CN104078304A - Uv lamp - Google Patents
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- CN104078304A CN104078304A CN201410105380.5A CN201410105380A CN104078304A CN 104078304 A CN104078304 A CN 104078304A CN 201410105380 A CN201410105380 A CN 201410105380A CN 104078304 A CN104078304 A CN 104078304A
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- discharge vessel
- wavelength
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- violet lamp
- ultraviolet
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- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
The invention provides a UV lamp, and the lamp can emit ultraviolet light with an expected wavelength from the interior of a discharge container to the outside, and can prevent short-wavelength ultraviolet light from causing the degradation of glass in a whole zone, in the discharge container, corresponding to a light-emitting part. The lamp is provided with the discharge container (1); a pair of electrodes (2) which are oppositely disposed on the outer surface of the discharge container (1) in a mode of clamping a sealed space (13); the light-emitting part (3) which enables light generated in the sealed space (13) through discharge to emit out of the discharge container (1); and a discharge container protection film (5) which allows ultraviolet light with a wavelength being greater than lambda to pass and emit or absorb the ultraviolet light with a wavelength being less than lambda, and is at least formed in a zone, corresponding to the light-emitting part (3), of the internal surface of the discharge container (1).
Description
Technical field
The present invention relates to a kind of ultra-violet lamp, it is configured to the ultraviolet ray producing in the discharge vessel of glass system is penetrated to outside from light injection part.
Background technology
For example, for such purposes such as solidifying of the cleaning of substrate, China ink, use the ultra-violet lamp that is useful on irradiation ultraviolet radiation.An example as such ultra-violet lamp 100A, as shown in patent documentation 1 and Fig. 6 and there is following structure, that is, ultra-violet lamp 100A possesses: the discharge vessel 1A of general flat rectangular shape, and it has in inside encloses the seal cavity 13A that has rare gas; And cancellous pair of electrodes 2A, they are set to the outer surface 11A of discharge vessel 1A opposed, the face that is provided with a side mesh-shape electrode 22A in described discharge vessel 1A is made as to light injection part 3A, the ultraviolet ray producing in inside is taken out outside discharge vessel 1A.In addition, this structure is set to the ultraviolet ray producing at discharge vessel 1A only from described smooth injection part 3A, to penetrate, in order to improve the taking-up efficiency of light, and being formed with by SiO except the part corresponding with light injection part 3A in the inner surface 12A of discharge vessel 1A
2the ultraviolet reflecting film 4A forming.
Yet the ultraviolet ray producing in discharge vessel 1A not only produces the ultraviolet ray of the desired wavelength region may of such object such as solidifying of the cleaning, the China ink that meet substrate, also produces in the lump short wavelength's ultraviolet ray in contrast.And this short wavelength's ultraviolet ray is formed on the ultraviolet reflecting film 4A reflection of the inner surface 12A of discharge vessel 1A, therefore only to the part corresponding with light injection part 3A in the inner surface 12A of discharge vessel 1A, irradiate.
When this short wavelength's ultraviolet ray is irradiated to the glass that forms discharge vessel 1A, the deteriorated aggravation gradually of glass, first reduces ultraviolet transmitance, makes ultraviolet taking-up decrease in efficiency.And then, when the deteriorated aggravation of glass, at discharge vessel 1A, produce crack and form lamp failure, need to change.
In recent years, expectation improves running rate and lamp integral body is reduced costs, and therefore seeks by eliminating the deteriorated of the UV-induced glass because of short wavelength in this light injection part 3A or alleviating that this is deteriorated can reduce the replacement frequency of lamp.
In order to prevent glass deteriorated of the formation discharge vessel 1A in such light injection part 3A, in the ultra-violet lamp 100A of the discharge vessel 1A that possesses dual cylindrical duct structure shown in patent documentation 2, till the ultraviolet reflecting film 4A that the inner surface 12A forming at discharge vessel 1A forms covers a part of light injection part 3A.
Specifically, this structure is made as, as shown in Figure 7, inner surface 11A in the inside tube of discharge vessel 1A forms the first solid electrode 21A, the mode that is C word shape at the outer surface 11A of the outboard tube of discharge vessel 1A laterally to analyse and observe under observation forms the second solid electrode 22A, using the opening portion that does not form the second solid electrode 22A as light injection part 3A.And, near the part corresponding with the second solid electrode 22A in the inner surface 12A of the outboard tube of discharge vessel 1A and the second solid electrode 22A in the inner surface 12A of the outboard tube of discharge vessel 1A, be that a part of described smooth injection part 3A is formed with ultraviolet reflecting film 4A.
; in patent documentation 2; by the especially easily generation in light injection part 3A is covered by ultraviolet reflecting film 4A by near the part the second solid electrode 22A of the inner surface 12A deteriorated, outboard tube of UV-induced glass, thereby can realize long lifetime.
Yet therefore, in said structure, for do not form the region of ultraviolet reflecting film 4A in light injection part 3A, owing to being subject to short wavelength's ultraviolet irradiation, cannot fully prevent deteriorated in light injection part 3A.On the contrary, when for prevent in the whole region in light injection part 3A by short wavelength, caused ultraviolet deteriorated, when the part corresponding with light injection part 3A in discharge vessel 1A is all formed at inner surface 12A by ultraviolet reflecting film 4A, cannot realize the ultraviolet ray that the inside at discharge vessel 1A is produced and take out to outside major part via light injection part 3A, cannot bring into play ultra-violet lamp 100A function originally.
Technical literature formerly
Patent documentation
Patent documentation 1: TOHKEMY 2012-243435 communique
Patent documentation 2: TOHKEMY 2010-218833 communique
Summary of the invention
The problem that invention will solve
The present invention completes in view of problem as described above, its object is to provide a kind of ultra-violet lamp, as ultra-violet lamp, the ultraviolet ray of the wavelength of expectation can be penetrated to outside in discharge vessel, and in the whole region corresponding with light injection part in discharge vessel, prevent deteriorated by short wavelength's UV-induced glass, can eliminate or further alleviate the reduction of ultraviolet taking-up efficiency, the generation in crack etc.
Solution
That is, ultra-violet lamp of the present invention is characterised in that, described ultra-violet lamp possesses: discharge vessel, and it consists of translucent glass, and in inside, has and enclose the seal cavity that has regulation gas; At least one pair of electrode, they are formed on the outer surface of described discharge vessel; Light injection part, it penetrates the light by discharge generation in described seal cavity outside described discharge vessel; And discharge vessel diaphragm, it sees through for ultraviolet ray more than wavelength X, and the ultraviolet ray of reflection or incomplete absorption wavelength X, and described discharge vessel diaphragm is formed at least corresponding with the described smooth injection part region in the inner surface of described discharge vessel.
According to such structure; because the ultraviolet ray for more than wavelength X sees through and the ultraviolet discharge vessel diaphragm of reflection or incomplete absorption wavelength X is formed in the region corresponding with described smooth injection part in the inner surface of described discharge vessel; therefore ultraviolet ray more than necessary wavelength X is taken out to outside, and can be to the ultraviolet ray of the not enough wavelength X of the part direct irradiation corresponding with light injection part in discharge vessel.
That is, can utilize described discharge vessel diaphragm to prevent situation as described below: to preventing that the ultraviolet ray of the area illumination short wavelength corresponding with light injection part in the discharge vessel of deteriorated aggravation of existing glass from being the ultraviolet ray of not enough wavelength X.Thereby compared with the past, the reduction of ultraviolet transmitance that prevents the part place corresponding with light injection part in discharge vessel in can be between long-term is, the generation in crack.
So, according to the present invention, can keep ultra-violet lamp function originally, and prevent from forming glass deteriorated of discharge vessel, realize long lifetime.Thereby, reduce the replacement frequency of ultra-violet lamp, for example improve the running rate of production line.
In order to make to produce in described seal cavity and want, to the ultraviolet ray more than wavelength X of outside taking-up to described smooth injection part, to concentrate and improve and take out efficiency, and can not make the short wavelength's that produces in described seal cavity ultraviolet ray arrive to discharge vessel, can prevent from producing the deteriorated of the glass that caused by short wavelength ultraviolet for any part in discharge vessel, carry out following setting: described discharge vessel diaphragm is formed in the region corresponding with described smooth injection part in the inner surface of described discharge vessel, described ultra-violet lamp also possesses ultraviolet reflecting film, this ultraviolet reflecting film uv reflectance, be formed in region corresponding to the part with beyond described smooth injection part in the inner surface of described discharge vessel.
As for example the ultraviolet ray of wavelength region may that is applicable to the cleaning of substrate being penetrated and is the above and wavelength below 175nm of 165nm for preventing from forming the concrete example of deteriorated wavelength X of the glass of described discharge vessel, enumerate described wavelength X from described smooth injection part.
As penetrating and the ultraviolet ray of the wavelength region may of expectation sees through and is reflected and makes to form the concrete structure example that the deteriorated short wavelength's of the glass of discharge vessel ultraviolet ray is also reflected from light injection part for not making in described ultraviolet reflecting film, enumerate described ultraviolet reflecting film and by particle diameter, be greater than the SiO of described wavelength X
2the example forming.
As in described discharge vessel diaphragm for reflect or absorb make the deteriorated short wavelength of glass ultraviolet ray, the particularly ultraviolet ray of the wavelength shorter than the wavelength that makes deteriorated aggravation and the concrete structure example only seeing through for the ultraviolet ray with the wavelength longer than wavelength X as the ultraviolet ray of the wavelength region may of expectation, as long as described discharge vessel diaphragm is less than described wavelength X by particle diameter and particle diameter is SiO more than 160nm
2form.
In described discharge vessel diaphragm, in order to make the ultraviolet ray of the wavelength longer than wavelength X see through and the ultraviolet ray of the wavelength shorter than wavelength X is absorbed, as long as described discharge vessel diaphragm is by Al
2o
3the ultraviolet ray forming sees through film.
Other forms as described discharge vessel diaphragm; in described discharge vessel diaphragm; for the ultraviolet ray of the wavelength longer than wavelength X is seen through, and the ultraviolet ray of the wavelength shorter than wavelength X is reflected, as long as described discharge vessel diaphragm is by MgO, CaF
2or MgF
2in the individual layer reflectance coating of any one formation.
Invention effect
So; according to ultra-violet lamp of the present invention; for at least corresponding with the described smooth injection part region in the inner surface of described discharge vessel; be formed with for ultraviolet ray more than wavelength X and see through and the ultraviolet described discharge vessel diaphragm of reflection or incomplete absorption wavelength X; glass deteriorated that can prevent the formation discharge vessel in existing not protected smooth injection part, can realize long lifetime.
Accompanying drawing explanation
Fig. 1 means the schematic perspective view of the use state of the ultra-violet lamp that the first execution mode of the present invention is related.
Fig. 2 means the in-built schematic cross sectional views of the ultra-violet lamp in above-mentioned execution mode.
Fig. 3 means the in-built schematic cross sectional views of the ultra-violet lamp that the second execution mode of the present invention is related.
Fig. 4 means the in-built schematic cross sectional views of the ultra-violet lamp that the 3rd execution mode of the present invention is related.
Fig. 5 means the in-built schematic cross sectional views of the ultra-violet lamp that the 4th execution mode of the present invention is related.
Fig. 6 means the in-built schematic cross sectional views of existing ultra-violet lamp.
Fig. 7 means the in-built schematic cross sectional views of another existing ultra-violet lamp.
Description of reference numerals is as follows:
100 ultra-violet lamps
1 discharge vessel
11 outer surfaces
12 inner surfaces
13 seal cavities
2 pair of electrodes
3 smooth injection parts
4 ultraviolet reflecting films
5 discharge vessel diaphragms
Embodiment
With reference to Fig. 1 and Fig. 2, the ultra-violet lamp of the first execution mode of the present invention (Excimer lamp) is described.
The ultraviolet ray that the ultra-violet lamp 100 of the first execution mode produces discharging by dielectric barrier is to substrate irradiation and for removing organic substance.
That is,, as shown in the stereogram of Fig. 1, from the described ultra-violet lamp 100 of general flat rectangular shape to downside irradiation ultraviolet radiation, form banded territory, ultraviolet radiation zone.Then, in the mode in this territory, ultraviolet radiation zone of crosscut, carry workpiece, thereby to workpiece irradiation ultraviolet radiation.
Next, the detailed structure of this ultra-violet lamp 100 is described.
As shown in the transverse sectional view of Fig. 2, described ultra-violet lamp 100 possesses: discharge vessel 1, and it consists of translucent glass, and is the general hollow rectangular shape in inside with seal cavity 13; Pair of electrodes 2, they are respectively formed at the outer surface 11 of the wider top and bottom of the opposed width of described discharge vessel 1; And light injection part 3, it is set in the downside of described discharge vessel 1, supplies the light that passes through discharge generation in described seal cavity 13 to the outer ejaculation of described discharge vessel 1.
In addition; this ultra-violet lamp 100 is formed with ultraviolet reflecting film 4 and discharge vessel diaphragm 5 these two kinds of films; this ultraviolet reflecting film 4 is formed on part corresponding to the part with beyond described smooth injection part 3 in the inner surface 12 of discharge vessel 1, and this discharge vessel diaphragm 5 is formed on the part corresponding with described smooth injection part 3 in the inner surface 12 of described discharge vessel 1.In addition; the ultraviolet reflecting film 4 of the first execution mode is configured to the ultraviolet ray producing at described seal cavity 13 and roughly all reflection or the absorptions of its Wavelength-independent ground; on the other hand, the ultraviolet ray that described discharge vessel diaphragm 5 is configured to the wavelength region may that makes regulation sees through and reflects or absorb compare short wavelength's ultraviolet ray with the wavelength region may of regulation.That is, the inner surface 12 at described discharge vessel 1 is formed with respectively ultraviolet reflecting film 4 and the discharge vessel diaphragm 5 that characteristic is different.
Each several part is elaborated.
Described discharge vessel 1 is formed by quartz glass and has light transmission, in the interior inclosure of seal cavity 13, has the xenon as rare gas.
Described pair of electrodes 2 is compared with wide face, to be the outer surface 11 of top and bottom and the mesh-shape electrode that forms with respect to the width of described discharge vessel 1, at 21,22 voltages that apply the high-frequency high-voltage of regulation of each electrode, thereby in the interior generation dielectric barrier electric discharge of described seal cavity 13.Owing to having xenon in the interior inclosure of described seal cavity 13, therefore, when producing dielectric barrier electric discharge, producing peak value is 172nm and the ultraviolet ray with the wavelength region may of regulation broadening.In addition, described pair of electrodes 2 forms respectively mesh-shape, therefore can make by the gap of electrode 22, to be discharged to gradually outside in the ultraviolet ray of described seal cavity 13 interior generations.
As shown in Figure 2, described ultraviolet reflecting film 4 forms a side opposed of cancellous electrode 21 and the narrower left and right side of a pair of width on the inner surface 12 of discharge vessel 1 that on the inner surface 12 of discharge vessel 1 and upper surface at discharge vessel 1 form.That is, described ultraviolet reflecting film 4 forms the part the opposing party's that whole coverings lower surface on inner surface 12 and at discharge vessel 1 forms opposed of cancellous electrode 22.
In addition, this ultraviolet reflecting film 4 is configured to the light of the wavelength region may as regulation is reflected or absorbed by the dielectric barrier roughly ultraviolet ray of whole wavelength region may producing of discharging in described seal cavity 13.More particularly, described ultraviolet reflecting film 4 by particle diameter than the large SiO of wavelength the longest in the wavelength region may of described regulation
2form.So, owing to forming ultraviolet reflecting film 4, the roughly whole ultraviolet ray and the SiO that forms ultraviolet reflecting film 4 therefore producing in seal cavity 13
2particle collision, reflect or absorb.Thereby ultraviolet ray can arrive the inner surface that is formed with ultraviolet reflecting film 4 12 of discharge vessel 1 hardly.
Described discharge vessel diaphragm 5 is configured to opposed of the cancellous electrode 22 that is formed on the opposing party that lower surface place on inner surface 12 and at discharge vessel 1 forms, and for ultraviolet ray more than wavelength X, sees through and the ultraviolet ray of the wavelength of not enough wavelength X is reflected or absorbed.In the first embodiment, for only make in the ultraviolet ray of described seal cavity 13 interior generations, as irradiating purposes, effectively wavelength components sees through, and described wavelength X is set as to 170nm.In other words, due to described wavelength X is set as to 170nm, so this discharge vessel diaphragm 5 at least can for the ultraviolet peak wavelength producing at seal cavity 13 be 172nm and near the ultraviolet ray of wavelength see through.Thereby, can not block the light of the wavelength region may that shows excellent effect in the cleaning of substrate etc. and it is penetrated to outside.
On the other hand, for make to form discharge vessel 1 glass deteriorated aggravation wavelength region may ultraviolet ray, be short wavelength's the ultraviolet ray of the wavelength of not enough 160nm, be set as not making it to arrive this discharge vessel 1 ground and be reflected or absorbed.That is, owing to thering is the ultraviolet ray of the wavelength of not enough 160nm, by described discharge vessel diaphragm 5, reflected or absorb, therefore can not arrive to discharge vessel 1.
In order to obtain such characteristic and reflection, absorption characteristic of seeing through, this discharge vessel diaphragm 5 by particle diameter than the little SiO of described ultraviolet reflecting film 4
2form.More particularly, in this first execution mode, described discharge vessel diaphragm 5 is that the little and particle diameter of 170nm is SiO more than 160nm by particle diameter than described wavelength X
2form.Thereby, the ultraviolet ray of the wavelength of and not enough 170nm longer than 160nm not with the SiO that forms discharge vessel diaphragm 5
2bump, arrive discharge vessel 1 and to outside, penetrate the ultraviolet ray of the wavelength shorter than 160nm and the SiO that forms discharge vessel diaphragm 5 on the other hand
2bump, be reflected or absorbed, can not arrive described discharge vessel 1.
So, in the inner surface 12 of described discharge vessel 1, the part that is only formed with discharge vessel diaphragm 5 for the peak wavelength producing at seal cavity 13 and near the ultraviolet ray of wavelength region may see through, be formed with and to outside, penetrate ultraviolet smooth injection part 3.Say on the contrary it, also can say that the inner surface 12 that wanting in discharge vessel 1 forms the part of light injection part 3 forms discharge vessel diaphragms 5, at the inner surface 12 of not wanting to form the part of light injection part 3, be formed with described ultraviolet reflecting film 4.In addition, also can say, form the SiO of described ultraviolet reflecting film 4
2particle diameter there is the particle diameter that is greater than described wavelength X, to ultravioletly roughly all reflect or absorb what produce at seal cavity 13.
According to the ultra-violet lamp 100 of the first execution mode of formation like this; whole any one that are formed with in described ultraviolet reflecting film 4 or described discharge vessel diaphragm 5 at the inner surface 12 of discharge vessel 1; therefore at least having of the seal cavity 13 interior generations wavelength shorter than 160nm, possess the ultraviolet ray that makes to form the deteriorated effect of the glass of described discharge vessel 1 and be reflected or absorbed at described ultraviolet reflecting film 4 or described discharge vessel diaphragm 5 places, thereby can not arrive discharge vessel 1.
Thereby, can reduce the ultraviolet transmitance of the wavelength region may that makes to form the deteriorated and expectation wanting to penetrate to outside of the glass of discharge vessel 1, and between long-term, prevent deteriorated aggravation and on discharge vessel 1, produce crack, become and cannot keep seal cavity 13 and formation lamp failure.Therefore, can realize the long lifetime of ultra-violet lamp 100, can reduce with respect to light-source box 101 and change the frequency of ultra-violet lamp 100, can improve the treatment effeciency of the workpiece of production line.
In addition; described discharge vessel diaphragm 5 forms littlely than 170nm by particle diameter; the wavelength region may that therefore can make expectation is that the ultraviolet ray of 172nm and near wavelength region may thereof sees through; therefore; even if be formed with described discharge vessel diaphragm 5 in the whole region of the inner surface corresponding with light injection part 3 12 of discharge vessel 1, also can make required ultraviolet ray penetrate to outside.In other words, by forming described discharge vessel diaphragm 5, can not reduce the ultraviolet taking-up efficiency of the wavelength region may of reply workpiece irradiation, can not damage the function as light injection part 3.
