CN103377873B - Dielectric barrier discharge lamp - Google Patents
Dielectric barrier discharge lamp Download PDFInfo
- Publication number
- CN103377873B CN103377873B CN201310145892.XA CN201310145892A CN103377873B CN 103377873 B CN103377873 B CN 103377873B CN 201310145892 A CN201310145892 A CN 201310145892A CN 103377873 B CN103377873 B CN 103377873B
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- China
- Prior art keywords
- photomask
- sidewall paneling
- discharge lamp
- discharge vessel
- dielectric barrier
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/025—Associated optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/302—Vessels; Containers characterised by the material of the vessel
Abstract
The invention provides a dielectric barrier discharge lamp used for vacuum ultraviolet irradiation, wherein the amount of the ultraviolet light irradiation is reduced, and a discharge vessel is protected from damage. Left and right side plates are arranged in the cross sections parallel with the front and back side plates and are bended to be convex towards to the exterior of the discharge vessel, shading films are formed on the inner side surface of the left and right side plates, the top and inner sides of the bended left and right side plates are covered by shading films, the shading films are positioned in the cross section parallel with the front and back side plates, the line connecting an intersection point with one end of the shading film forms an angle from 60 to 180 DEGs with the line connecting the intersection point with the other end of the shading film, wherein the intersection point is formed by the intersection of the middle line of upper and lower plates and the left and right side plates, or the intersection point with one end of the shading film forms an angle less than 180 DEGs with the line connectiong the intersection point with the other end of the shading film, and the ultraviolet transmissibility of the shading film is from 16% to 86%.
Description
Technical field
The present invention relates to be used to irradiate vacuum ultraviolet dielectric barrier discharge lamp.
Background technology
In recent years, it is known to the dielectric barrier discharge lamp for being shaped as that there is flat face in irradiation side of discharge tube (specially
Sharp document 1,2,3 etc.).The dielectric barrier discharge lamp can be purple with low cost manufacture by being connected with the supply unit of regulation
Outer beam irradiating apparatus, with can be to the vacuum ultraviolet advantage of irradiation object thing direct irradiation.
Following technology has been recorded in patent documentation 1：The dielectric barrier of the extremely shape of lengthwise is put before and after being formed as
In electric light, formed by the inner surface of front sheet or left and right sides wallboard before and after in the discharge vessel being mainly made up of quartz
" vacuum ultraviolet protective layer ", so as to suppress the deterioration (the 10th section and the 11st section etc.) of before and after front sheet or left and right sides wallboard.Separately
Outward, following technology has been recorded in patent documentation 2：Mainly it is being made up of quartz and with by left and right sides wallboard and upper and lower wallboard
In the discharge vessel of connected edge part, the central part of upper and lower wallboard is formed as in the way of the inner side towards discharge vessel
Bending, and the inner surface in discharge vessel forms " ultraviolet reflecting film ", thus, it is possible to prevent with edge part as breakage
The rupture (the 8th section and the 9th section etc.) of the discharge vessel of starting point.
In addition, in the previous research of all inventors of the invention, it is thus understood that exist in the lampshade because receiving discharge tube
Air-flow etc. and make various flyings easily be attached to discharge tube, and discharge tube produced because of the attachment of the tube wall damage so
Problem.Therefore, all inventors of the invention propose following scheme：By " the shading structure at least blocking more than 50% ultraviolet
Part " constituting the wall on the long side surface around the lower wall panels in discharge tube being mainly made up of quartz, thus subtracting
The attachment and its solidification (patent documentation 3) of few flying flown here to discharge tube.Hereinafter, in the description, exist comprising discharge tube
Interior and referred to as discharge vessel.
【Citation】
【Patent documentation】
【Patent documentation 1】Japanese Unexamined Patent Publication 2004-127710 publications
【Patent documentation 2】Japanese Unexamined Patent Publication 2009-181818 publications
【Patent documentation 3】International Publication No. 2011/078181
【The summary of invention】
【The invention problem to be solved】
However, in above-mentioned existing dielectric barrier discharge lamp, if the left and right sides wallboard for making discharge vessel generally hides
Light component or the surface on the inside of it are integrally formed the photomask for blocking ultraviolet, then existing makes ultraviolet irradiation light quantity
Reduce such problem.
In addition, in above-mentioned existing dielectric barrier discharge lamp, because discharge vessel is mainly made up of quartz, if therefore
Make the energy of high ultraviolet to discharge vessel Continuous irradiation, then there is the scope because forming photomask and cracking, from
And make the damaged situation of discharge vessel.In the section of the left and right sides wallboard for making discharge vessel in the way of becoming protrusion towards outside
During bending, in the case of without photomask, exist in the damaged situation of the near top generation of the bending.Even if in addition, working as
In the case that photomask is formed in the near top of bending on the inner surface of left and right sides wallboard, in Acceleration study, also deposit
There is the situation of breakage near the short edge of photomask in discharge vessel.
This part invent all inventors be conceived to by ultraviolet to discharge vessel irradiate when bending section in damaged part and
Its bursting stress, it is believed that the position of stress concentration is different because of the forming range of photomask, thus the forming range of photomask with
The stress distribution produced in the bending section of discharge vessel necessarily has certain relation.Also, the shape of photomask is thickly investigated in week
Into after the relation of scope and the stress distribution of discharge vessel, the forming range for completing photomask is the bending section product in discharge vessel
Whether reach in raw stress distribution bursting stress it is important the reason for one of opinion (opinion of first aspect).
In addition, this part invent all inventors be conceived to by ultraviolet to discharge vessel irradiate when bending section in damaged portion
Position, the transmitance of the ultraviolet of photomask and its bursting stress, it is believed that the time till the breakage of discharge vessel is because of shading
The forming range of film and the transmitance of ultraviolet and different, therefore the transmission of the ultraviolet of the forming range and photomask of photomask
The stress distribution that rate is produced with the bending section in discharge vessel necessarily has certain relation.Also, thickly investigate photomask in week
After the relation of the transmitance of the ultraviolet of forming range and photomask and the stress distribution of discharge vessel, the formation of photomask is completed
The transmitance of scope and ultraviolet is the weight that bursting stress whether is reached in the stress distribution of the bending section generation of discharge vessel
The opinion (opinion of second aspect) of one of the reason for wanting.
The content of the invention
The present invention proposes that in view of the foregoing the problem of its technology is to be situated between for irradiating vacuum ultraviolet electricity
In matter impedance discharge lamp, mainly suppress the reduction of vacuum ultraviolet irradiate light quantity, and while the breakage for suppressing discharge vessel comes
Improve the life-span.
【Solution】
The dielectric barrier discharge lamp of the first aspect possesses by upper and lower wallboard, the sidewall paneling of left and right and side wall in front and back
Plate constitute discharge vessel, be sealing into discharge vessel inside for excimers light electric discharge gas, electric discharge
The outside of container and the electrode arranged at least one party of upper and lower wallboard.Also, left and right sidewall paneling with side in front and back
In the parallel section of wallboard, bend in the way of to the outside of discharge vessel protrusion.In the inner surface of the sidewall paneling of the left and right
It is formed with the photomask for blocking ultraviolet.Also, the dielectric barrier discharge lamp is characterised by, the photomask covers left and right
The inner side at the top of the bending of sidewall paneling, and the photomask is in the section parallel with sidewall paneling in front and back, by intersection point and shading
The straight line angulation that the straight line that one end of film links links with the other end by intersection point and photomask is for more than 60 degree and little
In 180 degree, wherein, the intersection point is the straight line of the centre of upper and lower wallboard and the friendship by upper and lower wallboard and the sidewall paneling of left and right
The intersection point of the straight line that boundary links.
By the structure, photomask suppresses the stress produced on the sidewall paneling of left and right, the side thus, it is possible to prevent left and right
The generation of the crackle of wallboard etc., the life-span for making discharge vessel improves.Also, due to photomask do not cover left and right sidewall paneling it is whole
Body, therefore, it is possible to suppress the reduction of ultraviolet irradiation light quantity.
In the dielectric barrier discharge lamp of the first aspect, be preferably formed with the angle of photomask for more than 86 degree and
Less than 152 degree.By the structure, in the sidewall paneling of left and right, on the region of the concentration for being more suitable for suppressing stress shading is configured
The end edge portion of film, therefore, it is possible to the formation of photomask is constrained to into Min. such that it is able to further suppress the photograph of ultraviolet
Penetrate the reduction of light quantity.
The dielectric barrier discharge lamp of the second aspect possesses by upper and lower wallboard, the sidewall paneling of left and right and side wall in front and back
Plate constitute discharge vessel, be sealing into discharge vessel inside for excimers light electric discharge gas, electric discharge
The outside of container and the electrode arranged at least one party of upper and lower wallboard.Also, left and right sidewall paneling with side in front and back
In the parallel section of wallboard, bend in the way of to the outside of discharge vessel protrusion.In the inner surface of the sidewall paneling of the left and right
It is formed with the photomask for blocking ultraviolet.Also, the photomask covers the inner side at the top of the bending of the sidewall paneling of left and right, and should
Photomask in the section parallel with sidewall paneling in front and back, the straight line that one end of intersection point and photomask is linked with by intersection point and screening
The straight line angulation that the other end of light film links is less than 180 degree, wherein, the intersection point is the straight of the centre of upper and lower wallboard
Line and the intersection point by upper and lower wallboard and the straight line of the boundary link of the sidewall paneling of left and right.Also, the dielectric barrier discharge lamp
It is characterised by, the transmitance of the ultraviolet of photomask is more than 16% and less than 86% scope.
Here, the transmitance of the ultraviolet of photomask is the value of the emission wavelength relative to discharge lamp.
By the structure, the transmitance for making the ultraviolet of photomask is more than 16% and less than 86% scope, is thus come
Suppress the stress produced on the sidewall paneling of left and right, improve and put therefore, it is possible to suppress the generation of the crackle of sidewall paneling etc. of left and right
The life-span of capacitor.Also, because photomask does not cover the sidewall paneling entirety of left and right, therefore, it is possible to suppress ultraviolet irradiation light
The reduction of amount.Especially in the sidewall paneling of left and right, will configure near the boundary of photomask in the area for being adapted to the concentration for suppressing stress
In domain, therefore, it is possible to the formation of photomask is constrained to into Min..
In the dielectric barrier discharge lamp of the second aspect, msy be also constructed to, upper and lower wallboard be flat face and
Smoothly it is connected with the sidewall paneling of left and right, in the section parallel with side wall in front and back, the angle for being formed with photomask is 86 degree
Below.
Another dielectric barrier discharge lamp of the second aspect possesses by upper and lower wallboard, the sidewall paneling of left and right and in front and back
Sidewall paneling constitute discharge vessel, be sealing into discharge vessel inside for excimers light electric discharge gas,
The outside of discharge vessel and the electrode arranged at least one party of upper and lower wallboard.Also, left and right sidewall paneling with front and back
The parallel section of sidewall paneling in, bend in the way of to the outside of discharge vessel protrusion.In the inner side of the sidewall paneling of the left and right
Surface is formed with the photomask for blocking ultraviolet.Also, the photomask covers the inner side at the top of the bending of the sidewall paneling of left and right,
And the photomask is in the section parallel with sidewall paneling in front and back, the straight line that one end of intersection point and photomask is linked with by intersection point
The straight line angulation linked with the other end of photomask is less than 180 degree, wherein, the intersection point is the centre of upper and lower wallboard
Straight line and the intersection point by the straight line of the link of having a common boundary of the sidewall paneling of upper and lower wallboard and left and right.Also, the dielectric barrier is put
Electric light is characterised by that the transmitance of the ultraviolet of photomask is relative high with the boundary side of the sidewall paneling of left and right in upper and lower wallboard
In the near top of bending.
By the structure, make the transmitance of the near top of the bending of photomask relatively low, make upper and lower wallboard with left and right
Sidewall paneling boundary side transmitance it is relatively high, thus, it is possible to relax left and right sidewall paneling photomask end edge portion near
The concentration of the stress of generation, suppresses the generation of the crackle of sidewall paneling of left and right etc., so that the life-span of discharge vessel improves.
【Invention effect】
According to the dielectric barrier discharge lamp in terms of this first and second, the drop of ultraviolet irradiation light quantity can be suppressed
It is low, and while prevent the generation of the crackle of sidewall paneling of left and right etc. and improve the life-span of discharge vessel.
Description of the drawings
Fig. 1 is the figure of the embodiment for representing the first aspect, is dielectric barrier discharge lamp perpendicular to lengthwise side
To sectional view.
Fig. 2 is the figure of the embodiment for representing the first aspect, is that dielectric barrier discharge lamp eliminates lengthwise
The axonometric chart of central part.
Fig. 3 is the figure of the embodiment for representing the first aspect, (a) is the center of the lengthwise of discharge vessel in Fig. 2
Cut open at axle and observe sectional view obtained from discharge vessel from the side, (b) be the line A-A sectional view of (a).
Fig. 4 (a) and (b) are to represent the left and right in the discharge vessel of the dielectric barrier discharge lamp shown in Fig. 1 and Fig. 2
Sidewall paneling medial surface formed ultraviolet photomask situation figure.
Fig. 5 is the figure of the stress distribution of the wallboard of the left and right of the discharge vessel for illustrating the first aspect, (a) is without shading
The sectional view of the discharge vessel of film, is (b) to be formed with putting for photomask in the near top of inner surface of the sidewall paneling of left and right
The sectional view of capacitor, (c) be left and right sidewall paneling inner surface broader scope be formed with photomask electric discharge hold
The sectional view of device.
Fig. 6 is the figure of the measurement result of the stress distribution of the sidewall paneling of the left and right of the discharge vessel for representing the first aspect.
Fig. 7 is the figure that the ultraviolet light quantity of the measure to the first aspect is illustrated, and (a) is the width for illustrating photomask
Figure, (b) be the figure that represents the width of photomask and the relation of ultraviolet light quantity.
Fig. 8 is the figure for representing the existing dielectric barrier discharge lamp without photomask, is discharge lamp perpendicular to lengthwise
The sectional view in direction.
Fig. 9 is the figure of the assay method of the transmitance of the photomask for illustrating dielectric barrier discharge lamp.
Figure 10 is the figure of of the first embodiment for representing the second aspect, is the vertical of dielectric barrier discharge lamp
In the sectional view of longitudinally.
Figure 11 is the figure of the stress distribution of the sidewall paneling of the left and right of the discharge vessel for illustrating the second aspect, is (a) do not have
The sectional view of the discharge vessel of photomask, is (b) to be formed with transmitance in the near top of inner surface of the sidewall paneling of left and right
The sectional view of the discharge vessel of about 7.9% photomask, (c) be left and right sidewall paneling inner surface near top shape
Into the sectional view for having transmitance to be about the discharge vessel of 24% photomask.
Figure 12 is the stress distribution of the sidewall paneling of the left and right of the discharge vessel of the first embodiment for representing the second aspect
Measurement result figure.
Figure 13 is the figure of the experimental result of the first embodiment for representing the second aspect, (a) represents discharge vessel
The figure of the relation of the lighting time of peak strain and discharge vessel, (b) is the peak strain and photomask that represent discharge vessel
The figure of the relation of the transmitance of ultraviolet.
Figure 14 is the figure of of the second embodiment for representing the second aspect, is the vertical of dielectric barrier discharge lamp
In the sectional view of longitudinally.
【Symbol description】
1 discharge vessel
1a upper and lower wallboard
The sidewall paneling of 1b or so
Sidewall paneling before and after 1c
2 upper electrodes
3 lower electrodes
4 photomasks
5 exhaustors
10 dielectric barrier discharge lamps
Specific embodiment
(first aspect)
Hereinafter, with reference to drawing, various embodiments of the present invention will be described.Using same on same or similar component
One symbol is only indicated tail tag difference, and the repetitive description thereof will be omitted, but the record of each embodiment should be in order to manage
Solution the present invention technology thought and in accordance with destination explain, should not limited interpretation for embodiment record.First, to table
The overall summary for showing the dielectric barrier discharge lamp of embodiments of the present invention is illustrated.
Fig. 2 and Fig. 3 are the figures for representing one embodiment of the present invention, and Fig. 2 is in the eliminating of dielectric barrier discharge lamp
The axonometric chart in centre portion, Fig. 3 is the sectional view of Fig. 2.Fig. 3 (a) be by the discharge vessel of Fig. 2 the central axis of lengthwise cut open and from
Sectional view obtained from side surface direction observation, Fig. 3 (b) is the line A-A sectional view observed along the direction of arrow of Fig. 3 (a).Need
It is noted that the single dotted broken line in figure represents the central shaft of lengthwise.
Dielectric barrier discharge lamp 10 have the discharge vessel 1 of lengthwise, electrode 2,3, be used to hide in the inside of discharge vessel 1
Photomask 4, the exhaustor 5 of gear ultraviolet.Xenon (Xe) gas lighted for excimers is sealed with discharge vessel 1.Put
Capacitor 1 is made up of compound stone English system glass, including：The flat wallboard of top and bottom pair is (hereinafter referred to as " upper and lower wallboard ".)
The sidewall paneling that 1a, left and right face is (hereinafter referred to as " sidewall paneling of left and right ".)1b；The sidewall paneling of front-back pair is (hereinafter referred to as " front
Sidewall paneling afterwards ".)1c.Discharge vessel 1 can be by will be by the lengthwises that constitute of sidewall paneling 1b of upper and lower wallboard 1a and left and right
Sidewall paneling 1c before and after pipe using before and after distinguishes deposition and blocks to constitute.In discharge vessel 1, upper and lower wallboard 1a and a left side
Right sidewall paneling 1b both relative to lengthwise central shaft configured in parallel, the central axis of sidewall paneling 1c in front and back relative to lengthwise
Configuration.Left and right sidewall paneling 1b in the section that the central axis relative to lengthwise are cut open, in the way of protruding towards outside
Bending.For example, the Breadth Maximum of the above-below direction of the cross section of the discharge vessel 1 shown in Fig. 3 (a) be more than ten mm, left and right directions
Breadth Maximum be tens mm, the length of fore-and-aft direction is hundreds of more than mm.Project in advance respectively on sidewall paneling 1c before and after
It is provided with exhaustor 5.Each exhaustor 5 is the deposition in the way of the outer surface of the sidewall paneling 1c before and after further out side protrusion
Fused silica glass tubing, connects with the inside of discharge vessel 1 respectively in each exhaustor 5.The discharge vessel 1 is upper and lower
The outer surface of wallboard 1a be formed with the metallic film of electrode 2,3.Electrode 2 is with except for dielectric barrier discharge lamp radiation
The non-film portion of sensor that checked of vacuum ultraviolet intensity outside, cover the upper surface of wainscot 1a substantially
The mode film forming in whole face.In addition, electrode 3 with cancellous pattern the lower surface of lower wall panels 1a substantially entire surface film forming.
It is provided with to containing yittrium oxide (Y in the medial surface of the sidewall paneling 1b and sidewall paneling 1c in front and back of left and right2O3) slip enter
Row is used to block the photomask 4 of ultraviolet obtained from burning till.
Constitute ultraviolet lamp by the way that dielectric barrier discharge lamp 10 is connected with supply unit, and by via
Lead to electrode applies the electric power of regulation making dielectric barrier discharge lamp lighting, so as to pass through flat lower wall panels 1a to
The vacuum ultraviolet of 172nm is irradiated in the direction of the arrow of Fig. 3 (a).
Fig. 1 is the sectional view perpendicular to longitudinally of the dielectric barrier discharge lamp of present embodiment.Need explanation
It is that the single dotted broken line in the direction in length and breadth in Fig. 1 represents respectively the symmetrical axis of symmetry of the line in section, and the intersection point of two axis of symmetry is located at
On the central shaft of the lengthwise of Fig. 2.In addition, the arrow of dotted line represents ultraviolet irradiation direction.As shown in figure 1, discharge vessel 1
In, upper and lower wallboard 1a is smoothly connected respectively with the sidewall paneling 1b of left and right at the B1 of boundary.By upper and lower wallboard 1a and a left side
Smoothly connected referring to is carried out right sidewall paneling 1b in the little mode of the inclined change of the tangent line at the B1 that has a common boundary at the B1 of boundary
Connection.
In FIG, the section of the sidewall paneling 1b of left and right is bent in the way of becoming convex form towards outside.Specifically,
Semicircle of the outer surface by radius of curvature for R1 is constituted, and semicircle of the inner surface by radius of curvature for R2 is constituted.The side wall of left and right
The section of plate 1b can also with make each surface become oval or make to be essentially become near summit the mode such as linear carry out it is various curved
It is bent.
In FIG, photomask 4 is formed on the inner surface of the sidewall paneling 1b of left and right.And, photomask 4 covers left and right
Sidewall paneling 1b bending summit P1 inner side, also, in Fig. 1 (section parallel with sidewall paneling 1c in front and back), shading
The straight line L1 of the centre of upper and lower wallboard 1a is in that line is symmetrically similarly formed as line of symmetry by film 4, and by intersection point C and shading
The straight line L3 that one end B21 of film links is with the straight line L4 angulation θ of the other end B22 links by intersection point C and photomask 4
152 degree, wherein, intersection point C is the straight line L1 and the sidewall paneling by upper and lower wallboard 1a and left and right of the centre of upper and lower wallboard 1a
The intersection point of the straight line L2 that the boundary of 1b links.When photomask 4 is so formed, too small amount of photomask 4 can be led to suppress
Left and right sidewall paneling 1b on produce strain and extend until reach destroy till time.In order to be adequately suppressed in left and right
The strain that sidewall paneling 1b is produced, as long as making the angle, θ to form photomask 4 be more than 60 degree.
Fig. 4 (a) and (b) represent the electric discharge in the dielectric barrier discharge lamp shown in Fig. 1, Fig. 2 and Fig. 3 as one
The situation of ultraviolet photomask is formed on the medial surface of the sidewall paneling 1b of the left and right in container 1.First, by discharge vessel 1 such as Fig. 4
Incline in the way of the face of the sidewall paneling 1b of left and right becomes lower section as shown in (a), and will contain yittrium oxide from exhaustor 5
(Y2O3) slip S the height of regulation is injected into from the top of downside on the inner surface of the sidewall paneling 1b of left and right.Form shading
The angle of film is adjusted by the height of the slip S for injecting, but it is also possible to the sidewall paneling of left and right is made after a small amount of slip S is injected
1b inclines to adjust.Afterwards, unwanted slip S is discharged from exhaustor 5 and is then dried.The arrow of Fig. 4 (a) represents material
The moving direction of slurry S.The photomask can block the vacuum ultraviolet of 172nm, and shading rate can be by thickness or manufacture method
Etc. adjusting.
Shading rate can by making the slip of ormal weight in yittrium oxide concentration change adjusting.For example, it is also possible to sharp
To contain 10% yittrium oxide (Y with weight ratio meter with Sn- butanol2O3) slip dilution adjusting shading rate, under 3 times of dilutions
The photomask that shading rate is about 90% can be obtained, or the shading that shading rate is about 65% can be obtained under 10 times of dilutions
Film.Here, shading rate is the vacuum ultraviolet value relative to wavelength for 172 [nm].
Fig. 9 is the figure of the assay method of the transmitance of the photomask for illustrating dielectric barrier discharge lamp.As shown in figure 9, will
The assay method of the transmitance of the part 100 of the sidewall paneling of the left and right that above-mentioned dielectric barrier discharge lamp 10 is destroyed and taken out such as with
Under so.First, the part 100 of the sidewall paneling of left and right is erected by fixture (not shown) and is fixed on nitrogen (N2) in atmosphere
Determine on the platform 102 of device.Now, will configure in the top of slit 102a as the sidewall paneling of the left and right of measure object.Slit
The narrow width of the width of 102a photomask fully than determining.Then, wavelength will be determined (in present embodiment from light source 101
In, be 172nm) vacuum ultraviolet irradiate to the sidewall paneling side of the left and right of a side via slit 102a, and by sensor 103
The vacuum ultraviolet light intensity (passing through intensity) after through photomask is measured from the sidewall paneling side of the left and right of the opposing party.
According to so vacuum ultraviolet transmission intensity for determining, transmitance T is obtained by following formula.
T=I1/I0
Wherein, I0Represent the transmission intensity of the dielectric barrier discharge lamp without photomask, I1Represent electricity Jie of measure object
The transmission intensity of matter impedance discharge lamp.It should be noted that being multiplied by 100 in the case where T is represented by percentage rate (%).
In addition, obtaining shading rate S by following formular。
Sr=1-T
When sidewall paneling 1c as sidewall paneling 1b as described above to left and right and in front and back burns till after applying slip S,
Obtain the photomask 4 as shown in dotted line in Fig. 4 (b).It is that the wavelength obtained based on xenon is in the vacuum ultraviolet for blocking
In the case of the vacuum ultraviolet of 172nm, in addition to yittrium oxide, can also make the ultramicrons such as Zinc Oxide (ZnO) or
Person pass through ultramicron obtained from coated with silica titanium oxide it is muddy in a solvent obtained from slip (dirty solution) or oxygen
Change aluminum (Al2O3) fine particles the burned material of slip etc..Afterwards, from the aerofluxuss of exhaustor 5 and electric discharge gas G is injected (for example
Xenon), make electric discharge gas G be filled into inside.Then, it is the leading section of the exhaustor 5 of both sides is melting sealed close by inside
Close.Afterwards, to electrode with metal carry out evaporation come the figure system of carrying out, finally by evaporation Afluon (Asta) (MgF2) being formed for protecting
The coating of shield electrode, so as to complete to be formed with the discharge vessel 1 of photomask.
Fig. 8 is the figure for representing the existing dielectric barrier discharge lamp without photomask, is discharge lamp perpendicular to lengthwise
The sectional view in direction.The shape and material of the discharge vessel of dielectric barrier discharge lamp 80 and the phase of discharge vessel illustrated in fig. 11
Together.When the quartzy discharge vessel long-time irradiation ultraviolet radiation processed from interior lateral dielectric barrier discharge lamp 80, quartz glass
Volume contraction, so as to left and right sidewall paneling inner surface on produce compression stress, on the contrary left and right sidewall paneling outside
Tensile stress is produced on surface.As a result, be concentrated around stretching in the top P of the outer surface of the sidewall paneling of left and right should
Power, so as to easily crack.
Here, as representing section in Fig. 5, in the section of the sidewall paneling of left and right, changing from the convex portion of outer surface
Summit P2 to the end of photomask parallel to upper and lower wallboard apart from W1, W2 (below, for convenience, referred to as " photomask
Width ".) to make discharge lamp, determine the strain for making discharge lamp long-time produce on discharge vessel when lighting.Produce
Discharge lamp C0, C1, C2 are as table 1 below.
The discharge lamp of measure object is configured in polarization plates, from polarization in the way of being clipped by polarization plates and sensitive colour plate
Plate side is illuminated and takes pictures from sensitive colour plate side, and strain value and stress value are obtained by graphical analyses.Strain value with should
Force value is in proportional relation.
【Table 1】
| Discharge lamp | Shading rate Sr (%) | Angle (degree) |
| C0 | 0 | - |
| C1 | 90 | 86 |
| C2 | 90 | 152 |
Fig. 5 (a) (C0) is the discharge lamp without photomask, and Fig. 5 (b) (C1) is the inner surface of the sidewall paneling in left and right
Near top is formed with the discharge lamp of photomask, and Fig. 5 (c) (C2) is the broader scope of the inner surface of the sidewall paneling in left and right
It is formed with the discharge lamp of photomask.The overall dimensions in the section perpendicular to longitudinally of discharge lamp C0, C1, C2 are all indulged for maximum
To width 16 [mm] × maximum lateral width 45 [mm], thickness 2.5 [mm], length 1220 [mm], the outside of the sidewall paneling of left and right
Surface is the semicircle that radius of curvature is 8 [mm], and inner surface is the semicircle that radius of curvature is 5.5 [mm].Photomask 41,42 all hides
The ultraviolet of gear more than 90%.Form the angle, θ of photomask 411About 86 degree, form the angle, θ of photomask 422About 152 degree.
Above-mentioned angle, θ1、θ2The measured value of scope W1, W2 of the inner surface of the sidewall paneling of left and right is all covered according to photomask 41,42,
And calculated using the radius of curvature of sidewall paneling of left and right of discharge lamp, thickness and refractive index.
Fig. 6 is the figure of the measurement result of the stress distribution of the sidewall paneling of the left and right of discharge lamp C0, C1, C2 for representing Fig. 5.Figure
In curve F0 represent Fig. 5 (a) discharge lamp C0 stress distribution curve chart, curve F1 represents the discharge lamp C1's of Fig. 5 (b)
The curve chart of stress distribution, curve F2 represents the curve chart of the stress distribution of the discharge lamp C2 of Fig. 5 (c).In addition, by Fig. 6's
P2 represents the summit P2 of the outer surface of the sidewall paneling of the left and right in Fig. 5, and the upper and lower wallboard in Fig. 5 is represented by the B1 of Fig. 6
With the boundary B1 of the sidewall paneling of left and right, the end B23 of the photomask 41 of Fig. 5 (b) is represented by the B23 of Fig. 6, by the B24 of Fig. 6
Represent the end B24 of the photomask 42 of Fig. 5 (c).Discharge lamp C0, C1, C2 were not strained before discharge lamp is lighted, stress value
Substantially 0.
Curve chart F0, F1, F2 represent the stress value after vacuum ultraviolet is irradiated more than 2000 hours.
As shown in fig. 6, in curve chart F0, at the P2 of summit, the value of tensile stress becomes maximum.This is illustrated well
After long-time is irradiated, the P2 of summit at discharge lamp C0 easily breakage the fact.
In curve chart F1, tensile stress is not produced at the P2 of summit such that it is able to confirm the effect of photomask 41.
But, at the B23 in end B23, i.e. Fig. 6 of the photomask 41 of Fig. 5 (b), the value of tensile stress becomes maximum.
And think when prolonged exposure ultraviolet, it is easily damaged at discharge lamp C1 B23 in figure 6.
From the result, near the summit of the inner surface of the sidewall paneling in the left and right of dielectric barrier discharge lamp 80
Form photomask, and from interior lateral discharge vessel irradiation ultraviolet radiation when, it is attached on the summit of the inner surface of the sidewall paneling of left and right
Nearby, the irradiation dose of ultraviolet sidewall paneling to the left and right is reduced, and can relax the contraction near the summit of inner surface.However,
It is being formed near the boundary in the region of photomask, big strain is easily being produced because of the different of the contraction of quartz, in the boundary
Neighbouring outer surface is concentrated with tensile stress, therefore easily cracks.
In curve chart F2, at the B24 in end 24, i.e. Fig. 6 of the photomask 42 of Fig. 5 (c) stretching is not observed yet
The peak value of stress.Also, in curve chart F2, it is known that in the position than end B24 in the inner part of photomask 42, tensile stress
Value relatively increases, but the maximum of tensile stress is reduced than curve chart F1.
Then, be produced on the outside of the discharge lamp C0 without photomask be formed with the discharge lamp S1 of easy photomask～
S7 is studying the width of the photomask and the relation of ultraviolet irradiation light quantity.In the outer surface of discharge lamp C0, with including not
There is photomask (0 [mm]) to form the photomask of the ultraviolet for blocking 100% respectively in 7 kinds of interior width, thus obtain discharge lamp
S1～S7.
Fig. 7 is the figure that the ultraviolet light quantity to determining is illustrated.Fig. 7 (a) is the figure of the width for illustrating photomask, Fig. 7
B () is figure of the width with the relation of ultraviolet light quantity for representing photomask.It should be noted that Fig. 7 (a) is only by discharge vessel
Unilateral half is shown perpendicular to the section of longitudinally.For the condition S1～S7 of table 2 is measured.Determine the light quantity of ultraviolet
Check device in, by the light film of its sensor head with from trial-production electric discharge clamping device lower surface separate 3.5 [mm's]
The mode at interval is configured.
In Fig. 7 (b), represent on transverse axis in the section of discharge vessel from the side of the central shaft Os directions left and right of lengthwise
Wallboard apart from D2[mm], represents the vacuum ultraviolet of the 172nm that the central part of discharge vessel is standardized as 1.0 on the longitudinal axis
Illumination I (a.u., arbitrary unit).According to Fig. 7 (b), the light quantity for being formed with the discharge lamp of each photomask be by transverse axis, transverse axis into
The area that the curve chart of two ordinates and the illumination obtained based on each photomask for the summit of convex portion is surrounded, when with without screening
When distinguishing calculating ratio (%) on the basis of the light quantity of the discharge lamp of light film, become the result shown in table 2.It should be noted that
As shown in Fig. 7 (a), the angle, θ s in table represents the scope to form photomask.
【Table 2】
As shown in Table 2, compared with the discharge lamp without photomask, the width of photomask is 6 [mm] and forms photomask
Scope is in 152 degree of discharge lamp, the reduction of light quantity to be suppressed within about 20%, and the width of photomask is 3 [mm] and is formed
The scope of photomask is in 102 degree of discharge lamp, the reduction of light quantity to be suppressed within about 10%.
When the result of the above is collected, by the left and right of the discharge vessel of the experimental result and Fig. 6 of the light quantity of above-mentioned discharge lamp
Wallboard stress distribution understand, formed photomask angle be preferably more than 86 degree and less than 152 degree, more preferably 102 degree
Above and less than 152 degree.
In the discharge lamp of embodiments of the invention, when putting for manufacturing experimently in the section of longitudinally with above-mentioned experiment
Electric light it is equivalently-sized, left and right sidewall paneling inner surface on from the summit of convex portion towards inner side with the width of 6.7 [mm],
152 degree form photomask, and when making shading rate about 67% of ultraviolet of photomask, relative to the discharge lamp without photomask,
94% light quantity can be obtained.In addition, in the discharge lamp, vacuum ultraviolet irradiation time even across 500 hours, also not
The strain of crest can be produced.
In addition, in the discharge lamp of another embodiment, it is thus identified that even if in the profile chi perpendicular to the section of longitudinally
It is very little for longitudinally wide 12 [the mm] × maximum lateral width 37 [mm] of maximum, thickness 2 [mm], and the section of the sidewall paneling in left and right
In, outer surface is directed towards the semicircle of the radius of curvature for 6 [mm] in outside, and it is 4 that inner surface is directed towards the radius of curvature in outside
In the case of the semicircle of [mm], it is also possible to suppress the reduction of light quantity in the same manner as the discharge lamp manufactured experimently in above-mentioned experiment, and while
Suppress the generation of strain.
The dielectric barrier discharge lamp of the present invention is formed with one layer of photomask in the inner surface of the sidewall paneling of left and right, but
The multilayer film being made up of the different multiple photomasks of the shading rate for making ultraviolet can be formed.At this point it is possible to by the shape of each layer
The shading rate of various ultraviolet is set into the scope of photomask, for example, can set difference by the distance on the summit away from convex portion
Shading rate.Specifically, can be formed about blocking the first photomask of more than 90% ultraviolet on the summit of convex portion, and
And, covered near the boundary of first photomask by the second relatively low photomask of transmitance and formed to upper and lower wallboard with
Near the boundary of the sidewall paneling of left and right.Thus, can reduce near the summit of convex portion to the sudden flying of discharge vessel
Attachment and its solidification, and the generation of the tensile stress of crest can be suppressed near the boundary of the first photomask such that it is able to
Suppress reducing and the breakage of suppression discharge vessel simultaneously for ultraviolet irradiation light quantity.
(second aspect)
(first embodiment)
Fig. 2 and Fig. 3 are the figures of of the first embodiment for representing the present invention, and Fig. 2 is dielectric barrier discharge lamp
The axonometric chart of the central part of lengthwise is eliminated, Fig. 3 is the sectional view of Fig. 2.Fig. 3 (a) be by the discharge vessel of Fig. 2 in lengthwise
Sectional view obtained from cutting open at heart axle and observing from the side, Fig. 3 (b) is observed along the direction of arrow of Fig. 3 (a)
Line A-A sectional view.It should be noted that the single dotted broken line in figure represents the central shaft of lengthwise.
It should be noted that the structure of Fig. 2 and Fig. 3 is same with first aspect, therefore omit the description.
Figure 10 is the figure of of first embodiment that represents the present invention, is dielectric barrier discharge lamp perpendicular to vertical
The sectional view of length direction.The single dotted broken line in the direction in length and breadth in Figure 10 represents respectively the symmetrical axis of symmetry of the line in section, and two right
The intersection point for claiming axle is located on the central shaft of the lengthwise of Fig. 2.In addition, the arrow of dotted line represents ultraviolet irradiation direction.Such as Figure 10
It is shown, in discharge vessel 1, upper and lower wallboard 1a is smoothly connected respectively with the sidewall paneling 1b of left and right at the B1 of boundary.Will be upper
Under wallboard 1a be smoothly connected at the B1 of boundary and refer to the inclined change of the tangent line at the B1 that has a common boundary with the sidewall paneling 1b of left and right
Change little mode to be attached.
In Fig. 10, the section of the sidewall paneling 1b of left and right is bent in the way of becoming convex form towards outside.Specifically,
Semicircle of the outer surface by radius of curvature for R1 is constituted, and semicircle of the inner surface by radius of curvature for R2 is constituted.Need explanation
It is that the section of the sidewall paneling 1b of left and right can also be so that each surface becomes oval or makes to essentially become the side such as linear near summit
Formula carries out various bendings.
In Fig. 10, photomask 4 makes the transmitance of ultraviolet be about 24%, and it is formed in the inner side of the sidewall paneling 1b of left and right
On surface.The transmitance of the ultraviolet of photomask 4 is more than 16% and less than 86%, preferably more than 22% and less than 80%.
And, photomask 4 covers the inner side of the summit P1 of the bending of the sidewall paneling 1b of left and right, and in Figure 10 (with sidewall paneling in front and back
1c parallel section) in, the straight line L1 of the centre of upper and lower wallboard 1a is in that line is symmetrically same as line of symmetry by photomask 4
Formed, and the straight line L3 that one end B21 of intersection point C and photomask is linked and the other end B22 links by intersection point C and photomask 4
Straight line L4 angulations θ be 86 degree, intersection point C is the straight line L1 of the centre of upper and lower wallboard 1a and by upper and lower wallboard 1a
The intersection point of the straight line L2 linked with the boundary B1 of the sidewall paneling 1b of left and right.Straight line L3 and straight line L4 angulations θ is less than 180
Degree, preferably less than 86 degree.In such manner, it is possible to lead to too small amount of photomask 4 to suppress what is produced on the sidewall paneling 1b of left and right to answer
Become and extend until reach destroy till time.
Fig. 4 (a) and (b) represent putting in the dielectric barrier discharge lamp shown in Figure 10, Fig. 2 and Fig. 3 as one
The situation of ultraviolet photomask is formed on the medial surface of the sidewall paneling 1b of the left and right in capacitor 1.
It should be noted that the structure of Fig. 4 is also same with first aspect, therefore omit the description.
Fig. 9 is the figure of the assay method of the transmitance of the ultraviolet of the photomask for illustrating dielectric barrier discharge lamp.
It should be noted that the structure of Fig. 9 is also same with first aspect, therefore omit the description.
Fig. 8 is the figure for representing the existing dielectric barrier discharge lamp without photomask, is discharge lamp perpendicular to lengthwise
The sectional view in direction.The shape and material of the discharge vessel of dielectric barrier discharge lamp 80 and discharge vessel phase illustrated in fig. 1
Together.
It should be noted that the structure of Fig. 8 is also same with first aspect, therefore omit the description.
In addition, as represented section like that in Figure 11, change transmitance T of ultraviolet of photomask making discharge lamp, survey
Surely the strain for making discharge lamp long-time produce on discharge vessel when lighting.Discharge lamp C0, C1, C2 such as table 3 below produced
Like that.The discharge lamp of measure object is configured in polarization plates, from polarization plates in the way of being clipped by polarization plates and sensitive colour plate
Side is illuminated and takes pictures from sensitive colour plate side, and strain value and stress value are obtained by graphical analyses.Strain value and stress
Value is in proportional relation.
【Table 3】
| Discharge lamp | Light transmittance T (%) | Angle, θ1(degree) |
| C0 | Without photomask (100) | - |
| C1 | 7.9 | 86 |
| C2 | 24 | 86 |
Figure 11 (a) (C0) is the discharge lamp without photomask, and Figure 11 (b) (C1) is the inner surface of the sidewall paneling in left and right
Near top be formed with the discharge lamp that transmitance is about 7.9% photomask, Figure 11 (c) (C2) is the sidewall paneling in left and right
The near top of inner surface is formed with the discharge lamp that transmitance is about 24% photomask.Discharge lamp C0, C1, C2 perpendicular to
The overall dimensions in the section of longitudinally are all maximum longitudinally wide 16 [mm] × maximum lateral width 45 [mm], thickness 2.5
[mm], length 870 [mm], the outer surface of the sidewall paneling of left and right is the semicircle that radius of curvature is 8 [mm], and inner surface is curvature
Radius is the semicircle of 5.5 [mm].Photomask 41,42 is all covered near the summit of outer surface, and forms the angle of photomask 41,42
Degree θ1About 86 degree.The measured value of scope W of the inner surface of the sidewall paneling of left and right can be covered according to photomask 41,42, and
The angle, θ is calculated using the radius of curvature of the sidewall paneling of the left and right of discharge lamp, thickness and refractive index1。
Figure 12 is the figure of the measurement result of the stress distribution of the sidewall paneling of the left and right of discharge lamp C0, C1, C2 for representing Figure 11.
F0 in figure represents the curve chart of the stress distribution of the discharge lamp C0 of Figure 11 (a), and F1 represents the stress of the discharge lamp C1 of Figure 11 (b)
The curve chart of distribution, F2 represents the curve chart of the stress distribution of the discharge lamp C2 of Figure 11 (c).Discharge lamp C0, C1, C2 are put lighting
All do not strain before electric light, stress value substantially 0.
Curve chart F0, F1, F2 represent the stress value after vacuum ultraviolet is irradiated into 2000 more than the time.In addition, logical
Cross Figure 12 P2 represent left and right in Figure 11 sidewall paneling top P2, the upper and lower wallboard in Figure 11 is represented by the B1 of Figure 12
With the boundary B1 of the sidewall paneling of left and right, the end B2 of the photomask 41,42 of Figure 11 (b) and Figure 11 (c) is represented by the B2 of Figure 12.
It should be noted that it is following, for convenience, state using as peak stress or peak strain sometimes.Peak stress is in figure
In stress envelope as shown in 12, the maximum of the tensile stress at the P2 of summit is referred to, or when stress is at the P2 of summit
When being not maximum, the maximum of the tensile stress in the scope (scope of P2～B1) of the sidewall paneling of the left and right of lamp is referred to, or
When stress is not the tensile stress in the scope (scope of P2～B1) of the sidewall paneling of the left and right of maximum and lamp at the P2 of summit
When maximum is not present, the maximum in the scope (from B1 to inner side) of upper and lower wallboard is referred to.Peak strain is referred to and peak value
The corresponding strain of stress.In fig. 12, curve chart F0 shows peak stress and peak strain at the P2 of summit, curve chart F1 and
F2 shows peak stress and peak strain at B2.
As shown in figure 12, in curve chart F0, the value of tensile stress becomes maximum at the P2 of summit.This is illustrated well
After long-time is irradiated, the P2 of summit at discharge lamp C0 easily breakage the fact.
In curve chart F1, tensile stress is not produced at the P2 of summit such that it is able to confirm the effect of photomask 41.But
It is that at the B2 in the end of photomask 41, i.e. Figure 12, the value of tensile stress becomes maximum.And think when prolonged exposure is purple
It is easily damaged at discharge lamp C1 B2 in fig. 11 during outside line.
From the result, near the summit of the inner surface of the sidewall paneling in the left and right of dielectric barrier discharge lamp 70
Form photomask, and from interior lateral discharge vessel irradiation ultraviolet radiation when, it is attached on the summit of the inner surface of the sidewall paneling of left and right
Nearby, the irradiation dose of ultraviolet sidewall paneling to the left and right is reduced, and can relax the contraction near the summit of inner surface.However,
Near the boundary in region for forming photomask, big strain is easily produced because of the different of the contraction of quartz, it is attached in the boundary
Near outer surface is concentrated with tensile stress, therefore easily cracks.
In curve chart F2, it is known that the peak value of tensile stress is observed at the B2 in the end of photomask 42, i.e. Figure 12,
But the maximum of tensile stress is reduced than curve chart F1.
Then, be produced on the discharge lamp C0 without photomask inner surface will transmit through rate be about 22.8% photomask from
The summit of outer surface towards inner side formed to 4 [mm], the scope of about 86 degree of angle discharge lamp C3 studying above-mentioned discharge lamp
The peak strain of the discharge vessel of C1, C2, C3 and the relation of the lighting time of discharge vessel.The value of peak strain and above-mentioned strain
Value is similarly determined.Discharge lamp C1, C2, C3 of research is as table 4 below.
【Table 4】
| Discharge lamp | Light transmittance T (%) | Angle, θ1(degree) |
| C1 | 7.9 | 86 |
| C2 | 24 | 86 |
| C3 | 22.8 | 86 |
Figure 13 (a) is curve chart of the peak strain with the relation of the lighting time of discharge vessel for representing discharge vessel.
