JP5295808B2 - パーティクル付着防止方法及び被処理基板の搬送方法 - Google Patents
パーティクル付着防止方法及び被処理基板の搬送方法 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67184—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the presence of more than one transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67213—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one ion or electron beam chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
Description
請求項8記載の被処理基板の搬送方法は、請求項5乃至7のいずれか1項に記載の被処理基板の搬送方法において、前記搬送チャンバ内にはブレイクフィルタが配置され、前記イオン化ガスはブレイクフィルタを介して前記搬送チャンバ内へ供給されることを特徴とする。
2 基板処理部(減圧処理部)
3 大気系搬送部(大気系保持部)
4 搬送チャンバ
5,6 ゲートバルブ
10 処理チャンバ
11 サセプタ
40 フープ
42 ローダモジュール
50 移載アーム
51 チャンバ本体
52 給気システム
53 排気装置
56 制御バルブ
57 真空ポンプ
58 制御バルブ
59 排気口
60 イオン化装置
61 ブレイクフィルタ
W (半導体)ウエハ
Claims (8)
- 減圧環境において被処理基板に所定の処理を施す減圧処理部と大気圧環境において被処理基板を保持する大気系保持部の少なくとも一方に対して前記被処理基板を搬出入するために内部が減圧環境と大気圧環境とで切り替え可能な搬送チャンバと、前記搬送チャンバの外に設けられ、前記搬送チャンバ内に供給するイオン化ガスを生成するイオン化装置ガスとを備えた基板処理装置において、前記減圧処理部および前記大気系保持部の少なくとも一方と前記搬送チャンバとの間で前記被処理基板を搬送する際に前記被処理基板へのパーティクル付着を防止する方法であって、
前記搬送チャンバ内に前記被処理基板を収容する収容ステップと、
前記搬送チャンバ内の排気を停止しつつ、前記イオン化装置ガスにより発生させたイオン化ガスを前記搬送チャンバ内に供給して、目標圧力から第1の圧力に昇圧する昇圧ステップと、
前記イオン化ガスを前記搬送チャンバ内に供給しつつ、前記搬送チャンバ内を排気し、前記第1の圧力から前記目標圧力よりも低い第2の圧力に減圧する減圧ステップと、
前記イオン化ガスにより、前記被処理基板、前記搬送チャンバ内部材及び前記搬送チャンバ内のパーティクルの少なくとも1つに帯電した電荷を除電する除電ステップと、を有することを特徴とするパーティクル付着防止方法。 - 前記除電ステップでは、前記搬送チャンバ内に前記イオン化ガスを供給しながら前記搬送チャンバ内からの排気を行うことによって、前記搬送チャンバ内を前記大気圧環境から前記減圧環境へと移行させることを特徴とする請求項1記載のパーティクル付着防止方法。
- 前記除電ステップにおいて、前記減圧と前記昇圧とを繰り返すことによって前記搬送チャンバ内を前記大気圧環境から前記減圧環境へと移行させることを特徴とする請求項2記載のパーティクル付着防止方法。
- 前記除電ステップでは、前記イオン化ガスとして、前記搬送チャンバ内の圧力を調整するために前記搬送チャンバ内に供給されるパージガスをイオン化させたガスを用いることを特徴とする請求項1乃至3のいずれか1項に記載のパーティクル付着防止方法。
- 減圧環境において被処理基板に所定の処理を施す減圧処理部と大気圧環境において被処理基板を保持する大気系保持部の少なくとも一方と前記被処理基板を搬出入するために内部が減圧環境と大気圧環境とで切り替え可能な搬送チャンバと、前記搬送チャンバの外に設けられ、前記搬送チャンバ内に供給するイオン化ガスを生成するイオン化装置ガスとを備える基板処理装置において、前記減圧処理部および前記大気系保持部の少なくとも一方と前記搬送チャンバとの間で前記被処理基板を搬送する被処理基板の搬送方法であって、
前記被処理基板を前記搬送チャンバ内に収容又は収出するステップと、
前記被処理基板へのパーティクル付着を防止するステップと、を有し、
前記パーティクル付着を防止するステップは、
前記搬送チャンバ内の排気を停止する排気停止ステップと、
前記搬送チャンバの外部で発生させたイオン化ガスを前記搬送チャンバ内に供給して、目標圧力から第1の圧力に昇圧する昇圧ステップと、
前記イオン化ガスを前記搬送チャンバ内に供給しつつ、前記搬送チャンバ内を排気し、前記第1の圧力から前記目標圧力よりも低い第2の圧力に減圧する減圧ステップと、
前記イオン化ガスにより、前記被処理基板、前記搬送チャンバ内部材及び前記搬送チャンバ内のパーティクルの少なくとも1つに帯電した電荷を除電する除電ステップと、を有することを特徴とする被処理基板の搬送方法。 - 前記除電ステップでは、前記イオン化ガスとして、前記チャンバ内の圧力を調整するために前記チャンバ内に供給されるパージガスをイオン化させたガスを用いることを特徴とする請求項5記載の被処理基板の搬送方法。
- 前記昇圧ステップと前記減圧ステップとを交互に繰り返すことを特徴とする請求項5又は6記載の被処理基板の搬送方法。
- 前記搬送チャンバ内にはブレイクフィルタが配置され、前記イオン化ガスはブレイクフィルタを介して前記搬送チャンバ内へ供給される請求項5乃至7のいずれか1項に記載の被処理基板の搬送方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2009027369A JP5295808B2 (ja) | 2009-02-09 | 2009-02-09 | パーティクル付着防止方法及び被処理基板の搬送方法 |
US12/700,771 US9385015B2 (en) | 2009-02-09 | 2010-02-05 | Transfer chamber and method for preventing adhesion of particle |
KR1020100011629A KR101327671B1 (ko) | 2009-02-09 | 2010-02-08 | 파티클 부착 방지 방법 및 피처리 기판의 반송 방법 |
TW099103838A TWI457987B (zh) | 2009-02-09 | 2010-02-08 | Transport chamber and particle attachment prevention method |
CN2010101139032A CN101800187B (zh) | 2009-02-09 | 2010-02-09 | 搬送腔室和颗粒附着防止方法 |
US15/201,161 US10115614B2 (en) | 2009-02-09 | 2016-07-01 | Transfer chamber and method for preventing adhesion of particle |
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JP2009027369A JP5295808B2 (ja) | 2009-02-09 | 2009-02-09 | パーティクル付着防止方法及び被処理基板の搬送方法 |
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Publication number | Publication date |
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US10115614B2 (en) | 2018-10-30 |
TW201044447A (en) | 2010-12-16 |
CN101800187B (zh) | 2013-02-06 |
US20160315001A1 (en) | 2016-10-27 |
KR20100091128A (ko) | 2010-08-18 |
TWI457987B (zh) | 2014-10-21 |
US9385015B2 (en) | 2016-07-05 |
KR101327671B1 (ko) | 2013-11-08 |
JP2010183005A (ja) | 2010-08-19 |
CN101800187A (zh) | 2010-08-11 |
US20100202093A1 (en) | 2010-08-12 |
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