In sum, according to the ultra-violet lamp 100 of the first execution mode, can not reduce the disposal ability of such workpiece such as solidifying of cleaning, the China ink of substrate, can realize long lifetime.
Next, with reference to Fig. 3, the ultra-violet lamp 100 of the second execution mode is described.It should be noted that, in the second execution mode, the member corresponding with the first execution mode marked to identical Reference numeral.
The ultra-violet lamp 100 of the second execution mode is compared with the first execution mode, described discharge vessel diaphragm 5 differences, other partial commons.
More particularly, the described discharge vessel diaphragm 5 of the second execution mode is by Al
2o
3the ultraviolet ray forming sees through film, is configured to for ultraviolet ray more than wavelength X and sees through and the ultraviolet ray of the wavelength that absorptance wavelength X is short.At this, due to Al
2o
3ultraviolet absorption edge be near 160nm; therefore in the situation that using this discharge vessel diaphragm 5; near can making wavelength ratio 160nm, long ultraviolet ray sees through, and near making wavelength ratio 160nm, short ultraviolet ray is absorbed at these discharge vessel diaphragm 5 places.
Use above-mentioned structure, also can obtain the effect identical with the first execution mode, can realize the long lifetime of ultra-violet lamp 100.
Next, with reference to Fig. 4, the ultra-violet lamp 100 of the 3rd execution mode is described.It should be noted that, in the 3rd execution mode, the member corresponding with the first execution mode marked to identical Reference numeral.
The ultra-violet lamp 100 of the 3rd execution mode is compared with the first execution mode, is also described discharge vessel diaphragm 5 differences, other partial commons.
More particularly, the described discharge vessel diaphragm 5 of the 3rd execution mode is by MgO, CaF
2or MgF
2in the individual layer reflectance coating of any one formation, be configured to for ultraviolet ray more than wavelength X and see through and the shorter ultraviolet ray of wavelength is compared in reflection with wavelength X.
Use above-mentioned structure, also can obtain the effect identical with the first execution mode.
Then, with reference to Fig. 5, the ultra-violet lamp 100 of the 4th execution mode is described.It should be noted that, at the 4th execution mode, the member corresponding with the first execution mode marked to identical Reference numeral.
The ultra-violet lamp 100 of the 4th execution mode is compared with the first execution mode, makes to be provided with the face difference of described smooth injection part 3 in discharge vessel 1, is configured to ultraviolet ray and penetrates from the narrower side of the width of discharge vessel 1.That is, make the position of ultraviolet reflecting films 4 that the inner surface 12 at discharge vessel 1 forms and discharge vessel diaphragm 5 different from the first execution mode.
More particularly; as shown in Figure 5; described ultraviolet reflecting film 4 forms the face of whole coverings and each electrode 21,22 opposed inner surfaces 12 and the face opposed inner surface 12 narrower with a side width, and described discharge vessel diaphragm 5 form whole coverings part corresponding with described smooth injection part 3 with the opposed inner surface 12 of face of the opposing party's wider width.
So, by suitably set forming the place of described ultraviolet reflecting film 4 and described discharge vessel diaphragm 5, can be at set positions light injection part 3 arbitrarily, and can realize the long lifetime of discharge vessel 1.That is, the position of light injection part 3 may not, by described electrode 21,22 regulations, also can freely be set.
Other execution modes are described.
In described each execution mode, adopt have flat rectangular shape discharge vessel, use the structure that has this discharge vessel, the present invention also can be suitable for the ultra-violet lamp of the discharge vessel that possesses dual cylindrical duct shape as shown in Figure 7.; in Fig. 7; in the inner surface of discharge vessel, in the whole regional extent of the part corresponding with light injection part, form the discharge vessel diaphragm that each execution mode is recorded; thereby the long lifetime that can realize ultra-violet lamp compared with the past, and can make the ultraviolet ray of the wavelength region may of expectation penetrate from light injection part.
In described each execution mode, each electrode has adopted cancellous electrode, but for example penetrating in ultraviolet situation through electrode, also can use solid electrode.In addition, the gas being sealing in discharge vessel can be also the rare gas such as krypton except xenon.In addition, can be also rare gas after halogenation etc.In this case, as long as match with the ultraviolet wavelength region may producing, select the characteristic of described ultraviolet reflecting film and described discharge vessel diaphragm.
