JP5298480B2 - 電気光学装置及び電子機器 - Google Patents
電気光学装置及び電子機器 Download PDFInfo
- Publication number
- JP5298480B2 JP5298480B2 JP2007215761A JP2007215761A JP5298480B2 JP 5298480 B2 JP5298480 B2 JP 5298480B2 JP 2007215761 A JP2007215761 A JP 2007215761A JP 2007215761 A JP2007215761 A JP 2007215761A JP 5298480 B2 JP5298480 B2 JP 5298480B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- insulating film
- pixel electrode
- contact hole
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 239000010410 layer Substances 0.000 claims description 188
- 239000011229 interlayer Substances 0.000 claims description 88
- 239000012528 membrane Substances 0.000 claims 1
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 48
- 239000010408 film Substances 0.000 description 331
- 239000003990 capacitor Substances 0.000 description 37
- 238000000034 method Methods 0.000 description 32
- 238000004519 manufacturing process Methods 0.000 description 30
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- 239000004065 semiconductor Substances 0.000 description 16
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- 239000010409 thin film Substances 0.000 description 4
- 238000004040 coloring Methods 0.000 description 3
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- 239000004020 conductor Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
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- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
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- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
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- 238000005468 ion implantation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
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- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
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Images
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007215761A JP5298480B2 (ja) | 2007-08-22 | 2007-08-22 | 電気光学装置及び電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007215761A JP5298480B2 (ja) | 2007-08-22 | 2007-08-22 | 電気光学装置及び電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009048063A JP2009048063A (ja) | 2009-03-05 |
| JP2009048063A5 JP2009048063A5 (enrdf_load_stackoverflow) | 2010-08-19 |
| JP5298480B2 true JP5298480B2 (ja) | 2013-09-25 |
Family
ID=40500316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007215761A Expired - Fee Related JP5298480B2 (ja) | 2007-08-22 | 2007-08-22 | 電気光学装置及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5298480B2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8830436B2 (en) * | 2010-12-24 | 2014-09-09 | Japan Display West Inc. | Pixel structure, display device, and electronic apparatus |
| US9299728B2 (en) | 2011-11-30 | 2016-03-29 | Joled Inc. | Display panel and method for producing display panel |
| JPWO2013080261A1 (ja) * | 2011-11-30 | 2015-04-27 | パナソニック株式会社 | 表示パネル及び表示パネルの製造方法 |
| CN104571700B (zh) * | 2014-12-30 | 2017-10-13 | 深圳市华星光电技术有限公司 | 触控面板 |
| JP6816417B2 (ja) * | 2016-09-08 | 2021-01-20 | セイコーエプソン株式会社 | 電気光学装置、電子機器 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3063266B2 (ja) * | 1991-08-30 | 2000-07-12 | セイコーエプソン株式会社 | 液晶パネル及びその製造方法 |
| JPH09292633A (ja) * | 1996-02-27 | 1997-11-11 | Canon Inc | カラー液晶表示装置の製造方法 |
| JPH10186404A (ja) * | 1996-12-27 | 1998-07-14 | Sharp Corp | アクティブマトリクス型液晶表示装置およびその製造方法 |
| JPH10268346A (ja) * | 1997-03-24 | 1998-10-09 | Toshiba Corp | アクティブマトリクス型液晶表示装置 |
| JP3738530B2 (ja) * | 1997-06-30 | 2006-01-25 | ソニー株式会社 | カラー表示装置 |
| JP3791225B2 (ja) * | 1998-02-09 | 2006-06-28 | セイコーエプソン株式会社 | 電気光学パネル及び電子機器 |
| JP4109413B2 (ja) * | 2000-12-12 | 2008-07-02 | セイコーエプソン株式会社 | 基板装置の製造方法 |
| JP2004070196A (ja) * | 2002-08-09 | 2004-03-04 | Nec Kagoshima Ltd | 液晶表示装置用基板及びその製造方法並びに液晶表示装置 |
-
2007
- 2007-08-22 JP JP2007215761A patent/JP5298480B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009048063A (ja) | 2009-03-05 |
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