JP5351297B2 - 有機el素子の製造方法 - Google Patents
有機el素子の製造方法 Download PDFInfo
- Publication number
- JP5351297B2 JP5351297B2 JP2012026721A JP2012026721A JP5351297B2 JP 5351297 B2 JP5351297 B2 JP 5351297B2 JP 2012026721 A JP2012026721 A JP 2012026721A JP 2012026721 A JP2012026721 A JP 2012026721A JP 5351297 B2 JP5351297 B2 JP 5351297B2
- Authority
- JP
- Japan
- Prior art keywords
- organic
- organic layer
- pulse laser
- layer
- luminance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000012044 organic layer Substances 0.000 claims description 111
- 230000008439 repair process Effects 0.000 claims description 35
- 230000001678 irradiating effect Effects 0.000 claims description 13
- 230000007547 defect Effects 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000005401 electroluminescence Methods 0.000 description 93
- 239000010410 layer Substances 0.000 description 47
- 238000000034 method Methods 0.000 description 32
- 230000006872 improvement Effects 0.000 description 21
- 239000011368 organic material Substances 0.000 description 19
- 238000002679 ablation Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000005525 hole transport Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000013076 target substance Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
- H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/861—Repairing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
Description
前記有機EL素子を検査するステップと、
前記有機EL素子に欠陥が検出された場合に、前記有機EL素子をリペアするステップと、
前記リペアによって前記有機EL素子に形成された非発光部の周囲の部分に
前記第1の電極を透過させてパルスレーザを照射し、照射前よりも前記有機層の輝度を高めるステップとを備え、
照射された前記パルスレーザのパルス幅が1fs以上且つ1000ps以下であり、エネルギーが30nJ以上且つ60nJ以下である。
3 陰極
4 有機材料層
8 陽極
11 パルスレーザ
16 非点灯部
17 点灯部
18 絶縁化部
21 輝度向上部
23 有機層
24 導電性の有機層
50 非発光部
Claims (3)
- 透明の第1の電極と、
当該第1の電極に対向する第2の電極と、
当該第1及び第2の電極の間に配置された有機層とを有する有機EL素子の製造方法であって、
前記有機EL素子を検査するステップと、
前記有機EL素子に欠陥が検出された場合に、前記有機EL素子をリペアするステップと、
前記リペアによって前記有機EL素子に形成された非発光部の周囲の部分に
前記第1の電極を透過させてパルスレーザを照射し、照射前よりも前記有機層の輝度を高めるステップとを備え、
照射された前記パルスレーザのパルス幅が1fs以上且つ1000ps以下であり、エネルギーが30nJ以上且つ60nJ以下である有機EL素子の製造方法。 - 前記有機層は、照射された前記パルスレーザによってアブレーション加工される請求項
1に記載の有機EL素子の製造方法。 - 前記パルスレーザは、前記有機層の厚さが最も大きい部分に照射される、請求項1又は
請求項2に記載の有機EL素子の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012026721A JP5351297B2 (ja) | 2011-04-27 | 2012-02-09 | 有機el素子の製造方法 |
US13/453,305 US8680764B2 (en) | 2011-04-27 | 2012-04-23 | Method of manufacturing organic EL device and organic EL device |
CN201210120571.XA CN102760843B (zh) | 2011-04-27 | 2012-04-23 | 有机el元件的制造方法和有机el元件 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011098976 | 2011-04-27 | ||
JP2011098976 | 2011-04-27 | ||
JP2012026721A JP5351297B2 (ja) | 2011-04-27 | 2012-02-09 | 有機el素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012238573A JP2012238573A (ja) | 2012-12-06 |
JP5351297B2 true JP5351297B2 (ja) | 2013-11-27 |
Family
ID=47055223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012026721A Expired - Fee Related JP5351297B2 (ja) | 2011-04-27 | 2012-02-09 | 有機el素子の製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8680764B2 (ja) |
JP (1) | JP5351297B2 (ja) |
CN (1) | CN102760843B (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102845132B (zh) * | 2011-04-12 | 2015-12-16 | 株式会社日本有机雷特显示器 | 有机el元件的制造方法和激光焦点位置设定方法 |
US10307167B2 (en) | 2012-12-14 | 2019-06-04 | Corquest Medical, Inc. | Assembly and method for left atrial appendage occlusion |
US10813630B2 (en) | 2011-08-09 | 2020-10-27 | Corquest Medical, Inc. | Closure system for atrial wall |
US10314594B2 (en) | 2012-12-14 | 2019-06-11 | Corquest Medical, Inc. | Assembly and method for left atrial appendage occlusion |
