JP5316977B2 - Ｔｆｔアレイ検査の電子線走査方法およびｔｆｔアレイ検査装置 - Google Patents

Ｔｆｔアレイ検査の電子線走査方法およびｔｆｔアレイ検査装置 Download PDF

Info

Publication number
JP5316977B2
JP5316977B2 JP2012519175A JP2012519175A JP5316977B2 JP 5316977 B2 JP5316977 B2 JP 5316977B2 JP 2012519175 A JP2012519175 A JP 2012519175A JP 2012519175 A JP2012519175 A JP 2012519175A JP 5316977 B2 JP5316977 B2 JP 5316977B2
Authority
JP
Japan
Prior art keywords
pixel
electron beam
scanning
tft array
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012519175A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2011155044A1 (ja
Inventor
隆治 西原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of JPWO2011155044A1 publication Critical patent/JPWO2011155044A1/ja
Application granted granted Critical
Publication of JP5316977B2 publication Critical patent/JP5316977B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2330/00—Aspects of power supply; Aspects of display protection and defect management
    • G09G2330/12—Test circuits or failure detection circuits included in a display system, as permanent part thereof
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2012519175A 2010-06-10 2010-06-10 Ｔｆｔアレイ検査の電子線走査方法およびｔｆｔアレイ検査装置 Expired - Fee Related JP5316977B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2010/059846 WO2011155044A1 (ja) 2010-06-10 2010-06-10 Ｔｆｔアレイ検査の電子線走査方法およびｔｆｔアレイ検査装置

Publications (2)

Publication Number Publication Date
JPWO2011155044A1 JPWO2011155044A1 (ja) 2013-08-01
JP5316977B2 true JP5316977B2 (ja) 2013-10-16

Family

ID=45097674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012519175A Expired - Fee Related JP5316977B2 (ja) 2010-06-10 2010-06-10 Ｔｆｔアレイ検査の電子線走査方法およびｔｆｔアレイ検査装置

Country Status (3)

Country Link
JP (1) JP5316977B2 (zh)
CN (1) CN102792172B (zh)
WO (1) WO2011155044A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103500722B (zh) * 2013-10-21 2016-04-06 上海华力微电子有限公司 一种电子束缺陷检测方法
KR102409943B1 (ko) * 2017-11-29 2022-06-16 삼성전자주식회사 결함 검출 방법 및 이를 수행하기 위한 장치
WO2020003458A1 (ja) * 2018-06-28 2020-01-02 株式会社日立ハイテクノロジーズ 半導体検査装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007334262A (ja) * 2006-06-19 2007-12-27 Shimadzu Corp Ｔｆｔアレイ基板の欠陥検出方法、およびｔｆｔアレイ基板の欠陥検出装置
JP2008089476A (ja) * 2006-10-03 2008-04-17 Shimadzu Corp Ｔｆｔアレイ検査における電子線走査方法
JP2009294204A (ja) * 2008-05-09 2009-12-17 Nec Lcd Technologies Ltd 表示装置の検査方法と検査装置及び表示装置用基板と表示装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2004109375A1 (ja) * 2003-06-06 2006-07-20 東芝松下ディスプレイテクノロジー株式会社 基板の検査方法
JP5077538B2 (ja) * 2007-07-30 2012-11-21 株式会社島津製作所 Ｔｆｔアレイ検査装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007334262A (ja) * 2006-06-19 2007-12-27 Shimadzu Corp Ｔｆｔアレイ基板の欠陥検出方法、およびｔｆｔアレイ基板の欠陥検出装置
JP2008089476A (ja) * 2006-10-03 2008-04-17 Shimadzu Corp Ｔｆｔアレイ検査における電子線走査方法
JP2009294204A (ja) * 2008-05-09 2009-12-17 Nec Lcd Technologies Ltd 表示装置の検査方法と検査装置及び表示装置用基板と表示装置

Also Published As

Publication number Publication date
WO2011155044A1 (ja) 2011-12-15
CN102792172A (zh) 2012-11-21
CN102792172B (zh) 2015-03-25
JPWO2011155044A1 (ja) 2013-08-01

Similar Documents

Publication Publication Date Title
JP4483302B2 (ja) 基板検査装置及び基板検査方法
JP5224194B2 (ja) Ｔｆｔアレイ検査方法およびｔｆｔアレイ検査装置
JP5034382B2 (ja) Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置
JP4831525B2 (ja) Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置
WO2011070663A1 (ja) Ｔｆｔ基板検査装置およびｔｆｔ基板検査方法
JP2007334262A (ja) Ｔｆｔアレイ基板の欠陥検出方法、およびｔｆｔアレイ基板の欠陥検出装置
JP5316977B2 (ja) Ｔｆｔアレイ検査の電子線走査方法およびｔｆｔアレイ検査装置
JP5007925B2 (ja) Ｔｆｔアレイ検査における電子線走査方法
JP5459469B2 (ja) Ｔｆｔアレイの検査方法、およびｔｆｔアレイの検査装置
JP4748392B2 (ja) Ｔｆｔアレイ基板検査装置
JP5077544B2 (ja) Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置
JP4853705B2 (ja) Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置
JP4158199B2 (ja) Ｔｆｔアレイ検査装置
JP5429458B2 (ja) Ｔｆｔアレイの検査方法、およびｔｆｔアレイの検査装置
JP2009031208A (ja) Ｔｆｔアレイ検査装置
JP5311058B2 (ja) Ｔｆｔアレイ検査装置および同期方法
JP2012078127A (ja) Ｔｆｔアレイ検査装置およびｔｆｔアレイ検査方法
JP5418964B2 (ja) Ｔｆｔアレイ検査装置およびピクセル座標位置決定方法
JP5466393B2 (ja) Ｔｆｔアレイの検査方法及びｔｆｔアレイの検査装置
JP5142092B2 (ja) Ｔｆｔアレイ検査装置
JP5196157B2 (ja) Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置
JP5029826B2 (ja) プローブピンの接触検査方法およびｔｆｔアレイ検査装置
JP5578441B2 (ja) Ｔｆｔアレイ検査装置およびｔｆｔアレイ検査方法
JP5423664B2 (ja) Ｔｆｔアレイ検査装置
JP5459491B2 (ja) Ｔｆｔアレイ検査装置およびｔｆｔアレイ検査方法

Legal Events

Date Code Title Description
TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130614

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130627

R151 Written notification of patent or utility model registration

Ref document number: 5316977

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees