JP7199211B2 - 搬送検知方法及び基板処理装置 - Google Patents
搬送検知方法及び基板処理装置 Download PDFInfo
- Publication number
- JP7199211B2 JP7199211B2 JP2018226866A JP2018226866A JP7199211B2 JP 7199211 B2 JP7199211 B2 JP 7199211B2 JP 2018226866 A JP2018226866 A JP 2018226866A JP 2018226866 A JP2018226866 A JP 2018226866A JP 7199211 B2 JP7199211 B2 JP 7199211B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- wafer
- light
- transfer
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1679—Programme controls characterised by the tasks executed
- B25J9/1692—Calibration of manipulator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Human Computer Interaction (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Description
まず、一実施形態に係る基板処理装置1の一例について、図1を用いて説明する。図1は、一実施形態に係る基板処理装置1の一例を示す平面図である。基板処理装置1は、クラスタ構造(マルチチャンバタイプ)のシステムである。基板処理装置1は、真空処理室PM(Process Module)1~PM4、真空搬送室VTM(Vacuum Transfer Module)及びロードロック室LLM(Load Lock Module)1、LLM2を有する。また、基板処理装置1は、EFEM(Equipment Front End Module)、ロードポートLP(Load Port)1~LP3及び制御部100を有する。
次に、一実施形態に係る基板処理装置1にて搬送するウェハWを検知する光センサの配置について、図2を参照しながら比較例と比較して説明する。
<第1実施形態>
[ウェハの搬入及び搬出例]
次に、第1実施形態に係るウェハの搬入及び搬出の一例について、図3~図6を参照しながら説明する。図3~図6は、第1実施形態に係るウェハの搬入及び搬出の一例を示す図である。図3~図6では、真空搬送室VTMとロードロック室LLM1との間にてウェハWの搬入及び搬出を検知する例を挙げて説明する。ただし、ウェハWの検知は、これに限られず、真空搬送室VTMとロードロック室LLM2との間にてウェハWの搬入及び搬出を検知する場合、真空搬送室VTMと処理室PM1~PM4との間にてウェハWの搬入及び搬出を検知する場合を含む。ウェハWの検知は、EFEMとロードロック室LLM2との間にてウェハWの搬入及び搬出を検知する場合、ロードポートLPとEFEMとの間にてウェハWの搬入及び搬出を検知する場合を含む。
次に、第1実施形態に係るウェハ搬送時の検知処理について、図7~図12を参照しながら説明する。図7は、第1実施形態に係るウェハ搬送時の検知処理の一例を示すフローチャートの一例である。図8~図12は、第1実施形態に係る検知処理を説明する図である。ここでは、真空搬送室VTMからロードロック室LLM1へウェハWを搬送するときの検知処理を例に挙げて説明する。検知処理は制御部100によって制御される。
<第2実施形態>
[装置構成]
次に、第2実施形態に係る基板処理装置1の一部について、図13を参照しながら説明する。第1実施形態に係る基板処理装置1では、ロードロック室LLM1、LLM2を第1室とし、真空搬送室VTMを第2室としたが、第2実施形態に係る基板処理装置1では、ウェハの載置領域を確保するための載置室を第1室とする。第2室は、搬送アームが設けられた搬送室TMであり、搬送室TMは真空搬送室VTMであってもよいし、大気搬送室であってもよい。同様に、載置室は真空載置室であってもよいし、大気載置室であってもよい。
次に、第2実施形態に係るウェハ搬送時の検知処理について、図14~図18を参照しながら説明する。図14~図18は、第2実施形態に係る検知処理を説明する図である。ここでは、搬送室TMnと載置室PSSとの間のウェハWの搬送と、載置室PSSと搬送室TMn+1との間のウェハWの搬送を例に挙げて説明する。検知処理は制御部100によって制御される。
2 光センサ
10、11 載置部
15 搬出入口
30、40 搬送装置
31 第1の搬送アーム
32 第2の搬送アーム
31a、32a フォーク
50 アライメント装置
100 制御部
PM1~PM4 処理室(室、第2室)
VTM 真空搬送室(室、第1室)
LLM1、LLM2 ロードロック室(室)
EFEM 大気搬送室
LP1~LP3 ロードポート(室)
GV1~GV8 ゲートバルブ
PSS 載置室
C キャリア
W ウェハ
S1~S6 載置部
Claims (7)
- 複数の基板保持部を有し、前記複数の基板保持部を用いて第1室と前記第1室に隣接する第2室との間にて複数の基板を複数段に搬送する搬送アームと、
前記第1室と前記第2室とを連通する開口部の近傍に設けられた光センサと、を有する基板処理装置における搬送検知方法であって、
前記第1室は、複数の処理室又は複数のロードロック室を含み、
複数の前記処理室又は複数の前記ロードロック室が前記第2室に沿って配置され、
前記開口部に平行な水平方向の光軸を持つ、複数の前記処理室又は複数の前記ロードロック室に共通の複数の光を、前記複数の基板保持部に保持された基板が通過する位置に投光する工程と、
前記光センサが投光した前記光を検知した結果に応じて、前記基板保持部の上の基板及び前記搬送アームの状態の少なくともいずれかを判定する工程と、
を有する搬送検知方法。 - 前記投光する工程は、
前記水平方向の光軸を持つ光を、前記複数の基板保持部の数に対応させて上下方向に複数段に形成する、
請求項1に記載の搬送検知方法。 - 前記第2室は、前記搬送アームが設けられた搬送室を含む、
請求項1又は2に記載の搬送検知方法。 - 前記第1室は、前記第2室と、前記第2室と異なる第3室との間に設けられ、基板の載置部を有する載置室を含み、
前記第2室は、前記搬送アームが設けられた搬送室を含む、
請求項1又は2に記載の搬送検知方法。 - 前記第1室の内部にて複数の前記基板の載置部が前記第2室及び前記第3室に沿って配置される、
請求項4に記載の搬送検知方法。 - 前記判定する工程は、前記基板保持部の上の基板の有無、前記基板保持部の上の基板の歪み及び前記搬送アームの歪みの少なくともいずれかを判定する、
請求項1~5のいずれか一項に記載の搬送検知方法。 - 複数の基板保持部を有し、前記複数の基板保持部を用いて第1室と前記第1室に隣接する第2室との間にて複数の基板を複数段に搬送する搬送アームと、前記第1室と前記第2室とを連通する開口部の近傍に設けられた光センサと、制御部と、を有する基板処理装置であって、
前記第1室は、複数の処理室又は複数のロードロック室を含み、
複数の前記処理室又は複数の前記ロードロック室が前記第2室に沿って配置され、
前記制御部は、
前記開口部に平行な水平方向の光軸を持つ、複数の前記処理室又は複数の前記ロードロック室に共通の複数の光を、前記複数の基板保持部に保持された基板が通過する位置に投光し、
前記光センサが投光した前記光を検知した結果に応じて、前記基板保持部の上の基板及び前記搬送アームの状態の少なくともいずれかを判定するように制御する、
基板処理装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018226866A JP7199211B2 (ja) | 2018-12-03 | 2018-12-03 | 搬送検知方法及び基板処理装置 |
KR1020217019586A KR102586784B1 (ko) | 2018-12-03 | 2019-11-19 | 반송 검지 방법 및 기판 처리 장치 |
PCT/JP2019/045242 WO2020116150A1 (ja) | 2018-12-03 | 2019-11-19 | 搬送検知方法及び基板処理装置 |
US17/298,768 US20220037176A1 (en) | 2018-12-03 | 2019-11-19 | Transfer detection method and substrate processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018226866A JP7199211B2 (ja) | 2018-12-03 | 2018-12-03 | 搬送検知方法及び基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020092130A JP2020092130A (ja) | 2020-06-11 |
JP7199211B2 true JP7199211B2 (ja) | 2023-01-05 |
Family
ID=70974581
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018226866A Active JP7199211B2 (ja) | 2018-12-03 | 2018-12-03 | 搬送検知方法及び基板処理装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20220037176A1 (ja) |
JP (1) | JP7199211B2 (ja) |
KR (1) | KR102586784B1 (ja) |
WO (1) | WO2020116150A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20240070668A (ko) * | 2021-10-13 | 2024-05-21 | 도쿄엘렉트론가부시키가이샤 | 기판 반송 방법 및 기판 반송 장치 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011155137A (ja) | 2010-01-27 | 2011-08-11 | Tokyo Electron Ltd | 基板加熱装置および基板加熱方法、ならびに基板処理システム |
JP2014093489A (ja) | 2012-11-06 | 2014-05-19 | Tokyo Electron Ltd | 基板処理装置 |
JP2016092330A (ja) | 2014-11-10 | 2016-05-23 | 株式会社アルバック | 仕切弁装置及び基板搬送方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3741401B2 (ja) * | 1998-02-27 | 2006-02-01 | キヤノン株式会社 | 基板搬送装置、半導体製造装置および液晶プレート製造装置 |
JP2007227781A (ja) * | 2006-02-24 | 2007-09-06 | Tokyo Electron Ltd | 基板の位置ずれ検査機構,処理システム及び基板の位置ずれ検査方法 |
US7675048B2 (en) * | 2007-03-06 | 2010-03-09 | Varian Semiconductor Equipment Associates, Inc. | Wafer holding robot end effecter vertical position determination in ion implanter system |
JP5058836B2 (ja) * | 2007-05-08 | 2012-10-24 | 東京エレクトロン株式会社 | 処理装置、処理方法、被処理体の認識方法および記憶媒体 |
JP5324232B2 (ja) * | 2009-01-08 | 2013-10-23 | 日東電工株式会社 | 半導体ウエハのアライメント装置 |
JP5333408B2 (ja) * | 2010-10-22 | 2013-11-06 | 東京エレクトロン株式会社 | 保持部材の姿勢判定装置、その方法、基板処理装置及び記憶媒体 |
KR20150146095A (ko) * | 2014-06-20 | 2015-12-31 | 삼성전자주식회사 | 기판 반송 장치 및 그 동작 방법 |
JP2017085015A (ja) * | 2015-10-29 | 2017-05-18 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法および半導体製造装置 |
JP6710518B2 (ja) | 2015-12-03 | 2020-06-17 | 東京エレクトロン株式会社 | 搬送装置及び補正方法 |
KR102397110B1 (ko) * | 2016-06-13 | 2022-05-12 | 도쿄엘렉트론가부시키가이샤 | 기판 반송 장치 및 기판 반송 방법 |
JP6769796B2 (ja) * | 2016-09-14 | 2020-10-14 | 株式会社レクザム | ロボットのハンド部の傾き検査装置及びその傾き検査方法 |
-
2018
- 2018-12-03 JP JP2018226866A patent/JP7199211B2/ja active Active
-
2019
- 2019-11-19 WO PCT/JP2019/045242 patent/WO2020116150A1/ja active Application Filing
- 2019-11-19 US US17/298,768 patent/US20220037176A1/en active Pending
- 2019-11-19 KR KR1020217019586A patent/KR102586784B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011155137A (ja) | 2010-01-27 | 2011-08-11 | Tokyo Electron Ltd | 基板加熱装置および基板加熱方法、ならびに基板処理システム |
JP2014093489A (ja) | 2012-11-06 | 2014-05-19 | Tokyo Electron Ltd | 基板処理装置 |
JP2016092330A (ja) | 2014-11-10 | 2016-05-23 | 株式会社アルバック | 仕切弁装置及び基板搬送方法 |
Also Published As
Publication number | Publication date |
---|---|
US20220037176A1 (en) | 2022-02-03 |
WO2020116150A1 (ja) | 2020-06-11 |
KR102586784B1 (ko) | 2023-10-11 |
KR20210093341A (ko) | 2021-07-27 |
JP2020092130A (ja) | 2020-06-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11664259B2 (en) | Process apparatus with on-the-fly substrate centering | |
EP1028905B1 (en) | Integrated intrabay buffer, delivery, and stocker system | |
US11088001B2 (en) | Substrate transfer method and substrate transfer module | |
KR20180025290A (ko) | 기판 처리 방법 및 기판 처리 시스템 | |
US20090169344A1 (en) | Substrate processing apparatus and substrate processing method | |
KR20110074472A (ko) | 기판 처리 장치 및 기판 처리 방법 | |
KR20180111592A (ko) | 기판 처리 장치 | |
US20220367223A1 (en) | Substrate transport apparatus and substrate transport method | |
JP7199211B2 (ja) | 搬送検知方法及び基板処理装置 | |
JP2022148398A (ja) | 基板搬送方法 | |
KR20080078426A (ko) | 기판 처리 장치 및 그 장치에서의 기판 정렬 방법 | |
KR100916141B1 (ko) | 얼라이너 챔버 및 그것을 구비한 멀티 챔버형 기판 처리 설비 | |
WO2020100381A1 (ja) | 基板処理装置及び基板搬送方法 | |
WO2023167043A1 (ja) | 基板搬送方法、および半導体製造システム | |
KR100740805B1 (ko) | 다단 반송장치 및 그것을 사용한 기판 처리 설비 | |
KR20060117621A (ko) | 반도체 제조설비 및 그의 제어방법 | |
US20230230862A1 (en) | Substrate transport method and substrate processing system | |
JP7519243B2 (ja) | 搬送装置及び搬送方法 | |
US20240312821A1 (en) | Automatic teaching apparatus for semiconductor manufacturing equipment | |
TW202431509A (zh) | 基板搬送裝置及基板搬送方法 | |
US20220324659A1 (en) | Method of teaching transfer device, and transfer system | |
WO2024157316A1 (ja) | 基板搬送装置、及び基板搬送方法 | |
KR20240140334A (ko) | Efem의 설치 공간을 활용한 풉 버퍼 시스템 | |
KR20100060088A (ko) | 기판 처리 장치 및 그의 처리 방법 | |
JP2023139986A (ja) | 基板処理システム及び基板搬送方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210819 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220816 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221012 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20221122 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20221220 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7199211 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |