JP5274622B2 - 欠陥検査装置及び方法 - Google Patents
欠陥検査装置及び方法 Download PDFInfo
- Publication number
- JP5274622B2 JP5274622B2 JP2011141426A JP2011141426A JP5274622B2 JP 5274622 B2 JP5274622 B2 JP 5274622B2 JP 2011141426 A JP2011141426 A JP 2011141426A JP 2011141426 A JP2011141426 A JP 2011141426A JP 5274622 B2 JP5274622 B2 JP 5274622B2
- Authority
- JP
- Japan
- Prior art keywords
- defect
- image
- defect image
- laminated film
- pseudo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011141426A JP5274622B2 (ja) | 2011-06-27 | 2011-06-27 | 欠陥検査装置及び方法 |
KR1020120066124A KR101358481B1 (ko) | 2011-06-27 | 2012-06-20 | 결함 검사 장치 및 방법 |
TW101122729A TWI418779B (zh) | 2011-06-27 | 2012-06-26 | 缺陷檢查裝置及方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011141426A JP5274622B2 (ja) | 2011-06-27 | 2011-06-27 | 欠陥検査装置及び方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013007689A JP2013007689A (ja) | 2013-01-10 |
JP5274622B2 true JP5274622B2 (ja) | 2013-08-28 |
Family
ID=47675148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011141426A Expired - Fee Related JP5274622B2 (ja) | 2011-06-27 | 2011-06-27 | 欠陥検査装置及び方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5274622B2 (ko) |
KR (1) | KR101358481B1 (ko) |
TW (1) | TWI418779B (ko) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6182806B2 (ja) * | 2013-06-04 | 2017-08-23 | 住友化学株式会社 | 欠陥検査システム及びフィルムの製造装置 |
JP6156820B2 (ja) * | 2013-08-22 | 2017-07-05 | 住友化学株式会社 | 欠陥検査装置、光学部材の製造システム及び光学表示デバイスの生産システム |
TWI487895B (zh) * | 2013-09-10 | 2015-06-11 | Benq Materials Corp | 隔離膜的針孔瑕疵檢測系統及其檢測方法 |
JP2015160282A (ja) * | 2014-02-27 | 2015-09-07 | 中央発條株式会社 | カバレージ測定方法及びカバレージ測定装置 |
KR101697071B1 (ko) * | 2014-04-18 | 2017-01-17 | 동우 화인켐 주식회사 | 광학 필름의 결함 판별 방법 |
KR101702841B1 (ko) * | 2014-09-01 | 2017-02-06 | 동우 화인켐 주식회사 | 편광 필름의 결함 모니터링 방법 |
CN104655648B (zh) * | 2015-03-18 | 2017-03-01 | 常州工学院 | 一种用于缺陷检测的硬件移植装置和软件移植方法 |
JP6456235B2 (ja) * | 2015-05-11 | 2019-01-23 | 株式会社クラレ | 偏光フィルムの検査方法 |
JP6749321B2 (ja) * | 2015-06-05 | 2020-09-02 | 住友化学株式会社 | 光透過性フィルムの欠陥検査方法、直線偏光子フィルムの製造方法及び偏光板の製造方法 |
JP6784540B2 (ja) * | 2015-09-30 | 2020-11-11 | 日東電工株式会社 | 偏光板の検査方法および検査装置 |
JP6898492B2 (ja) * | 2015-09-30 | 2021-07-07 | 日東電工株式会社 | 偏光子の検査方法および偏光板の製造方法 |
CN105842885B (zh) * | 2016-03-21 | 2018-11-27 | 凌云光技术集团有限责任公司 | 一种液晶屏缺陷分层定位方法及装置 |
CN110431406B (zh) * | 2017-02-28 | 2022-04-01 | 东洋玻璃株式会社 | 容器的检查装置和容器的检查方法 |
KR102475056B1 (ko) * | 2017-03-03 | 2022-12-06 | 스미또모 가가꾸 가부시키가이샤 | 결함 마킹 방법 및 결함 마킹 장치, 원반의 제조 방법 및 원반, 그리고 시트의 제조 방법 및 시트 |
CN107764835A (zh) * | 2017-09-30 | 2018-03-06 | 长沙派数控股份有限公司 | 一种电子产品玻璃盖板检测装置及方法 |
JP2020173188A (ja) * | 2019-04-11 | 2020-10-22 | 住友化学株式会社 | 検査装置、検査方法、及び、フィルムの製造方法 |
CN110132981A (zh) * | 2019-05-21 | 2019-08-16 | 东莞市瑞图新智科技有限公司 | 一种滤光片中片外观和尺寸一体化检测设备及检测方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1130591A (ja) * | 1997-07-11 | 1999-02-02 | Asahi Chem Ind Co Ltd | フィルムシート欠陥検査方法及びフィルムシート欠陥検査装置 |
JP2001349839A (ja) * | 2000-06-07 | 2001-12-21 | Sumitomo Chem Co Ltd | 偏光フィルムの欠陥検査方法 |
JP2003344302A (ja) * | 2002-05-31 | 2003-12-03 | Sumitomo Chem Co Ltd | 偏光フィルムの検査法および検査装置 |
JP2004198163A (ja) * | 2002-12-17 | 2004-07-15 | Sumitomo Chem Co Ltd | 保護フィルム粘着偏光板の欠陥検査方法 |
JP4396160B2 (ja) * | 2003-07-31 | 2010-01-13 | 住友化学株式会社 | 透明性フィルムの異物検査方法 |
JP2006275843A (ja) * | 2005-03-30 | 2006-10-12 | Nitto Denko Corp | 配線回路基板用絶縁フィルムの異物検査方法 |
JP5051874B2 (ja) * | 2006-01-11 | 2012-10-17 | 日東電工株式会社 | 積層フィルムの製造方法、積層フィルムの欠陥検出方法、積層フィルムの欠陥検出装置 |
JP4842034B2 (ja) * | 2006-07-12 | 2011-12-21 | 株式会社日本マイクロニクス | 液晶パネルの検査方法および画像処理装置 |
JP5248052B2 (ja) * | 2006-10-11 | 2013-07-31 | 日東電工株式会社 | 光学フィルムを有するシート状製品の欠点検査装置、その検査データ処理装置、その切断装置及びその製造システム |
-
2011
- 2011-06-27 JP JP2011141426A patent/JP5274622B2/ja not_active Expired - Fee Related
-
2012
- 2012-06-20 KR KR1020120066124A patent/KR101358481B1/ko active IP Right Grant
- 2012-06-26 TW TW101122729A patent/TWI418779B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR101358481B1 (ko) | 2014-02-05 |
KR20130001683A (ko) | 2013-01-04 |
JP2013007689A (ja) | 2013-01-10 |
TW201300766A (zh) | 2013-01-01 |
TWI418779B (zh) | 2013-12-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5274622B2 (ja) | 欠陥検査装置及び方法 | |
WO2010024082A1 (ja) | 欠陥検査システムおよび欠陥検査方法 | |
JP2017215277A (ja) | 欠陥検査システム、フィルム製造装置及び欠陥検査方法 | |
JP5415709B2 (ja) | 偏光フィルムの仕分けシステム | |
JP2014163694A (ja) | 欠陥検査装置および欠陥検査方法 | |
CN107003254A (zh) | 用于工件中的缺陷检测的设备、方法及计算机程序产品 | |
US20140286563A1 (en) | Accurate detection of low-contrast defects in transparent material | |
JP7184954B2 (ja) | 欠陥検査用撮像装置、欠陥検査システム、フィルム製造装置、欠陥検査用撮像方法、欠陥検査方法、及び、フィルムの製造方法 | |
JP6801142B1 (ja) | 偏光板の検査方法および検査装置 | |
JP2009293999A (ja) | 木材欠陥検出装置 | |
TW201608233A (zh) | 光學薄膜檢查裝置 | |
TW201918702A (zh) | 缺陷檢查裝置、缺陷檢查方法、圓偏光板或橢圓偏光板之製造方法及相位差板之製造方法 | |
TW200307117A (en) | Method for inspecting polarizing film and apparatus for the method | |
US20120133761A1 (en) | Uneven area inspection system | |
JP2015004674A (ja) | 光学フィルムの欠陥判別方法 | |
JP2017219343A (ja) | 欠陥検査装置、欠陥検査方法、フィルム製造装置及びフィルム製造方法 | |
JP2008026060A (ja) | 絶縁皮膜被覆帯状体の疵検査装置 | |
JP2008096314A (ja) | マクロ検査装置 | |
JP3977503B2 (ja) | フィルム検査方法およびそれを用いたフィルム検査装置 | |
JP2010223598A (ja) | シート状物の欠陥検査装置 | |
JP2011141285A5 (ko) | ||
JP2001124538A (ja) | 物体表面の欠陥検査方法および欠陥検査装置 | |
KR102632190B1 (ko) | 편광 필름의 촬상 장치, 및 검사 장치, 그리고 검사 방법 | |
JP2005351825A (ja) | 欠陥検査装置 | |
JP2016125817A (ja) | 検査システム、検査方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130117 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130416 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130424 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130514 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5274622 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |