 2008-05-09 부상 장치 및 부상 반송 장치 Ceased KR20100018613A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-173433 2007-06-29
JP2007173433A JP5396695B2 (ja) 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置

Publications (1)

Publication Number Publication Date
KR20100018613A true KR20100018613A (ko) 2010-02-17

Family

ID=40225916

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107000547A Ceased KR20100018613A (ko) 2007-06-29 2008-05-09 부상 장치 및 부상 반송 장치

Country Status (5)

Country Link
JP (1) JP5396695B2 (https=)
KR (1) KR20100018613A (https=)
CN (1) CN101715422B (https=)
TW (1) TW200918427A (https=)
WO (1) WO2009004859A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101142959B1 (ko) * 2009-06-29 2012-05-08 김영태 평판 정밀 플로팅 시스템
JP5879680B2 (ja) * 2010-11-05 2016-03-08 株式会社Ihi 非接触式静電チャック
JP5790121B2 (ja) * 2011-04-26 2015-10-07 株式会社Ihi 浮上搬送装置
CN102785940A (zh) * 2012-08-15 2012-11-21 吉林大学 超声波/气浮混合式非接触自动运输装置
CN106829482A (zh) * 2016-11-01 2017-06-13 昆山高艺泽机械设备有限公司 一种气浮式输送系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
JP4501713B2 (ja) * 2005-02-09 2010-07-14 シンフォニアテクノロジー株式会社 エア浮上搬送装置
TW200800773A (en) * 2005-11-14 2008-01-01 Ishikawajima Harima Heavy Ind Floating device and carrying device
KR101213991B1 (ko) * 2005-12-16 2012-12-20 엘아이지에이디피 주식회사 기판 이송 장치 및 방법

Also Published As

Publication number Publication date
CN101715422B (zh) 2013-03-27
CN101715422A (zh) 2010-05-26
TWI359778B (https=) 2012-03-11
WO2009004859A1 (ja) 2009-01-08
JP2009012875A (ja) 2009-01-22
TW200918427A (en) 2009-05-01
JP5396695B2 (ja) 2014-01-22

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P13-X000 Application amended

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PB0901 Examination by re-examination before a trial

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B601 Maintenance of original decision after re-examination before a trial
PB0601 Maintenance of original decision after re-examination before a trial

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J301 Trial decision

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Effective date: 20130219

PJ1301 Trial decision

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Decision date: 20130219

Appeal event data comment text: Appeal Kind Category : Appeal against decision to decline refusal, Appeal Ground Text : 2010 7000547

Appeal request date: 20120504

Appellate body name: Patent Examination Board

Decision authority category: Office appeal board

Decision identifier: 2012101004336

P22-X000 Classification modified

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