In Figure 13 (a), the lighting time Hr of discharge vessel is represented on transverse axis, (a.u. appoints value ε of expression peak strain on the longitudinal axis
Meaning unit).In each mark in Figure 13 (a), circular (zero) is represented when discharge lamp C0 is lighted in the utensil of ignition device
Peak strain measured value, rhombus (◇) represents peak strain when making discharge lamp C1 light in the utensil of ignition device
Measured value, square () represents the measured value of peak strain when making discharge lamp C2 light without cover (without utensil), triangle
(△) measured value of peak strain when making discharge lamp C3 light in the utensil of ignition device is represented.It should be noted that bent
Line G0～G3 represents respectively the curve chart estimated according to above-mentioned measurement result.Also, specify that when discharge lamp is in ignition device
Utensil in when lighting, than lighting the lost of life about 25% without cover.
According to Figure 13 (a), in discharge lamp C0, as shown in curve chart G0, when lighting time being 2000 hours, strain
It is worth for 48 (a.u.).In discharge lamp C1, as shown in curve chart G1, when lighting time being 2221 hours, the value of strain is 46
(a.u.).On the other hand, in discharge lamp C3, as shown in curve chart G3, when lighting time being 2040 hours, the value of strain is
30 (a.u.), when lighting time being 2978 hours, the value of strain is 40 (a.u.).It follows that when the purple for improving photomask
During transmitance T of outside line, even if under identical lighting time, the value of peak strain also declines.Therefore, it is formed with above-mentioned shading
Transmitance T that the discharge lamp of film passes through the ultraviolet of raising photomask, till the crackle for producing discharge vessel can be extended to
Time, the damaged of discharge vessel can be suppressed and extend the life-span.
Then, according to above-mentioned Figure 12 and Figure 13 (a), electric discharge when making above-mentioned discharge lamp C0～C3 light 2000 hours is obtained
The peak strain value of container is studying the relation of transmitance T of the ultraviolet of peak strain and photomask.Also, following
Under the conditions of study discharge lamp C4～C8 respectively to study the peak strain of discharge vessel when lighting 2000 hours with photomask
The relation of transmitance T of ultraviolet.Table 5 represents the result.
Discharge lamp C4～C8 uses the discharge vessel with above-mentioned discharge lamp C0～C3 identical size and shapes.Discharge lamp C4
In～C8, photomask is formed in the near top of the inner surface of the sidewall paneling of left and right, and the angle for forming photomask is about 152
Degree, the transmitance of photomask is respectively 20%, 30%, 40%, 50%, 60%.
【Table 5】
Figure 13 (b) is figure of the peak strain with the relation of transmitance T of the ultraviolet of photomask for representing discharge vessel.
Transmitance T (%) of the ultraviolet of photomask is represented on transverse axis, discharge vessel when expression is lighted 2000 hours on the longitudinal axis
Value ε (a.u.) of peak strain.Mark C0 in figure～C8 is represented make that above-mentioned that discharge lamp C0～C8 lights respectively 2000 is little respectively
The peak strain relative to each transmitance T constantly.In addition, curve H represents the interpolation curve of mark C0～C8.
Understand Figure 13 (b) in mark C8 peak strain value be 17, the transmitance of the ultraviolet of photomask is 60%
When nearby, the value of peak strain becomes minimum.Also, also know that the value that there is peak strain is optimal saturating below setting
Cross the scope of rate.It is for about more than 16% and about that the value for reading out peak strain from curve H is for about the scope of less than 35 transmitance
Less than 86%.Also, read out the scope of the transmitance that the value of peak strain is less than about 30 be for about more than 22% and about 80% with
Under.
As known from the above, the discharge lamp of first embodiment of the invention is for about in the transmitance of the ultraviolet of photomask
When more than 16% and about less than 86%, the sufficient life-span can be obtained in the practicality of discharge lamp.In order to extend the longevity of discharge lamp
Life, the transmitance of the ultraviolet of preferred photomask is for about more than 22% and about less than 80%.
(second embodiment)
In the dielectric barrier discharge lamp for representing embodiments of the present invention, can be in each scope for forming photomask
Constituted in the mode for making the transmitance of the ultraviolet of photomask different.
Figure 14 is the figure of that represents second embodiment of the present invention, is dielectric barrier discharge lamp perpendicular to vertical
The sectional view of length direction.Dielectric barrier discharge lamp 20 be the shape same with the dielectric barrier discharge lamp of above-mentioned Fig. 1 and
Material, in the inner surface of the sidewall paneling 1b of left and right photomask 24 is formed, and also forms the photomask 25 for covering the photomask 24.
In fig. 14, the section of the sidewall paneling 1b of left and right is bent in the way of becoming convex form towards outside, specifically,
Semicircle of the outer surface by radius of curvature for R1 is constituted, and semicircle of the inner surface by radius of curvature for R2 is constituted.Need explanation
It is that the section of the sidewall paneling 1b of left and right can also be so that each surface becomes oval or makes to essentially become the side such as linear near summit
Formula carries out various bendings.
In fig. 14, photomask 24 cover left and right sidewall paneling 1b bending top P1 inner side, and Fig. 1 (with
Sidewall paneling 1c in front and back parallel section) in, the straight line L1 of the centre of upper and lower wallboard 1a is in by shading 24 as line of symmetry
Line is symmetrically similarly formed, and the straight line L3 that one end B21 of intersection point C and photomask 24 is linked with by intersection point C and photomask 24
Other end B22 link straight line L4 angulation θ2For 86 degree, intersection point C is the straight line L1 of the centre of upper and lower wallboard 1a
With the intersection point of the straight line L2 for linking the boundary of upper and lower wallboard 1a and the sidewall paneling 1b of left and right.In addition, photomask 25 is covered hiding
Light film 24, also, in Figure 12 (section parallel with sidewall paneling 1c in front and back), photomask 25 is by the centre of upper and lower wallboard 1a
Straight line L1 be in that line is symmetrically similarly formed as line of symmetry, and the straight line that one end B31 of intersection point C and photomask 25 is linked
The L5 and straight line L6 angulation θ for linking the other end B32 of intersection point C and photomask 253Less than 180 degree.Photomask 24
Cover the inner side of the top P1 of the bending of the sidewall paneling 1b of left and right, angle, θ2It can be less than 86 degree.
In fig. 14, the transmitance of the ultraviolet of photomask 24 relatively lower than the ultraviolet of photomask 25 transmitance, and
In upper and lower wallboard 1a compared with the boundary B1 sides of the sidewall paneling 1b of left and right are relatively higher than near the top P1 of bending.It is concrete and
Speech, photomask 24 passes through about 10% ultraviolet, and photomask 25 passes through about 50% ultraviolet.Photomask 24 can also make purple
Outside line is passed through with about less than 10%.
So the end B21 of photomask 24 is made by photomask 25, the subtractive of quartzy contraction near 22 it is little, it is also possible to
Suppress the maximum of the tensile stress that the end B21 of photomask 24, the crest ground at 22 produce and suppress the breakage of discharge vessel.
Also, by photomask 24 can reduce left and right sidewall paneling 1b bending near top white flying attachment and
Its solidification.It should be noted that photomask 24 is not limited with the upper and lower relation of photomask 25.
In second embodiment of the present invention, photomask is made by the near top of the bending of the sidewall paneling in left and right
The transmitance of ultraviolet becomes less than 10%, so as to reduce the attachment of the flying flown here to discharge vessel near top
And its solidification.Also, near the boundary for covering the photomask, can be suppressed by the relatively high other photomasks of transmitance
The generation of the tensile stress of crest such that it is able to which suppress ultraviolet irradiation light quantity reduces and suppress simultaneously the broken of discharge vessel
Damage.
In the dielectric barrier discharge lamp of the present invention, the structure of discharge vessel is not limited two-layer pipe, single tube structure.And
And, in the case of two-layer pipe, auxiliary electrode can also be set.
