JP5389802B2 - 組織の均一性が改善された高融点金属プレート - Google Patents

組織の均一性が改善された高融点金属プレート Download PDF

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JP5389802B2
JP5389802B2 JP2010519963A JP2010519963A JP5389802B2 JP 5389802 B2 JP5389802 B2 JP 5389802B2 JP 2010519963 A JP2010519963 A JP 2010519963A JP 2010519963 A JP2010519963 A JP 2010519963A JP 5389802 B2 JP5389802 B2 JP 5389802B2
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plate
refractory metal
metal plate
less
thickness
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JP2010535943A (ja
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アール． ジェプソン ピーター
ボズカヤ ディンサー
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エイチ．シー． スターク インコーポレイテッド
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
    • B21B1/22—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
    • B21B1/22—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length
    • B21B1/227—Surface roughening or texturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/18—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces by using pressure rollers
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
    • C22F1/18—High-melting or refractory metals or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B2265/00—Forming parameters
    • B21B2265/24—Forming parameters asymmetric rolling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B2267/00—Roll parameters
    • B21B2267/02—Roll dimensions
    • B21B2267/06—Roll diameter
    • B21B2267/065—Top and bottom roll have different diameters; Asymmetrical rolling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B2273/00—Path parameters
    • B21B2273/02—Vertical deviation, e.g. slack, looper height
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B39/00—Arrangements for moving, supporting, or positioning work, or controlling its movement, combined with or arranged in, or specially adapted for use in connection with, metal-rolling mills
    • B21B39/02—Feeding or supporting work; Braking or tensioning arrangements, e.g. threading arrangements
    • B21B39/04—Lifting or lowering work for conveying purposes, e.g. tilting tables arranged immediately in front of or behind the pass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12014—All metal or with adjacent metals having metal particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12458—All metal or with adjacent metals having composition, density, or hardness gradient

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Metal Rolling (AREA)
  • Powder Metallurgy (AREA)
  • Forging (AREA)
  • Control Of Metal Rolling (AREA)
JP2010519963A 2007-08-06 2008-08-05 組織の均一性が改善された高融点金属プレート Active JP5389802B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US96361607P 2007-08-06 2007-08-06
US60/963,616 2007-08-06
PCT/US2008/009388 WO2009020587A1 (en) 2007-08-06 2008-08-05 Refractory metal plates with improved uniformity of texture

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013143996A Division JP6085531B2 (ja) 2007-08-06 2013-07-09 組織の均一性が改善された高融点金属プレート

Publications (2)

Publication Number Publication Date
JP2010535943A JP2010535943A (ja) 2010-11-25
JP5389802B2 true JP5389802B2 (ja) 2014-01-15

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Family Applications (6)

Application Number Title Priority Date Filing Date
JP2010519963A Active JP5389802B2 (ja) 2007-08-06 2008-08-05 組織の均一性が改善された高融点金属プレート
JP2010519977A Pending JP2010535633A (ja) 2007-08-06 2008-08-06 傾斜圧延法によってプレートおよびシートの組織を制御する方法
JP2013051303A Active JP5766733B2 (ja) 2007-08-06 2013-03-14 傾斜圧延法によってプレートおよびシートの組織を制御する方法
JP2013143996A Active JP6085531B2 (ja) 2007-08-06 2013-07-09 組織の均一性が改善された高融点金属プレート
JP2015122175A Active JP6140771B2 (ja) 2007-08-06 2015-06-17 傾斜圧延法によってプレートおよびシートの組織を制御する方法
JP2016020371A Pending JP2016148110A (ja) 2007-08-06 2016-02-05 組織の均一性が改善された高融点金属プレート

Family Applications After (5)

Application Number Title Priority Date Filing Date
JP2010519977A Pending JP2010535633A (ja) 2007-08-06 2008-08-06 傾斜圧延法によってプレートおよびシートの組織を制御する方法
JP2013051303A Active JP5766733B2 (ja) 2007-08-06 2013-03-14 傾斜圧延法によってプレートおよびシートの組織を制御する方法
JP2013143996A Active JP6085531B2 (ja) 2007-08-06 2013-07-09 組織の均一性が改善された高融点金属プレート
JP2015122175A Active JP6140771B2 (ja) 2007-08-06 2015-06-17 傾斜圧延法によってプレートおよびシートの組織を制御する方法
JP2016020371A Pending JP2016148110A (ja) 2007-08-06 2016-02-05 組織の均一性が改善された高融点金属プレート

Country Status (7)

Country Link
US (5) US9095885B2 (enExample)
EP (3) EP2185300B1 (enExample)
JP (6) JP5389802B2 (enExample)
KR (3) KR101201577B1 (enExample)
CN (2) CN101772385B (enExample)
CA (1) CA2694355A1 (enExample)
WO (2) WO2009020587A1 (enExample)

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EP2998039A1 (en) 2016-03-23
US20210217596A1 (en) 2021-07-15
EP2176009A1 (en) 2010-04-21
KR20100054793A (ko) 2010-05-25
US10943772B2 (en) 2021-03-09
KR20100054127A (ko) 2010-05-24
WO2009020587A1 (en) 2009-02-12
US20180040462A1 (en) 2018-02-08
US20150294844A1 (en) 2015-10-15
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CN103350108B (zh) 2016-12-28
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CA2694355A1 (en) 2009-02-12
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US20090038362A1 (en) 2009-02-12
EP2185300A1 (en) 2010-05-19
US11443929B2 (en) 2022-09-13
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