US20140142689A1 (en) | 2012-11-21 | 2014-05-22 | Didier De Canniere | Device and method of treating heart valve malfunction |
US9566443B2 (en) | 2013-11-26 | 2017-02-14 | Corquest Medical, Inc. | System for treating heart valve malfunction including mitral regurgitation |
US10842626B2 (en) | 2014-12-09 | 2020-11-24 | Didier De Canniere | Intracardiac device to correct mitral regurgitation |
CN108550611B (zh) | 2018-05-24 | 2021-08-06 | 京东方科技集团股份有限公司 | 有机发光显示面板、其制作方法及显示装置 |
JP2022076273A (ja) * | 2020-11-09 | 2022-05-19 | 株式会社Joled | 自発光型表示パネル、及び自発光型表示パネルの製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001117534A (ja) * | 1999-10-21 | 2001-04-27 | Pioneer Electronic Corp | アクティブマトリクス型表示装置及びその駆動方法 |
JP2001176661A (ja) * | 1999-12-20 | 2001-06-29 | Toyota Motor Corp | 有機el素子の輝度修復方法及び有機el素子 |
JP4020673B2 (ja) * | 2002-03-20 | 2007-12-12 | 三洋電機株式会社 | 有機elパネルの減光化方法および有機elパネル |
TWI223569B (en) | 2002-03-20 | 2004-11-01 | Sanyo Electric Co | Method for reducing light quantity of organic EL panel and organic EL panel |
JP2007042498A (ja) | 2005-08-04 | 2007-02-15 | Aitesu:Kk | 有機elレーザリペア方法及びレーザリペア装置 |
JP2008066003A (ja) * | 2006-09-04 | 2008-03-21 | Sanyo Electric Co Ltd | エレクトロルミネッセンス表示装置の欠陥検査方法及び欠陥修正方法及びエレクトロルミネッセンス表示装置の製造方法 |
DE102006051101A1 (de) * | 2006-10-25 | 2008-04-30 | Osram Opto Semiconductors Gmbh | Organische Licht emittierende Diode (OLED) mit strukturierter Backelektrode und Verfahren zur Herstellung einer OLED mit strukturierter Backelektrode |
-
2012
- 2012-02-09 JP JP2012026721A patent/JP5351297B2/ja not_active Expired - Fee Related
- 2012-04-23 CN CN201210120571.XA patent/CN102760843B/zh not_active Expired - Fee Related
- 2012-04-23 US US13/453,305 patent/US8680764B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US8680764B2 (en) | 2014-03-25 |
US20120274202A1 (en) | 2012-11-01 |
CN102760843B (zh) | 2015-07-15 |
CN102760843A (zh) | 2012-10-31 |
JP2012238573A (ja) | 2012-12-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5351297B2 (ja) | 有機el素子の製造方法 | |
EP2378841B1 (en) | Organic el display and method for manufacturing same | |
CN102845132B (zh) | 有机el元件的制造方法和激光焦点位置设定方法 | |
JP6151888B2 (ja) | 発光装置の作製方法 | |
JP2008235178A (ja) | 有機elディスプレイの製造方法及び有機elディスプレイ | |
JP4733235B2 (ja) | 有機elディスプレイおよびその製造方法 | |
JP5805181B2 (ja) | 有機エレクトロルミネッセンス素子の製造方法 | |
US20120056181A1 (en) | Method of manufacturing electronic element and electronic element | |
JP5760009B2 (ja) | 有機エレクトロルミネッセンス素子の製造方法 | |
US9287527B2 (en) | Organic EL light emitting element and method for manufacturing same | |
JP2009283396A (ja) | 有機el表示装置の製造方法 | |
JP6325690B2 (ja) | 有機発光素子 | |
JP2001176672A (ja) | 有機電界発光装置およびその製造方法 | |
WO2014188695A1 (ja) | 有機エレクトロルミネッセンス表示装置の製造方法および有機エレクトロルミネッセンス表示装置 | |
JP6388291B2 (ja) | 有機エレクトロルミネッセンス素子の製造方法および有機エレクトロルミネッセンス素子 | |
JP2013114749A (ja) | 有機el素子の製造方法 | |
JP2010244866A (ja) | 有機el表示装置 | |
JP2012204105A (ja) | 表示基板の欠陥修正方法 | |
JP2010267420A (ja) | 有機el素子検査リペア方法および装置 | |
JP5698921B2 (ja) | 有機el発光装置およびその製造方法 | |
WO2015111119A1 (ja) | 表示装置の製造方法および表示装置 | |
JP2013196831A (ja) | 有機elパネルの欠陥修正方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130411 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130416 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130611 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130702 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130719 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130820 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130822 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |