JP5333408B2 - 保持部材の姿勢判定装置、その方法、基板処理装置及び記憶媒体 - Google Patents

保持部材の姿勢判定装置、その方法、基板処理装置及び記憶媒体 Download PDF

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Publication number
JP5333408B2
JP5333408B2 JP2010237843A JP2010237843A JP5333408B2 JP 5333408 B2 JP5333408 B2 JP 5333408B2 JP 2010237843 A JP2010237843 A JP 2010237843A JP 2010237843 A JP2010237843 A JP 2010237843A JP 5333408 B2 JP5333408 B2 JP 5333408B2
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Japan
Prior art keywords
holding member
fork
posture
substrate
data
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JP2010237843A
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English (en)
Japanese (ja)
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JP2012089809A5 (enExample
JP2012089809A (ja
Inventor
英樹 梶原
準之輔 牧
卓 榎木田
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2010237843A priority Critical patent/JP5333408B2/ja
Priority to KR1020110105075A priority patent/KR101695197B1/ko
Priority to CN201110328464.1A priority patent/CN102456601B/zh
Priority to TW100138328A priority patent/TWI505389B/zh
Priority to US13/278,496 priority patent/US9030656B2/en
Publication of JP2012089809A publication Critical patent/JP2012089809A/ja
Publication of JP2012089809A5 publication Critical patent/JP2012089809A5/ja
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Publication of JP5333408B2 publication Critical patent/JP5333408B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2010237843A 2010-10-22 2010-10-22 保持部材の姿勢判定装置、その方法、基板処理装置及び記憶媒体 Active JP5333408B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010237843A JP5333408B2 (ja) 2010-10-22 2010-10-22 保持部材の姿勢判定装置、その方法、基板処理装置及び記憶媒体
KR1020110105075A KR101695197B1 (ko) 2010-10-22 2011-10-14 보지 부재의 형상 판정 장치, 그 방법, 기판 처리 장치 및 기억 매체
CN201110328464.1A CN102456601B (zh) 2010-10-22 2011-10-21 保持部件形状判定装置及其方法和基板处理装置
TW100138328A TWI505389B (zh) 2010-10-22 2011-10-21 保持構件的形狀判定裝置、及其方法、基板處理裝置及記憶媒體
US13/278,496 US9030656B2 (en) 2010-10-22 2011-10-21 Inspection device, inspection method and non-transitory storage medium for inspecting deformation of substrate holding member, and substrate processing system including the inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010237843A JP5333408B2 (ja) 2010-10-22 2010-10-22 保持部材の姿勢判定装置、その方法、基板処理装置及び記憶媒体

Publications (3)

Publication Number Publication Date
JP2012089809A JP2012089809A (ja) 2012-05-10
JP2012089809A5 JP2012089809A5 (enExample) 2012-12-13
JP5333408B2 true JP5333408B2 (ja) 2013-11-06

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JP2010237843A Active JP5333408B2 (ja) 2010-10-22 2010-10-22 保持部材の姿勢判定装置、その方法、基板処理装置及び記憶媒体

Country Status (5)

Country Link
US (1) US9030656B2 (enExample)
JP (1) JP5333408B2 (enExample)
KR (1) KR101695197B1 (enExample)
CN (1) CN102456601B (enExample)
TW (1) TWI505389B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101352253B1 (ko) 2012-04-24 2014-01-17 엘지디스플레이 주식회사 액정표시장치와 그 ｆｒｃ 방법
JP2014008578A (ja) * 2012-06-29 2014-01-20 Daihen Corp 基板搬送装置
KR101385594B1 (ko) * 2012-09-28 2014-04-15 삼성디스플레이 주식회사 자동보정 및 티칭로딩이 가능한 자동반송시스템 및 제어방법
JP6374775B2 (ja) * 2014-11-25 2018-08-15 東京エレクトロン株式会社 基板搬送システム及びこれを用いた熱処理装置
GB2541689B (en) * 2015-08-26 2020-04-15 Rolls Royce Plc Apparatus and methods for determining location of at least a part of an object
JP6700149B2 (ja) 2016-09-29 2020-05-27 株式会社Ｓｃｒｅｅｎホールディングス 姿勢変更装置
US10651067B2 (en) * 2017-01-26 2020-05-12 Brooks Automation, Inc. Method and apparatus for substrate transport apparatus position compensation
JP6858041B2 (ja) * 2017-03-16 2021-04-14 川崎重工業株式会社 基板搬送装置
JP7023094B2 (ja) * 2017-12-05 2022-02-21 日本電産サンキョー株式会社 ロボット
JP7199211B2 (ja) * 2018-12-03 2023-01-05 東京エレクトロン株式会社 搬送検知方法及び基板処理装置
JP7246256B2 (ja) * 2019-05-29 2023-03-27 東京エレクトロン株式会社 搬送方法及び搬送システム
CN110444493B (zh) * 2019-08-15 2021-03-16 德淮半导体有限公司 一种防止手臂撞击晶圆的装置
KR102566135B1 (ko) * 2019-12-02 2023-08-11 주식회사 원익아이피에스 인터락 기능을 갖는 반도체 공정 장비
US11335578B2 (en) * 2020-02-13 2022-05-17 Kawasaki Jukogyo Kabushiki Kaisha Substrate transfer apparatus and method of measuring positional deviation of substrate
KR102590268B1 (ko) * 2021-03-25 2023-10-18 피에스케이 주식회사 기판 처리 장치 및 기판 처리 방법
US12176233B2 (en) 2021-08-17 2024-12-24 Changxin Memory Technologies, Inc. Apparatus and method for transferring wafer, and apparatus for controlling transferring wafer
KR102669767B1 (ko) * 2022-04-01 2024-05-28 주식회사 유진테크 기판 이송장치 및 기판 이송장치의 이상 판단방법

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
JPH0810800B2 (ja) * 1988-03-17 1996-01-31 富士通株式会社 部品リードの検査及び姿勢認識方法
IL86514A0 (enExample) * 1988-05-26 1988-11-15
DE3941725A1 (de) * 1989-12-18 1991-06-20 Krupp Atlas Elektronik Gmbh Vorrichtung zum erkennen von deformationen auf pressteilen
JPH11179692A (ja) * 1997-12-16 1999-07-06 Shin Meiwa Ind Co Ltd 産業用ロボットのハンド異常検出装置及びハンド異常検出方法
JP2001044263A (ja) * 1999-08-04 2001-02-16 Nikon Corp 基板搬送方法及び基板搬送装置
JP2001127136A (ja) * 1999-10-29 2001-05-11 Applied Materials Inc 基板搬送ロボットの検査装置
US6380503B1 (en) * 2000-03-03 2002-04-30 Daniel G. Mills Apparatus and method using collimated laser beams and linear arrays of detectors for sizing and sorting articles
JP2004296484A (ja) * 2003-03-25 2004-10-21 Hitachi Kokusai Electric Inc 基板処理装置
JP2005303196A (ja) * 2004-04-15 2005-10-27 Canon Inc 位置決め装置、露光装置、半導体デバイスの製造方法
JP4835839B2 (ja) * 2006-04-07 2011-12-14 株式会社安川電機 搬送用ロボットおよび搬送用ロボットの位置補正方法
JP2008141098A (ja) * 2006-12-05 2008-06-19 Dainippon Screen Mfg Co Ltd 基板搬送装置の検査装置および基板処理装置
JP4313824B2 (ja) * 2007-03-23 2009-08-12 東京エレクトロン株式会社 基板移載装置及び基板移載方法並びに記憶媒体
JP4914761B2 (ja) * 2007-05-16 2012-04-11 オリンパス株式会社 外観検査装置
JP4910945B2 (ja) * 2007-08-28 2012-04-04 パナソニック株式会社 部品実装装置
JP5185756B2 (ja) * 2008-10-01 2013-04-17 川崎重工業株式会社 基板検出装置および方法
JP5246550B2 (ja) * 2009-03-03 2013-07-24 川崎重工業株式会社 ロボット及びその制御方法
JP5614326B2 (ja) * 2010-08-20 2014-10-29 東京エレクトロン株式会社 基板搬送装置、基板搬送方法及びその基板搬送方法を実行させるためのプログラムを記録した記録媒体

Also Published As

Publication number Publication date
CN102456601A (zh) 2012-05-16
TW201237988A (en) 2012-09-16
TWI505389B (zh) 2015-10-21
CN102456601B (zh) 2016-01-20
JP2012089809A (ja) 2012-05-10
US9030656B2 (en) 2015-05-12
KR101695197B1 (ko) 2017-01-11
US20120099951A1 (en) 2012-04-26
KR20120042658A (ko) 2012-05-03

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