JP5237900B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP5237900B2 JP5237900B2 JP2009186701A JP2009186701A JP5237900B2 JP 5237900 B2 JP5237900 B2 JP 5237900B2 JP 2009186701 A JP2009186701 A JP 2009186701A JP 2009186701 A JP2009186701 A JP 2009186701A JP 5237900 B2 JP5237900 B2 JP 5237900B2
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Description
図1は本発明の実施の形態の半導体装置の構造の一例を封止体を透過して示す平面図、図2は図1に示すA−A線に沿って切断した構造の一例を示す断面図、図3は図1に示すB−B線に沿って切断した構造の一例を示す断面図、図4は図1に示す半導体装置におけるワイヤリング状態の一例を示す部分平面図である。さらに、図5は図1に示す半導体装置に搭載される第1半導体チップと第2半導体チップの外観構造の一例を示す断面図、図6は図5に示す第1半導体チップにおける電極パッドの周辺の構造の一例を示す拡大部分断面図、図7は図5に示す第2半導体チップにおける電極パッドの周辺の構造の一例を示す拡大部分断面図である。
2 リードフレーム
2a インナリード(リード)
2b アウタリード
2c ダイパッド(チップ搭載部)
2d 第1のダイパッド(第1のチップ搭載部)
2e 第2のダイパッド(第2のチップ搭載部)
2f 上面
2g 上面
2h 枠部
2i 吊りリード
2j 支持リード
3 マイコンチップ(第1半導体チップ)
3a 主面(回路形成面)
3b 裏面
3c 電極パッド
3d 絶縁膜
3e ガラスコート膜
3f チタン層
3g ステップカット部(段差部)
4 ASICチップ(第2半導体チップ)
4a 主面(回路形成面)
4b 裏面
4c 電極パッド
4d 絶縁膜
4e ガラスコート膜
4f チタン層
4g ポリイミドコート膜(保護膜)
5 封止体
6 ワイヤ
6a 第1ワイヤ
6b 第2ワイヤ
6c 第3ワイヤ
6d 第4ワイヤ
7 ペースト材
8 ゲタ型コレット(表面非接触型のコレット)
8a 吸引孔
8b 吸引部
9 丸型コレット(表面接触型のコレット)
9a 吸引孔
9b 吸引部
10 角錐型コレット(表面非接触型のコレット)
10a 吸引孔
10b 吸引部
11 レジン流動方向
12 封止用樹脂
13 モールドゲート
14 配線基板
14a 上面
14b 下面
14c 第1のチップ搭載領域(第1のチップ搭載部)
14d 第2のチップ搭載領域(第2のチップ搭載部)
14e ボンディングリード
15 半田ボール
16 SIP(半導体装置)
Claims (16)
- (a)第1のチップ搭載部と前記第1のチップ搭載部に並んで設けられた第2のチップ搭載部とを備えたチップ搭載部を有し、前記チップ搭載部の周囲に複数のリードが設けられたリードフレームを準備する工程と、
(b)表面非接触型のコレットで第1半導体チップをピックアップし、前記ピックアップされた前記第1半導体チップを前記第1のチップ搭載部にダイボンディングする工程と、
(c)前記(b)工程の後、表面接触型のコレットで第2半導体チップをピックアップし、前記ピックアップされた前記第2半導体チップを前記第2のチップ搭載部にダイボンディングする工程と、
(d)前記(c)工程の後、前記第1及び第2半導体チップそれぞれにワイヤボンディングを行う工程と、
を有することを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(b)工程で、前記第1半導体チップを前記第1のチップ搭載部上にペースト材を介して搭載し、
前記(c)工程で、前記第2半導体チップを前記第2のチップ搭載部上にペースト材を介して搭載することを特徴とする半導体装置の製造方法。 - 請求項2記載の半導体装置の製造方法において、
前記(c)工程の後でかつ前記(d)工程の前に、前記第1のチップ搭載部上の前記ペースト材と前記第2のチップ搭載部上の前記ペースト材とを一括して熱硬化することを特徴とする半導体装置の製造方法。 - 請求項3記載の半導体装置の製造方法において、前記第2半導体チップはその回路形成面上に保護膜を有していることを特徴とする半導体装置の製造方法。
- 請求項4記載の半導体装置の製造方法において、前記第2半導体チップはロジック回路を有していることを特徴とする半導体装置の製造方法。
