JP5380827B2 - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法 Download PDF

Info

Publication number
JP5380827B2
JP5380827B2 JP2007308597A JP2007308597A JP5380827B2 JP 5380827 B2 JP5380827 B2 JP 5380827B2 JP 2007308597 A JP2007308597 A JP 2007308597A JP 2007308597 A JP2007308597 A JP 2007308597A JP 5380827 B2 JP5380827 B2 JP 5380827B2
Authority
JP
Japan
Prior art keywords
gate electrode
insulating film
film
semiconductor device
dummy gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007308597A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008172209A5 (enExample
JP2008172209A (ja
Inventor
八州志 舘下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2007308597A priority Critical patent/JP5380827B2/ja
Priority to US12/518,540 priority patent/US8361850B2/en
Priority to PCT/JP2007/073689 priority patent/WO2008072573A1/ja
Priority to KR1020097012118A priority patent/KR101441553B1/ko
Priority to TW096147110A priority patent/TW200843110A/zh
Publication of JP2008172209A publication Critical patent/JP2008172209A/ja
Publication of JP2008172209A5 publication Critical patent/JP2008172209A5/ja
Priority to US13/615,799 priority patent/US9041058B2/en
Application granted granted Critical
Publication of JP5380827B2 publication Critical patent/JP5380827B2/ja
Priority to US14/177,705 priority patent/US9419096B2/en
Priority to US14/672,385 priority patent/US9502529B2/en
Priority to US15/078,079 priority patent/US9865733B2/en
Priority to US15/236,933 priority patent/US9673326B2/en
Priority to US15/818,182 priority patent/US10128374B2/en
Priority to US16/041,956 priority patent/US10868176B2/en
Priority to US17/084,038 priority patent/US11404573B2/en
Priority to US17/845,384 priority patent/US11901454B2/en
Priority to US18/536,880 priority patent/US20240204102A1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0167—Manufacturing their channels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/791—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions
    • H10D30/797—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions being in source or drain regions, e.g. SiGe source or drain
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/28008—Making conductor-insulator-semiconductor electrodes
    • H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H01L21/28088—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a composite, e.g. TiN
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0223—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
    • H10D30/0227—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate having both lightly-doped source and drain extensions and source and drain regions self-aligned to the sides of the gate, e.g. lightly-doped drain [LDD] MOSFET or double-diffused drain [DDD] MOSFET
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H10D30/605—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  having significant overlap between the lightly-doped extensions and the gate electrode
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H10D30/608—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  having non-planar bodies, e.g. having recessed gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/791—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions
    • H10D30/794—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions comprising conductive materials, e.g. silicided source, drain or gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/01—Manufacture or treatment
    • H10D62/021—Forming source or drain recesses by etching e.g. recessing by etching and then refilling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149—Source or drain regions of field-effect devices
    • H10D62/151—Source or drain regions of field-effect devices of IGFETs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/82—Heterojunctions
    • H10D62/822—Heterojunctions comprising only Group IV materials heterojunctions, e.g. Si/Ge heterojunctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/015—Manufacture or treatment removing at least parts of gate spacers, e.g. disposable spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/017—Manufacture or treatment using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/62—Electrodes ohmically coupled to a semiconductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/665—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of elemental metal contacting the insulator, e.g. tungsten or molybdenum
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/667—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN workfunction layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/667—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN workfunction layers
    • H10D64/668—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN workfunction layers the layer being a silicide, e.g. TiSi2
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/691—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator comprising metallic compounds, e.g. metal oxides or metal silicates 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/693—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator the insulator comprising nitrogen, e.g. nitrides, oxynitrides or nitrogen-doped materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/017—Manufacturing their source or drain regions, e.g. silicided source or drain regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0172—Manufacturing their gate conductors
    • H10D84/0177—Manufacturing their gate conductors the gate conductors having different materials or different implants
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0181—Manufacturing their gate insulating layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • H10D84/85—Complementary IGFETs, e.g. CMOS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/28008—Making conductor-insulator-semiconductor electrodes
    • H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H01L21/28079—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a single metal, e.g. Ta, W, Mo, Al

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Materials Engineering (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2007308597A 2006-12-11 2007-11-29 半導体装置の製造方法 Expired - Fee Related JP5380827B2 (ja)

Priority Applications (15)

Application Number Priority Date Filing Date Title
JP2007308597A JP5380827B2 (ja) 2006-12-11 2007-11-29 半導体装置の製造方法
PCT/JP2007/073689 WO2008072573A1 (ja) 2006-12-11 2007-12-07 半導体装置の製造方法および半導体装置
KR1020097012118A KR101441553B1 (ko) 2006-12-11 2007-12-07 반도체 장치의 제조 방법 및 반도체 장치
US12/518,540 US8361850B2 (en) 2006-12-11 2007-12-07 Metal oxide semiconductor having epitaxial source drain regions and a method of manufacturing same using dummy gate process
TW096147110A TW200843110A (en) 2006-12-11 2007-12-10 Semiconductor device manufacturing method and semiconductor device
US13/615,799 US9041058B2 (en) 2006-12-11 2012-09-14 Metal oxide semiconductor having epitaxial source drain regions and method of manufacturing same using dummy gate process
US14/177,705 US9419096B2 (en) 2006-12-11 2014-02-11 Metal oxide semiconductor having epitaxial source drain regions and a method of manufacturing same using dummy gate process
US14/672,385 US9502529B2 (en) 2006-12-11 2015-03-30 Metal oxide semiconductor having epitaxial source drain regions and a method of manufacturing same using dummy gate process
US15/078,079 US9865733B2 (en) 2006-12-11 2016-03-23 Metal oxide semiconductor having epitaxial source drain regions and a method of manufacturing same using dummy gate process
US15/236,933 US9673326B2 (en) 2006-12-11 2016-08-15 Metal oxide semiconductor having epitaxial source drain regions and a method of manufacturing same using dummy gate process
US15/818,182 US10128374B2 (en) 2006-12-11 2017-11-20 Metal oxide semiconductor having epitaxial source drain regions and a method of manufacturing same using dummy gate process
US16/041,956 US10868176B2 (en) 2006-12-11 2018-07-23 Metal oxide semiconductor having epitaxial source drain regions and a method of manufacturing same using dummy gate process
US17/084,038 US11404573B2 (en) 2006-12-11 2020-10-29 Metal oxide semiconductor having epitaxial source drain regions and a method of manufacturing same using dummy gate process
US17/845,384 US11901454B2 (en) 2006-12-11 2022-06-21 Metal oxide semiconductor having epitaxial source drain regions and a method of manufacturing same using dummy gate process
US18/536,880 US20240204102A1 (en) 2006-12-11 2023-12-12 Metal oxide semiconductor having epitaxial source drain regions and a method of manufacturing same using dummy gate process

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006333087 2006-12-11
JP2006333087 2006-12-11
JP2007308597A JP5380827B2 (ja) 2006-12-11 2007-11-29 半導体装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013095337A Division JP5672334B2 (ja) 2006-12-11 2013-04-30 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2008172209A JP2008172209A (ja) 2008-07-24
JP2008172209A5 JP2008172209A5 (enExample) 2011-01-06
JP5380827B2 true JP5380827B2 (ja) 2014-01-08

Family

ID=39699978

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2007308597A Expired - Fee Related JP5380827B2 (ja) 2006-12-11 2007-11-29 半導体装置の製造方法
JP2013095337A Active JP5672334B2 (ja) 2006-12-11 2013-04-30 半導体装置の製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2013095337A Active JP5672334B2 (ja) 2006-12-11 2013-04-30 半導体装置の製造方法

Country Status (4)