Claims (9)
1. a kind of dielectric barrier discharge lamp, it possesses：
The discharge vessel being made up of upper and lower wallboard, the sidewall paneling of left and right and sidewall paneling in front and back；
It is sealing into the electric discharge gas lighted for excimers of the inside of the discharge vessel；
The electrode arranged in the outside of the discharge vessel and at least one party of the upper and lower wallboard,
The dielectric barrier discharge lamp is characterised by,
The sidewall paneling of the left and right with it is described before and after the parallel section of sidewall paneling in, with convex to the outside of the discharge vessel
The mode for going out bends,
The photomask for blocking ultraviolet is formed with the inner surface of the sidewall paneling of the left and right,
The photomask covers the inner side at the top of the bending of the sidewall paneling of the left and right, and the photomask with it is described before and after
The parallel section of sidewall paneling in, the straight line that one end of intersection point and the photomask is linked with by the intersection point and the shading
The straight line angulation that the other end of film links be 60 degree less than 180 degree, wherein, the intersection point be it is described up and down
The straight line of the centre of wallboard and the intersection point by the upper and lower wallboard and the straight line of the boundary link of the sidewall paneling of the left and right.
2. dielectric barrier discharge lamp according to claim 1, it is characterised in that
The angle ranging from more than 86 degree and less than 152 degree.
3. dielectric barrier discharge lamp according to claim 1 and 2, it is characterised in that
The discharge vessel is mainly made up of quartz.
4. a kind of dielectric barrier discharge lamp, it possesses：
The discharge vessel being made up of upper and lower wallboard, the sidewall paneling of left and right and sidewall paneling in front and back；
It is sealing into the electric discharge gas lighted for excimers of the inside of the discharge vessel；
The electrode arranged in the outside of the discharge vessel and at least one party of the upper and lower wallboard,
The dielectric barrier discharge lamp is characterised by,
The sidewall paneling of the left and right with it is described before and after the parallel section of sidewall paneling in, with convex to the outside of the discharge vessel
The mode for going out bends,
The photomask for blocking ultraviolet is formed with the inner surface of the sidewall paneling of the left and right,
The photomask covers the inner side at the top of the bending of the sidewall paneling of the left and right, and the photomask with it is described before and after
The parallel section of sidewall paneling in, the straight line that one end of intersection point and the photomask is linked with by the intersection point and the shading
The straight line angulation that the other end of film links is less than 180 degree, wherein, the intersection point is the centre of the upper and lower wallboard
Straight line and the intersection point by the upper and lower wallboard and the straight line of the boundary link of the sidewall paneling of the left and right,
The transmitance of the ultraviolet of the photomask is more than 16% and less than 86% scope.
5. dielectric barrier discharge lamp according to claim 4, it is characterised in that
The transmitance of the ultraviolet of the photomask is more than 22% and less than 80%.
6. the dielectric barrier discharge lamp according to claim 4 or 5, it is characterised in that
The angle ranging from less than 86 degree.
7. the dielectric barrier discharge lamp according to claim 4 or 5, it is characterised in that
The discharge vessel is mainly made up of quartz.
8. a kind of dielectric barrier discharge lamp, it possesses：
The discharge vessel being made up of upper and lower wallboard, the sidewall paneling of left and right and sidewall paneling in front and back；
It is sealing into the electric discharge gas lighted for excimers of the inside of the discharge vessel；
The electrode arranged in the outside of the discharge vessel and at least one party of the upper and lower wallboard,
The dielectric barrier discharge lamp is characterised by,
The sidewall paneling of the left and right with it is described before and after the parallel section of sidewall paneling in, with convex to the outside of the discharge vessel
The mode for going out bends,
The photomask for blocking ultraviolet is formed with the inner surface of the sidewall paneling of the left and right,
The photomask covers the inner side at the top of the bending of the sidewall paneling of the left and right, and the photomask with it is described before and after
The parallel section of sidewall paneling in, the straight line that one end of intersection point and the photomask is linked with by the intersection point and the shading
The straight line angulation that the other end of film links is less than 180 degree, wherein, the intersection point is the centre of the upper and lower wallboard
Straight line and the intersection point by the upper and lower wallboard and the straight line of the boundary link of the sidewall paneling of the left and right,
The transmitance of the ultraviolet of the photomask is relative with the boundary side of the sidewall paneling of the left and right in the upper and lower wallboard
Higher than the near top of the bending.
9. dielectric barrier discharge lamp according to claim 8, it is characterised in that
The photomask makes the first photomask overlap with the second photomask to form,
First photomask is formed in the near top of the bending,
Second photomask is formed to the scope wider than first photomask, second shading from the top of the bending
The transmitance of the ultraviolet of film is relatively higher than the transmitance of the ultraviolet of first photomask.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012103922A JP5773276B2 (en) | 2012-04-27 | 2012-04-27 | Dielectric barrier discharge lamp |
| JP2012-103922 | 2012-04-27 | ||
| JP2012103923A JP5773277B2 (en) | 2012-04-27 | 2012-04-27 | Dielectric barrier discharge lamp |
| JP2012-103923 | 2012-04-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103377873A CN103377873A (en) | 2013-10-30 |
| CN103377873B true CN103377873B (en) | 2017-04-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310145892.XA Active CN103377873B (en) | 2012-04-27 | 2013-04-24 | Dielectric barrier discharge lamp |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR102003807B1 (en) |
| CN (1) | CN103377873B (en) |
| TW (1) | TWI578374B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018146878A (en) * | 2017-03-08 | 2018-09-20 | カンタツ株式会社 | Lens element and image capturing lens unit |
| JP7139808B2 (en) * | 2018-09-13 | 2022-09-21 | 東芝ライテック株式会社 | barrier discharge lamp |
| TWI747073B (en) * | 2019-11-01 | 2021-11-21 | 崇翌科技股份有限公司 | Excimer lamp |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101188184A (en) * | 2006-11-24 | 2008-05-28 | 优志旺电机株式会社 | Discharge lamp |
| CN101409204A (en) * | 2007-10-11 | 2009-04-15 | 优志旺电机株式会社 | Excimer lamps |
| CN101661866A (en) * | 2008-08-29 | 2010-03-03 | 优志旺电机株式会社 | Excimer lamp |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4221561B2 (en) | 2002-10-02 | 2009-02-12 | 株式会社ジーエス・ユアサコーポレーション | Excimer lamp |
| JP5071085B2 (en) * | 2007-12-11 | 2012-11-14 | ウシオ電機株式会社 | Excimer discharge lamp |
| JP4998827B2 (en) * | 2008-01-31 | 2012-08-15 | ウシオ電機株式会社 | Excimer lamp |
| KR101389786B1 (en) | 2009-12-22 | 2014-04-29 | 가부시키가이샤 지에스 유아사 | Dielectric barrier discharge lamp and ultraviolet irradiation device using the same |
-
2013
- 2013-04-24 CN CN201310145892.XA patent/CN103377873B/en active Active
- 2013-04-25 KR KR1020130046055A patent/KR102003807B1/en active IP Right Grant
- 2013-04-25 TW TW102114816A patent/TWI578374B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101188184A (en) * | 2006-11-24 | 2008-05-28 | 优志旺电机株式会社 | Discharge lamp |
| CN101409204A (en) * | 2007-10-11 | 2009-04-15 | 优志旺电机株式会社 | Excimer lamps |
| CN101661866A (en) * | 2008-08-29 | 2010-03-03 | 优志旺电机株式会社 | Excimer lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201346977A (en) | 2013-11-16 |
| KR102003807B1 (en) | 2019-07-25 |
| KR20130121742A (en) | 2013-11-06 |
| TWI578374B (en) | 2017-04-11 |
| CN103377873A (en) | 2013-10-30 |
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