201009887 六、發明說明： 【發明所屬之技術領域】 本發明是關於經由二氧化矽玻璃所成的放電容器，及 相對的一對電極，及在該一對的電極間形成該放電容器的 二氧化矽玻璃，激勵放電用氣體’並在上述放電容器的內 '部發生準分子放電的準分子燈。 Φ 【先前技術】 近年來，開發了藉由將波長200nm以下的真空紫外線 照射在金屬、玻璃及其他材料所成的被處理體，而藉由該 真空紫外光及由此所生成的臭氧的作用來處理被處理體的 技術，例如除去附著於被處理體的表面的有機污染物質的 洗淨處理技術，或在被處理體的表面形成氧化膜的氧化膜 形成處理技術，而被實用化。 在此些裝置中，作爲照射真空紫外光，眾知例如藉由 φ 準分子放電形成準分子分子，利用隨著該準分子分子的崩 潰所發生的光’例如波長1 72nm附近的光的準分子燈。此 種準分子燈’是爲了更有效率地放射更高強度的紫外線， ' 實施很多嘗試。 第5圖是表示日本特開2004-127710號公報所述的習 知的準分子燈的構成的說明用立體圖。習知的準分子燈60 是具備透射紫外線的二氧化矽玻璃所成斷面矩形狀又中空 長邊的放電容器61，而在該放電容器61的外表面形成有 一對電極65 ’66。在該放電容器61的內部封入氙氣體作. -5- 201009887 爲放電用氣體。又，該準分子燈60是若在一方的該電極 65供應著點燈電力，則形成有準分子分子，隨著該準分子 分子的崩潰而產生真空紫外光被放射的所謂準分子放電。 真空紫外光是極高能量的光之故，因而若將該強真空 紫外光長時間地繼續照射在二氧化矽玻璃，則起因於紫外 線的缺陷會生成於該二氧化矽玻璃中，此爲形成紫外線失 真，視情況，會發生微細的裂痕或裂縫。尤其是，在面臨 於放電空間的最表面，在放電空間所發生的真空紫外光內 ，短波長側的高能量的波長域的光大部分會直接照射在該 表面，而強紫外線變形被形成在該表面收縮的方向。另一 方面，被照射在放電容器61的外表面的真空紫外光，是 僅形成該放電容器61的玻璃的厚度分量被衰減，而形成 於藉由紫外線失真所收縮的方向的紫外線失真量，是與內 表面相比較格外地變少。藉由該紫外線失真所生成的量之 不相同，抗拉應力施加於面臨於放電空間的最表面，該外 表面是朝伸長方向變形。 第6圖是表示用於說明習知的準分子燈的放電容器61 的變形的說明用斷面圖。 放電谷器61是長邊狀板玻璃所成的長邊面62a，62b 配置成互相相對向，而利用連結長邊面62a與長邊面62b 的短邊面63 a’ 63 b形成有斷面矩形狀的管。箭號是表示 朝放電容器的內部作用的應力的方向著。 在面臨於長邊面62a，62b或短邊面63a，63b的放電 空間的最表面真空紫外光之內，高能量的短波長域的光被 -6 - 201009887 吸收較多之故，因而形成紫外線失真，有力量作用 號所示地收縮的方向。另一方面，放電容器61的 是有力量作用於朝箭號地伸長的方向。在斷面矩形 電容器61中，由形狀上的特徵，有朝長邊面62a’ 向伸縮的應力，及朝短邊面63a，63b方向伸縮的 用於連結長邊面62a，62b與短邊面63a，63b的 64a，64b’ 64c，64d’而有應力集中在邊緣部64a φ 64c，64d。因此，藉由利用應力集中所積蓄的失真 邊緣部64a，64b，64c，64d成爲破損的起點，而 電容器61被破壞的問題。 專利文獻1 ··日本特開2004-127710號公報 【發明內容】201009887 VI. Description of the Invention: [Technical Field] The present invention relates to a discharge vessel formed by using ceria glass, and a pair of opposing electrodes, and a dioxide which forms the discharge vessel between the pair of electrodes A glass-lined, excimer lamp that excites a discharge gas 'and emits a quasi-molecular discharge in the inner portion of the discharge vessel. Φ [Prior Art] In recent years, the object to be treated by irradiating vacuum ultraviolet rays having a wavelength of 200 nm or less with metal, glass, and other materials has been developed, and the vacuum ultraviolet light and the ozone generated thereby are developed. The technique for processing the object to be processed, for example, a cleaning treatment technique for removing an organic contaminant attached to the surface of the object to be processed, or an oxide film formation treatment technique for forming an oxide film on the surface of the object to be processed, is put to practical use. In such devices, as ultraviolet light is irradiated, it is known to form an excimer molecule by, for example, φ excimer discharge, and to utilize light generated by the collapse of the excimer molecule, for example, an excimer of light having a wavelength of around 1 72 nm. light. This excimer lamp is designed to emit higher-intensity ultraviolet rays more efficiently, and many attempts have been made. Fig. 5 is a perspective view for explaining the configuration of a conventional excimer lamp described in Japanese Laid-Open Patent Publication No. 2004-127710. The conventional excimer lamp 60 is a discharge vessel 61 having a rectangular parallelepiped shape and a long hollow side formed by ultraviolet ray-transparent cerium oxide glass, and a pair of electrodes 65' 66 are formed on the outer surface of the discharge vessel 61. A helium gas is sealed in the inside of the discharge vessel 61. -5 - 201009887 is a gas for discharge. Further, in the excimer lamp 60, when one of the electrodes 65 is supplied with lighting power, an excimer molecule is formed, and a so-called excimer discharge in which vacuum ultraviolet light is emitted as the excimer molecules collapse is generated. Vacuum ultraviolet light is a very high-energy light. Therefore, if the strong vacuum ultraviolet light is continuously irradiated on the ceria glass for a long time, defects due to ultraviolet rays are generated in the ceria glass, which is formed. Ultraviolet distortion, depending on the situation, can cause fine cracks or cracks. In particular, in the vacuum ultraviolet light generated in the discharge space facing the outermost surface of the discharge space, most of the light of the high-energy wavelength region on the short-wavelength side directly illuminates the surface, and strong ultraviolet rays are formed in the surface. The direction in which the surface contracts. On the other hand, the vacuum ultraviolet light that is irradiated on the outer surface of the discharge vessel 61 is an amount of ultraviolet distortion in which the thickness component of the glass forming only the discharge vessel 61 is attenuated and formed in a direction contracted by ultraviolet distortion. It is exceptionally less than the inner surface. The amount of the ultraviolet distortion generated is different, and the tensile stress is applied to the outermost surface facing the discharge space, which is deformed in the direction of elongation. Fig. 6 is a cross-sectional view for explaining the deformation of the discharge vessel 61 of the conventional excimer lamp. The discharge valley device 61 is a long side surface 62a formed by long-side plate glass, and 62b is disposed to face each other, and a cross section is formed by a short side surface 63a' 63b