Country Link
US (11) US8361850B2 (enExample)
JP (2) JP5380827B2 (enExample)
KR (1) KR101441553B1 (enExample)
TW (1) TW200843110A (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008056289A1 (en) * 2006-11-06 2008-05-15 Nxp B.V. Method of manufacturing a fet gate
JP5100137B2 (ja) * 2007-01-26 2012-12-19 株式会社東芝 半導体装置の製造方法および半導体装置
JP5003515B2 (ja) 2007-03-20 2012-08-15 ソニー株式会社 半導体装置
US7964487B2 (en) * 2008-06-04 2011-06-21 International Business Machines Corporation Carrier mobility enhanced channel devices and method of manufacture
JP2010010266A (ja) * 2008-06-25 2010-01-14 Nec Electronics Corp 半導体装置の製造方法および半導体装置
US8071481B2 (en) 2009-04-23 2011-12-06 Taiwan Semiconductor Manufacturing Co., Ltd. Method for forming highly strained source/drain trenches
DE102009031114B4 (de) * 2009-06-30 2011-07-07 Globalfoundries Dresden Module One LLC & CO. KG, 01109 Halbleiterelement, das in einem kristallinen Substratmaterial hergestellt ist und ein eingebettetes in-situ n-dotiertes Halbleitermaterial aufweist, und Verfahren zur Herstellung desselben
JP2011151166A (ja) * 2010-01-21 2011-08-04 Panasonic Corp 半導体装置及びその製造方法
US8399314B2 (en) * 2010-03-25 2013-03-19 International Business Machines Corporation p-FET with a strained nanowire channel and embedded SiGe source and drain stressors
KR20120058962A (ko) * 2010-11-30 2012-06-08 삼성전자주식회사 반도체 장치의 제조 방법
US8673758B2 (en) * 2011-06-16 2014-03-18 United Microelectronics Corp. Structure of metal gate and fabrication method thereof
JP2013138201A (ja) * 2011-12-23 2013-07-11 Imec 置換ゲートプロセスに従って電界効果半導体デバイスを製造する方法
JP5968708B2 (ja) * 2012-01-23 2016-08-10 ルネサスエレクトロニクス株式会社 半導体装置
FR2986369B1 (fr) * 2012-01-30 2016-12-02 Commissariat Energie Atomique Procede pour contraindre un motif mince et procede de fabrication de transistor integrant ledit procede
KR101876793B1 (ko) * 2012-02-27 2018-07-11 삼성전자주식회사 전계효과 트랜지스터 및 그 제조 방법
US9105498B2 (en) 2012-03-01 2015-08-11 International Business Machines Corporation Gate strain induced work function engineering
CN103311281B (zh) * 2012-03-14 2016-03-30 中国科学院微电子研究所 半导体器件及其制造方法
US8847315B2 (en) * 2012-05-07 2014-09-30 Qualcomm Incorporated Complementary metal-oxide-semiconductor (CMOS) device and method
US20140004677A1 (en) * 2012-06-29 2014-01-02 GlobalFoundries, Inc. High-k Seal for Protection of Replacement Gates
US9093298B2 (en) * 2013-08-22 2015-07-28 Texas Instruments Incorporated Silicide formation due to improved SiGe faceting
US9773869B2 (en) 2014-03-12 2017-09-26 Samsung Electronics Co., Ltd. Semiconductor device and method of fabricating the same
US9515158B1 (en) 2015-10-20 2016-12-06 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor structure with insertion layer and method for manufacturing the same
KR102649484B1 (ko) 2017-01-18 2024-03-20 주식회사 위츠 이중 루프 안테나
WO2019098298A1 (ja) * 2017-11-15 2019-05-23 株式会社Flosfia 半導体装置
US11670688B2 (en) * 2017-11-15 2023-06-06 Flosfia Inc. Semiconductor apparatus
JP7099158B2 (ja) * 2018-08-09 2022-07-12 富士電機株式会社 模擬素子及び抵抗素子の不良検査方法
KR102553773B1 (ko) * 2019-01-09 2023-07-11 어플라이드 머티어리얼스, 인코포레이티드 반도체 디바이스에 구조를 형성하는 방법
US11825661B2 (en) * 2020-09-23 2023-11-21 Taiwan Semiconductor Manufacturing Company Limited Mobility enhancement by source and drain stress layer of implantation in thin film transistors
WO2022170266A1 (en) 2021-02-08 2022-08-11 Applied Materials, Inc. Mosfet gate engineering with dipole films

Family Cites Families (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6054355A (en) * 1997-06-30 2000-04-25 Kabushiki Kaisha Toshiba Method of manufacturing a semiconductor device which includes forming a dummy gate
TW374227B (en) * 1998-04-18 1999-11-11 United Microelectronics Corp Method for manufacturing a metal-oxide semiconductor transistor of a metal gate
US6232641B1 (en) * 1998-05-29 2001-05-15 Kabushiki Kaisha Toshiba Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor
US6737716B1 (en) 1999-01-29 2004-05-18 Kabushiki Kaisha Toshiba Semiconductor device and method of manufacturing the same
JP2000223703A (ja) * 1999-01-29 2000-08-11 Toshiba Corp 半導体装置及びその製造方法
JP4237332B2 (ja) 1999-04-30 2009-03-11 株式会社東芝 半導体装置の製造方法
KR20010004598A (ko) * 1999-06-29 2001-01-15 김영환 반도체 소자의 게이트 형성방법
JP2001024189A (ja) 1999-07-08 2001-01-26 Fujitsu Ltd 半導体装置の製造方法
US6171910B1 (en) 1999-07-21 2001-01-09 Motorola Inc. Method for forming a semiconductor device
JP2001044421A (ja) 1999-07-27 2001-02-16 Mitsubishi Electric Corp Ｍｉｓｆｅｔの製造方法
TW514992B (en) 1999-12-17 2002-12-21 Koninkl Philips Electronics Nv A method of manufacturing a semiconductor device
US7391087B2 (en) * 1999-12-30 2008-06-24 Intel Corporation MOS transistor structure and method of fabrication
US6214679B1 (en) 1999-12-30 2001-04-10 Intel Corporation Cobalt salicidation method on a silicon germanium film
JP2001257344A (ja) 2000-03-10 2001-09-21 Toshiba Corp 半導体装置及び半導体装置の製造方法
JP3851752B2 (ja) 2000-03-27 2006-11-29 株式会社東芝 半導体装置の製造方法
JP2002198521A (ja) * 2000-12-25 2002-07-12 Nec Corp 半導体装置の製造方法
US6631367B2 (en) * 2000-12-28 2003-10-07 Intel Corporation Method and apparatus to search for information
EP1428262A2 (en) * 2001-09-21 2004-06-16 Amberwave Systems Corporation Semiconductor structures employing strained material layers with defined impurity gradients and methods for fabricating same
JP3939952B2 (ja) * 2001-10-05 2007-07-04 オークマ株式会社 レゾルバ付きモータ
JP2004031753A (ja) * 2002-06-27 2004-01-29 Renesas Technology Corp 半導体装置の製造方法
US7358121B2 (en) 2002-08-23 2008-04-15 Intel Corporation Tri-gate devices and methods of fabrication
US20040036129A1 (en) 2002-08-22 2004-02-26 Micron Technology, Inc. Atomic layer deposition of CMOS gates with variable work functions
WO2004097943A1 (ja) 2003-04-28 2004-11-11 Matsushita Electric Industrial Co., Ltd. 半導体装置とその製造方法
US7545001B2 (en) * 2003-11-25 2009-06-09 Taiwan Semiconductor Manufacturing Company Semiconductor device having high drive current and method of manufacture therefor
JP2005291233A (ja) 2004-03-31 2005-10-20 Koyo Seiko Co Ltd サスペンション用のアンギュラ玉軸受
US7449782B2 (en) * 2004-05-04 2008-11-11 International Business Machines Corporation Self-aligned metal to form contacts to Ge containing substrates and structure formed thereby
JP4622318B2 (ja) 2004-06-04 2011-02-02 セイコーエプソン株式会社 半導体装置の製造方法
US7172933B2 (en) * 2004-06-10 2007-02-06 Taiwan Semiconductor Manufacturing Company, Ltd. Recessed polysilicon gate structure for a strained silicon MOSFET device
US7138323B2 (en) * 2004-07-28 2006-11-21 Intel Corporation Planarizing a semiconductor structure to form replacement metal gates
JP4417808B2 (ja) 2004-09-13 2010-02-17 株式会社東芝 半導体装置の製造方法
US7180132B2 (en) 2004-09-16 2007-02-20 Fairchild Semiconductor Corporation Enhanced RESURF HVPMOS device with stacked hetero-doping RIM and gradual drift region
US7332439B2 (en) 2004-09-29 2008-02-19 Intel Corporation Metal gate transistors with epitaxial source and drain regions
TW200620539A (en) 2004-10-14 2006-06-16 Koninkl Philips Electronics Nv BiCMOS compatible JFET device and method of manufacturing same
JP2006114747A (ja) 2004-10-15 2006-04-27 Seiko Epson Corp 半導体装置の製造方法
US20060091483A1 (en) 2004-11-02 2006-05-04 Doczy Mark L Method for making a semiconductor device with a high-k gate dielectric layer and a silicide gate electrode
US7312128B2 (en) 2004-12-01 2007-12-25 Applied Materials, Inc. Selective epitaxy process with alternating gas supply
US7195969B2 (en) 2004-12-31 2007-03-27 Taiwan Semiconductor Manufacturing Co., Ltd. Strained channel CMOS device with fully silicided gate electrode
US7195985B2 (en) 2005-01-04 2007-03-27 Intel Corporation CMOS transistor junction regions formed by a CVD etching and deposition sequence
JP4945900B2 (ja) 2005-01-06 2012-06-06 ソニー株式会社 絶縁ゲート電界効果トランジスタおよびその製造方法
JP5055771B2 (ja) * 2005-02-28 2012-10-24 富士通セミコンダクター株式会社 半導体装置およびその製造方法
US20060202233A1 (en) 2005-02-28 2006-09-14 Fujitsu Limited Semiconductor device and manufacturing method thereof
JP4561419B2 (ja) * 2005-03-16 2010-10-13 ソニー株式会社 半導体装置の製造方法
JP2006351581A (ja) * 2005-06-13 2006-12-28 Fujitsu Ltd 半導体装置の製造方法
US7569443B2 (en) * 2005-06-21 2009-08-04 Intel Corporation Complementary metal oxide semiconductor integrated circuit using raised source drain and replacement metal gate
US8105908B2 (en) * 2005-06-23 2012-01-31 Applied Materials, Inc. Methods for forming a transistor and modulating channel stress
JP2007103654A (ja) 2005-10-04 2007-04-19 Toshiba Corp 半導体装置およびその製造方法
US7358551B2 (en) * 2005-07-21 2008-04-15 International Business Machines Corporation Structure and method for improved stress and yield in pFETs with embedded SiGe source/drain regions
US7229873B2 (en) * 2005-08-10 2007-06-12 Texas Instruments Incorporated Process for manufacturing dual work function metal gates in a microelectronics device
US7326601B2 (en) * 2005-09-26 2008-02-05 Advanced Micro Devices, Inc. Methods for fabrication of a stressed MOS device
US7410859B1 (en) * 2005-11-07 2008-08-12 Advanced Micro Devices, Inc. Stressed MOS device and method for its fabrication
US8159030B2 (en) * 2005-11-30 2012-04-17 Globalfoundries Inc. Strained MOS device and methods for its fabrication
US8101485B2 (en) * 2005-12-16 2012-01-24 Intel Corporation Replacement gates to enhance transistor strain
JP4309911B2 (ja) * 2006-06-08 2009-08-05 株式会社東芝 半導体装置およびその製造方法
US7601574B2 (en) 2006-10-25 2009-10-13 Globalfoundries Inc. Methods for fabricating a stress enhanced MOS transistor
US8466502B2 (en) * 2011-03-24 2013-06-18 United Microelectronics Corp. Metal-gate CMOS device

Also Published As

Publication number Publication date
US8361850B2 (en) 2013-01-29
TW200843110A (en) 2008-11-01
KR101441553B1 (ko) 2014-09-17
US20240204102A1 (en) 2024-06-20
US20100001323A1 (en) 2010-01-07
TWI362753B (enExample) 2012-04-21
US11901454B2 (en) 2024-02-13
KR20090097159A (ko) 2009-09-15
US20160359042A1 (en) 2016-12-08
US20140322880A1 (en) 2014-10-30
US9419096B2 (en) 2016-08-16
US9865733B2 (en) 2018-01-09
JP2013175769A (ja) 2013-09-05
US10868176B2 (en) 2020-12-15
US20130009210A1 (en) 2013-01-10
JP2008172209A (ja) 2008-07-24
US20220352373A1 (en) 2022-11-03
US9673326B2 (en) 2017-06-06
US20210074858A1 (en) 2021-03-11
US20180076325A1 (en) 2018-03-15
JP5672334B2 (ja) 2015-02-18
US20150340498A1 (en) 2015-11-26
US10128374B2 (en) 2018-11-13
US20160204203A1 (en) 2016-07-14
US11404573B2 (en) 2022-08-02
US9502529B2 (en) 2016-11-22
US9041058B2 (en) 2015-05-26
US20180350986A1 (en) 2018-12-06

Similar Documents

Publication Publication Date Title
JP5380827B2 (ja) 半導体装置の製造方法
US7220635B2 (en) Method for making a semiconductor device with a metal gate electrode that is formed on an annealed high-k gate dielectric layer
JP5326274B2 (ja) 半導体装置および半導体装置の製造方法
CN101027770B (zh) 一种包括金属栅电极的集成电路及制备金属栅电极的方法
JP5569173B2 (ja) 半導体装置の製造方法及び半導体装置
JP2010010508A (ja) 半導体装置および半導体装置の製造方法
CN107591367A (zh) 半导体结构的制造方法
WO2007058042A1 (ja) 半導体装置およびその製造方法
TWI509702B (zh) 具有金屬閘極之電晶體及其製作方法
JPWO2007094110A1 (ja) 半導体装置およびその製造方法
WO2008072573A1 (ja) 半導体装置の製造方法および半導体装置
JPWO2006129637A1 (ja) 半導体装置
JP4145272B2 (ja) 半導体装置の製造方法
JP5195421B2 (ja) 半導体装置
KR20100108419A (ko) 박막 및 그 박막을 이용한 반도체 장치의 제조 방법
JPH10199992A (ja) 相補型半導体装置の製造方法

Legal Events

Date Code Title Description
RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20091009

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20091106

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101111

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20101111

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130226

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130430

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130625

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130816

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130903

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130916

R151 Written notification of patent or utility model registration

Ref document number: 5380827

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees