JP5300363B2 - 保持用治具およびそれを用いた搬送装置 - Google Patents

保持用治具およびそれを用いた搬送装置 Download PDF

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Publication number
JP5300363B2
JP5300363B2 JP2008195980A JP2008195980A JP5300363B2 JP 5300363 B2 JP5300363 B2 JP 5300363B2 JP 2008195980 A JP2008195980 A JP 2008195980A JP 2008195980 A JP2008195980 A JP 2008195980A JP 5300363 B2 JP5300363 B2 JP 5300363B2
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holding
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holding jig
holding member
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JP2008195980A
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Japanese (ja)
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JP2009055017A (ja
JP2009055017A5 (enExample
Inventor
勝 作田
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Kyocera Corp
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Kyocera Corp
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JP2008195980A 2007-07-30 2008-07-30 保持用治具およびそれを用いた搬送装置 Active JP5300363B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008195980A JP5300363B2 (ja) 2007-07-30 2008-07-30 保持用治具およびそれを用いた搬送装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007196944 2007-07-30
JP2007196944 2007-07-30
JP2008195980A JP5300363B2 (ja) 2007-07-30 2008-07-30 保持用治具およびそれを用いた搬送装置

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JP2009055017A JP2009055017A (ja) 2009-03-12
JP2009055017A5 JP2009055017A5 (enExample) 2011-05-06
JP5300363B2 true JP5300363B2 (ja) 2013-09-25

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JP2008195980A Active JP5300363B2 (ja) 2007-07-30 2008-07-30 保持用治具およびそれを用いた搬送装置

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JP (1) JP5300363B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101097310B1 (ko) * 2009-05-18 2011-12-21 삼성모바일디스플레이주식회사 기판 지지 장치 및 지지대 및 이를 포함하는 이온 주입 장치
WO2011077911A1 (ja) * 2009-12-25 2011-06-30 株式会社クリエイティブ テクノロジー 真空チャック
JP2012245597A (ja) * 2011-05-31 2012-12-13 Kyocera Corp 搬送アームおよびそれを用いた吸着装置
JP6360756B2 (ja) * 2014-09-05 2018-07-18 株式会社ディスコ チャックテーブル
JP2022102893A (ja) * 2020-12-25 2022-07-07 京セラ株式会社 試料搬送部材

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2507213Y2 (ja) * 1989-02-28 1996-08-14 京セラ株式会社 半導体ウエハ−の加工、測定用真空吸着盤
JPH09237824A (ja) * 1996-02-29 1997-09-09 Kyocera Corp 物品保持装置
JP2001308168A (ja) * 2000-02-07 2001-11-02 Ibiden Co Ltd 半導体製造・検査装置用セラミック基板
JP2002261151A (ja) * 2001-03-06 2002-09-13 Nec Kansai Ltd 半導体製造装置

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JP2009055017A (ja) 2009-03-12

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