connecting the long side surface 62a and the long side surface 62b. Rectangular tube. The arrow indicates the direction of the stress acting toward the inside of the discharge vessel. In the surface ultraviolet light that faces the discharge space of the long side faces 62a, 62b or the short side faces 63a, 63b, the high-energy short-wavelength light is absorbed by -6 - 201009887, thereby forming ultraviolet rays. Distortion, the direction of contraction as indicated by the force action number. On the other hand, the discharge vessel 61 has a force acting on the direction of the arrow. The cross-sectional rectangular capacitor 61 has a shape-like characteristic, and has a stress that expands and contracts toward the long side surface 62a', and a long side surface 62a, 62b and a short side surface that expands and contracts in the direction of the short side surfaces 63a, 63b. 64a, 64b'64c, 64d' of 63a, 63b are concentrated at the edge portions 64a φ 64c, 64d. Therefore, the distortion edge portions 64a, 64b, 64c, 64d accumulated by the stress concentration become the starting point of the breakage, and the capacitor 61 is broken. Patent Document 1: Japanese Laid-Open Patent Publication No. 2004-127710
本發明是爲了解決上述問題而創作者，提供在 面矩形狀的管型放電容器的準分子燈中，可防止邊 φ 爲破損起點而使得放電容被破壞的準分子燈作爲目E 本發明的申請專利範圍第1項所述的準分子燈 具備兩端藉由端面被關閉，藉由互相相對的長邊面 該長邊面的短邊面所圍繞的斷面矩形狀的放電容器 r 放電容器的互相相對的該長邊面，或是在該短邊面 一對電極，而在該放電容器的內部封入氙氣體，在 間內發生準分子放電的準分子燈，其特徵爲：該長 對於連結該長邊面與該短邊面的邊緣部’該長邊面 部朝向該放電空間的內側的方向彎曲’在該放電容 於朝箭 外表面 狀的放 62b方 應力作 邊緣部 » 64b 5 ，使得 產生放 具備斷 緣部成 β。 ，屬於 與連結 ，在該 配置有 放電空 邊面相 的中央 器的內 -7- 201009887 表面形成有紫外線反射膜，該紫外線反射膜是形成於該邊 緣部的膜厚，比形成於該放電容器的其他內表面的膜厚還 要厚。 又，本發明的申請專利範圍第2項所述的準分子燈， 是除了上述構成之外，上述短邊面相對於連結該長邊面與 該短邊面的邊緣部，該短邊面的中央部朝向該放電空間的 內側的方向彎曲，爲其特徵者。 又，本發明的申請專利範圍第3項所述的準分子燈， @ 是除了上述構成之外，上述紫外線反射膜是包含二氧化矽 粒子與氧化鋁粒子，爲其特徵者。 依照本發明的申請專利範圍第1項所述的準分子燈， 該長邊面是對於連結該長邊面與該短邊面的邊緣部，該長 邊面的中央部朝向該放電空間的內側的方向彎曲，在該放 電容器的內表面形成有紫外線反射膜，該紫外線反射膜是 形成於該邊緣部的膜厚，比形成於該放電容器的其他內表 面的膜厚還要厚。因此，容易成爲破起點的邊緣部是藉由 © 紫外線反射膜使得真空紫外光充分地被遮斷，而可減輕發 生於該邊緣部的紫外線失真等的損傷之故，因而作爲結果 ，具有可防止該放電容器的破壞等的不方便的優點。 依照本發明的申請專利範圍.第2項所述的準分子燈， ^ 該短邊面的中央部爲對於連結長邊面與短邊面的邊緣部， 朝向放電空間的內側的方向彎曲。所以，即使形成於短邊 面中央部的內表面的該紫外線反射膜的膜厚作成較薄，在 該邊緣部近旁內表面，也可把該紫外線反射膜的膜作成較 -8- 201009887 厚。亦即，可將在放電空間內部所生成的強真空紫外光， 增大到在該邊緣部可選擇性地遮斷的程度爲止。所以，可 減輕發生於該邊緣部的紫外線失真等的損傷之故，因而作 爲結果，具有可防止該放電容器的破壞等的不方便的優點 〇 依照本發明的申請專利範圍第第3項所述的準分子燈 ，在該紫外線反射膜包含二氧化矽粒子，藉此可提高與由 φ 二氧化矽玻璃所成的放電容器之接著力，而且在該紫外線 反射膜包含氧化鋁粒子，藉此具有可長時間地維持紫外線 的反射特性的優點。還有’該氧化鋁粒子阻礙互相鄰接的 二氧化矽粒子利用放電所作的熱被熔融的情形，而可維持 各粒子間的境界，具有可長時間地維持紫外線的反射特性 的優點。 【實施方式】 φ 第1圖是表示本發明的準分子燈ίο的一例的構成的 槪略的說明用斷面圖，第1(a)圖是表示沿著放電容器U 的長度方向的斷面的橫斷面圖，第1(b)圖是表示第i(a)圖 的A-A線斷面圖。 該準分子燈10是具備兩端被氣密地封閉而在內部形 成有放電空間S的斷面矩形狀的中空長狀的放電容器n ，而在該放電容器11的內部，作爲放電用氣體，被封入 有氣氣體。在此’氣氣體是壓力作成例如成爲10至60kPa 的範圍內的封入量。 -9- 201009887 放電容器11是-由良好地透射真空紫外光的二氧化矽 玻璃，例如合成石英玻璃所成，兼具有作爲介質的功能。 放電容器11是長狀板玻璃所成的長邊面12a，12b配 置成互相相對的狀態，而藉由連結長邊面12a與長邊面 12b的短邊面13a，13b形成有斷面矩形狀的管。長邊方向 的兩端是藉由端面14a，14b被關閉，而將放電空間S的 ， 內部作爲氣密空間。放電容器1 1是例如長度方向的長度 爲800至1600mm，具有320至640cm3的放電空間S。 _ 在放電容器11的長邊面12a，12b的外表面，相對向 朝長邊方向延伸而形成有一對格子狀電極15a，15b。在長 邊面12a的外表面配置有功能作爲高電壓饋電電極的一方 電極15a，而在長邊面12b的外表面配置有功能作爲接地 電極的另一方電極15b。藉由此，作成在一對電極15a， 15b間介設有作爲介質的功能的放電容器11的狀態。此種 電極15a，15b是例如藉由將金屬所成的電極材料糊膏塗 佈於放電容器11，或是藉由照片印刷可形成。 @ 該準分子燈10，當點燈電力被供應於一方的電極15a ，則經由功能作爲介質的放電容器11的壁而在兩電極15a ，15b間生成放電，藉由此，形成有準分子分子，而且在 該準分子分子崩潰的過程中產生真空紫外光所放射的準分 ^ 子放電。 上述準分子燈10是爲了有效率地利用藉由準分子放 電所發生的真空紫外光，在被曝露於放電容器11的放電 空間S的表面，設有紫外線散射粒子所成的紫外線反射膜 -10- 201009887 紫外線反射膜20是對應於放電容器11的長邊面12a 的功能作爲高電壓饋電電極的一方電極15a的內表面領域 ，與連續於該領域的短邊面13a，13b的內表面領域全面 所形成。又，在端面14a，14b的內表面領域也形成有紫 外線反射膜20。一方面，在對應於放電容器11的長邊面 12b的功能作爲接地電極的另一方電極15b的內表面領域 φ ，藉由未形成有紫外線反射膜20來構成光出射部17。又 ，在未形成有長邊面12b的電極15b的端部的內表面領域 也藉由形成紫外線反射膜20，而可提高反射效率。 第2圖是表示爲了說明本發明的準分子燈1〇的詳細 而對於端面14a，14b平行地對於燈管軸正交的面切斷的 槪略斷面圖。尤其是，在同圖中，成爲強調各玻璃面的彎 曲狀態或紫外線反射膜的厚度之相差的槪念圖。 在長邊面12a的兩端接合有短邊面13a或短邊面13b ϋ 的一端，形成有接合長邊面12a與短邊面13a的邊緣部 16a’及接合長邊面12a與短邊面13b的邊緣部16b。同樣 地’在長邊面12b的兩端接合有短邊面13b或短邊面13a 的一端，形成有接合長邊面12b與短邊面13b的邊緣部 16c，及接合長邊面12b與短邊面13a的邊緣部16d。 該長邊面12a的中央部121a，是對於在該長邊面12a 上存在於中央部121a的延長上的邊緣部l6a，16b，位於 放電空間S的內方，而該長邊面12a本身，是朝該放電空 間S內側的方向彎曲。該長邊面12a的中央部121a與邊 -11 - 201009887 緣部16b之間的距離D是0.2mm左右。又，針對於配置 成與該長邊面12a相對向的長邊面12b也同樣。 又，短邊面13a的中央部19a，是對於在該短邊面 13a上存在於中央部19a的延長上的邊緣部16a，16b，位 於放電空間S的內方，而該短邊面13a本身，是朝該放電 _ 空間S內側的方向彎曲。又，配置成與該短邊面13a相對 — 向的短邊面13b也同樣。 觀看放電容器11全體，在平行地切斷端面14a，14b _ 的斷面中，邊緣部 16a，16b，16c，16d是在長邊面 12a 與長邊面12b相對向的方向，或短邊面13a與短邊面13b 相對向的方向，都朝向放電空間S的外方鼓出。換言之， 放電容器11是長邊面12a，12b的中央部121a，121b及 短邊面13a，13b的中央部19a，19b，成爲朝著放電空間 S內方稍突出方向彎曲的形狀。又，形成於該放電容器11 的內表面的紫外線反射膜20，是在該邊緣部16a，16b， 16c，16d，膜厚形成比中央部121a，121b，或是中央部 _ 1 9a，1 9b還要厚。 形成於長邊面12a的內表面領域的紫外線反射膜20， 是將反射在放電空間S所發生的真空紫外光作爲目的之故 ，因而將其膜厚形成充分厚，例如在中央部121a爲形成 3 Ομπι左右較佳。藉由充分地獲得紫外線反射膜20的膜厚 ，不但將入射於紫外線反射膜20的光不會透射至放電容 器11，而反射真空紫外光還可再重新回到放電空間S。 —方面，形成於短邊面13a的內表面領域的紫外線反 -12- 201009887 射膜20，是將保護被曝露在真空紫外光的放電容器u作 爲目的之故’因而反射真空紫外光的功能是並不需要，幾 乎不會透射真空紫外光的最低限度的厚度所形成就充分。 例如’若在中央部19a的內表面領域形成2至 3 ，貝丨J在 紫外線反射膜20就可遮斷真空紫外光約9 0%。 又’作爲構該紫外線反射膜20的紫外線散射粒子例 如使用將二氧化矽玻璃粉末狀地作成細小粒子的二氧化矽 粒子等。二氧化矽粒子是粒子徑爲例如0.01〜20 的範 圍內者，中心粒徑（數平均粒徑的峰値）爲如0.1〜l〇ym者 較佳，更佳爲0.3〜3"m者。又，包含於紫外線反射膜20 的二氧化矽粒子的粒徑分佈是不會擴展至廣範圍者較佳， 使用粒徑成爲中心粒徑的値的二氧化矽粒子被選別成半數 以上的二氧化矽粒子較佳。 該二氧化矽粒子是藉由一部分熔融等，將紫外線反射 膜20附著於放電容器11。一般線膨賬係數値相等或近似 者，具有容易接著的性質。二氧化矽粒子是線膨脹係數値 與二氧化矽玻璃所成的放電容器11相等之故，因而具有 提高與放電容器11的接著力的功能。 然而，二氧化矽粒子是藉由在準分子燈所發生的 電漿的熱，會熔融，消失粒界’無法擴散反射真空紫外光 而有降低反射率的情形。作爲紫外線散射粒子’不但含有 二氧化矽粒子，也含有氧化鋁粒子’藉此’即使被曝露在 依電漿所致的熱時’具有比二氧化较粒子還高融點的氧化 鋁粒子是也不會熔融之故’因而以粒子彼此間結合著互相 -13- 201009887 地鄰接的二氧化矽粒子與氧化鋁粒子被防止而被維持著粒 界。 氧化鋁粒子是粒子徑爲例如0.1〜10 的範圍內者， 中心粒徑（數平均粒徑的峰値）爲如0.1〜3 者較佳，更佳 爲0.3〜3#m者。又，被包含於紫外線反射膜20的氧化鋁 ^ 粒子的粒徑的分佈是不會廣範圍地擴展較佳，使用粒徑成 爲中心粒徑之値的氧化鋁粒子的被選別成爲一半以上的氧 化鋁粒子較佳。 @ 第3圖是表示用於表示此種放電容器11的形成方法 的製造途中的放電容器11的立體圖。 邊緣部16a，16b，16c，16d朝放電空間S的外方鼓 出的放電容器11，是將圓筒狀二氧化矽玻璃所成的圓形管 25，藉由安裝有取出棒24的矩形狀拉拔模子23，在加熱 軟化該圓形管之狀態下藉由拉拔該拉拔模子所成形。爲了 把邊緣部16a，16b，16c，16d朝外方鼓出的方式予以成 形，在拉拔模子23的角形成鼓出。 @ 作爲其加工手續，首先，以燃燒器加熱二氧化矽玻璃 所成的圓筒狀圓形管25直到容易地變形爲止。之後，在 以燃燒器加熱圓形管2 5的外表面的狀態下，將拉拔模子 23插進內管並塞進。拉拔模子23是使用比圓形管25的斷 面還要大者之故，因而圓形管25被擠廣成方形管。例如 對於直徑Φ 30mm的圓形管25，使用著長邊面長度成爲 40mm的拉拔模子23。又，拉拔模子23是曝露在高溫之 故’因而利用碳所形成較佳。若使用金屬所成的拉拔模子 -14- 201009887 23，則金屬作爲不純物而附著混入於放電容器11的內表 面，而有放電容器11的二氧化矽玻璃的純度會降低之虞 〇 使用具有比圓形管25的斷面還要大的面積的拉拔模 子23而將圓形管25擴展淬火成方形管之故，因而被成形 的放電容器11的斷面是成爲投射拉拔模子23的形狀的形 狀。然而，考慮該拉拔模子本身的熱脹，或拉拔後的玻璃 管的收縮等，實際上在拉拔模子23的角事先形成鼓出， 藉此朝外方鼓出放電容器11的邊緣部16a，16b，16c， 16d的方式被成形。 第4圖是表示紫外線反射膜20的膜厚，及其光的透 射率的關係的圖表。將縱軸作爲透射率[%]，而將橫軸作 爲紫外線反射膜的膜厚Um]，表示其關係。又，表示於縱 軸的透射率是表示波長1 72nm的真空紫外光的透射率。又 ，可知在波長150nm並波長200nm的範圍的真空紫外線 領域，表示大約同樣的趨勢。由同一圖表可知，若加厚紫 外線反射膜20的膜厚，則會降低真空紫外光的透射率， 可知紫外線反射膜20的膜厚在10 μιη以上的範圍，完全不 透射真空紫外光。 將第4圖的結果適用於第2圖的放電容器11，則若將 紫外線反射膜20形成具有充分膜厚於放電容器11的內表 面領域，而在放電空間S內所發生的波長17 2nm具有峰値 的真空紫外光未能透射紫外線反射膜20之故，因而可減 低被照射在對於放電空間S經由紫外線反射膜20所形成 -15- 201009887 的放電容器11，具體爲長邊面12a，短邊面13a’13b的 真空紫外光的強度。因此，防止強度強大的真空紫外光照 射在構成放電容器11的二氧化矽玻璃，而可抑制放電容 器的劣化。 爲了將在放電空間S內部所發生的準分子光照射在對 象物，必須構成未形成有紫外線反射膜20的光射出部17 。在光射出部17未有紫外線反射膜20之故，因而真空紫 外光直接地被照射在構成放電容器11的二氧化矽玻璃。 又，放電容器11是呈斷面矩形狀的形狀之故，因而在邊 緣部16a，16b，16c，16d具有應力容易集中的特徵。所 以光射出部17是形成在未包含邊緣部16a，16b，16c， 16d的長邊面12b，而容易成爲破損的起點的邊緣部16a， 16b，16c，16d是藉由紫外線反射膜20從真空紫外光被保 護。採用此種構成，藉此，即使使用斷面矩形狀的放電容 器11的準分子燈中，也可防止放電容器11的破裂。 又，放電容器11是長邊面12a，12b的中央部121a， 121b或短邊面13a，13b的中央部19a，19b，對於邊緣部 16a’ I6b，I6c，16d，位於放電空間S的內方之故，因而 在邊緣部 16a’ 16b，16c，16d的內表面領域，與放電容 器11的其他內表面領域相比較，紫外線反射膜20的膜厚 可形成較厚。具體而言，形成於邊緣部16a，16b，16c， 16d的內表面領域的紫外線反射膜20，是與形成於其他領 域的紫外線反射膜20相比較，其膜厚至少變大成10/ζιη以 上。因此’形成於邊緣部16a，16b，16c，16d的內表面 -16- 201009887 領域的紫外線反射膜20的膜厚是至少被確保ι〇 #„!以上之 故’因而大致完全地可遮斷真空紫外光，而在放電容器11 的邊緣部16a，16b，16c，16d未照射在放電空間S所發 生的真空紫外光。 亦即，形成於邊緣部16a，16b，16c，16d的內表面 領域的紫外線反射膜20的膜厚，與形成於放電容器11的 其他的表面領域的膜厚相比較，成爲較厚。所以，在容易 φ 成爲破損起點的邊緣部16a，16b，16c，16d中，藉由紫 外線反射膜20來遮斷真空紫外光，作成真空紫外光未照 射在放電容器11的邊緣部16a，16b，16c，16d，而可防 止利用真空紫外光所作的損傷所引起的放電容器11的破 裂。 以下，說明紫外線反射膜20對於放電容器11的內表 面領域的形成方法的一例子》 紫外線反射膜20是藉由例如稱爲「流下法」的方法 φ 就可進行。首先，調合流進放電容器11內側的塗敷液。 塗敷液是由紫外線散射粒子，黏合劑，分散劑及溶劑所構 成。紫外線散射粒子是例如二氧化矽粒子與氧化鋁粒子， 黏合劑是含有原矽酸四乙基分散劑是矽烷耦合劑，溶劑是 乙醇。 藉由在塗敷液含有分散劑，凝膠化塗敷液而容易附著 於放電容器11，而且可定影在塗敷液中均等地分散的紫外 線散射粒子。 藉由在塗敷液含有溶劑，可調整塗敷液的紫外線散射 -17- 201009887 粒子的含有濃度。 將塗敷液流進放電容器11的內部，附著於放電容器 11的內表面的所定領域。 首先，將塗敷液流進短邊面13a的內表面領域，短邊 面13a的中央部19a的膜厚成爲2至5从m的方式附著塗敷 液。然後，將塗敷液流過短邊面13b的內表面領域，短邊 面13b的中央部19b的膜厚成爲2至5//m的方式附著塗敷 液。在短邊面13a及短邊面13b的內表面領域附著有塗敷 液的狀態下，經自然乾燥而進行蒸發溶劑。之後，在氧氣 氣氛中加熱成500 °C經1小時進行暫時淬火。進行暫時淬 火俾將塗敷液定影於短邊面13a，13b的內表面領域，藉 此’在邊緣部16a’ 16b周邊中可作成與繼續流進長邊面 12a的內表面領域的塗敷液不會緩衝的情形。 然後，將塗敷液流進長邊面12a的內表面領域以形成 紫外線反射膜20。長邊面12a的中央部121a的膜厚成爲 20至30/zm的方式附著塗敷液，而在該狀態下經自然乾燥 俾蒸發溶劑。此時，藉由塗敷液的表面張力，在邊緣部 16a，16b周邊產生著塗敷液被吸上於短邊面13a，13b的 現象之故，因而在邊緣部16a，16b的短邊面13a，13b側 也附著有較厚的塗敷液。 在該狀態經自然乾燥在長邊面12a的內表面領域也附 著有塗敷液的放電容器11，在該狀態下經自然乾燥而蒸發 溶劑，又在氧氣氣氛中加熱成100 〇°C經1小時進行正式淬 火。當燒成塗敷液，則分散劑被加熱消失，僅留下紫外線 -18- 201009887 散射粒子與黏合劑，黏合劑是成爲二氧化矽而被熔融附著 於紫外線散射粒子，以提昇與粒子彼此間，或放電容器11 的黏合力。 利用上述工序，在長邊面12a的內表面領域中，與短 邊面13a，13b的內表面領域相比較，可形成膜厚較厚的 _ 紫外線反射膜20。又，放電容器11的長邊面12a，12b或 短邊面13a，13b被加工成彎曲狀，及利用製程的塗敷液 H 的表面張力，在邊緣部16a，16b，16c，16d的內表面領 域，與其他領域相比較，使得紫外線反射膜20的膜厚可 形成較厚。 又，在本發明的說明中所使用的圖式是針於紫外線反 射膜20的薄膜厚度或放電容器11的形狀，擴張地表示尺 寸等。 【圖式簡單說明】 第1(a)圖及第1(b)圖是表示本發明的準分子燈的構成 的說明圖槪略斷面圖。 第2圖是表示本發明的準分子燈的槪略斷面圖。 第3圖是表示本發明的準分子燈的放電容器的形成方 法所用的立體圖。 第4圖是表示紫外線反射膜的膜厚及其光透射率的關 係的圖表。 第5圖是表示習知的準分子燈的構成的說明用立體圖 -19- 201009887 第6圖是表示用於說明習知的準分子燈的變形的說明 用斷面圖。 【主要元件符號說明】 1 0 :準分子燈 1 1 :放電容器 12a ， 12b :長邊面 1 3 a，1 3b :短邊面 14a， 14b:端面 15a， 15b:電極 1 6a，1 6b，1 6c，1 6d :邊緣部 1 7 :光射出部 20 :紫外線反射膜The present invention has been made in order to solve the above problems, and an excimer lamp capable of preventing a side φ from being a breakage origin and causing a discharge capacitance to be broken is provided as an object in the excimer lamp having a rectangular tube-shaped discharge vessel. The excimer lamp according to the first aspect of the patent application has a rectangular discharge vessel r discharge vessel surrounded by the short side faces of the long side faces which are closed by the end faces of the opposite sides. The long-side surface facing each other, or a pair of electrodes on the short-side surface, and an excimer lamp in which a helium gas is sealed inside the discharge vessel and an excimer discharge occurs in the middle, which is characterized in that: Connecting the long side surface and the edge portion of the short side surface 'the long side surface is curved toward the inner side of the discharge space'. The discharge capacitance is placed on the outer surface of the arrow and the edge of the arrow 62b is the edge portion » 64b 5 . The resulting discharge has a broken edge portion formed into β. In the inner-7-201009887 surface of the center device in which the discharge air-side surface is disposed, an ultraviolet reflecting film is formed on the surface, and the ultraviolet reflecting film is formed on the edge portion, and is formed in the discharge vessel. The film thickness of other inner