JP5174064B2 - 半導体発光装置および半導体発光装置の製造方法 - Google Patents
半導体発光装置および半導体発光装置の製造方法 Download PDFInfo
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- JP5174064B2 JP5174064B2 JP2010052214A JP2010052214A JP5174064B2 JP 5174064 B2 JP5174064 B2 JP 5174064B2 JP 2010052214 A JP2010052214 A JP 2010052214A JP 2010052214 A JP2010052214 A JP 2010052214A JP 5174064 B2 JP5174064 B2 JP 5174064B2
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- 239000004065 semiconductor Substances 0.000 title claims description 80
- 238000000034 method Methods 0.000 title claims description 30
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000758 substrate Substances 0.000 claims description 88
- 229910052594 sapphire Inorganic materials 0.000 claims description 42
- 239000010980 sapphire Substances 0.000 claims description 42
- 150000001875 compounds Chemical class 0.000 claims description 38
- 238000000605 extraction Methods 0.000 claims description 18
- 150000004767 nitrides Chemical class 0.000 claims description 8
- 238000012546 transfer Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 description 22
- 239000002184 metal Substances 0.000 description 22
- 229920002120 photoresistant polymer Polymers 0.000 description 12
- 230000004888 barrier function Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 239000012535 impurity Substances 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 238000005530 etching Methods 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 230000017525 heat dissipation Effects 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000007788 roughening Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/382—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending partially in or entirely through the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0091—Scattering means in or on the semiconductor body or semiconductor body package
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Led Devices (AREA)
Description
前記発光素子の両面側にそれぞれ配置される第1電極および第2電極と、を備え、
前記発光素子は、
発光層と、
前記発光層と前記第1電極との間に配置される第1導電型半導体層と、
前記発光層と前記第2電極との間に配置される第2導電型半導体層と、を有し、
前記第1導電型半導体層の前記第1電極側の表面は、二種類以上の傾斜角度で粗面化された光取り出し面であることを特徴とする半導体発光素子が提供される。
前記サファイア基板の前記凹凸パターンが形成された面側に、窒化物系III−V族化合物半導体層からなる発光部を形成する工程と、
前記発光部の上に支持基板を形成する工程と、
レーザリフトオフ法により前記サファイア基板を剥離して、二種類以上の傾斜角度で粗面化された光取り出し面を有する前記発光部を形成する工程と、
前記発光部を素子分離して複数の発光素子を形成する工程と、
前記複数の発光素子の少なくとも側壁部分に絶縁膜を形成する工程と、
前記複数の発光素子の上面側と、反対側の前記支持基板の表面とに、それぞれ電極を形成する工程と、
前記複数の発光素子を個片化する工程と、を備えることを特徴とする半導体発光素子の製造方法が提供される。
6 化合物半導体層
7 n電極層
8 p電極層
9 絶縁膜
11 n型半導体層
12 発光層
13 p型半導体層
14 光取り出し面
15 屈折率緩和層
20 サファイア基板
21 分離溝
Claims (5)
- 基板上に形成される窒化物系III−V族化合物半導体層を備える発光素子と、
前記発光素子の両面側にそれぞれ配置される第1電極および第2電極と、を備え、
前記発光素子は、
発光層と、
前記発光層と前記第1電極との間に配置される第1導電型半導体層と、
前記発光層と前記第2電極との間に配置される第2導電型半導体層と、を有し、
前記第1導電型半導体層の前記第1電極側の表面は、二種類以上の傾斜角度を有しストライプ状の凹凸パターンで粗面化された光取り出し面を有し、
前記第1導電型半導体層の前記凹凸パターンの一部を構成する凹部の側面と基板面の法線方向との為す角度は、前記凹凸パターンの他の一部を構成する凸部の側面と基板面の法線方向との為す角度よりも大きいことを特徴とする半導体発光素子。 - 前記第1導電型半導体層の前記光取り出し面上に配置される屈折率緩和膜を備えることを特徴とする請求項1に記載の半導体発光素子。
- ストライプ状のマスクパターンを用いて、サファイア基板上に二種類以上の傾斜角度を持つストライプ状の凹凸パターンであって、前記凹凸パターンの一部を構成する凹部の側面と基板面の法線方向との為す角度は、前記凹凸パターンの他の一部を構成する凸部の側面と基板面の法線方向との為す角度よりも大きい前記凹凸パターンを形成する工程と、
前記サファイア基板の前記凹凸パターンが形成された面側に、窒化物系III−V族化合物半導体層からなる発光部を形成する工程と、
前記発光部の上に支持基板を形成する工程と、
レーザリフトオフ法により前記サファイア基板を剥離して、二種類以上の傾斜角度を有しストライプ状の凹凸パターンで粗面化された光取り出し面を有する前記発光部を形成する工程と、
前記発光部を素子分離して複数の発光素子を形成する工程と、
前記複数の発光素子の少なくとも側壁部分に絶縁膜を形成する工程と、
前記複数の発光素子の上面側と、反対側の前記支持基板の表面とに、それぞれ電極を形成する工程と、
前記複数の発光素子を個片化する工程と、を備えることを特徴とする半導体発光素子の製造方法。 - 前記発光素子の前記光取り出し面上に屈折率緩和膜を形成することを特徴とする請求項3に記載の半導体発光素子の製造方法。
- 二種類以上のマスクパターンを順に用いて、前記サファイア基板に転写する工程を繰り返すことにより、前記サファイア基板上に前記凹凸パターンをするか、あるいは、マスクパターンをベークして、パターンエッジを丸める処理を行った後のマスクパターンを前記サファイア基板に転写して前記凹凸パターンを形成することを特徴とする請求項3または4に記載の半導体発光素子の製造方法。
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JP2010052214A JP5174064B2 (ja) | 2010-03-09 | 2010-03-09 | 半導体発光装置および半導体発光装置の製造方法 |
US12/874,399 US8390007B2 (en) | 2010-03-09 | 2010-09-02 | Semiconductor light emitting device and method of fabricating semiconductor light emitting device |
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US20120168714A1 (en) * | 2011-01-03 | 2012-07-05 | SemiLEDs Optoelectronics Co., Ltd. | Vertical light emitting diode (vled) die and method of fabrication |
US8686461B2 (en) * | 2011-01-03 | 2014-04-01 | SemiLEDs Optoelectronics Co., Ltd. | Light emitting diode (LED) die having stepped substrates and method of fabrication |
CN103022301A (zh) * | 2011-09-20 | 2013-04-03 | 上海蓝光科技有限公司 | 具有光抽取微结构的大功率GaN基垂直结构LED及其制备方法 |
US9450152B2 (en) | 2012-05-29 | 2016-09-20 | Micron Technology, Inc. | Solid state transducer dies having reflective features over contacts and associated systems and methods |
JP5792694B2 (ja) * | 2012-08-14 | 2015-10-14 | 株式会社東芝 | 半導体発光素子 |
TWI642204B (zh) * | 2014-04-02 | 2018-11-21 | 國立交通大學 | 發光二極體元件 |
US10559716B2 (en) | 2016-03-08 | 2020-02-11 | Alpad Corporation | Semiconductor light emitting device and method for manufacturing same |
CN111834386A (zh) * | 2019-04-18 | 2020-10-27 | 群创光电股份有限公司 | 发光元件的制作方法及应用发光元件的电子装置 |
US11239389B2 (en) * | 2019-04-18 | 2022-02-01 | Innolux Corporation | Method for manufacturing light-emitting element and electronic device applying light-emitting element |
DE102020112414A1 (de) * | 2020-05-07 | 2021-11-11 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Strahlung emittierendes Halbleiterbauelement und Verfahren zur Herstellung eines Strahlung emittierenden Halbleiterbauelements |
TWI792283B (zh) * | 2021-04-27 | 2023-02-11 | 錼創顯示科技股份有限公司 | 微型發光二極體結構與使用其的微型發光二極體顯示面板 |
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JP2002016312A (ja) * | 2000-06-27 | 2002-01-18 | Sanyo Electric Co Ltd | 窒化物系半導体素子およびその製造方法 |
US6463088B1 (en) * | 2000-07-07 | 2002-10-08 | Lucent Technologies Inc. | Mesa geometry semiconductor light emitter having chalcogenide dielectric coating |
JP4427993B2 (ja) * | 2003-08-12 | 2010-03-10 | ソニー株式会社 | 半導体発光素子の製造方法 |
EP3699963A1 (en) * | 2003-08-19 | 2020-08-26 | Nichia Corporation | Semiconductor light emitting diode and method of manufacturing its substrate |
US7202141B2 (en) | 2004-03-29 | 2007-04-10 | J.P. Sercel Associates, Inc. | Method of separating layers of material |
JP2006287113A (ja) * | 2005-04-04 | 2006-10-19 | Toyoda Gosei Co Ltd | 発光素子およびこれを用いた発光装置 |
JP2007305909A (ja) * | 2006-05-15 | 2007-11-22 | Kyocera Corp | 窒化ガリウム系化合物半導体の製造方法及び発光素子の製造方法 |
JP5198793B2 (ja) * | 2007-05-10 | 2013-05-15 | ソニー株式会社 | 半導体素子およびその製造方法 |
JP5493252B2 (ja) * | 2007-06-28 | 2014-05-14 | 日亜化学工業株式会社 | 半導体発光素子 |
US7781242B1 (en) * | 2009-12-10 | 2010-08-24 | Walsin Lihwa Corporation | Method of forming vertical structure light emitting diode with heat exhaustion structure |
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JP2011187736A (ja) | 2011-09-22 |
US20110220933A1 (en) | 2011-09-15 |
US8390007B2 (en) | 2013-03-05 |
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