JP5201042B2 - エキシマランプ - Google Patents

エキシマランプ Download PDF

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Publication number
JP5201042B2
JP5201042B2 JP2009069406A JP2009069406A JP5201042B2 JP 5201042 B2 JP5201042 B2 JP 5201042B2 JP 2009069406 A JP2009069406 A JP 2009069406A JP 2009069406 A JP2009069406 A JP 2009069406A JP 5201042 B2 JP5201042 B2 JP 5201042B2
Authority
JP
Japan
Prior art keywords
electrode
excimer lamp
discharge vessel
light
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009069406A
Other languages
English (en)
Japanese (ja)
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JP2010225343A (ja
Inventor
法隆 竹添
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP2009069406A priority Critical patent/JP5201042B2/ja
Priority to TW099100704A priority patent/TWI449083B/zh
Priority to KR1020100011944A priority patent/KR101301806B1/ko
Priority to CN201010150661A priority patent/CN101847564A/zh
Publication of JP2010225343A publication Critical patent/JP2010225343A/ja
Application granted granted Critical
Publication of JP5201042B2 publication Critical patent/JP5201042B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
JP2009069406A 2009-03-23 2009-03-23 エキシマランプ Active JP5201042B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009069406A JP5201042B2 (ja) 2009-03-23 2009-03-23 エキシマランプ
TW099100704A TWI449083B (zh) 2009-03-23 2010-01-12 Excimer lamp
KR1020100011944A KR101301806B1 (ko) 2009-03-23 2010-02-09 엑시머 램프
CN201010150661A CN101847564A (zh) 2009-03-23 2010-03-23 准分子灯

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009069406A JP5201042B2 (ja) 2009-03-23 2009-03-23 エキシマランプ

Publications (2)

Publication Number Publication Date
JP2010225343A JP2010225343A (ja) 2010-10-07
JP5201042B2 true JP5201042B2 (ja) 2013-06-05

Family

ID=42772126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009069406A Active JP5201042B2 (ja) 2009-03-23 2009-03-23 エキシマランプ

Country Status (4)

Country Link
JP (1) JP5201042B2 (ko)
KR (1) KR101301806B1 (ko)
CN (1) CN101847564A (ko)
TW (1) TWI449083B (ko)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3491532B2 (ja) * 1998-07-01 2004-01-26 東亞合成株式会社 シャドウマスク製造時の裏止め材用硬化型組成物
JP5376410B2 (ja) * 2011-03-11 2013-12-25 ウシオ電機株式会社 エキシマランプ
JP5287928B2 (ja) * 2011-05-17 2013-09-11 ウシオ電機株式会社 エキシマランプ
JP5898891B2 (ja) * 2011-09-13 2016-04-06 浜松ホトニクス株式会社 発光装置
JP5891804B2 (ja) * 2012-01-23 2016-03-23 ウシオ電機株式会社 エキシマランプ
JP6016059B2 (ja) * 2012-03-30 2016-10-26 ウシオ電機株式会社 エキシマランプ
JP6232782B2 (ja) * 2013-07-01 2017-11-22 ウシオ電機株式会社 エキシマランプ
JP6201925B2 (ja) * 2013-07-31 2017-09-27 株式会社Ｇｓユアサ 放電ランプ
KR102219742B1 (ko) * 2013-07-31 2021-02-23 가부시키가이샤 지에스 유아사 방전 램프
JP6191870B2 (ja) * 2013-11-22 2017-09-06 ウシオ電機株式会社 エキシマランプ
JP5892189B2 (ja) * 2014-04-11 2016-03-23 ウシオ電機株式会社 エキシマランプおよびエキシマランプ装置
JP7106945B2 (ja) * 2018-04-02 2022-07-27 ウシオ電機株式会社 エキシマランプ、光照射装置、及び、オゾン発生装置
JP6940033B1 (ja) * 2019-10-07 2021-09-22 ウシオ電機株式会社 紫外線照射装置
TWI747073B (zh) * 2019-11-01 2021-11-21 崇翌科技股份有限公司 準分子燈
JP7384090B2 (ja) 2020-03-26 2023-11-21 ウシオ電機株式会社 エキシマランプ、光照射装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3149780B2 (ja) * 1995-03-31 2001-03-26 ウシオ電機株式会社 外部電極式蛍光放電管
JPH10188910A (ja) * 1996-12-25 1998-07-21 Ushio Inc 外部電極型蛍光ランプ
JP2004111326A (ja) * 2002-09-20 2004-04-08 Japan Storage Battery Co Ltd エキシマランプ
JP4221561B2 (ja) * 2002-10-02 2009-02-12 株式会社ジーエス・ユアサコーポレーション エキシマランプ
JP2004178882A (ja) * 2002-11-26 2004-06-24 Iwasaki Electric Co Ltd 放電ランプ
JP2005259380A (ja) * 2004-03-09 2005-09-22 Japan Storage Battery Co Ltd 紫外線照射処理装置
TWI258163B (en) * 2004-04-07 2006-07-11 Gs Yuasa Corp Dielectric barrier electric discharge lamp
JP4561448B2 (ja) * 2004-04-07 2010-10-13 株式会社Ｇｓユアサ 誘電体バリア放電ランプ及び紫外線照射装置
JP4396415B2 (ja) * 2004-06-24 2010-01-13 ウシオ電機株式会社 光照射装置
JP4400469B2 (ja) * 2005-02-02 2010-01-20 ウシオ電機株式会社 希ガス蛍光ランプ
JP4857939B2 (ja) * 2006-06-19 2012-01-18 ウシオ電機株式会社 放電ランプ
JP4848879B2 (ja) * 2006-07-28 2011-12-28 ウシオ電機株式会社 希ガス蛍光ランプ
JP5019156B2 (ja) * 2006-08-21 2012-09-05 ウシオ電機株式会社 エキシマランプ装置
JP2008059888A (ja) * 2006-08-31 2008-03-13 Ushio Inc エキシマランプ
JP4900011B2 (ja) * 2006-11-24 2012-03-21 ウシオ電機株式会社 放電ランプ
JP4946552B2 (ja) * 2007-03-19 2012-06-06 ウシオ電機株式会社 外部電極型希ガス蛍光ランプ
JP4424394B2 (ja) * 2007-08-31 2010-03-03 ウシオ電機株式会社 エキシマランプ

Also Published As

Publication number Publication date
TWI449083B (zh) 2014-08-11
CN101847564A (zh) 2010-09-29
KR20100106207A (ko) 2010-10-01
JP2010225343A (ja) 2010-10-07
KR101301806B1 (ko) 2013-08-29
TW201036028A (en) 2010-10-01

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