JP5266972B2 - エキシマランプ - Google Patents
エキシマランプ Download PDFInfo
- Publication number
- JP5266972B2 JP5266972B2 JP2008220654A JP2008220654A JP5266972B2 JP 5266972 B2 JP5266972 B2 JP 5266972B2 JP 2008220654 A JP2008220654 A JP 2008220654A JP 2008220654 A JP2008220654 A JP 2008220654A JP 5266972 B2 JP5266972 B2 JP 5266972B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge vessel
- discharge
- long side
- ultraviolet
- short side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002245 particle Substances 0.000 claims description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 32
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 12
- 229910052724 xenon Inorganic materials 0.000 claims description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 5
- 230000006378 damage Effects 0.000 abstract description 8
- 238000005452 bending Methods 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 description 23
- 238000000576 coating method Methods 0.000 description 23
- 239000007788 liquid Substances 0.000 description 23
- 239000007789 gas Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000002904 solvent Substances 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 4
- 239000002270 dispersing agent Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical group CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 238000007496 glass forming Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000009172 bursting Effects 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/305—Flat vessels or containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
- H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Manufacturing & Machinery (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008220654A JP5266972B2 (ja) | 2008-08-29 | 2008-08-29 | エキシマランプ |
TW098120839A TWI431658B (zh) | 2008-08-29 | 2009-06-22 | Excimer lamp |
KR1020090067422A KR101213350B1 (ko) | 2008-08-29 | 2009-07-23 | 엑시머 램프 |
CN2009101666409A CN101661866B (zh) | 2008-08-29 | 2009-08-24 | 准分子灯 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008220654A JP5266972B2 (ja) | 2008-08-29 | 2008-08-29 | エキシマランプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010055971A JP2010055971A (ja) | 2010-03-11 |
JP5266972B2 true JP5266972B2 (ja) | 2013-08-21 |
Family
ID=41789801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008220654A Active JP5266972B2 (ja) | 2008-08-29 | 2008-08-29 | エキシマランプ |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5266972B2 (ko) |
KR (1) | KR101213350B1 (ko) |
CN (1) | CN101661866B (ko) |
TW (1) | TWI431658B (ko) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011204408A (ja) * | 2010-03-25 | 2011-10-13 | Ushio Inc | 蛍光ランプ |
CN102214545A (zh) * | 2010-04-01 | 2011-10-12 | 优志旺电机株式会社 | 荧光灯 |
JP5287928B2 (ja) * | 2011-05-17 | 2013-09-11 | ウシオ電機株式会社 | エキシマランプ |
JP5704375B2 (ja) * | 2012-02-02 | 2015-04-22 | ウシオ電機株式会社 | エキシマランプの発光管の製造方法 |
JP5773277B2 (ja) * | 2012-04-27 | 2015-09-02 | 株式会社Gsユアサ | 誘電体バリア放電ランプ |
JP5773276B2 (ja) * | 2012-04-27 | 2015-09-02 | 株式会社Gsユアサ | 誘電体バリア放電ランプ |
CN103377873B (zh) * | 2012-04-27 | 2017-04-12 | 株式会社杰士汤浅国际 | 电介质阻挡放电灯 |
KR102219742B1 (ko) | 2013-07-31 | 2021-02-23 | 가부시키가이샤 지에스 유아사 | 방전 램프 |
JP2015032378A (ja) * | 2013-07-31 | 2015-02-16 | 株式会社Gsユアサ | 放電ランプ |
JP5928848B2 (ja) * | 2014-04-22 | 2016-06-01 | ウシオ電機株式会社 | 光照射装置およびロングアーク型放電ランプ |
JP7384090B2 (ja) * | 2020-03-26 | 2023-11-21 | ウシオ電機株式会社 | エキシマランプ、光照射装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3252676B2 (ja) * | 1995-10-02 | 2002-02-04 | ウシオ電機株式会社 | 誘電体バリア放電ランプ |
JP3580233B2 (ja) * | 2000-09-19 | 2004-10-20 | ウシオ電機株式会社 | 誘電体バリア放電ランプ装置 |
JP4221561B2 (ja) * | 2002-10-02 | 2009-02-12 | 株式会社ジーエス・ユアサコーポレーション | エキシマランプ |
JP5148803B2 (ja) * | 2003-05-21 | 2013-02-20 | 株式会社Gsユアサ | 無声放電ランプ |
JP2005222905A (ja) * | 2004-02-09 | 2005-08-18 | Japan Storage Battery Co Ltd | エキシマランプ |
JP2005332711A (ja) * | 2004-05-20 | 2005-12-02 | Japan Storage Battery Co Ltd | 誘電体バリア放電ランプ |
JP2005347025A (ja) * | 2004-06-01 | 2005-12-15 | Japan Storage Battery Co Ltd | 誘電体バリア放電ランプ |
JP4457768B2 (ja) * | 2004-06-15 | 2010-04-28 | ウシオ電機株式会社 | エキシマランプ |
JP4743847B2 (ja) * | 2005-05-18 | 2011-08-10 | 株式会社小糸製作所 | 自動車用前照灯 |
JP4857939B2 (ja) * | 2006-06-19 | 2012-01-18 | ウシオ電機株式会社 | 放電ランプ |
JP4788534B2 (ja) * | 2006-09-07 | 2011-10-05 | ウシオ電機株式会社 | エキシマランプ |
JP4998827B2 (ja) * | 2008-01-31 | 2012-08-15 | ウシオ電機株式会社 | エキシマランプ |
-
2008
- 2008-08-29 JP JP2008220654A patent/JP5266972B2/ja active Active
-
2009
- 2009-06-22 TW TW098120839A patent/TWI431658B/zh active
- 2009-07-23 KR KR1020090067422A patent/KR101213350B1/ko active IP Right Grant
- 2009-08-24 CN CN2009101666409A patent/CN101661866B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
KR101213350B1 (ko) | 2012-12-17 |
CN101661866A (zh) | 2010-03-03 |
TW201009887A (en) | 2010-03-01 |
TWI431658B (zh) | 2014-03-21 |
JP2010055971A (ja) | 2010-03-11 |
CN101661866B (zh) | 2013-07-17 |
KR20100026972A (ko) | 2010-03-10 |
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