surfaces is also thicker. Further, in the excimer lamp according to the second aspect of the present invention, in addition to the above configuration, the short side surface is opposite to an edge portion connecting the long side surface and the short side surface, and the center of the short side surface The portion is curved toward the inner side of the discharge space, and is characterized by the same. Further, in the excimer lamp according to the third aspect of the present invention, in addition to the above configuration, the ultraviolet ray reflecting film is characterized by comprising cerium oxide particles and alumina particles. According to the excimer lamp of the first aspect of the invention, the long side surface is an edge portion connecting the long side surface and the short side surface, and a central portion of the long side surface faces the inner side of the discharge space The direction of the bending is such that an ultraviolet reflecting film is formed on the inner surface of the discharge vessel, and the ultraviolet reflecting film has a film thickness formed on the edge portion and is thicker than a film thickness formed on the other inner surface of the discharge vessel. Therefore, the edge portion which is likely to be the starting point is that the vacuum ultraviolet light is sufficiently blocked by the ultraviolet reflecting film, and the damage such as ultraviolet distortion occurring in the edge portion can be reduced, and as a result, it can be prevented. The inconvenient advantage of the destruction of the discharge vessel. According to the invention, in the excimer lamp according to the second aspect of the invention, the central portion of the short side surface is curved toward the inner side of the discharge space with respect to the edge portion connecting the long side surface and the short side surface. Therefore, even if the film thickness of the ultraviolet ray reflection film formed on the inner surface of the central portion of the short side surface is made thin, the film of the ultraviolet ray reflection film can be made thicker than -8 - 201009887 on the inner surface near the edge portion. That is, the strong vacuum ultraviolet light generated inside the discharge space can be increased to such an extent that the edge portion can be selectively blocked. Therefore, it is possible to reduce the damage such as ultraviolet rays generated in the edge portion, and as a result, it has an advantage of being inconvenient to prevent the destruction of the discharge vessel, etc., according to the third item of the patent application scope of the present invention. The excimer lamp includes cerium oxide particles in the ultraviolet ray reflecting film, whereby an adhesion force to the discharge vessel formed of φ cerium oxide glass can be improved, and the ultraviolet ray reflecting film contains alumina particles, thereby having The advantage of the reflection characteristics of ultraviolet rays can be maintained for a long time. Further, the alumina particles prevent the heat of the cerium oxide particles adjacent to each other from being melted by the discharge, thereby maintaining the boundary between the particles and having the advantage of maintaining the reflection characteristics of the ultraviolet rays for a long period of time. [Embodiment] FIG. 1 is a cross-sectional view showing a schematic configuration of an example of an excimer lamp ίο of the present invention, and FIG. 1(a) is a cross-sectional view along the longitudinal direction of the discharge vessel U. The cross-sectional view of Fig. 1(b) is a cross-sectional view taken along line AA of the i-th (a). The excimer lamp 10 is a hollow-shaped discharge vessel n having a rectangular cross section in which both ends are hermetically sealed and a discharge space S is formed therein, and a discharge gas is used inside the discharge vessel 11 as a discharge gas. It is enclosed in gas. Here, the gas gas is a pressure-injection amount in a range of, for example, 10 to 60 kPa. -9- 201009887 The discharge vessel 11 is a glass of cerium oxide which is well transmitted by vacuum ultraviolet light, such as synthetic quartz glass, and has a function as a medium. The discharge vessel 11 is a long side surface 12a formed by long glass, and 12b is disposed in a state of being opposed to each other, and is formed in a rectangular shape by a short side surface 13a, 13b connecting the long side surface 12a and the long side surface 12b. Tube. Both ends in the longitudinal direction are closed by the end faces 14a, 14b, and the inside of the discharge space S is used as an airtight space. The discharge vessel 1 1 is, for example, a length in the longitudinal direction of 800 to 1600 mm, and has a discharge space S of 320 to 640 cm 3 . _ On the outer surfaces of the long side faces 12a, 12b of the discharge vessel 11, a pair of lattice electrodes 15a, 15b are formed to extend in the longitudinal direction. One electrode 15a functioning as a high voltage feed electrode is disposed on the outer surface of the long side surface 12a, and the other electrode 15b functioning as a ground electrode is disposed on the outer surface of the long side surface 12b. Thereby, a state in which the discharge vessel 11 functioning as a medium is interposed between the pair of electrodes 15a and 15b is formed. Such electrodes 15a, 15b are formed, for example, by coating an electrode material paste made of a metal on the discharge vessel 11, or by photo printing. @ The excimer lamp 10, when the lighting power is supplied to one of the electrodes 15a, generates a discharge between the electrodes 15a, 15b via the wall of the discharge vessel 11 functioning as a medium, whereby excimer molecules are formed And the quasi-component discharge emitted by the vacuum ultraviolet light is generated during the collapse of the excimer molecule. The excimer lamp 10 is an ultraviolet reflecting film 10 provided with ultraviolet scattering particles on the surface of the discharge space S exposed to the discharge vessel 11 in order to efficiently utilize vacuum ultraviolet light generated by excimer discharge. - 201009887 The ultraviolet ray reflection film 20 is an inner surface area of one electrode 15a which functions as a high voltage feed electrode corresponding to the long side surface 12a of the discharge vessel 11, and an inner surface area of the short side faces 13a, 13b which are continuous with the field Fully formed. Further, an ultraviolet ray reflection film 20 is also formed on the inner surface areas of the end faces 14a, 14b. On the other hand, in the inner surface area φ of the other electrode 15b serving as the ground electrode corresponding to the long side surface 12b of the discharge vessel 11, the light exit portion 17 is constituted by the ultraviolet reflection film 20 not being formed. Further, in the inner surface region of the end portion of the electrode 15b where the long side surface 12b is not formed, the ultraviolet ray reflection film 20 is also formed, whereby the reflection efficiency can be improved. Fig. 2 is a schematic cross-sectional view showing the end faces 14a and 14b cut parallel to the plane perpendicular to the tube axis for explaining the details of the excimer lamp 1A of the present invention. In particular, in the same figure, a concept of emphasis is placed on the difference between the curved state of each glass surface and the thickness of the ultraviolet reflective film. One end of the short side surface 13a or the short side surface 13b is joined to both ends of the long side surface 12a, and the edge portion 16a' and the long side surface 12a and the short side surface which join the long side surface 12a and the short side surface 13a are formed. Edge portion 16b of 13b. Similarly, the end portion of the short side surface 13b or the short side surface 13a is joined to both ends of the long side surface 12b, and the edge portion 16c that joins the long side surface 12b and the short side surface 13b is formed, and the joint long side surface 12b and the short side are formed. The edge portion 16d of the side surface 13a. The central portion 121a of the long side surface 12a is located inside the discharge space S with respect to the edge portions 16a, 16b which are present on the long side surface 12a in the extension of the central portion 121a, and the long side surface 12a itself, It is curved in the direction of the inner side of the discharge space S. The distance D between the central portion 121a of the long side surface 12a and the edge portion 16b of the side -11 - 201009887 is about 0.2 mm. The same applies to the long side surface 12b which is disposed to face the long side surface 12a. Further, the central portion 19a of the short side surface 13a is located inside the discharge space S with respect to the edge portions 16a, 16b which are present on the short side surface 13a in the extension of the central portion 19a, and the short side surface 13a itself Is bent in the direction of the inside of the discharge_space S. Further, the same applies to the short side surface 13b which is disposed opposite to the short side surface 13a. When the entire discharge vessel 11 is viewed, in the cross section in which the end faces 14a, 14b_ are cut in parallel, the edge portions 16a, 16b, 16c, 16d are in the direction in which the long side face 12a and the long side face 12b face each other, or the short side face. The direction in which the 13a and the short side surface 13b face each other bulges toward the outside of the discharge space S. In other words, the discharge vessel 11 has a central portion 121a, 121b of the long side faces 12a, 12b and central portions 19a, 19b of the short side faces 13a, 13b which are curved in a direction slightly protruding toward the inside of the discharge space S. Further, the ultraviolet ray reflection film 20 formed on the inner surface of the discharge vessel 11 is formed at the edge portions 16a, 16b, 16c, and 16d, and has a film thickness ratio center portion 121a, 121b or a central portion _1 9a, 1 9b. Still thicker. The ultraviolet ray reflection film 20 formed on the inner surface area of the long side surface 12a is intended to reflect the vacuum ultraviolet light generated in the discharge space S. Therefore, the film thickness is sufficiently thick, for example, formed in the central portion 121a. 3 Ομπι is better. By sufficiently obtaining the film thickness of the ultraviolet reflecting film 20, not only the light incident on the ultraviolet reflecting film 20 is transmitted to the discharge capacitor 11, but also the reflected vacuum ultraviolet light can be returned to the discharge space S again. On the other hand, the ultraviolet ray -12-201009887 film 20 formed on the inner surface of the short side surface 13a is intended to protect the discharge vessel u exposed to vacuum ultraviolet light. Thus, the function of reflecting vacuum ultraviolet light is It is not necessary, and the formation of a minimum thickness that hardly transmits vacuum ultraviolet light is sufficient. For example, if 2 to 3 is formed in the inner surface area of the central portion 19a, the shellfish J can block the vacuum ultraviolet light by about 90% in the ultraviolet reflecting film 20. Further, as the ultraviolet ray scattering particles constituting the ultraviolet ray reflection film 20, for example, cerium oxide particles in which fine particles are formed by powdery cerium oxide glass are used. The cerium oxide particles are those having a particle diameter of, for example, 0.01 to 20, and the central particle diameter (peak of the number average particle diameter) is preferably 0.1 to 1 μm, more preferably 0.3 to 3 " Further, the particle size distribution of the cerium oxide particles contained in the ultraviolet ray reflection film 20 is preferably not extended to a wide range, and the cerium oxide particles having a cerium having a particle diameter of a central particle diameter are selected to be more than half of the oxidized dioxide. The ruthenium particles are preferred. The cerium oxide particles are adhered to the discharge vessel 11 by a part of melting or the like. The general line inflation factor is equal or similar, and has the property of being easy to follow. The cerium oxide particles have a coefficient of linear expansion 値 equal to that of the discharge vessel 11 made of cerium oxide glass, and thus have a function of improving the adhesion to the discharge vessel 11. However, the cerium oxide particles are melted by the heat of the plasma generated in the excimer lamp, and the disappearance of the grain boundary is not able to diffuse and reflect the vacuum ultraviolet light to lower the reflectance. As the ultraviolet ray scattering particles, not only the cerium oxide particles but also the aluminum oxide particles are used, and even if they are exposed to heat due to the plasma, the alumina particles having a higher melting point than the particles of the oxidized particles are also It does not melt. Therefore, the particles are bonded to each other and the cerium oxide particles and alumina particles adjacent to each other are prevented from being maintained at the grain boundary. The alumina particles have a particle diameter of, for example, 0.1 to 10, and the central particle diameter (peak of the number average particle diameter) is preferably 0.1 to 3, more preferably 0.3 to 3 #m. In addition, the distribution of the particle diameter of the alumina particles contained in the ultraviolet ray reflection film 20 is preferably not widely spread, and the oxidation of the alumina particles having the particle diameter of the center particle diameter is selected to be half or more. Aluminum particles are preferred. @ Fig. 3 is a perspective view showing the discharge vessel 11 in the middle of the manufacturing process for forming such a discharge vessel 11. The discharge vessel 11 which bulges toward the outside of the discharge space S at the edge portions 16a, 16b, 16c, and 16d is a circular tube 25 formed of cylindrical cerium oxide glass, and has a rectangular shape in which the extraction rod 24 is attached. The drawing die 23 is formed by drawing the drawing die while heating and softening the circular tube. In order to form the edge portions 16a, 16b, 16c, 16d so as to bulge outward, bulging is formed at the corners of the drawing mold 23. @ As a processing procedure, first, a cylindrical circular tube 25 made of cerium oxide glass is heated by a burner until it is easily deformed. Thereafter, the drawing die 23 is inserted into the inner tube and inserted while the outer surface of the circular tube 25 is heated by the burner. The drawing die 23 is larger than the cross section of the circular pipe 25, and thus the circular pipe 25 is extruded into a square pipe. For example, for the circular tube 25 having a diameter of 30 mm, a drawing die 23 having a long side face length of 40 mm is used. Further, the drawing die 23 is exposed to a high temperature, and thus it is preferably formed of carbon. When a drawing die of the metal-14-201009887 23 is used, the metal adheres to the inner surface of the discharge vessel 11 as an impurity, and the purity of the cerium oxide glass having the discharge vessel 11 is lowered. The circular tube 25 has a larger cross-section drawing die 23 and the circular tube 25 is expanded and quenched into a square tube. Thus, the cross section of the formed discharge vessel 11 is in the shape of the projection drawing mold 23. shape. However, considering the thermal expansion of the drawing mold itself, or the contraction of the glass tube after the drawing, etc., the bulging is actually formed in advance at the corner of the drawing mold 23, whereby the edge portion of the discharge vessel 11 is bulged outward. The manner of 16a, 16b, 16c, 16d is formed. Fig. 4 is a graph showing the relationship between the film thickness of the ultraviolet ray reflection film 20 and the transmittance of light. The vertical axis is taken as the transmittance [%], and the horizontal axis is taken as the film thickness Um of the ultraviolet ray reflection film, and the relationship is shown. Further, the transmittance shown on the vertical axis is the transmittance of vacuum ultraviolet light having a wavelength of 1 72 nm. Further, it is understood that the vacuum ultraviolet field in the range of 150 nm and 200 nm has a similar tendency. As is clear from the same graph, when the film thickness of the ultraviolet ray reflection film 20 is increased, the transmittance of the vacuum ultraviolet light is lowered, and it is understood that the film thickness of the ultraviolet ray reflection film 20 is in the range of 10 μm or more, and the vacuum ultraviolet light is not transmitted at all. When the result of FIG. 4 is applied to the discharge vessel 11 of FIG. 2, if the ultraviolet ray reflection film 20 is formed to have a sufficient film thickness in the inner surface area of the discharge vessel 11, the wavelength of 17 2 nm which occurs in the discharge space S has The vacuum ultraviolet light of the peak 未能 fails to transmit the ultraviolet ray reflection film 20, so that the discharge vessel 11 which is irradiated to the discharge space S via the ultraviolet ray reflection film 20 to form the -15-201009887, specifically the long side surface 12a, is short. The intensity of the vacuum ultraviolet light of the side surface 13a'13b. Therefore, the strong ultraviolet ultraviolet light is prevented from being incident on the ceria glass constituting the discharge vessel 11, and the deterioration of the discharge capacitor can be suppressed. In order to irradiate the excimer light generated inside the discharge space S to the object, it is necessary to constitute the light emitting portion 17 in which the ultraviolet ray reflection film 20 is not formed. Since the ultraviolet light-emitting film 20 is not present in the light emitting portion 17, the vacuum ultraviolet light is directly irradiated onto the ceria glass constituting the discharge vessel 11. Further, since the discharge vessel 11 has a rectangular cross section, the edge portions 16a, 16b, 16c, and 16d have a characteristic that stress tends to concentrate. Therefore, the light emitting portion 17 is formed on the long side surface 12b not including the edge portions 16a, 16b, 16c, 16d, and the edge portions 16a, 16b, 16c, 16d which are easy to be the starting points of the breakage are vacuumed by the ultraviolet reflecting film 20 Ultraviolet light is protected. According to this configuration, even if the excimer lamp of the discharge capacitor 11 having a rectangular cross section is used, the crack of the discharge vessel 11 can be prevented. Further, the discharge vessel 11 is the central portions 121a, 121b of the long side faces 12a, 12b or the central portions 19a, 19b of the short side faces 13a, 13b, and is located inside the discharge space S for the edge portions 16a' I6b, I6c, 16d. Therefore, the film thickness of the ultraviolet ray reflection film 20 can be formed thicker in the inner surface area of the edge portions 16a' 16b, 16c, 16d as compared with the other inner surface areas of the discharge vessel 11. Specifically, the ultraviolet ray reflection film 20 formed on the inner surface areas of the edge portions 16a, 16b, 16c, and 16d has a film thickness of at least 10 Å or more as compared with the ultraviolet ray reflection film 20 formed in other fields. Therefore, the film thickness of the ultraviolet ray reflection film 20 formed on the inner surface of the edge portions 16a, 16b, 16c, 16d is at least ensured to be 〇 „ „ „ „ 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而Ultraviolet light, while the edge portions 16a, 16b, 16c, 16d of the discharge vessel 11 are not irradiated with vacuum ultraviolet light generated in the discharge space S. That is, formed in the inner surface area of the edge portions 16a, 16b, 16c, 16d The film thickness of the ultraviolet ray reflection film 20 is thicker than that of other surface areas formed in the discharge vessel 11. Therefore, in the edge portions 16a, 16b, 16c, and 16d where φ is a breakage origin, The ultraviolet ray reflection film 20 blocks the vacuum ultraviolet light, and the vacuum ultraviolet light is not irradiated on the edge portions 16a, 16b, 16c, 16d of the discharge vessel 11, and the rupture of the discharge vessel 11 caused by the damage by the vacuum ultraviolet light can be prevented. Hereinafter, an example of a method of forming the ultraviolet reflective film 20 on the inner surface area of the discharge vessel 11 will be described. The ultraviolet reflective film 20 can be carried out by, for example, a method φ called "flow down method".First, the coating liquid flowing into the inside of the discharge vessel 11 is blended. The coating liquid is composed of ultraviolet scattering particles, a binder, a dispersing agent, and a solvent. The ultraviolet ray scattering particles are, for example, cerium oxide particles and alumina particles, and the binder is a cerium coupling agent containing a tetraethyl orthosilicate dispersant, and the solvent is ethanol. By containing a dispersing agent in the coating liquid, the coating liquid is gelled to easily adhere to the discharge vessel 11, and the ultraviolet ray scattering particles uniformly dispersed in the coating liquid can be fixed. By containing a solvent in the coating liquid, the concentration of the ultraviolet ray scattering -17-201009887 of the coating liquid can be adjusted. The coating liquid flows into the inside of the discharge vessel 11 and adheres to a predetermined area of the inner surface of the discharge vessel 11. First, the coating liquid flows into the inner surface area of the short side surface 13a, and the film thickness of the central portion 19a of the short side surface 13a is 2 to 5 from the coating liquid. Then, the coating liquid flows through the inner surface area of the short side surface 13b, and the coating liquid is adhered so that the film thickness of the central portion 19b of the short side surface 13b becomes 2 to 5/m. The solvent is evaporated by natural drying in a state in which the coating liquid is adhered to the inner surface of the short side surface 13a and the short side surface 13b. Thereafter, it was temporarily quenched by heating to 500 ° C in an oxygen atmosphere for 1 hour. After the temporary quenching, the coating liquid is fixed to the inner surface area of the short side faces 13a, 13b, whereby the coating liquid which can be formed in the periphery of the edge portion 16a' 16b and continues to flow into the inner surface area of the long side face 12a There is no buffering situation. Then, the coating liquid flows into the inner surface area of the long side face 12a to form the ultraviolet ray reflection film 20. The coating liquid is adhered so that the thickness of the central portion 121a of the long side surface 12a is 20 to 30/zm, and in this state, the solvent is naturally dried and evaporating the solvent. At this time, the surface of the edge portions 16a, 16b is caused by the surface tension of the coating liquid, and the coating liquid is attracted to the short side faces 13a, 13b. Therefore, the short side faces of the edge portions 16a, 16b are formed. Thicker coating liquid is also attached to the 13a, 13b side. In this state, the discharge vessel 11 of the coating liquid is also adhered to the inner surface of the long side surface 12a by natural drying, and in this state, the solvent is evaporated by natural drying, and heated to 100 〇 ° C in an oxygen atmosphere. Formally quenched in hours. When the coating liquid is fired, the dispersing agent is heated and disappears, leaving only the ultraviolet ray -18-201009887 scattering particles and the binder, and the binder is cerium oxide and is fused to the ultraviolet ray scattering particles to enhance the interaction with the particles. , or the adhesion of the discharge vessel 11. By the above process, in the inner surface area of the long side surface 12a, the ultraviolet ray reflection film 20 having a relatively thick film thickness can be formed as compared with the inner surface area of the short side surfaces 13a, 13b. Further, the long side faces 12a, 12b or the short side faces 13a, 13b of the discharge vessel 11 are processed into a curved shape, and the surface tension of the coating liquid H by the process is applied to the inner surfaces of the edge portions 16a, 16b, 16c, 16d. In the field, the film thickness of the ultraviolet ray reflection film 20 can be made thicker as compared with other fields. Further, the drawing used in the description of the present invention is the thickness of the film of the ultraviolet ray reflection film 20 or the shape of the discharge vessel 11, and the size and the like are expanded. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1(a) and Fig. 1(b) are schematic cross-sectional views showing the structure of an excimer lamp of the present invention. Fig. 2 is a schematic cross-sectional view showing the excimer lamp of the present invention. Fig. 3 is a perspective view showing a method of forming a discharge vessel of the excimer lamp of the present invention. Fig. 4 is a graph showing the relationship between the film thickness of the ultraviolet ray reflection film and the light transmittance thereof. Fig. 5 is a perspective view showing a configuration of a conventional excimer lamp. -19-201009887 Fig. 6 is a cross-sectional view for explaining a modification of a conventional excimer lamp. [Description of main component symbols] 1 0 : Excimer lamp 1 1 : discharge vessel 12a , 12b : long side face 1 3 a, 1 3b : short side face 14a, 14b: end face 15a, 15b: electrode 1 6a, 16b, 1 6c, 1 6d : edge portion 1 7 : light emitting portion 20 : ultraviolet reflecting film
-20--20-