- 請求項3記載の半導体装置の製造方法において、前記第1半導体チップはその回路形成面の縁部に凹状の段差部を有していることを特徴とする半導体装置の製造方法。
- 請求項6記載の半導体装置の製造方法において、前記第1半導体チップはマイコンチップであることを特徴とする半導体装置の製造方法。
- 請求項1記載の半導体装置の製造方法において、
前記(d)工程では、前記第1半導体チップに接続する第1ワイヤをワイヤボンディングするとともに、前記第2半導体チップに接続する第2ワイヤと前記第2ワイヤのワイヤループよりワイヤループの高さが高い第3ワイヤをワイヤボンディングし、
前記(d)工程の後、前記第1及び第2半導体チップを封止する樹脂モールディングを行う(e)工程を有し、
前記(e)工程では、封止用樹脂が、前記第3ワイヤが前記第2ワイヤから離れる方向に前記第3ワイヤを押すように前記封止用樹脂を注入することを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(d)工程では、前記第1半導体チップに接続する第1ワイヤをワイヤボンディングするとともに、前記第2半導体チップに接続する第2ワイヤと前記第2ワイヤのワイヤループよりワイヤループの高さが高い第3ワイヤをワイヤボンディングし、
前記第1ワイヤは、前記第2半導体チップを飛び越えて前記リードに接続するワイヤを含んでいることを特徴とする半導体装置の製造方法。 - 請求項9記載の半導体装置の製造方法において、前記第2半導体チップの厚さは、前記第1半導体チップの厚さより薄いことを特徴とする半導体装置の製造方法。
- 請求項1記載の半導体装置の製造方法において、
前記(d)工程では、前記第1半導体チップに接続する第1ワイヤをワイヤボンディングするとともに、前記第2半導体チップに接続する第2ワイヤと前記第2ワイヤのワイヤループよりワイヤループの高さが高い第3ワイヤをワイヤボンディングし、さらに、前記第1半導体チップと前記第2半導体チップとを接続する第4ワイヤをワイヤボンディングすることを特徴とする半導体装置の製造方法。 - (a)第1のチップ搭載部と前記第1のチップ搭載部に並んで設けられた第2のチップ搭載部とを備えたチップ搭載部を有し、前記チップ搭載部の周囲に複数のボンディングリードが設けられた配線基板を準備する工程と、
(b)表面非接触型のコレットで第1半導体チップをピックアップし、前記ピックアップされた前記第1半導体チップを前記第1のチップ搭載部にダイボンディングする工程と、
(c)前記(b)工程の後、表面接触型のコレットで第2半導体チップをピックアップし、前記ピックアップされた前記第2半導体チップを前記第2のチップ搭載部にダイボンディングする工程と、
(d)前記(c)工程の後、前記第1及び第2半導体チップそれぞれにワイヤボンディングを行う工程と、
を有することを特徴とする半導体装置の製造方法。 - 請求項12記載の半導体装置の製造方法において、
前記(b)工程で、前記第1半導体チップを前記第1のチップ搭載部上にペースト材を介して搭載し、
前記(c)工程で、前記第2半導体チップを前記第2のチップ搭載部上にペースト材を介して搭載することを特徴とする半導体装置の製造方法。 - 請求項13記載の半導体装置の製造方法において、
前記(c)工程の後でかつ前記(d)工程の前に、前記第1のチップ搭載部上の前記ペースト材と前記第2のチップ搭載部上の前記ペースト材とを一括して熱硬化することを特徴とする半導体装置の製造方法。 - 請求項14記載の半導体装置の製造方法において、前記第2半導体チップはその回路形成面上に保護膜を有していることを特徴とする半導体装置の製造方法。
- 請求項15記載の半導体装置の製造方法において、前記第2半導体チップはロジック回路を有していることを特徴とする半導体装置の製造方法。
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US9431327B2 (en) * | 2014-05-30 | 2016-08-30 | Delta Electronics, Inc. | Semiconductor device |
JP2016058612A (ja) * | 2014-09-11 | 2016-04-21 | 株式会社デンソー | 半導体装置 |
JP6593405B2 (ja) * | 2017-08-31 | 2019-10-23 | 日亜化学工業株式会社 | 半導体装置の製造方法 |
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