The wavelength X of recording in described each execution mode is an example, as long as and want the ultraviolet wavelength region may that workpiece is irradiated and do not want to make it to arrive the extremely ultraviolet wavelength region may of described discharge vessel and correspondingly set wavelength X.In addition, for wavelength X, the character of the translucent glass that also can use according to discharge vessel decides.Adopt described execution mode, also can be by by the ultraviolet reflection of the wavelength of not enough 160nm and make the mode that the ultraviolet ray of wavelength more than 160nm sees through form discharge vessel diaphragm.
For example, as the preferred cleaning performance of the acquisitions such as cleaning at substrate, prevent the concrete example of deteriorated, the long lifetime of realizing ultra-violet lamp of discharge vessel, also enumerate described wavelength X and be the structure of the above and wavelength below 175nm of 165nm.
In addition, also can in the scope of not violating purport of the present invention, carry out distortion, the combination of various execution modes.
Claims (8)
1. a ultra-violet lamp, is characterized in that,
Described ultra-violet lamp possesses:
Discharge vessel, it consists of translucent glass, and in inside, has the seal cavity that inclosure has regulation gas;
At least one pair of electrode, they are formed on the outer surface of described discharge vessel;
Light injection part, it penetrates the light by discharge generation in described seal cavity outside described discharge vessel; And
Discharge vessel diaphragm, it sees through for ultraviolet ray more than wavelength X, and the ultraviolet ray of reflection or incomplete absorption wavelength X, and described discharge vessel diaphragm is formed at least corresponding with the described smooth injection part region in the inner surface of described discharge vessel.
2. ultra-violet lamp according to claim 1, wherein,
Described discharge vessel diaphragm is formed in the region corresponding with described smooth injection part in the inner surface of described discharge vessel,
Described ultra-violet lamp also possesses ultraviolet reflecting film, and this ultraviolet reflecting film uv reflectance is formed in region corresponding to the part with beyond described smooth injection part in the inner surface of described discharge vessel.
3. ultra-violet lamp according to claim 1 and 2, wherein,
Described wavelength X is more than 165nm and the wavelength below 175nm.
4. according to the ultra-violet lamp described in any one in claims 1 to 3, wherein,
Described ultraviolet reflecting film is greater than the SiO of described wavelength X by particle diameter
2form.
5. according to the ultra-violet lamp described in any one in claim 1 to 4, wherein,
Described discharge vessel diaphragm is less than described wavelength X by particle diameter and particle diameter is SiO more than 160nm
2form.
6. according to the ultra-violet lamp described in any one in claim 1 to 4, wherein,
Described discharge vessel diaphragm is by Al
2o
3the ultraviolet ray forming sees through film.
7. according to the ultra-violet lamp described in any one in claim 1 to 4, wherein,
Described discharge vessel diaphragm is by MgO, CaF
2or MgF
2in the individual layer reflectance coating of any one formation.
8. according to the ultra-violet lamp described in any one in claim 1 to 7, it is characterized in that,
Described ultra-violet lamp is Excimer lamp,
In described discharge vessel, produce quasi-molecule electric discharge.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-070441 | 2013-03-28 | ||
| JP2013070441 | 2013-03-28 | ||
| JP2014048451A JP6202332B2 (en) | 2013-03-28 | 2014-03-12 | UV lamp |
| JP2014-048451 | 2014-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104078304A true CN104078304A (en) | 2014-10-01 |
Family
ID=51599496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410105380.5A Pending CN104078304A (en) | 2013-03-28 | 2014-03-20 | Uv lamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104078304A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019051975A1 (en) * | 2017-09-12 | 2019-03-21 | 深圳市华星光电半导体显示技术有限公司 | Ultraviolet irradiation device |
-
2014
- 2014-03-20 CN CN201410105380.5A patent/CN104078304A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019051975A1 (en) * | 2017-09-12 | 2019-03-21 | 深圳市华星光电半导体显示技术有限公司 | Ultraviolet irradiation device |
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